JP5474948B2 - 被加工物搬送台 - Google Patents

被加工物搬送台 Download PDF

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Publication number
JP5474948B2
JP5474948B2 JP2011512874A JP2011512874A JP5474948B2 JP 5474948 B2 JP5474948 B2 JP 5474948B2 JP 2011512874 A JP2011512874 A JP 2011512874A JP 2011512874 A JP2011512874 A JP 2011512874A JP 5474948 B2 JP5474948 B2 JP 5474948B2
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JP
Japan
Prior art keywords
workpiece carrier
disc
workpiece
ring
shaft
Prior art date
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JP2011512874A
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English (en)
Japanese (ja)
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JP2011523895A (ja
Inventor
エッサー，シュテファン
Original Assignee
エルリコン トレーディング アクチェンゲゼルシャフト，トリューブバハ
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Application filed by エルリコン トレーディング アクチェンゲゼルシャフト，トリューブバハ filed Critical エルリコン トレーディング アクチェンゲゼルシャフト，トリューブバハ
Publication of JP2011523895A publication Critical patent/JP2011523895A/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Coating Apparatus (AREA)
  • Rolling Contact Bearings (AREA)
  • Packaging For Recording Disks (AREA)
  • Spray Control Apparatus (AREA)
  • Snaps, Bayonet Connections, Set Pins, And Snap Rings (AREA)
  • Chain Conveyers (AREA)
  • Gear Processing (AREA)
  • Jigs For Machine Tools (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Chemical Vapour Deposition (AREA)
JP2011512874A 2008-06-11 2009-06-04 被加工物搬送台 Active JP5474948B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH8842008 2008-06-11
CH884/08 2008-06-11
PCT/EP2009/003998 WO2009149864A1 (en) 2008-06-11 2009-06-04 Workpiece carrier

Publications (2)

Publication Number Publication Date
JP2011523895A JP2011523895A (ja) 2011-08-25
JP5474948B2 true JP5474948B2 (ja) 2014-04-16

Family

ID=40220250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011512874A Active JP5474948B2 (ja) 2008-06-11 2009-06-04 被加工物搬送台

Country Status (15)

Country Link
US (2) US20110083604A1 (zh)
EP (1) EP2297375B1 (zh)
JP (1) JP5474948B2 (zh)
KR (1) KR101598645B1 (zh)
CN (1) CN102057075B (zh)
AU (1) AU2009256934B2 (zh)
BR (1) BRPI0913321B1 (zh)
CA (1) CA2724917C (zh)
ES (1) ES2541466T3 (zh)
MX (1) MX2010013449A (zh)
PL (1) PL2297375T3 (zh)
PT (1) PT2297375E (zh)
RU (1) RU2499080C2 (zh)
TW (1) TWI484058B (zh)
WO (1) WO2009149864A1 (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG11201402975SA (en) * 2011-12-08 2014-10-30 Praxair Technology Inc Multifuntion tooling fixture assembly for use in a coating related operations
SG11201402968XA (en) * 2011-12-08 2014-10-30 Praxair Technology Inc Tooling fixture assembly for use in a coating operation
RU2507306C1 (ru) * 2012-09-04 2014-02-20 Открытое акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" Установка для напыления покрытий на прецизионные детали узлов гироприборов
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten
HK1215127A2 (zh) 2015-06-17 2016-08-12 Master Dynamic Ltd 製品塗層的設備、儀器和工藝
CN105728643B (zh) * 2016-03-18 2018-07-03 湖州南丰机械制造有限公司 一种用于熔模铸造的蜡模安置架
ES2934799T3 (es) * 2017-02-16 2023-02-27 Oerlikon Surface Solutions Ag Pfaeffikon Accesorio de herramientas para múltiples pasos de procedimiento
KR102079778B1 (ko) * 2017-12-14 2020-02-21 한국생산기술연구원 스퍼터링 지그
KR102090277B1 (ko) 2018-09-11 2020-04-23 구한모 스크린골프장용 스크린원단 및 제조방법
DE102018126862A1 (de) * 2018-10-26 2020-04-30 Oerlikon Surface Solutions Ag, Pfäffikon Werkstückträgereinrichtung und Beschichtungsanordnung
DE102019110158A1 (de) * 2019-04-17 2020-10-22 Oerlikon Surface Solutions Ag, Pfäffikon Werkstückträgereinrichtung

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1391063A (en) * 1971-03-02 1975-04-16 Dobson C D Apparatus for vacuum deposition
JPS5371390U (zh) * 1976-11-18 1978-06-15
JPS60155009A (ja) * 1984-01-20 1985-08-14 Nippon Cable Syst Inc ケ−ブル式ウインドレギユレ−タ用張力自動調整機構
JPS6131252U (ja) * 1984-07-31 1986-02-25 株式会社 松下 絵葉書類の陳列器
JPS6147855U (ja) * 1984-08-31 1986-03-31 秀雄 増淵 種販売用スタンド
FR2594102B1 (fr) * 1986-02-12 1991-04-19 Stein Heurtey Installation flexible automatisee de traitement thermochimique rapide
SU1824458A1 (en) * 1991-05-06 1993-06-30 Nii Vychislitelnoj Tekhn Apparatus for application of coatings
UA10775A (uk) * 1996-04-19 1996-12-25 Валерій Федорович Семенюк Спосіб вакуумhо-дугового hаhесеhhя покриттів та пристрій для його здійсhеhhя
US6077572A (en) * 1997-06-18 2000-06-20 Northeastern University Method of coating edges with diamond-like carbon
CN2428490Y (zh) * 2000-06-27 2001-05-02 复旦大学 一种用于真空蒸镀的样品支架
US20020062791A1 (en) * 2000-10-11 2002-05-30 Andrey Ginovker Table
EP1256637B1 (de) * 2001-05-08 2005-11-30 Unaxis Balzers Aktiengesellschaft Werkstückträger
DE102004027989B4 (de) * 2004-06-09 2007-05-10 Esser, Stefan, Dr.-Ing. Werkstückträgervorrichtung zum Halten von Werkstücken
JP2006255648A (ja) 2005-03-18 2006-09-28 Ga-Rew:Kk コーティング装置
TWI331635B (en) * 2005-04-22 2010-10-11 Hon Hai Prec Ind Co Ltd Substrate holder
US20070004577A1 (en) * 2005-06-29 2007-01-04 Gabor Lederer Centrifuge assembly

Also Published As

Publication number Publication date
KR101598645B1 (ko) 2016-02-29
BRPI0913321A2 (pt) 2015-11-17
TW201006948A (en) 2010-02-16
PL2297375T3 (pl) 2015-09-30
CA2724917A1 (en) 2009-12-17
CA2724917C (en) 2016-03-29
RU2499080C2 (ru) 2013-11-20
TWI484058B (zh) 2015-05-11
CN102057075B (zh) 2013-01-02
RU2010145987A (ru) 2012-07-20
JP2011523895A (ja) 2011-08-25
US20140109827A1 (en) 2014-04-24
BRPI0913321B1 (pt) 2021-03-02
EP2297375B1 (en) 2015-04-08
KR20110015595A (ko) 2011-02-16
EP2297375A1 (en) 2011-03-23
WO2009149864A1 (en) 2009-12-17
AU2009256934A1 (en) 2009-12-17
MX2010013449A (es) 2011-01-21
PT2297375E (pt) 2015-06-29
CN102057075A (zh) 2011-05-11
AU2009256934B2 (en) 2014-06-26
US20110083604A1 (en) 2011-04-14
US8944000B2 (en) 2015-02-03
ES2541466T3 (es) 2015-07-20

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