JP5463461B2 - カラーフィルタの突起欠陥高さ測定器及びリペア装置 - Google Patents

カラーフィルタの突起欠陥高さ測定器及びリペア装置 Download PDF

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Publication number
JP5463461B2
JP5463461B2 JP2010163196A JP2010163196A JP5463461B2 JP 5463461 B2 JP5463461 B2 JP 5463461B2 JP 2010163196 A JP2010163196 A JP 2010163196A JP 2010163196 A JP2010163196 A JP 2010163196A JP 5463461 B2 JP5463461 B2 JP 5463461B2
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Japan
Prior art keywords
color filter
height
defect
stylus
height measuring
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Application number
JP2010163196A
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English (en)
Japanese (ja)
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JP2012026766A (ja
Inventor
一人 大淵
真廣 小檜山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
V Technology Co Ltd
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V Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by V Technology Co Ltd filed Critical V Technology Co Ltd
Priority to JP2010163196A priority Critical patent/JP5463461B2/ja
Priority to PCT/JP2011/063957 priority patent/WO2012011346A1/ja
Priority to CN201180035424.6A priority patent/CN103003659B/zh
Priority to KR1020127034459A priority patent/KR101826273B1/ko
Priority to TW100122739A priority patent/TWI484140B/zh
Publication of JP2012026766A publication Critical patent/JP2012026766A/ja
Application granted granted Critical
Publication of JP5463461B2 publication Critical patent/JP5463461B2/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • G01B5/06—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness
    • G01B5/061—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness for measuring thickness height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/02—Measuring arrangements characterised by the use of mechanical techniques for measuring length, width or thickness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • B24B21/06—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving members with limited contact area pressing the belt against the work, e.g. shoes sweeping across the whole area to be ground
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/033—Other grinding machines or devices for grinding a surface for cleaning purposes, e.g. for descaling or for grinding off flaws in the surface
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010163196A 2010-07-20 2010-07-20 カラーフィルタの突起欠陥高さ測定器及びリペア装置 Active JP5463461B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010163196A JP5463461B2 (ja) 2010-07-20 2010-07-20 カラーフィルタの突起欠陥高さ測定器及びリペア装置
PCT/JP2011/063957 WO2012011346A1 (ja) 2010-07-20 2011-06-17 カラーフィルタの突起欠陥高さ測定器及びリペア装置
CN201180035424.6A CN103003659B (zh) 2010-07-20 2011-06-17 滤色片的突起缺陷高度测量仪器以及修复装置
KR1020127034459A KR101826273B1 (ko) 2010-07-20 2011-06-17 컬러 필터의 돌기 결함 높이 측정기 및 리페어 장치
TW100122739A TWI484140B (zh) 2010-07-20 2011-06-29 彩色濾光片之突起缺陷高度測定器及彩色濾光片之修復裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010163196A JP5463461B2 (ja) 2010-07-20 2010-07-20 カラーフィルタの突起欠陥高さ測定器及びリペア装置

Publications (2)

Publication Number Publication Date
JP2012026766A JP2012026766A (ja) 2012-02-09
JP5463461B2 true JP5463461B2 (ja) 2014-04-09

Family

ID=45496775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010163196A Active JP5463461B2 (ja) 2010-07-20 2010-07-20 カラーフィルタの突起欠陥高さ測定器及びリペア装置

Country Status (5)

Country Link
JP (1) JP5463461B2 (ko)
KR (1) KR101826273B1 (ko)
CN (1) CN103003659B (ko)
TW (1) TWI484140B (ko)
WO (1) WO2012011346A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104698632A (zh) * 2015-03-30 2015-06-10 合肥京东方光电科技有限公司 一种基板检测装置及突起高度检测方法
CN105093584B (zh) * 2015-08-18 2018-09-14 武汉华星光电技术有限公司 彩膜修复机及彩膜修复方法
CN107390396B (zh) * 2017-08-17 2023-04-14 东旭（昆山）显示材料有限公司 彩膜基板修补装置和方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3012068B2 (ja) * 1991-12-26 2000-02-21 新日本製鐵株式会社 波箔の山高さ測定方法
JP3615330B2 (ja) * 1996-06-19 2005-02-02 大日本印刷株式会社 突起・異物等の高さ測定器
JP3845165B2 (ja) * 1997-01-30 2006-11-15 松下電器産業株式会社 研磨装置における研磨高さ位置設定方法
JP3844705B2 (ja) * 2002-03-13 2006-11-15 株式会社アクト・ブレイン 基板欠陥のリペア装置及び方法
JP2004223658A (ja) * 2003-01-23 2004-08-12 V Technology Co Ltd 異物除去装置および異物除去方法
JP4074205B2 (ja) * 2003-02-19 2008-04-09 株式会社ブイ・テクノロジー 検知装置
JP4410042B2 (ja) * 2004-06-28 2010-02-03 Ｎｔｎ株式会社 微細パターン修正装置
KR101085134B1 (ko) * 2004-11-11 2011-11-18 엘지디스플레이 주식회사 박막 패터닝 장치 및 그를 이용한 칼라필터 어레이 기판의제조방법
CN100468094C (zh) * 2006-02-15 2009-03-11 虹创科技股份有限公司 彩色滤光片的制造方法
KR100807089B1 (ko) * 2006-06-09 2008-02-26 에스엔유 프리시젼 주식회사 기판 돌기 제거 장치

Also Published As

Publication number Publication date
CN103003659A (zh) 2013-03-27
TWI484140B (zh) 2015-05-11
JP2012026766A (ja) 2012-02-09
WO2012011346A1 (ja) 2012-01-26
KR101826273B1 (ko) 2018-02-06
KR20130094223A (ko) 2013-08-23
CN103003659B (zh) 2016-06-29
TW201221903A (en) 2012-06-01

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