JP5473265B2 - 多層構造計測方法および多層構造計測装置 - Google Patents

多層構造計測方法および多層構造計測装置 Download PDF

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Publication number
JP5473265B2
JP5473265B2 JP2008179311A JP2008179311A JP5473265B2 JP 5473265 B2 JP5473265 B2 JP 5473265B2 JP 2008179311 A JP2008179311 A JP 2008179311A JP 2008179311 A JP2008179311 A JP 2008179311A JP 5473265 B2 JP5473265 B2 JP 5473265B2
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optical distance
layer
light
interference
wavelength
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Expired - Fee Related
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Japanese (ja)
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JP2010019636A (ja
JP2010019636A5 (https=
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信人 末平
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Canon Inc
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Canon Inc
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Priority to JP2008179311A priority Critical patent/JP5473265B2/ja
Priority to US12/487,026 priority patent/US20100007894A1/en
Priority to EP09163477A priority patent/EP2144034A1/en
Priority to CN2009101402379A priority patent/CN101625319B/zh
Publication of JP2010019636A publication Critical patent/JP2010019636A/ja
Publication of JP2010019636A5 publication Critical patent/JP2010019636A5/ja
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/1005—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for measuring distances inside the eye, e.g. thickness of the cornea
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
    • A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
    • A61B3/102—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for optical coherence tomography [OCT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Surgery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Medical Informatics (AREA)
  • Molecular Biology (AREA)
  • Engineering & Computer Science (AREA)
  • Animal Behavior & Ethology (AREA)
  • Biomedical Technology (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biophysics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2008179311A 2008-07-09 2008-07-09 多層構造計測方法および多層構造計測装置 Expired - Fee Related JP5473265B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008179311A JP5473265B2 (ja) 2008-07-09 2008-07-09 多層構造計測方法および多層構造計測装置
US12/487,026 US20100007894A1 (en) 2008-07-09 2009-06-18 Multilayer Structure Measuring Method and Multilayer Structure Measuring Apparatus
EP09163477A EP2144034A1 (en) 2008-07-09 2009-06-23 Multilayer structure measuring method and multilayer structure measuring apparatus
CN2009101402379A CN101625319B (zh) 2008-07-09 2009-07-09 多层结构测量方法和多层结构测量设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008179311A JP5473265B2 (ja) 2008-07-09 2008-07-09 多層構造計測方法および多層構造計測装置

Publications (3)

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JP2010019636A JP2010019636A (ja) 2010-01-28
JP2010019636A5 JP2010019636A5 (https=) 2011-07-21
JP5473265B2 true JP5473265B2 (ja) 2014-04-16

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US (1) US20100007894A1 (https=)
EP (1) EP2144034A1 (https=)
JP (1) JP5473265B2 (https=)
CN (1) CN101625319B (https=)

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Publication number Publication date
JP2010019636A (ja) 2010-01-28
CN101625319B (zh) 2011-06-29
EP2144034A1 (en) 2010-01-13
US20100007894A1 (en) 2010-01-14
CN101625319A (zh) 2010-01-13

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