JP2012150245A5 - - Google Patents

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Publication number
JP2012150245A5
JP2012150245A5 JP2011008370A JP2011008370A JP2012150245A5 JP 2012150245 A5 JP2012150245 A5 JP 2012150245A5 JP 2011008370 A JP2011008370 A JP 2011008370A JP 2011008370 A JP2011008370 A JP 2011008370A JP 2012150245 A5 JP2012150245 A5 JP 2012150245A5
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JP
Japan
Prior art keywords
optical element
optical system
image
negative lens
catadioptric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011008370A
Other languages
English (en)
Japanese (ja)
Other versions
JP5627476B2 (ja
JP2012150245A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011008370A priority Critical patent/JP5627476B2/ja
Priority claimed from JP2011008370A external-priority patent/JP5627476B2/ja
Priority to US13/353,385 priority patent/US9097883B2/en
Publication of JP2012150245A publication Critical patent/JP2012150245A/ja
Publication of JP2012150245A5 publication Critical patent/JP2012150245A5/ja
Application granted granted Critical
Publication of JP5627476B2 publication Critical patent/JP5627476B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011008370A 2011-01-19 2011-01-19 反射屈折光学系及びそれを有する撮像装置 Expired - Fee Related JP5627476B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011008370A JP5627476B2 (ja) 2011-01-19 2011-01-19 反射屈折光学系及びそれを有する撮像装置
US13/353,385 US9097883B2 (en) 2011-01-19 2012-01-19 Catadioptric optical system and image-pickup apparatus having the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011008370A JP5627476B2 (ja) 2011-01-19 2011-01-19 反射屈折光学系及びそれを有する撮像装置

Publications (3)

Publication Number Publication Date
JP2012150245A JP2012150245A (ja) 2012-08-09
JP2012150245A5 true JP2012150245A5 (https=) 2014-03-06
JP5627476B2 JP5627476B2 (ja) 2014-11-19

Family

ID=46490497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011008370A Expired - Fee Related JP5627476B2 (ja) 2011-01-19 2011-01-19 反射屈折光学系及びそれを有する撮像装置

Country Status (2)

Country Link
US (1) US9097883B2 (https=)
JP (1) JP5627476B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2027950B1 (en) * 2021-04-12 2022-10-21 Nearfield Instr B V Compact optical microscope, metrology device comprising the optical microscope and a wafer positioning metrology apparatus comprising the metrology device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034737B2 (ja) 1977-03-14 1985-08-10 オリンパス光学工業株式会社 顕微鏡対物レンズ
JPS6034737U (ja) 1983-08-11 1985-03-09 カシオ計算機株式会社 メモリバツクアツプ用の電源回路
US5212593A (en) * 1992-02-06 1993-05-18 Svg Lithography Systems, Inc. Broad band optical reduction system using matched multiple refractive element materials
EP1059550A4 (en) 1998-12-25 2003-03-19 Nikon Corp REFRACTION REFLECTION IMAGE FORMING SYSTEM AND PROJECTION EXPOSURE APPARATUS INCLUDING THE OPTICAL SYSTEM
US6842298B1 (en) * 2000-09-12 2005-01-11 Kla-Tencor Technologies Corporation Broad band DUV, VUV long-working distance catadioptric imaging system
US8675276B2 (en) 2003-02-21 2014-03-18 Kla-Tencor Corporation Catadioptric imaging system for broad band microscopy
US7672043B2 (en) * 2003-02-21 2010-03-02 Kla-Tencor Technologies Corporation Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth
US7646533B2 (en) * 2003-02-21 2010-01-12 Kla-Tencor Technologies Corporation Small ultra-high NA catadioptric objective
US7224539B2 (en) * 2005-05-13 2007-05-29 Schaack David F Providing optical systems having improved properties to users of catalog (stock) lenses
WO2009154731A2 (en) * 2008-06-17 2009-12-23 Kla-Tencor Corporation External beam delivery system using catadioptric objective with aspheric surfaces

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