JP5271456B2 - プラズマ処理装置及びプラズマ処理方法 - Google Patents
プラズマ処理装置及びプラズマ処理方法 Download PDFInfo
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- 238000012545 processing Methods 0.000 title claims description 37
- 238000003672 processing method Methods 0.000 title claims description 5
- 239000007789 gas Substances 0.000 claims description 105
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 50
- 239000005751 Copper oxide Substances 0.000 claims description 50
- 229910000431 copper oxide Inorganic materials 0.000 claims description 50
- 239000011261 inert gas Substances 0.000 claims description 27
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000009616 inductively coupled plasma Methods 0.000 claims description 10
- 239000003058 plasma substitute Substances 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 claims 2
- 239000010949 copper Substances 0.000 description 30
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 28
- 229910052802 copper Inorganic materials 0.000 description 28
- 238000000034 method Methods 0.000 description 16
- 238000006243 chemical reaction Methods 0.000 description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 229910000679 solder Inorganic materials 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000010405 reoxidation reaction Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 238000011946 reduction process Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VMQMZMRVKUZKQL-UHFFFAOYSA-N Cu+ Chemical compound [Cu+] VMQMZMRVKUZKQL-UHFFFAOYSA-N 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/2465—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated by inductive coupling, e.g. using coiled electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/26—Cleaning or polishing of the conductive pattern
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2240/00—Testing
- H05H2240/10—Testing at atmospheric pressure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/40—Surface treatments
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/09—Treatments involving charged particles
- H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fluid Mechanics (AREA)
- Plasma Technology (AREA)
- ing And Chemical Polishing (AREA)
- Wire Bonding (AREA)
Description
図1に示す本発明の実施の形態に係るプラズマ処理装置1は、微小な大気圧プラズマを高速で照射することにより、対象物2(例えば基板、電子部品等)の銅配線のうちの対象となる部分(例えば基板の銅配線のうちの電極の部分や、電子部品の銅電極(バンプ))から銅酸化膜を還元除去する。つまり、本実施の形態のプラズマ処理装置1は、銅酸化膜を大気圧マイクロプラズマジェットで高速に選択的に還元除去する。
Claims (7)
- 銅酸化膜除去の対象物を保持する保持部と、
第1の不活性ガスの誘導結合型プラズマからなる一次プラズマを吹き出す誘導結合型プラズマ発生部と、第2の不活性ガスと反応性ガスの混合ガス領域と前記一次プラズマとが衝突されることによりプラズマ化した混合ガスから成る二次プラズマを発生するプラズマ展開部とを有し、前記二次プラズマを前記対象物に照射する大気圧プラズマ照射部と、
前記二次プラズマの前記対象物への照射エリアが移動するように、前記保持部と前記大気圧プラズマ照射部とを相対的に移動させる移動部と
を備え、
前記第1及び第2の不活性ガスはArガスであり、前記反応性ガスはH 2 ガスであり、
前記第2の不活性ガスであるArガスと前記反応性ガスであるH 2 ガスの混合ガスのH 2 濃度は、0.5%以上3.0%以下である、プラズマ処理装置。 - 前記混合ガスのH 2 濃度は2.5%である、請求項1に記載のプラズマ処理装置。
- 前記移動部は、前記照射エリアが一定速度で移動するように、前記保持部と前記大気圧プラズマ照射部とを相対的に移動させる、請求項1又は請求項2に記載のプラズマ処理装置。
- 前記移動部は、前記照射エリアが円状又は円弧状に移動するように、前記保持部と前記大気圧プラズマ照射部とを相対的に移動させる、請求項1から請求項3のいずれか1項に記載のプラズマ処理装置。
- 前記移動部は、移動する前記照射エリア間に重なりが生じるように、前記保持部と前記大気圧プラズマ照射部とを相対的に移動させる、請求項1から請求項4のいずれか1項に記載のプラズマ処理装置。
- 前記保持部は前記対象物を加熱する加熱装置を備える、請求項1から請求項5のいずれか1項に記載のプラズマ処理装置。
- 第1の不活性ガスの誘導結合型プラズマからなる一次プラズマを発生させ、発生した一次プラズマを第2の不活性ガスと反応性ガスの混合ガスとが衝突されることによりプラズマ化した混合ガスから成る二次プラズマを発生させ、
前記二次プラズマを照射エリアに対して相対的に移動させつつ対象物の表面の銅酸化膜に照射し、
前記第1及び第2の不活性ガスはArガスであり、前記反応性ガスはH 2 ガスであり、
前記第2の不活性ガスのArガスと前記反応性ガスのH 2 ガスの混合ガスのH 2 濃度は、0.5%以上3.0%以下である、プラズマ処理方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2012542812A JP5271456B2 (ja) | 2010-11-10 | 2011-11-08 | プラズマ処理装置及びプラズマ処理方法 |
Applications Claiming Priority (4)
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JP2010251959 | 2010-11-10 | ||
JP2010251959 | 2010-11-10 | ||
JP2012542812A JP5271456B2 (ja) | 2010-11-10 | 2011-11-08 | プラズマ処理装置及びプラズマ処理方法 |
PCT/JP2011/006240 WO2012063474A1 (ja) | 2010-11-10 | 2011-11-08 | プラズマ処理装置及びプラズマ処理方法 |
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JP5271456B2 true JP5271456B2 (ja) | 2013-08-21 |
JPWO2012063474A1 JPWO2012063474A1 (ja) | 2014-05-12 |
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US (1) | US20130233828A1 (ja) |
JP (1) | JP5271456B2 (ja) |
WO (1) | WO2012063474A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6143440B2 (ja) * | 2012-11-22 | 2017-06-07 | 住重試験検査株式会社 | 半導体装置の製造方法及び基板処理システム |
US11412605B2 (en) * | 2019-06-24 | 2022-08-09 | Evernew Biotech, Inc. | Plasma device including two gas inlets |
JP7530564B2 (ja) | 2020-05-29 | 2024-08-08 | ウシオ電機株式会社 | 還元処理方法 |
WO2022182622A1 (en) * | 2021-02-24 | 2022-09-01 | Acutronic Turbines, Inc. | Plasma ignition and combustion assist system for gas turbine engines |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002110613A (ja) * | 2000-09-26 | 2002-04-12 | Matsushita Electric Works Ltd | プラズマ洗浄装置及びプラズマ洗浄方法 |
JP2002170815A (ja) * | 2000-12-01 | 2002-06-14 | Matsushita Electric Works Ltd | 表面処理装置及び表面処理方法 |
JP2008068263A (ja) * | 2006-09-12 | 2008-03-27 | Matsushita Electric Ind Co Ltd | ウエハ加工方法及び装置 |
WO2009047981A1 (ja) * | 2007-10-09 | 2009-04-16 | Konica Minolta Holdings, Inc. | 薄膜トランジスタの製造方法 |
JP2009131850A (ja) * | 2009-03-13 | 2009-06-18 | Panasonic Electric Works Co Ltd | 接点材料の表面洗浄装置及び接点材料の表面洗浄方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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ATE532203T1 (de) * | 2004-08-27 | 2011-11-15 | Fei Co | Lokalisierte plasmabehandlung |
JP5327147B2 (ja) * | 2009-12-25 | 2013-10-30 | 東京エレクトロン株式会社 | プラズマ処理装置 |
-
2011
- 2011-11-08 WO PCT/JP2011/006240 patent/WO2012063474A1/ja active Application Filing
- 2011-11-08 US US13/884,143 patent/US20130233828A1/en not_active Abandoned
- 2011-11-08 JP JP2012542812A patent/JP5271456B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002110613A (ja) * | 2000-09-26 | 2002-04-12 | Matsushita Electric Works Ltd | プラズマ洗浄装置及びプラズマ洗浄方法 |
JP2002170815A (ja) * | 2000-12-01 | 2002-06-14 | Matsushita Electric Works Ltd | 表面処理装置及び表面処理方法 |
JP2008068263A (ja) * | 2006-09-12 | 2008-03-27 | Matsushita Electric Ind Co Ltd | ウエハ加工方法及び装置 |
WO2009047981A1 (ja) * | 2007-10-09 | 2009-04-16 | Konica Minolta Holdings, Inc. | 薄膜トランジスタの製造方法 |
JP2009131850A (ja) * | 2009-03-13 | 2009-06-18 | Panasonic Electric Works Co Ltd | 接点材料の表面洗浄装置及び接点材料の表面洗浄方法 |
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US20130233828A1 (en) | 2013-09-12 |
WO2012063474A1 (ja) | 2012-05-18 |
JPWO2012063474A1 (ja) | 2014-05-12 |
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