JP5465907B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5465907B2 JP5465907B2 JP2009079127A JP2009079127A JP5465907B2 JP 5465907 B2 JP5465907 B2 JP 5465907B2 JP 2009079127 A JP2009079127 A JP 2009079127A JP 2009079127 A JP2009079127 A JP 2009079127A JP 5465907 B2 JP5465907 B2 JP 5465907B2
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- Prior art keywords
- gate
- soi layer
- gate electrode
- region
- semiconductor device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823814—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823878—Complementary field-effect transistors, e.g. CMOS isolation region manufacturing related aspects, e.g. to avoid interaction of isolation region with adjacent structure
Description
図2(a)は、本実施例による半導体装置100の上面図である。図2(b)は、図2(a)におけるA1−A1線部分の断面を表す断面図である。なお、図2(a)では、説明の便宜のため、ゲート電極及びSOI層のみ図示している。
図4は、本実施例による半導体装置200の上面図である。図4では、説明の便宜のため、SOI層(30n、30p)及びゲート電極(40n、40p)のみ図示している。以下、図4を参照しつつ、第1の実施例と異なる部分について主に説明する。
図5は、本実施例による半導体装置300の上面図である。ここでは説明の便宜のため、SOI層30n及びゲート電極40nのみ図示している。半導体装置300は、例えばアナログ回路などの高精度を要求される用途に用いられるSOI構造のデバイスである。以下、半導体装置300をNチャネル型のSOIデバイスとして説明する。半導体装置300のSOI構造自体は第1の実施例で説明したのと同様である。以下、図5を参照しつつ、SOI層30n及びゲート電極40nの形状について説明する。
20 埋め込み酸化膜(BOX層)
30n、30p SOI層
31n、31p ソース領域
32n、32p ドレイン領域
33n、33p チャネル領域
40n、40p ゲート電極
41n、41p ゲート酸化膜
50n、50p サイドウォール
100、200、300 半導体装置
Nch N型トランジスタ
Pch P型トランジスタ
500 SOIデバイス
510 シリコン支持基板上
520 埋め込み酸化膜(BOX層)
530 SOI層
540 ゲート電極
550 サイドウォール
Claims (2)
- 支持基板上に形成された埋め込み酸化膜と、前記埋め込み酸化膜上に形成された半導体領域と、前記半導体領域にゲート電極がゲート長方向に沿って並置された複数のトランジスタと、を含む半導体装置であって、
前記複数のトランジスタのうちの最外部のトランジスタにおけるゲート電極から前記半導体領域の縁までの距離が、前記最外部のトランジスタのチャネル領域に圧縮応力が及ばないような距離となるように形成され、
前記複数のトランジスタの各々のゲート電極はT字型に形成され、互いに隣接する前記ゲート電極同士はT字型の向きが反転して、前記半導体領域の端部における各々のゲート長が長短交互になるように形成されている、ことを特徴とする半導体装置。 - 前記距離が1.5マイクロメートル以上であることを特徴とする請求項1に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009079127A JP5465907B2 (ja) | 2009-03-27 | 2009-03-27 | 半導体装置 |
US12/659,947 US8362562B2 (en) | 2009-03-27 | 2010-03-25 | Semiconductor device with selected transistor properties |
Applications Claiming Priority (1)
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JP2009079127A JP5465907B2 (ja) | 2009-03-27 | 2009-03-27 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010232470A JP2010232470A (ja) | 2010-10-14 |
JP5465907B2 true JP5465907B2 (ja) | 2014-04-09 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009079127A Active JP5465907B2 (ja) | 2009-03-27 | 2009-03-27 | 半導体装置 |
Country Status (2)
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US (1) | US8362562B2 (ja) |
JP (1) | JP5465907B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6119454B2 (ja) * | 2013-06-24 | 2017-04-26 | 富士通セミコンダクター株式会社 | 半導体装置の製造方法及び半導体装置を測定する方法 |
CN109524457B (zh) | 2017-09-20 | 2021-11-02 | 联华电子股份有限公司 | 半导体装置 |
US11705487B2 (en) * | 2019-05-12 | 2023-07-18 | Skyworks Solutions, Inc. | Transistors having reduced parasitics and enhanced performance |
Family Cites Families (31)
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JPH0786582A (ja) * | 1993-09-13 | 1995-03-31 | Toshiba Corp | 半導体装置 |
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JP4969715B2 (ja) * | 2000-06-06 | 2012-07-04 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP4776755B2 (ja) * | 2000-06-08 | 2011-09-21 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
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JP2003086708A (ja) | 2000-12-08 | 2003-03-20 | Hitachi Ltd | 半導体装置及びその製造方法 |
JP2003158198A (ja) * | 2001-09-07 | 2003-05-30 | Seiko Instruments Inc | 相補型mos半導体装置 |
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JP2006190727A (ja) * | 2005-01-04 | 2006-07-20 | Renesas Technology Corp | 半導体集積回路 |
JP4936418B2 (ja) * | 2005-05-17 | 2012-05-23 | ルネサスエレクトロニクス株式会社 | 半導体装置とその製造方法、及び半導体装置の設計プログラム |
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JP2006179949A (ja) * | 2006-02-15 | 2006-07-06 | Renesas Technology Corp | 半導体集積回路装置 |
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2009
- 2009-03-27 JP JP2009079127A patent/JP5465907B2/ja active Active
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2010
- 2010-03-25 US US12/659,947 patent/US8362562B2/en active Active
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US8362562B2 (en) | 2013-01-29 |
US20100244135A1 (en) | 2010-09-30 |
JP2010232470A (ja) | 2010-10-14 |
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