JP5454143B2 - 薄膜トランジスタの製造方法 - Google Patents
薄膜トランジスタの製造方法 Download PDFInfo
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- JP5454143B2 JP5454143B2 JP2009536965A JP2009536965A JP5454143B2 JP 5454143 B2 JP5454143 B2 JP 5454143B2 JP 2009536965 A JP2009536965 A JP 2009536965A JP 2009536965 A JP2009536965 A JP 2009536965A JP 5454143 B2 JP5454143 B2 JP 5454143B2
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- thin film
- film transistor
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- transistor according
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- 125000002294 quinazolinyl group Chemical group N1=C(N=CC2=CC=CC=C12)* 0.000 description 1
- 125000005493 quinolyl group Chemical group 0.000 description 1
- 125000001567 quinoxalinyl group Chemical group N1=C(C=NC2=CC=CC=C12)* 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 229910052704 radon Inorganic materials 0.000 description 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 239000002094 self assembled monolayer Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 125000000475 sulfinyl group Chemical group [*:2]S([*:1])=O 0.000 description 1
- 239000002335 surface treatment layer Substances 0.000 description 1
- 125000001973 tert-pentyl group Chemical group [H]C([H])([H])C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 1
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 description 1
- NLDYACGHTUPAQU-UHFFFAOYSA-N tetracyanoethylene Chemical group N#CC(C#N)=C(C#N)C#N NLDYACGHTUPAQU-UHFFFAOYSA-N 0.000 description 1
- PCCVSPMFGIFTHU-UHFFFAOYSA-N tetracyanoquinodimethane Chemical compound N#CC(C#N)=C1C=CC(=C(C#N)C#N)C=C1 PCCVSPMFGIFTHU-UHFFFAOYSA-N 0.000 description 1
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 125000000335 thiazolyl group Chemical group 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 125000004306 triazinyl group Chemical group 0.000 description 1
- 125000001425 triazolyl group Chemical group 0.000 description 1
- VIFIHLXNOOCGLJ-UHFFFAOYSA-N trichloro(3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-heptadecafluorodecyl)silane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)CC[Si](Cl)(Cl)Cl VIFIHLXNOOCGLJ-UHFFFAOYSA-N 0.000 description 1
- ZOYFEXPFPVDYIS-UHFFFAOYSA-N trichloro(ethyl)silane Chemical compound CC[Si](Cl)(Cl)Cl ZOYFEXPFPVDYIS-UHFFFAOYSA-N 0.000 description 1
- GATGUNJRFUIHOM-UHFFFAOYSA-N trichloro-[3-(1,1,1,2,3,3,3-heptafluoropropan-2-yloxy)propyl]silane Chemical compound FC(F)(F)C(F)(C(F)(F)F)OCCC[Si](Cl)(Cl)Cl GATGUNJRFUIHOM-UHFFFAOYSA-N 0.000 description 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 1
- 125000002889 tridecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- MLXDKRSDUJLNAB-UHFFFAOYSA-N triethoxy(3,3,4,4,5,5,6,6,7,7,8,8,9,9,10,10,10-heptadecafluorodecyl)silane Chemical compound CCO[Si](OCC)(OCC)CCC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F MLXDKRSDUJLNAB-UHFFFAOYSA-N 0.000 description 1
- DENFJSAFJTVPJR-UHFFFAOYSA-N triethoxy(ethyl)silane Chemical compound CCO[Si](CC)(OCC)OCC DENFJSAFJTVPJR-UHFFFAOYSA-N 0.000 description 1
- CPUDPFPXCZDNGI-UHFFFAOYSA-N triethoxy(methyl)silane Chemical compound CCO[Si](C)(OCC)OCC CPUDPFPXCZDNGI-UHFFFAOYSA-N 0.000 description 1
- BJDLPDPRMYAOCM-UHFFFAOYSA-N triethoxy(propan-2-yl)silane Chemical compound CCO[Si](OCC)(OCC)C(C)C BJDLPDPRMYAOCM-UHFFFAOYSA-N 0.000 description 1
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 description 1
- 125000000025 triisopropylsilyl group Chemical group C(C)(C)[Si](C(C)C)(C(C)C)* 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- LGROXJWYRXANBB-UHFFFAOYSA-N trimethoxy(propan-2-yl)silane Chemical compound CO[Si](OC)(OC)C(C)C LGROXJWYRXANBB-UHFFFAOYSA-N 0.000 description 1
- FIONWRDVKJFHRC-UHFFFAOYSA-N trimethyl(2-phenylethenyl)silane Chemical compound C[Si](C)(C)C=CC1=CC=CC=C1 FIONWRDVKJFHRC-UHFFFAOYSA-N 0.000 description 1
- 239000005051 trimethylchlorosilane Substances 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/40—Organosilicon compounds, e.g. TIPS pentacene
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/655—Aromatic compounds comprising a hetero atom comprising only sulfur as heteroatom
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Formation Of Insulating Films (AREA)
- Thin Film Transistor (AREA)
Description
3、4 表面層
6 ソース電極
6’ ドレイン電極
7 有機半導体層
8 ゲート絶縁層
9 ゲート電極
下記式で表されるポリシロキサン類、
下記式で表されるトリメチルシリルスチレン系ポリマー、
下記式で表されるポリ(p−ジシラニルフェニレン)、
下記式で表されるポリシルセスキオキサンを主骨格とするポリマーなどがある。
図1に、基体上に設けられた珪素を含有する層を、酸素プラズマ処理等、酸化処理することで酸化珪素を含有する層とした本発明に係わるゲート絶縁層を用いる有機薄膜トランジスタの作製プロセスを好ましい実施の形態の1例により示す。
下引き層上に下記組成の光感応性樹脂組成液1を塗布し、100℃にて1分間乾燥させることで、厚さ2μmの光感応性樹脂層を形成した後、発振波長830nm、出力100mWの半導体レーザーで200mJ/cm2のエネルギー密度でゲートバスラインおよびゲート電極のパターンを露光し、アルカリ水溶液で現像してレジスト像を得た。
色素A 7部
ノボラック樹脂(フェノールとm−、p−混合クレゾールとホルムアルデヒドを共縮合させたノボラック樹脂(Mw=4000、フェノール/m−クレゾール/p−クレゾールのモル比がそれぞれ5/57/38)) 90部
クリスタルバイオレット 3部
プロピレングリコールモノメチルエーテル 1000部
ゲート電極9を形成した後、基板をよく洗浄し、10質量%燐酸アンモニウム水溶液中で2分間、30Vの低電圧電源から供給される直流を用いて、陽極酸化皮膜の厚さが120nmになるまで陽極酸化を行った。よく洗浄した後に、1気圧、100℃の飽和した蒸気チャンバーの中で、蒸気封孔処理を施す。このようにして陽極酸化被膜を有するゲート電極を下引き処理したポリエーテルスルホン樹脂フィルム上に作製した。
次いで、珪素を有するポリマー、例えばポリ(p−トリメチルシリルスチレン)のTHF(テトラヒドロフラン)溶液を乾燥膜厚として例えば500nmとなるよう塗布してゲート絶縁層8を形成する(図1(2))。
不活性ガス:ヘリウム 98.25体積%
反応性ガス:酸素ガス 1.75体積%
からなるガスを使用し酸素プラズマ処理を行う。
(ヘプタデカフルオロ−1,1,2,2−テトラヒドロデシル)トリエトキシシラン
(3,3,3−トリフルオロプロピル)トリメトキシシラン(信越化学製KBM7103)
ビス(トリフルオロプロピル)テトラメチルジシラザン
(3−ヘプタフルオロイソプロポキシ)プロピルトリクロロシラン
ペンタフルオロフェニルトリエトキシシラン
ペンタフルオロフェニルジメチルクロロシラン
1,8−ビス(トリクロロシリルエチル)ヘキサデカフルオロオクタン
これらの化合物は、信越化学、アヅマックス等から製品として入手可能である。
有機薄膜トランジスタの場合、有機半導体薄膜(「有機半導体層」ともいう。)を構成する有機半導体材料としては、後述する種々の縮合多環芳香族化合物や共役系化合物が適用可能である。
一般式(OSC2)において、R7またはR8で表される置換基は、般式(OSC1)においてR1〜R6で各々表される置換基と同義である。また、Z1またはZ2で表される芳香族炭化水素基、芳香族複素環基は、上記R1〜R6で各々表される置換基として記載されている芳香族炭化水素基、芳香族複素環基と各々同義である。
上記一般式(SG1)において、R9〜R11で表される置換基は、前記一般式(1)におけるR1〜R3で表される置換基と同義である。
本発明の薄膜トランジスタ素子において、ソース電極またはドレイン電極は、前記無電解メッキ法により形成されるが、ソース電極およびドレイン電極の一つはゲート電極と共に無電解メッキによらない電極であってよい。その場合、電極は公知の方法、公知の電極材料にて形成される。電極材料としては導電性材料であれば特に限定されず、白金、金、銀、ニッケル、クロム、銅、鉄、錫、アンチモン鉛、タンタル、インジウム、パラジウム、テルル、レニウム、イリジウム、アルミニウム、ルテニウム、ゲルマニウム、モリブデン、タングステン、酸化スズ・アンチモン、酸化インジウム・スズ(ITO)、フッ素ドープ酸化亜鉛、亜鉛、炭素、グラファイト、グラッシーカーボン、銀ペーストおよびカーボンペースト、リチウム、ベリリウム、ナトリウム、マグネシウム、カリウム、カルシウム、スカンジウム、チタン、マンガン、ジルコニウム、ガリウム、ニオブ、ナトリウム、ナトリウム−カリウム合金、マグネシウム、リチウム、アルミニウム、マグネシウム/銅混合物、マグネシウム/銀混合物、マグネシウム/アルミニウム混合物、マグネシウム/インジウム混合物、アルミニウム/酸化アルミニウム混合物、リチウム/アルミニウム混合物等が用いられる。あるいはドーピング等で導電率を向上させた公知の導電性ポリマー、例えば導電性ポリアニリン、導電性ポリピロール、導電性ポリチオフェン(ポリエチレンジオキシチオフェンとポリスチレンスルホン酸の錯体など)も好適に用いられる。
基体を構成する支持体材料としては、種々の材料が利用可能であり、例えば、ガラス、石英、酸化アルミニウム、サファイア、チッ化珪素、炭化珪素などのセラミック基板、シリコン、ゲルマニウム、ガリウム砒素、ガリウム燐、ガリウム窒素など半導体基板、紙、不織布などを用いることができるが、本発明において支持体は樹脂からなることが好ましく、例えばプラスチックフィルムシートを用いることができる。プラスチックフィルムとしては、例えばポリエチレンテレフタレート(PET)、ポリエチレンナフタレート(PEN)、ポリエーテルスルホン(PES)、ポリエーテルイミド、ポリエーテルエーテルケトン、ポリフェニレンスルフィド、ポリアリレート、ポリイミド、ボリカーボネート(PC)、セルローストリアセテート(TAC)、セルロースアセテートプロピオネート(CAP)等からなるフィルム等が挙げられる。プラスチックフィルムを用いることで、ガラス基板を用いる場合に比べて軽量化を図ることができ、可搬性を高めることができるとともに、衝撃に対する耐性を向上できる。
図1に、本発明に係わるボトムゲート、ボトムコンタクト型有機薄膜トランジスタの作製例を示す。
基体1として、ポリエーテルスルホン樹脂フィルム(200μm)を用い、該フィルム上に、先ず50W/m2/分の条件でコロナ放電処理を施した。
ジペンタエリスリトールヘキサアクリレート単量体 60g
ジペンタエリスリトールヘキサアクリレート2量体 20g
ジペンタエリスリトールヘキサアクリレート3量体以上の成分 20g
ジエトキシベンゾフェノンUV開始剤 2g
シリコーン系界面活性剤 1g
メチルエチルケトン 75g
メチルプロピレングリコール 75g
更に、その層の上に下記条件で連続的に大気圧プラズマ処理して厚さ50nmの酸化ケイ素膜を設け、これらの層を下引き層とした(図1では省略した)。大気圧プラズマ処理装置は、特開2003−303520号公報に記載の図6に準じた装置を用いた。
(使用ガス)
不活性ガス:ヘリウム 98.25体積%
反応性ガス:酸素ガス 1.5体積%
反応性ガス:テトラエトキシシラン蒸気(ヘリウムガスにてバブリング)
0.25体積%
(放電条件)
高周波電源:13.56MHz
放電出力:10W/cm2。
電極は、冷却水による冷却手段を有するステンレス製ジャケットロール母材に対して、セラミック溶射によるアルミナを1mm被覆し、その後、テトラメトキシシランを酢酸エチルで希釈した溶液を塗布乾燥後、紫外線照射により封孔処理を行い、表面を平滑にしてRmaxを5μmとした誘電体(比誘電率10)を有するロール電極であり、アースされている。一方、印加電極としては、中空の角型のステンレスパイプに対し上記同様の誘電体を同条件にて被覆した。
次いで、ゲート電極を形成する。
色素A 7部
ノボラック樹脂(フェノールとm−、p−混合クレゾールとホルムアルデヒドを共縮合させたノボラック樹脂(Mw=4000、フェノール/m−クレゾール/p−クレゾールのモル比がそれぞれ5/57/38)) 90部
クリスタルバイオレット 3部
プロピレングリコールモノメチルエーテル 1000部
次いで、以下の陽極酸化皮膜形成工程により、平滑化、絶縁性向上のための補助的絶縁膜として、ゲート電極9上に陽極酸化被膜を形成した(図1では省略。)。
ゲート電極を形成した後、基板をよく洗浄し、10質量%燐酸アンモニウム水溶液中で2分間、30Vの低電圧電源から供給される直流を用いて、陽極酸化皮膜の厚さが120nmになるまで陽極酸化を行った。よく洗浄した後に、1気圧、100℃の飽和した蒸気チャンバーの中で、蒸気封孔処理を施した。このようにして陽極酸化被膜を有するゲート電極を下引き処理したポリエーテルスルホン樹脂フィルム上に作製した。
次いで、珪素を有するポリマー(ポリ(p−トリメチルシリルスチレン):重合度n=1000)のトルエン3%溶液を乾燥膜厚で400nmとなるよう塗布してゲート絶縁層8を形成した(図1(2))。
不活性ガス:窒素 98.25体積%
反応性ガス:酸素ガス 1.75体積%
以上により、支持体上にゲート電極、ゲート絶縁層8が形成された基体を作製した。表面層が酸素を含むプラズマに晒されたことでゲート絶縁層は酸化珪素を含む厚さ10nmの表面層3が形成された(図1(3))。表面層の酸化珪素はXPSによるSi2pの結合エネルギーの増加から確認された。装置はアルバックファイ社製Quantera SXMを用いた。
ゲート絶縁膜表面の酸化処理を行わなかった以外は、実施例1と全く同様に素子を作製した。
基体1として、ポリエーテルスルホン樹脂フィルム(200μm)を用い、下記絶縁層まで実施例1と同じに行った。
次いで、珪素を有するポリマー(ポリ(p−トリメチルシリルスチレン):重合度n=1000)のトルエン3%溶液を乾燥膜厚で400nmとなるよう塗布してゲート絶縁層8を形成した(図2(2))。
不活性ガス:窒素 98.25体積%
反応性ガス:酸素ガス 1.75体積%
以上により、支持体上にゲート電極、ゲート絶縁層8が形成された基体を作製した。表面層が酸素を含むプラズマに晒されたことでゲート絶縁層は、酸化珪素を含む厚さ約10nmの表面層3を有している(図2(3))。表面層の酸化珪素はXPSによるSi2pの結合エネルギーの増加から形成が確認された。装置はアルバックファイ社製Quantera SXMを用いた。
オクチルトリエトキシシランを原料ガスとして下記条件で連続的に、表面層3上を20秒間大気圧プラズマ処理した。大気圧プラズマ処理装置は、特開2003−303520号公報に記載の図6に準じた装置を用いた。
〔使用ガス〕
不活性ガス:窒素 98.25体積%
原料ガス:オクチルトリエトキシシラン 1.75体積%
〔放電条件〕
高周波電源:13.56MHz
放電出力:5W/cm2。
次に、ソース、ドレイン電極のパターンに対応した光透過部を有する、石英基板上のクロムマスクMを密着させ、これを介して、低圧水銀灯を用いて紫外光(波長185nm、および254nm)を照射した(図2(5))。
次に、露出されたソース電極、ドレイン電極パターン状に液状電極材料5である銀ナノ粒子インク(平均粒子径8nmの銀微粒子のトルエン分散物)をインクジェット法により堆積後、180℃で30分間加熱して乾燥した(図2(7)〜(8))。乾燥と共に親水化領域に銀ナノ粒子インクは集まり親水化領域上にソース電極6、ドレイン電極6’がそれぞれ位置精度よく形成された(厚み100nm)。
珪素を有するポリマーを、ポリジメチルシロキサン(重量平均分子量Mw=100万)に変更した以外は実施例2と全く同様に素子を作製した。
実施例2にて、ソース・ドレイン電極を形成した後、UVオゾン洗浄を行い、電極および表面層の表面を洗浄した。さらに、ペンタフルオロベンゼンチオールの0.1%エタノール溶液に基板ごと1分間浸漬し、エタノールでよく洗浄した。窒素ブローにより乾燥させた後、ヘキサメチルジシラザンを、スピンコートで塗布し、大気中で乾燥させた。
オクチルトリクロロシランによる表面処理まで実施例2と同じに行った。(図3(4))
次に、半導体のパターンに対応した光透過部を有する、石英基板上のクロムマスクMを密着させ、これを介して、低圧水銀灯を用いて紫外光(波長185nm、および254nm)を照射した(図3(5))
これにより、オクチルトリクロロシランにより表面処理された表面のうち半導体に対応する部分の表面の単分子膜を分解した。エタノールで洗浄して分解物を除去し、半導体ソース、ドレイン電極に対応するパターンに下引き層表面を露出させた(図3(6))
次に、半導体材料として、OSC2−1を用いて、有機半導体層を形成した。即ち、OSC2−1のトルエン溶液(0.1質量%)を調製し、上記の基板を浸漬してディップコートし、大気中で自然乾燥させると、半導体の露光パターンに対応する幅10μm、長さ50μm、膜厚40nmの有機半導体層7が形成された(図3(7)、(8))。
Claims (15)
- 基体上に設けられた珪素を含有する層を、酸化処理として酸素プラズマ処理又はUVオゾン処理することにより、表面に酸化珪素を含有する層を形成した層を、ゲート絶縁膜として用いることを特徴とする薄膜トランジスタの製造方法。
- 前記酸化処理が、大気圧プラズマ法による酸素プラズマ処理であることを特徴とする請求項1記載の薄膜トランジスタの製造方法。
- 基体上にゲート電極を形成した後、珪素を含有する層を設けることを特徴とする請求項1又は2記載の薄膜トランジスタの製造方法。
- 珪素を含有する層が、塗布により形成されることを特徴とする請求項1〜3の何れかに記載の薄膜トランジスタの製造方法。
- 珪素を含有する層が、珪素原子を有するポリマーを含む層であることを特徴とする請求項1〜4の何れかに記載の薄膜トランジスタの製造方法。
- 珪素を含有する層が、珪素原子を含有するポリマーの層からなることを特徴とする請求項1〜5の何れかに記載の薄膜トランジスタの製造方法。
- 半導体薄膜を形成する工程を含むことを特徴とする請求項1〜6の何れかに記載の薄膜トランジスタの製造方法。
- 表面処理材料のパターンにより、ゲート絶縁膜表面の表面エネルギーを変化させることを特徴とする請求項1〜7の何れかに記載の薄膜トランジスタの製造方法。
- 前記表面処理材料のパターンにより、ゲート絶縁膜表面の表面エネルギーを低下させることを特徴とする請求項8記載の薄膜トランジスタの製造方法。
- 前記表面処理材料がシランカップリング剤またはチタンカップリング剤であることを特徴とする請求項8又は9記載の薄膜トランジスタの製造方法。
- 前記表面処理材料のパターンが形成された表面に、溶液を供給した後、該溶液のキャスト膜のパターンを形成することを特徴とする請求項8〜10の何れかに記載の薄膜トランジスタの製造方法。
- 前記キャスト膜が、電極であることを特徴とする請求項11記載の薄膜トランジスタの製造方法。
- 前記キャスト膜が、有機半導体層であることを特徴とする請求項11記載の薄膜トランジスタの製造方法。
- 前記酸化珪素を含有する層への表面処理材料による表面処理方法が、大気圧プラズマ法によることを特徴とする請求項8〜13の何れかに記載の薄膜トランジスタの製造方法。
- 前記表面処理材料のパターン化が、波長300nm以下の紫外線照射によるものであることを特徴とする請求項8〜14のいずれかに記載の薄膜トランジスタの製造方法。
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