JP5475077B2 - 配線基板およびその製造方法 - Google Patents
配線基板およびその製造方法 Download PDFInfo
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- JP5475077B2 JP5475077B2 JP2012196864A JP2012196864A JP5475077B2 JP 5475077 B2 JP5475077 B2 JP 5475077B2 JP 2012196864 A JP2012196864 A JP 2012196864A JP 2012196864 A JP2012196864 A JP 2012196864A JP 5475077 B2 JP5475077 B2 JP 5475077B2
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- Prior art keywords
- base
- wiring board
- layer
- metal
- surface layer
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- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000002344 surface layer Substances 0.000 claims description 58
- 239000010410 layer Substances 0.000 claims description 50
- 239000002184 metal Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 37
- 230000005012 migration Effects 0.000 claims description 20
- 238000013508 migration Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 18
- 230000008569 process Effects 0.000 claims description 15
- 239000010949 copper Substances 0.000 claims description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 238000005530 etching Methods 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 7
- 238000010292 electrical insulation Methods 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 238000007772 electroless plating Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 description 11
- 230000004048 modification Effects 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 238000009413 insulation Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- 239000004020 conductor Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- LCPVQAHEFVXVKT-UHFFFAOYSA-N 2-(2,4-difluorophenoxy)pyridin-3-amine Chemical compound NC1=CC=CN=C1OC1=CC=C(F)C=C1F LCPVQAHEFVXVKT-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- CHQMHPLRPQMAMX-UHFFFAOYSA-L sodium persulfate Substances [Na+].[Na+].[O-]S(=O)(=O)OOS([O-])(=O)=O CHQMHPLRPQMAMX-UHFFFAOYSA-L 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H01L2224/27011—Involving a permanent auxiliary member, i.e. a member which is left at least partly in the finished device, e.g. coating, dummy feature
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- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
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- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
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Description
本発明の一形態は、電気絶縁性を有する基層と;導電性を有し前記基層上に形成された複数の接続端子と;電気絶縁性を有し、前記基層上における前記複数の接続端子の間に充填された表層とを備える配線基板であって、前記表層は、開口部が形成された第1表面と、前記開口部の内側において前記第1表面に対して前記基層側に窪んだ第2表面とを有し、前記複数の接続端子は、前記第2表面から露出し、前記接続端子は、導電性を有する第1金属からなる基部と;導電性を有し前記第1金属とは異なる第2金属からなり、前記表層を貫通し前記基層に至るまで前記基部を被覆する被覆部とを含むことを特徴とする配線基板である。この形態によれば、基部を形成する第1金属が表層に移行するマイグレーションを、第2金属からなる被覆部によって抑制することができる。その結果、第1金属によるマイグレーションに起因する絶縁不良を防止することができる。
図1は、配線基板10の構成を示す上面図である。図2は、配線基板10の構成を模式的に示す部分断面図である。図3は、半導体チップ20を実装した配線基板10の構成を模式的に示す部分断面図である。図2には、図1の矢視F2−F2で切断した配線基板10の断面を図示した。図3には、半導体チップ20を実装した配線基板10を、図1の矢視F2−F2に対応する位置で切断した断面を図示した。
図8は、変形例における配線基板10bの構成を示す上面図である。配線基板10bの説明において、第1実施形態の配線基板10と同様の構成については同一符号を付すと共に説明を省略する。本変形例は、本明細書で説明する他の実施形態や他の変形例に適用することが可能である。変形例の配線基板10bは、第1表面141、第2表面142、接続端子130および開口部150の形状がそれぞれ異なる点を除き、第1実施形態の配線基板10と同様である。
本発明は、上述の実施形態や実施例、変形例に限られるものではなく、その趣旨を逸脱しない範囲において種々の構成で実現することができる。例えば、発明の概要の欄に記載した各形態中の技術的特徴に対応する実施形態、実施例、変形例中の技術的特徴は、上述の課題の一部または全部を解決するために、あるいは、上述の効果の一部または全部を達成するために、適宜、差し替えや、組み合わせを行うことが可能である。また、その技術的特徴が本明細書中に必須なものとして説明されていなければ、適宜、削除することが可能である。
20…半導体チップ
30…アンダーフィル材
120…基層
130…接続端子
132…基部
132a…側部
132b…端部
132c…側部
132d…端部
134…被覆部
140…表層
141…第1表面
142…第2表面
148…壁面
150…開口部
232…接続端子
SD…ハンダ
GP…間隙
Claims (4)
- 電気絶縁性を有する基層と、
導電性を有し前記基層上に形成された複数の接続端子と、
電気絶縁性を有し、前記基層上における前記複数の接続端子の間に充填された表層と
を備える配線基板であって、
前記表層は、
開口部が形成された第1表面と、
前記開口部の内側において前記第1表面に対して前記基層側に窪んだ第2表面と
を有し、
前記複数の接続端子は、前記第2表面から露出し、
前記接続端子は、
導電性を有する第1金属からなる基部と、
導電性を有し前記第1金属とは異なる第2金属からなり、前記表層を貫通し前記基層に至るまで前記基部を被覆する被覆部と
を含むことを特徴とする配線基板。 - 前記第2金属は、前記複数の接続端子における各接続端子間に発生するマイグレーションの進行が前記第1金属よりも遅いことを特徴とする請求項1に記載の配線基板。
- 請求項1または請求項2に記載の配線基板であって、
前記第1金属は、銀(Ag)および銅(Cu)の少なくとも一方であり、
前記第2金属は、ニッケル(Ni)および錫(Sn)の少なくとも1つであることを特徴とする配線基板。 - 請求項1から請求項3までのいずれか一項に記載の配線基板を製造する、配線基板の製造方法であって、
前記第1金属からなる前記基部を前記基層上に形成し、
前記基部が形成された前記基層上に前記表層を形成し、
前記表層が形成された前記基層上における前記基部をエッチングすることによって、前記基部の側部および端部を退縮させ、前記基部と前記表層との間に、前記表層から前記基層に至る間隙を形成し、
前記間隙を形成した後、前記基部に対する無電解メッキによるメッキ処理によって、前記第2金属からなり前記表層を貫通し前記基層に至るまで前記基部を被覆する前記被覆部を、形成する、配線基板の製造方法。
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US11823983B2 (en) * | 2021-03-23 | 2023-11-21 | Qualcomm Incorporated | Package with a substrate comprising pad-on-pad interconnects |
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JP2671851B2 (ja) * | 1995-02-21 | 1997-11-05 | 日本電気株式会社 | プリント配線板の製造方法 |
JP3346263B2 (ja) * | 1997-04-11 | 2002-11-18 | イビデン株式会社 | プリント配線板及びその製造方法 |
US6998293B2 (en) * | 2002-03-29 | 2006-02-14 | Visteon Global Technologies, Inc. | Flip-chip bonding method |
TWI287956B (en) * | 2005-04-11 | 2007-10-01 | Phoenix Prec Technology Corp | Conducting bump structure of circuit board and fabricating method thereof |
US7884483B2 (en) * | 2005-06-14 | 2011-02-08 | Cufer Asset Ltd. L.L.C. | Chip connector |
JP2007042805A (ja) * | 2005-08-02 | 2007-02-15 | Matsushita Electric Ind Co Ltd | 配線基板およびその製造方法ならびに半導体装置 |
JP4747770B2 (ja) | 2005-10-04 | 2011-08-17 | 日立化成工業株式会社 | プリント配線板の製造方法、及び半導体チップ搭載基板の製造方法 |
JP4728782B2 (ja) * | 2005-11-15 | 2011-07-20 | パナソニック株式会社 | 半導体装置およびその製造方法 |
US7331241B1 (en) * | 2006-08-22 | 2008-02-19 | Kulite Semiconductor Products, Inc. | Low cost pressure sensor for measuring oxygen pressure |
WO2009013826A1 (ja) * | 2007-07-25 | 2009-01-29 | Fujitsu Microelectronics Limited | 半導体装置 |
US20090246911A1 (en) * | 2008-03-27 | 2009-10-01 | Ibiden, Co., Ltd. | Substrate for mounting electronic components and its method of manufacture |
US8173910B2 (en) * | 2008-07-24 | 2012-05-08 | GM Global Technology Operations LLC | Printed circuit board ball grid array system having improved mechanical strength |
JP5188915B2 (ja) * | 2008-09-30 | 2013-04-24 | 富士フイルム株式会社 | 配線形成方法 |
US8686300B2 (en) * | 2008-12-24 | 2014-04-01 | Ibiden Co., Ltd. | Printed wiring board and method for manufacturing the same |
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