JP5469475B2 - 圧電セラミックス及びその製造方法 - Google Patents
圧電セラミックス及びその製造方法 Download PDFInfo
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- JP5469475B2 JP5469475B2 JP2010022678A JP2010022678A JP5469475B2 JP 5469475 B2 JP5469475 B2 JP 5469475B2 JP 2010022678 A JP2010022678 A JP 2010022678A JP 2010022678 A JP2010022678 A JP 2010022678A JP 5469475 B2 JP5469475 B2 JP 5469475B2
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- barium titanate
- piezoelectric
- average particle
- piezoelectric ceramic
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- 239000000919 ceramic Substances 0.000 title claims description 47
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 229910002113 barium titanate Inorganic materials 0.000 claims description 45
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 45
- 239000000843 powder Substances 0.000 claims description 31
- 239000002245 particle Substances 0.000 claims description 28
- 238000010304 firing Methods 0.000 claims description 26
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 21
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims description 20
- 229910001947 lithium oxide Inorganic materials 0.000 claims description 20
- 239000002994 raw material Substances 0.000 claims description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- 229910018068 Li 2 O Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 description 15
- 230000008878 coupling Effects 0.000 description 14
- 238000010168 coupling process Methods 0.000 description 14
- 238000005859 coupling reaction Methods 0.000 description 14
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 14
- 239000007858 starting material Substances 0.000 description 14
- 229910052808 lithium carbonate Inorganic materials 0.000 description 13
- 230000010287 polarization Effects 0.000 description 7
- 239000000654 additive Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 230000002542 deteriorative effect Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- XUCJHNOBJLKZNU-UHFFFAOYSA-M dilithium;hydroxide Chemical compound [Li+].[Li+].[OH-] XUCJHNOBJLKZNU-UHFFFAOYSA-M 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000007088 Archimedes method Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000001027 hydrothermal synthesis Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 1
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000004945 emulsification Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- LLZRNZOLAXHGLL-UHFFFAOYSA-J titanic acid Chemical compound O[Ti](O)(O)O LLZRNZOLAXHGLL-UHFFFAOYSA-J 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Description
出発原料の平均粒径を同一とした場合の、添加物の添加量と焼成温度による関係を評価した。
添加物の添加量を同一とした場合の、出発原料の平均粒径と焼成温度による関係を評価した。
Claims (2)
- チタン酸バリウムを主成分として含む圧電セラミックスの製造方法であって、前記チタン酸バリウムの原料粉末は、平均粒径が0.05μm以上0.10μm以下であり、第一副成分として酸化リチウム(Li2O)を前記主成分を100質量%として0.03質量%以上0.08質量%以下添加し、第二副成分として酸化アルミニウム(Al2O3)を0.01質量%以上0.10質量%以下添加したことを特徴とする圧電セラミックスの製造方法。
- 前記チタン酸バリウムを含む成形体を、1000℃以上1200℃以下の温度範囲で焼成することを特徴とする請求項1記載の圧電セラミックスの製造方法。
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JP2010022678A JP5469475B2 (ja) | 2010-02-04 | 2010-02-04 | 圧電セラミックス及びその製造方法 |
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JP2010022678A JP5469475B2 (ja) | 2010-02-04 | 2010-02-04 | 圧電セラミックス及びその製造方法 |
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JP2011157252A JP2011157252A (ja) | 2011-08-18 |
JP5469475B2 true JP5469475B2 (ja) | 2014-04-16 |
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Families Citing this family (2)
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JP6146064B2 (ja) * | 2013-03-11 | 2017-06-14 | 株式会社リコー | 積層構造体及び積層構造体の製造方法 |
CN115959907B (zh) * | 2022-12-30 | 2024-02-13 | 深圳市汉清达科技有限公司 | 一种无铅压电陶瓷及其制备方法和应用 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01115868A (ja) * | 1987-10-28 | 1989-05-09 | Matsushita Electric Ind Co Ltd | 誘電体磁器およびその製造方法 |
JP3465549B2 (ja) * | 1996-11-22 | 2003-11-10 | 北興化学工業株式会社 | チタン酸バリウム焼結体及びその製造方法 |
JP2000072539A (ja) * | 1998-08-31 | 2000-03-07 | Kyocera Corp | 圧電体 |
JP4067298B2 (ja) * | 2001-02-22 | 2008-03-26 | Tdk株式会社 | 圧電磁器 |
JP2010006623A (ja) * | 2008-06-25 | 2010-01-14 | Nec Tokin Corp | 圧電セラミックス及びその製造方法 |
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