JP5436099B2 - 液体吐出ヘッド用基板の製造方法、液体吐出ヘッド用基板及び液体吐出ヘッド - Google Patents

液体吐出ヘッド用基板の製造方法、液体吐出ヘッド用基板及び液体吐出ヘッド Download PDF

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Publication number
JP5436099B2
JP5436099B2 JP2009199897A JP2009199897A JP5436099B2 JP 5436099 B2 JP5436099 B2 JP 5436099B2 JP 2009199897 A JP2009199897 A JP 2009199897A JP 2009199897 A JP2009199897 A JP 2009199897A JP 5436099 B2 JP5436099 B2 JP 5436099B2
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Japan
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substrate
wiring
liquid discharge
discharge head
conductive
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JP2009199897A
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English (en)
Japanese (ja)
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JP2010076441A5 (enExample
JP2010076441A (ja
Inventor
好一 小俣
良行 今仲
孝明 山口
勇治 田丸
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Canon Inc
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Canon Inc
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/05—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers produced by the application of heat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04528—Control methods or devices therefor, e.g. driver circuits, control circuits aiming at warming up the head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04531—Control methods or devices therefor, e.g. driver circuits, control circuits controlling a head having a heater in the manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04543—Block driving
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0458—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on heating elements forming bubbles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2009199897A 2008-08-29 2009-08-31 液体吐出ヘッド用基板の製造方法、液体吐出ヘッド用基板及び液体吐出ヘッド Active JP5436099B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009199897A JP5436099B2 (ja) 2008-08-29 2009-08-31 液体吐出ヘッド用基板の製造方法、液体吐出ヘッド用基板及び液体吐出ヘッド

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008221494 2008-08-29
JP2008221494 2008-08-29
JP2009199897A JP5436099B2 (ja) 2008-08-29 2009-08-31 液体吐出ヘッド用基板の製造方法、液体吐出ヘッド用基板及び液体吐出ヘッド

Publications (3)

Publication Number Publication Date
JP2010076441A JP2010076441A (ja) 2010-04-08
JP2010076441A5 JP2010076441A5 (enExample) 2012-10-11
JP5436099B2 true JP5436099B2 (ja) 2014-03-05

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JP2009199897A Active JP5436099B2 (ja) 2008-08-29 2009-08-31 液体吐出ヘッド用基板の製造方法、液体吐出ヘッド用基板及び液体吐出ヘッド

Country Status (6)

Country Link
US (1) US9242460B2 (enExample)
EP (1) EP2159059B1 (enExample)
JP (1) JP5436099B2 (enExample)
KR (1) KR101313946B1 (enExample)
CN (1) CN101659154B (enExample)
RU (1) RU2414354C1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101313946B1 (ko) * 2008-08-29 2013-10-01 캐논 가부시끼가이샤 액체 토출 헤드용 기판, 그 제조 방법 및 액체 토출 헤드
JP6249682B2 (ja) * 2013-08-27 2017-12-20 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、および、記録装置。
JP6150673B2 (ja) * 2013-08-27 2017-06-21 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、および、記録装置。
JP6833363B2 (ja) * 2016-06-30 2021-02-24 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、及び記録装置
JP2019010769A (ja) * 2017-06-29 2019-01-24 キヤノン株式会社 液体吐出ヘッド用基板および液体吐出ヘッド
JP7486259B2 (ja) 2020-01-27 2024-05-17 キヤノン株式会社 記録素子基板、記録ヘッド及び記録装置
JP7631053B2 (ja) * 2021-03-18 2025-02-18 キヤノン株式会社 電気配線部材および液体吐出ヘッド
JP2024081345A (ja) * 2022-12-06 2024-06-18 キヤノン株式会社 ヘッド用基板

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US4847630A (en) * 1987-12-17 1989-07-11 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
JPH035151A (ja) 1989-06-02 1991-01-10 Canon Inc 液体噴射記録ヘッド
JP2815959B2 (ja) * 1990-02-19 1998-10-27 キヤノン株式会社 液体噴射記録装置
JPH03246046A (ja) 1990-02-26 1991-11-01 Canon Inc 記録ヘッド，記録ヘッド用基板およびインクジェット記録装置
JP3143549B2 (ja) 1993-09-08 2001-03-07 キヤノン株式会社 熱記録ヘッド用基体、該基体を用いたインクジェット記録ヘッド、インクジェットカートリッジ、インクジェット記録装置、及び記録ヘッドの駆動方法
ATE194553T1 (de) * 1993-12-28 2000-07-15 Canon Kk Substrat für einen tintenstrahlkopf, tintenstrahlkopf und tintenstrahlgerät
JPH0938919A (ja) * 1995-08-03 1997-02-10 Dantoo Kk ノンスリップタイルとその製造方法
JPH10774A (ja) * 1996-06-14 1998-01-06 Canon Inc インクジェット記録ヘッド用基板及びこれを備えたインクジェット記録ヘッド
JP3706715B2 (ja) * 1996-07-09 2005-10-19 キヤノン株式会社 液体吐出ヘッド，液体吐出方法，ヘッドカートリッジ，液体吐出装置，プリントシステムならびに回復処理方法
JPH10109421A (ja) * 1996-10-08 1998-04-28 Canon Inc 液体噴射記録ヘッド用発熱基板
JPH11227209A (ja) * 1997-12-05 1999-08-24 Canon Inc 液体吐出ヘッド、ヘッドカートリッジおよび液体吐出装置
JP2003145765A (ja) * 2001-11-15 2003-05-21 Canon Inc 記録装置およびその吐出方法
KR100425328B1 (ko) * 2002-06-20 2004-03-30 삼성전자주식회사 잉크 젯 프린트 헤드 및 그 제조방법
TWI246462B (en) * 2003-06-10 2006-01-01 Canon Kk Ink-jet printhead substrate, driving control method, ink-jet printhead and ink-jet printing apparatus
KR100757861B1 (ko) * 2004-07-21 2007-09-11 삼성전자주식회사 잉크젯 헤드 기판, 잉크젯 헤드 및 잉크젯 헤드 기판의제조방법.
JP4669278B2 (ja) * 2004-12-27 2011-04-13 キヤノン株式会社 記録ヘッド用素子基板、記録ヘッドおよび記録装置
JP2006198884A (ja) * 2005-01-20 2006-08-03 Canon Inc インクジェット吐出ヘッド用基板
JP2006224443A (ja) * 2005-02-17 2006-08-31 Canon Inc インクジェット記録ヘッド、記録装置、および記録方法
JP4574385B2 (ja) * 2005-02-17 2010-11-04 キヤノン株式会社 インクジェット記録ヘッドおよび記録装置
JP5025345B2 (ja) * 2007-06-19 2012-09-12 キヤノン株式会社 インクジェット記録ヘッドおよびインクジェット記録装置
KR101313946B1 (ko) * 2008-08-29 2013-10-01 캐논 가부시끼가이샤 액체 토출 헤드용 기판, 그 제조 방법 및 액체 토출 헤드
JP5038460B2 (ja) * 2009-05-08 2012-10-03 キヤノン株式会社 液体吐出ヘッド

Also Published As

Publication number Publication date
CN101659154A (zh) 2010-03-03
CN101659154B (zh) 2013-03-27
US20100053278A1 (en) 2010-03-04
RU2414354C1 (ru) 2011-03-20
EP2159059B1 (en) 2014-04-02
KR101313946B1 (ko) 2013-10-01
KR20100026998A (ko) 2010-03-10
EP2159059A1 (en) 2010-03-03
US9242460B2 (en) 2016-01-26
JP2010076441A (ja) 2010-04-08

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