KR101387823B1 - 반사굴절 광학계 및 촬상 장치 - Google Patents

반사굴절 광학계 및 촬상 장치 Download PDF

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Publication number
KR101387823B1
KR101387823B1 KR1020127030187A KR20127030187A KR101387823B1 KR 101387823 B1 KR101387823 B1 KR 101387823B1 KR 1020127030187 A KR1020127030187 A KR 1020127030187A KR 20127030187 A KR20127030187 A KR 20127030187A KR 101387823 B1 KR101387823 B1 KR 101387823B1
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KR
South Korea
Prior art keywords
optical system
refractive power
image
imaging
lens
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020127030187A
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English (en)
Korean (ko)
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KR20130006696A (ko
Inventor
유지 가타시바
가즈히코 가지야마
마사유키 스즈키
Original Assignee
캐논 가부시끼가이샤
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Publication of KR20130006696A publication Critical patent/KR20130006696A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G02B17/0804—Catadioptric systems using two curved mirrors
    • G02B17/0808—Catadioptric systems using two curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
KR1020127030187A 2010-05-27 2011-05-19 반사굴절 광학계 및 촬상 장치 Expired - Fee Related KR101387823B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2010-121751 2010-05-27
JP2010121751A JP5479224B2 (ja) 2010-05-27 2010-05-27 反射屈折光学系及びそれを有する撮像装置
PCT/JP2011/062039 WO2011148999A1 (en) 2010-05-27 2011-05-19 Catadioptric system and image pickup apparatus

Publications (2)

Publication Number Publication Date
KR20130006696A KR20130006696A (ko) 2013-01-17
KR101387823B1 true KR101387823B1 (ko) 2014-04-22

Family

ID=45003985

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020127030187A Expired - Fee Related KR101387823B1 (ko) 2010-05-27 2011-05-19 반사굴절 광학계 및 촬상 장치

Country Status (6)

Country Link
US (1) US9019633B2 (https=)
EP (1) EP2577377A1 (https=)
JP (1) JP5479224B2 (https=)
KR (1) KR101387823B1 (https=)
CN (1) CN102906619B (https=)
WO (1) WO2011148999A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101453309B1 (ko) 2014-04-03 2014-10-22 조성구 카메라용 광학렌즈 시스템
WO2018039361A1 (en) * 2016-08-23 2018-03-01 The United States Of America, As Represented By The Secretary, Department Of Health And Human Services Systems and methods for instant total internal reflection fluorescence/structured illumination microscopy
WO2018066313A1 (ja) 2016-10-03 2018-04-12 株式会社ニコン 反射屈折光学系および光学装置
JP2019101181A (ja) * 2017-11-30 2019-06-24 キヤノン株式会社 撮像装置
CN108873289B (zh) * 2018-09-04 2024-02-09 中国科学院长春光学精密机械与物理研究所 显微物镜光学系统及光学设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002082285A (ja) * 2000-09-07 2002-03-22 Nikon Corp 反射屈折光学系および該光学系を備えた露光装置
US20060082905A1 (en) * 2004-10-14 2006-04-20 Shafer David R Catadioptric projection objective with an in-line, single-axis configuration
KR20070030959A (ko) * 2004-07-14 2007-03-16 칼 짜이스 에스엠테 아게 반사굴절식 투영 대물렌즈
WO2009154731A2 (en) * 2008-06-17 2009-12-23 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
EP1059550A4 (en) * 1998-12-25 2003-03-19 Nikon Corp REFRACTION REFLECTION IMAGE FORMING SYSTEM AND PROJECTION EXPOSURE APPARATUS INCLUDING THE OPTICAL SYSTEM
US6984044B2 (en) 2002-07-30 2006-01-10 Canon Kabushiki Kaisha Projection optical system, projection type image display apparatus, and image display system
JP2004061959A (ja) * 2002-07-30 2004-02-26 Canon Inc 投射光学系、投射型画像表示装置および画像表示システム
JP2005115127A (ja) 2003-10-09 2005-04-28 Nikon Corp 反射屈折投影光学系、露光装置及び露光方法
US7348575B2 (en) 2003-05-06 2008-03-25 Nikon Corporation Projection optical system, exposure apparatus, and exposure method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002082285A (ja) * 2000-09-07 2002-03-22 Nikon Corp 反射屈折光学系および該光学系を備えた露光装置
KR20070030959A (ko) * 2004-07-14 2007-03-16 칼 짜이스 에스엠테 아게 반사굴절식 투영 대물렌즈
US20060082905A1 (en) * 2004-10-14 2006-04-20 Shafer David R Catadioptric projection objective with an in-line, single-axis configuration
WO2009154731A2 (en) * 2008-06-17 2009-12-23 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces

Also Published As

Publication number Publication date
JP5479224B2 (ja) 2014-04-23
US20120320187A1 (en) 2012-12-20
CN102906619B (zh) 2015-01-14
WO2011148999A1 (en) 2011-12-01
CN102906619A (zh) 2013-01-30
JP2011248122A (ja) 2011-12-08
EP2577377A1 (en) 2013-04-10
KR20130006696A (ko) 2013-01-17
US9019633B2 (en) 2015-04-28

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