US20110083604A1 - Workpiece carrier - Google Patents

Workpiece carrier Download PDF

Info

Publication number
US20110083604A1
US20110083604A1 US12/996,928 US99692809A US2011083604A1 US 20110083604 A1 US20110083604 A1 US 20110083604A1 US 99692809 A US99692809 A US 99692809A US 2011083604 A1 US2011083604 A1 US 2011083604A1
Authority
US
United States
Prior art keywords
workpiece carrier
case
carrier according
shaft
discs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/996,928
Other languages
English (en)
Inventor
Stefan Esser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Trading AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading AG Truebbach filed Critical Oerlikon Trading AG Truebbach
Assigned to OERLIKON TRADING AG, TRUEBBACH reassignment OERLIKON TRADING AG, TRUEBBACH ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ESSER, STEFAN
Publication of US20110083604A1 publication Critical patent/US20110083604A1/en
Assigned to OERLIKON TRADING AG, TRUEBBACH reassignment OERLIKON TRADING AG, TRUEBBACH CHANGE OF ADDRESS Assignors: OERLIKON TRADING AG, TRUEBBACH
Abandoned legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Definitions

  • the invention relates to a workpiece carrier for a coating system according to the precharacterizing clause of claim 1 .
  • a workpiece carrier of this type usually carries, in corresponding holders, a relatively large number of workpieces which are transported past coating sources several times to ensure a coating which is as uniform as possible.
  • DE 10 2004 027 989 A1 discloses a workpiece carrier of the generic type.
  • it has holders inclined outwards obliquely away from the shaft, which permits a very close arrangement of the workpieces and also leads to a generally desired increase in the thickness of the coating towards the end face of the workpiece and improves the uniformity of the coating especially on end faces.
  • a similar workpiece carrier is disclosed in EP 1 256 637 A1.
  • the holders are aligned parallel to a rotating central shaft which drives the discs. Neither the discs nor the shaft nor further parts producing in each case rotation of the holder itself are protected from coating.
  • the shaft, the discs and the lower parts of the holders are covered by a cladding which has a very simple design and is easy to mount and to remove and can be cleaned easily and without danger of damage.
  • the cladding can also serve further purposes, such as establishing the spacing of directly successive discs.
  • FIG. 1 schematically shows an axial longitudinal section through a workpiece carrier according to the invention, in a first embodiment
  • FIG. 2 shows a partial side view of the workpiece carrier according to the invention, of FIG. 1 .
  • FIG. 3 shows a partial exploded view of a workpiece carrier according to the invention, in a second embodiment.
  • the workpiece carrier according to FIG. 1 , 2 is shown somewhat schematically and is also provided with fewer holders for workpieces than will usually be provided.
  • a central perpendicular shaft 1 of non-rotationally symmetrical, preferably square, cross-section which is connected to a base 2 . It can be mounted on an axis coinciding with the centre of the shaft 1 so as to be non-rotatable relative to the base 2 or rotatable about said axis and can be driveable.
  • a gear ring 3 mounted so as to be rotatable about said axis engages a driveable pinion 4 and is driven by the latter in such a way that its rotational speed differs from that of the shaft 1 so that the gear ring 3 executes a rotational movement relative to the shaft 1 .
  • Rings 5 of a thin rigid material e.g.
  • Each disc 7 carries an equal number—in the example six, as a rule preferably more—of identical holders inclined outwards obliquely away from the shaft 1 .
  • Each of the holders 8 comprises a bolt 9 which is anchored in an oblique bore 10 in the disc 7 and a sleeve 11 rotatably mounted on the bolt 9 and having a bore 12 for receiving a workpiece 13 (omitted in FIG. 2 ).
  • the holders 8 are distributed in each case uniformly over the circumference of the disc 7 so that adjacent holders are offset relative to one another in each case by the same angular pitch ⁇ 60° in the example.
  • the rings 5 each have, at the upper edge, a number of upper recesses 14 uniformly distributed over the circumference, which number corresponds to the number of holders 8 , and—with the exception of the lowermost ring—likewise, at the lower edge, uniformly distributed lower recesses 15 which however are offset in each case by half the angular pitch relative to the upper recesses 14 so that one of the upper recesses 14 is in each case centred between two lower recesses 15 , and vice versa.
  • Successive rings 5 are oriented so that the lower recesses 15 of the upper ring 5 are adjacent in each case to the upper recesses 14 of the lower ring 5 , in particular so that the edges of the latter constitute a smooth continuation of those of the former.
  • the lower recess 15 and the upper recess 14 adjacent to it together form in each case an opening in the cladding through which one of the holders 8 projects, it also being necessary for a recess 16 to be provided in each case at the outer edge of the support ring 6 of the upper ring 5 .
  • the openings which belong to a group formed in this manner between two rings are at the same height and are distributed uniformly over the circumference of the cladding.
  • the openings which are preferably identical throughout may each have an elongated elliptical shape or a similar shape, for example may be in the form of semi-ellipses of identical or different lengths which are connected by a rectangular central piece.
  • the rings 5 abut one another along boundary lines 17 which are led in the circumferential direction in such a way that they connect in each case adjacent openings, i.e. intersect the webs separating them, and do so in such a way that they start in the vicinity of the narrowest point between said openings, and preferably somewhat below said point, it being necessary to ensure that the upper recesses 14 narrow only to such an extent that their width is at least slightly greater even at the lower end than the diameter of the holders 8 , i.e. of their sleeves 11 .
  • the boundary line 17 is formed so that adjacent rings 5 are fixed in a required position with respect to their mutual angular position, apart from rotations through a multiple of the angular pitch. In addition, it is chosen so that said angular position automatically adopts a fixed required position if the upper ring is mounted so that it is rotated by less than half the angular pitch. This is achieved in the example by virtue of the fact that the boundary line 17 follows a preferably symmetrical V-shaped line with a lowest point in the middle between the adjacent openings which it connects.
  • the web sections which separate adjacent lower recesses 15 slide when they rest on a sleeve 11 of a recess 8 , in each case on said sleeve in such a way that the ring is automatically rotated towards the required position.
  • the relative position of successive rings 5 can be controlled by stops which project, for example, on the inside of a ring slightly above the boundary line 17 and cooperate there with the inside of the following ring.
  • the stops can (cf. FIG. 3 ) be formed, for example, by parts of the support ring 6 . They can, however, also be absent since the effective formation of the boundary lines 17 over the total circumference forces the ring 5 to assume the required position in each direction.
  • a transmission part 18 is coordinated with each of the discs 7 , which transmission part 18 is preferably a part which is punched from a metal sheet and bent and which engages the shaft 1 in a displaceable but non-rotatable manner, for example by having a square recess through which said shaft projects and which is connected to the respective disc 7 in such a way that it is rotatable relative to said disc but is not displaceable or at most has limited displaceability axially, parallel to the shaft 1 . It has lugs 19 which project radially outwards and engage rotary stops on the holders 8 , which rotary stops are each in the form of notches 20 in the sleeve 11 .
  • the workpiece carrier can be assembled by first mounting the lowermost ring 5 on the gear ring 3 , then the lowermost disc 7 , together with the corresponding transmission part 18 and the holders 8 , on the support ring 6 thereof, then the next ring 5 , etc. Owing to the position and properties of the boundary lines 17 , this does not give rise to any difficulties since the upper recesses 14 are just wide enough even at their lower ends to be able to receive the sleeves 11 of the holders 8 , and the lower recesses 15 each widen towards the edge.
  • the position of the discs 7 in the direction of the shaft 1 is completely fixed in each case by the position of the corresponding ring 5 .
  • the position of each ring 5 in turn results from its support on the next lower ring or on the gear ring 3 .
  • the rotational position of the rings 5 need be checked in each case only approximately during assembly since their relevant orientation is effected automatically by the contact with the holders 8 of the next lower disc and finally by the V-shape of the boundary lines 17 .
  • FIG. 3 shows a realistic formation of a disc 7 having eighteen holders 8 and of a ring 5 coordinated with the disc 7 and having corresponding numbers of upper recesses 14 , lower recesses 15 and recesses 16 on the support ring 6 .
  • Rotation-preventing devices 21 which prevent rotation of the disc 7 relative to the ring 5 when the former rests on the support ring 6 are also visible on the same.
  • the webs between adjacent openings are very narrow and the upper recesses 14 in turn are offset relative to the lower recesses 15 by half an angular pitch. This permits an overall very dense arrangement of the holders 8 on the workpiece carrier.
  • the boundary lines 17 between adjacent openings are once again V-shaped with a lowest point in the middle.
  • all rings as well as all discs are identically formed in each case so that all openings are also identical.
  • the rings are in each case invariant with rotation about a multiple of the angular pitch.
  • Each of the rings is coordinated with one of the discs and determines the distance between said disc and the following disc.
  • the cladding and the rings can also have a shape other than substantially cylindrical.
  • the shaft may consist of a plurality of sections which are connected non-rotatably to one another and to which in each case one transmission means can then also be firmly connected.
  • the workpiece carrier may also have a more complex design than described, for example with a plurality of units having the design described and being present on a base rotatable about an axis.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Coating Apparatus (AREA)
  • Rolling Contact Bearings (AREA)
  • Packaging For Recording Disks (AREA)
  • Spray Control Apparatus (AREA)
  • Snaps, Bayonet Connections, Set Pins, And Snap Rings (AREA)
  • Chain Conveyers (AREA)
  • Gear Processing (AREA)
  • Jigs For Machine Tools (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Chemical Vapour Deposition (AREA)
US12/996,928 2008-06-11 2009-06-04 Workpiece carrier Abandoned US20110083604A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH8842008 2008-06-11
CH884/08 2008-06-11
PCT/EP2009/003998 WO2009149864A1 (en) 2008-06-11 2009-06-04 Workpiece carrier

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/000039 A-371-Of-International WO2009087090A1 (de) 2008-01-07 2009-01-07 Vorrichtung und verfahren zur wahlweisen umschaltung zweier master für zugeordnete slaves in einer logischen ringschaltung

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US14/142,462 Continuation US8944000B2 (en) 2008-06-11 2013-12-27 Workpiece carrier

Publications (1)

Publication Number Publication Date
US20110083604A1 true US20110083604A1 (en) 2011-04-14

Family

ID=40220250

Family Applications (2)

Application Number Title Priority Date Filing Date
US12/996,928 Abandoned US20110083604A1 (en) 2008-06-11 2009-06-04 Workpiece carrier
US14/142,462 Active US8944000B2 (en) 2008-06-11 2013-12-27 Workpiece carrier

Family Applications After (1)

Application Number Title Priority Date Filing Date
US14/142,462 Active US8944000B2 (en) 2008-06-11 2013-12-27 Workpiece carrier

Country Status (15)

Country Link
US (2) US20110083604A1 (zh)
EP (1) EP2297375B1 (zh)
JP (1) JP5474948B2 (zh)
KR (1) KR101598645B1 (zh)
CN (1) CN102057075B (zh)
AU (1) AU2009256934B2 (zh)
BR (1) BRPI0913321B1 (zh)
CA (1) CA2724917C (zh)
ES (1) ES2541466T3 (zh)
MX (1) MX2010013449A (zh)
PL (1) PL2297375T3 (zh)
PT (1) PT2297375E (zh)
RU (1) RU2499080C2 (zh)
TW (1) TWI484058B (zh)
WO (1) WO2009149864A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130177707A1 (en) * 2011-12-08 2013-07-11 Albert Feuerstein Multifunction tooling fixture assembly for use in a coating related operations
US20210394216A1 (en) * 2018-10-26 2021-12-23 Oerlikon Surface Solutions Ag, Pfaffikon Workpiece carrier device and coating arrangement

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG11201402968XA (en) * 2011-12-08 2014-10-30 Praxair Technology Inc Tooling fixture assembly for use in a coating operation
RU2507306C1 (ru) * 2012-09-04 2014-02-20 Открытое акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" Установка для напыления покрытий на прецизионные детали узлов гироприборов
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten
HK1215127A2 (zh) 2015-06-17 2016-08-12 Master Dynamic Ltd 製品塗層的設備、儀器和工藝
CN105728643B (zh) * 2016-03-18 2018-07-03 湖州南丰机械制造有限公司 一种用于熔模铸造的蜡模安置架
ES2934799T3 (es) * 2017-02-16 2023-02-27 Oerlikon Surface Solutions Ag Pfaeffikon Accesorio de herramientas para múltiples pasos de procedimiento
KR102079778B1 (ko) * 2017-12-14 2020-02-21 한국생산기술연구원 스퍼터링 지그
KR102090277B1 (ko) 2018-09-11 2020-04-23 구한모 스크린골프장용 스크린원단 및 제조방법
DE102019110158A1 (de) * 2019-04-17 2020-10-22 Oerlikon Surface Solutions Ag, Pfäffikon Werkstückträgereinrichtung

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Publication number Priority date Publication date Assignee Title
US4662236A (en) * 1984-01-20 1987-05-05 Nippon Cable System Inc. Mechanism for automatically regulating tension of wires employed in a window regulator
US20020062791A1 (en) * 2000-10-11 2002-05-30 Andrey Ginovker Table
US20070004577A1 (en) * 2005-06-29 2007-01-04 Gabor Lederer Centrifuge assembly

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JPS6131252U (ja) * 1984-07-31 1986-02-25 株式会社 松下 絵葉書類の陳列器
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SU1824458A1 (en) * 1991-05-06 1993-06-30 Nii Vychislitelnoj Tekhn Apparatus for application of coatings
UA10775A (uk) * 1996-04-19 1996-12-25 Валерій Федорович Семенюк Спосіб вакуумhо-дугового hаhесеhhя покриттів та пристрій для його здійсhеhhя
US6077572A (en) * 1997-06-18 2000-06-20 Northeastern University Method of coating edges with diamond-like carbon
CN2428490Y (zh) * 2000-06-27 2001-05-02 复旦大学 一种用于真空蒸镀的样品支架
EP1256637B1 (de) * 2001-05-08 2005-11-30 Unaxis Balzers Aktiengesellschaft Werkstückträger
DE102004027989B4 (de) * 2004-06-09 2007-05-10 Esser, Stefan, Dr.-Ing. Werkstückträgervorrichtung zum Halten von Werkstücken
JP2006255648A (ja) 2005-03-18 2006-09-28 Ga-Rew:Kk コーティング装置
TWI331635B (en) * 2005-04-22 2010-10-11 Hon Hai Prec Ind Co Ltd Substrate holder

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
US4662236A (en) * 1984-01-20 1987-05-05 Nippon Cable System Inc. Mechanism for automatically regulating tension of wires employed in a window regulator
US20020062791A1 (en) * 2000-10-11 2002-05-30 Andrey Ginovker Table
US20070004577A1 (en) * 2005-06-29 2007-01-04 Gabor Lederer Centrifuge assembly

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130177707A1 (en) * 2011-12-08 2013-07-11 Albert Feuerstein Multifunction tooling fixture assembly for use in a coating related operations
KR20140108253A (ko) * 2011-12-08 2014-09-05 프랙스에어 에스.티. 테크놀로지, 인코포레이티드 코팅 관련 작업에서 이용하기 위한 다기능 툴링 고정구 조립체
US9381537B2 (en) * 2011-12-08 2016-07-05 Praxair Technology, Inc. Multifunction tooling fixture assembly for use in a coating related operations
KR102120964B1 (ko) * 2011-12-08 2020-06-09 프랙스에어 에스.티. 테크놀로지, 인코포레이티드 코팅 관련 작업에서 이용하기 위한 다기능 툴링 고정구 조립체
US20210394216A1 (en) * 2018-10-26 2021-12-23 Oerlikon Surface Solutions Ag, Pfaffikon Workpiece carrier device and coating arrangement
US11806737B2 (en) * 2018-10-26 2023-11-07 Oerlikon Surface Solutions Ag, Pfaffikon Workpiece carrier device and coating arrangement

Also Published As

Publication number Publication date
KR101598645B1 (ko) 2016-02-29
BRPI0913321A2 (pt) 2015-11-17
TW201006948A (en) 2010-02-16
PL2297375T3 (pl) 2015-09-30
CA2724917A1 (en) 2009-12-17
CA2724917C (en) 2016-03-29
RU2499080C2 (ru) 2013-11-20
JP5474948B2 (ja) 2014-04-16
TWI484058B (zh) 2015-05-11
CN102057075B (zh) 2013-01-02
RU2010145987A (ru) 2012-07-20
JP2011523895A (ja) 2011-08-25
US20140109827A1 (en) 2014-04-24
BRPI0913321B1 (pt) 2021-03-02
EP2297375B1 (en) 2015-04-08
KR20110015595A (ko) 2011-02-16
EP2297375A1 (en) 2011-03-23
WO2009149864A1 (en) 2009-12-17
AU2009256934A1 (en) 2009-12-17
MX2010013449A (es) 2011-01-21
PT2297375E (pt) 2015-06-29
CN102057075A (zh) 2011-05-11
AU2009256934B2 (en) 2014-06-26
US8944000B2 (en) 2015-02-03
ES2541466T3 (es) 2015-07-20

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AS Assignment

Owner name: OERLIKON TRADING AG, TRUEBBACH, SWITZERLAND

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ESSER, STEFAN;REEL/FRAME:025483/0417

Effective date: 20101117

AS Assignment

Owner name: OERLIKON TRADING AG, TRUEBBACH, SWITZERLAND

Free format text: CHANGE OF ADDRESS;ASSIGNOR:OERLIKON TRADING AG, TRUEBBACH;REEL/FRAME:032094/0614

Effective date: 20140121

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION