PL2297375T3 - Nośnik przedmiotów obrabianych - Google Patents

Nośnik przedmiotów obrabianych

Info

Publication number
PL2297375T3
PL2297375T3 PL09761427T PL09761427T PL2297375T3 PL 2297375 T3 PL2297375 T3 PL 2297375T3 PL 09761427 T PL09761427 T PL 09761427T PL 09761427 T PL09761427 T PL 09761427T PL 2297375 T3 PL2297375 T3 PL 2297375T3
Authority
PL
Poland
Prior art keywords
workpiece carrier
workpiece
carrier
Prior art date
Application number
PL09761427T
Other languages
English (en)
Inventor
Stefan Esser
Original Assignee
Oerlikon Surface Solutions Ag Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Truebbach filed Critical Oerlikon Surface Solutions Ag Truebbach
Publication of PL2297375T3 publication Critical patent/PL2297375T3/pl

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
PL09761427T 2008-06-11 2009-06-04 Nośnik przedmiotów obrabianych PL2297375T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH8842008 2008-06-11
PCT/EP2009/003998 WO2009149864A1 (en) 2008-06-11 2009-06-04 Workpiece carrier
EP09761427.5A EP2297375B1 (en) 2008-06-11 2009-06-04 Workpiece carrier

Publications (1)

Publication Number Publication Date
PL2297375T3 true PL2297375T3 (pl) 2015-09-30

Family

ID=40220250

Family Applications (1)

Application Number Title Priority Date Filing Date
PL09761427T PL2297375T3 (pl) 2008-06-11 2009-06-04 Nośnik przedmiotów obrabianych

Country Status (15)

Country Link
US (2) US20110083604A1 (pl)
EP (1) EP2297375B1 (pl)
JP (1) JP5474948B2 (pl)
KR (1) KR101598645B1 (pl)
CN (1) CN102057075B (pl)
AU (1) AU2009256934B2 (pl)
BR (1) BRPI0913321B1 (pl)
CA (1) CA2724917C (pl)
ES (1) ES2541466T3 (pl)
MX (1) MX2010013449A (pl)
PL (1) PL2297375T3 (pl)
PT (1) PT2297375E (pl)
RU (1) RU2499080C2 (pl)
TW (1) TWI484058B (pl)
WO (1) WO2009149864A1 (pl)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013086339A2 (en) * 2011-12-08 2013-06-13 Praxair S.T. Technology, Inc. Multifuntion tooling fixture assembly for use in a coating related operations
EP2788525B1 (en) * 2011-12-08 2016-02-24 Praxair S.T. Technology, Inc. Tooling fixture assembly for use in a coating operation
RU2507306C1 (ru) * 2012-09-04 2014-02-20 Открытое акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" Установка для напыления покрытий на прецизионные детали узлов гироприборов
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten
HK1215127A2 (zh) 2015-06-17 2016-08-12 Master Dynamic Ltd 製品塗層的設備、儀器和工藝
CN105728643B (zh) * 2016-03-18 2018-07-03 湖州南丰机械制造有限公司 一种用于熔模铸造的蜡模安置架
BR112019016982A2 (pt) 2017-02-16 2020-04-07 Oerlikon Surface Solutions Ag Pfaeffikon acessório de ferramenta para múltiplas etapas de processo
KR102079778B1 (ko) * 2017-12-14 2020-02-21 한국생산기술연구원 스퍼터링 지그
KR102090277B1 (ko) 2018-09-11 2020-04-23 구한모 스크린골프장용 스크린원단 및 제조방법
DE102018126862A1 (de) * 2018-10-26 2020-04-30 Oerlikon Surface Solutions Ag, Pfäffikon Werkstückträgereinrichtung und Beschichtungsanordnung
DE102019110158A1 (de) * 2019-04-17 2020-10-22 Oerlikon Surface Solutions Ag, Pfäffikon Werkstückträgereinrichtung

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1391063A (en) * 1971-03-02 1975-04-16 Dobson C D Apparatus for vacuum deposition
JPS5371390U (pl) * 1976-11-18 1978-06-15
JPS60155009A (ja) * 1984-01-20 1985-08-14 Nippon Cable Syst Inc ケ−ブル式ウインドレギユレ−タ用張力自動調整機構
JPS6131252U (ja) * 1984-07-31 1986-02-25 株式会社 松下 絵葉書類の陳列器
JPS6147855U (ja) * 1984-08-31 1986-03-31 秀雄 増淵 種販売用スタンド
FR2594102B1 (fr) * 1986-02-12 1991-04-19 Stein Heurtey Installation flexible automatisee de traitement thermochimique rapide
SU1824458A1 (en) * 1991-05-06 1993-06-30 Nii Vychislitelnoj Tekhn Apparatus for application of coatings
UA10775A (uk) * 1996-04-19 1996-12-25 Валерій Федорович Семенюк Спосіб вакуумhо-дугового hаhесеhhя покриттів та пристрій для його здійсhеhhя
US6077572A (en) * 1997-06-18 2000-06-20 Northeastern University Method of coating edges with diamond-like carbon
CN2428490Y (zh) * 2000-06-27 2001-05-02 复旦大学 一种用于真空蒸镀的样品支架
US20020062791A1 (en) * 2000-10-11 2002-05-30 Andrey Ginovker Table
EP1256637B1 (de) * 2001-05-08 2005-11-30 Unaxis Balzers Aktiengesellschaft Werkstückträger
DE102004027989B4 (de) * 2004-06-09 2007-05-10 Esser, Stefan, Dr.-Ing. Werkstückträgervorrichtung zum Halten von Werkstücken
JP2006255648A (ja) 2005-03-18 2006-09-28 Ga-Rew:Kk コーティング装置
TWI331635B (en) * 2005-04-22 2010-10-11 Hon Hai Prec Ind Co Ltd Substrate holder
US20070004577A1 (en) * 2005-06-29 2007-01-04 Gabor Lederer Centrifuge assembly

Also Published As

Publication number Publication date
AU2009256934A1 (en) 2009-12-17
EP2297375A1 (en) 2011-03-23
AU2009256934B2 (en) 2014-06-26
BRPI0913321B1 (pt) 2021-03-02
RU2499080C2 (ru) 2013-11-20
CN102057075A (zh) 2011-05-11
US8944000B2 (en) 2015-02-03
EP2297375B1 (en) 2015-04-08
US20140109827A1 (en) 2014-04-24
TW201006948A (en) 2010-02-16
BRPI0913321A2 (pt) 2015-11-17
KR20110015595A (ko) 2011-02-16
KR101598645B1 (ko) 2016-02-29
CA2724917C (en) 2016-03-29
JP2011523895A (ja) 2011-08-25
WO2009149864A1 (en) 2009-12-17
CN102057075B (zh) 2013-01-02
PT2297375E (pt) 2015-06-29
MX2010013449A (es) 2011-01-21
JP5474948B2 (ja) 2014-04-16
US20110083604A1 (en) 2011-04-14
ES2541466T3 (es) 2015-07-20
CA2724917A1 (en) 2009-12-17
RU2010145987A (ru) 2012-07-20
TWI484058B (zh) 2015-05-11

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