JP5446175B2 - 振動型センサ - Google Patents

振動型センサ Download PDF

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Publication number
JP5446175B2
JP5446175B2 JP2008224371A JP2008224371A JP5446175B2 JP 5446175 B2 JP5446175 B2 JP 5446175B2 JP 2008224371 A JP2008224371 A JP 2008224371A JP 2008224371 A JP2008224371 A JP 2008224371A JP 5446175 B2 JP5446175 B2 JP 5446175B2
Authority
JP
Japan
Prior art keywords
base
vibrating
extension
portions
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008224371A
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English (en)
Japanese (ja)
Other versions
JP2010060347A5 (enExample
JP2010060347A (ja
Inventor
竜太 西澤
想 市川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2008224371A priority Critical patent/JP5446175B2/ja
Publication of JP2010060347A publication Critical patent/JP2010060347A/ja
Publication of JP2010060347A5 publication Critical patent/JP2010060347A5/ja
Application granted granted Critical
Publication of JP5446175B2 publication Critical patent/JP5446175B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2008224371A 2008-09-02 2008-09-02 振動型センサ Expired - Fee Related JP5446175B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008224371A JP5446175B2 (ja) 2008-09-02 2008-09-02 振動型センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008224371A JP5446175B2 (ja) 2008-09-02 2008-09-02 振動型センサ

Publications (3)

Publication Number Publication Date
JP2010060347A JP2010060347A (ja) 2010-03-18
JP2010060347A5 JP2010060347A5 (enExample) 2011-10-27
JP5446175B2 true JP5446175B2 (ja) 2014-03-19

Family

ID=42187309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008224371A Expired - Fee Related JP5446175B2 (ja) 2008-09-02 2008-09-02 振動型センサ

Country Status (1)

Country Link
JP (1) JP5446175B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5896114B2 (ja) * 2011-10-31 2016-03-30 セイコーエプソン株式会社 物理量検出デバイス、物理量検出器、および電子機器
JP2013164278A (ja) * 2012-02-09 2013-08-22 Seiko Epson Corp 物理量検出器、物理量検出デバイス、電子機器
FR2992066B1 (fr) * 2012-06-15 2014-07-11 Commissariat Energie Atomique Capteur de champ magnetique a force de laplace

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2639527B2 (ja) * 1987-05-15 1997-08-13 東洋通信機株式会社 双ビーム圧電共振子の構造
JPH0744418B2 (ja) * 1988-08-31 1995-05-15 株式会社村田製作所 圧電振動子
US5113698A (en) * 1990-02-26 1992-05-19 Sundstrand Data Control, Inc. Vibrating beam transducer drive system
FR2723638B1 (fr) * 1994-08-10 1996-10-18 Sagem Transducteur force-frequence a poutres vibrantes
JP2006332727A (ja) * 2005-05-23 2006-12-07 Seiko Epson Corp 圧電デバイス
JP2007263775A (ja) * 2006-03-29 2007-10-11 Nippon Dempa Kogyo Co Ltd 角速度センサ素子

Also Published As

Publication number Publication date
JP2010060347A (ja) 2010-03-18

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