CN101659154B - 液体排出头基板及其制造方法和液体排出头 - Google Patents

液体排出头基板及其制造方法和液体排出头 Download PDF

Info

Publication number
CN101659154B
CN101659154B CN2009101696902A CN200910169690A CN101659154B CN 101659154 B CN101659154 B CN 101659154B CN 2009101696902 A CN2009101696902 A CN 2009101696902A CN 200910169690 A CN200910169690 A CN 200910169690A CN 101659154 B CN101659154 B CN 101659154B
Authority
CN
China
Prior art keywords
heater
liquid
substrate
discharge
conductive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2009101696902A
Other languages
English (en)
Chinese (zh)
Other versions
CN101659154A (zh
Inventor
小俣好一
今仲良行
山口孝明
田丸勇治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN101659154A publication Critical patent/CN101659154A/zh
Application granted granted Critical
Publication of CN101659154B publication Critical patent/CN101659154B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14072Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/05Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers produced by the application of heat
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04528Control methods or devices therefor, e.g. driver circuits, control circuits aiming at warming up the head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04531Control methods or devices therefor, e.g. driver circuits, control circuits controlling a head having a heater in the manifold
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04543Block driving
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0458Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on heating elements forming bubbles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/17Ink jet characterised by ink handling
    • B41J2/175Ink supply systems ; Circuit parts therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN2009101696902A 2008-08-29 2009-08-31 液体排出头基板及其制造方法和液体排出头 Active CN101659154B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008221494 2008-08-29
JP2008221494 2008-08-29
JP2008-221494 2008-08-29

Publications (2)

Publication Number Publication Date
CN101659154A CN101659154A (zh) 2010-03-03
CN101659154B true CN101659154B (zh) 2013-03-27

Family

ID=41227563

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009101696902A Active CN101659154B (zh) 2008-08-29 2009-08-31 液体排出头基板及其制造方法和液体排出头

Country Status (6)

Country Link
US (1) US9242460B2 (enExample)
EP (1) EP2159059B1 (enExample)
JP (1) JP5436099B2 (enExample)
KR (1) KR101313946B1 (enExample)
CN (1) CN101659154B (enExample)
RU (1) RU2414354C1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101313946B1 (ko) * 2008-08-29 2013-10-01 캐논 가부시끼가이샤 액체 토출 헤드용 기판, 그 제조 방법 및 액체 토출 헤드
JP6249682B2 (ja) * 2013-08-27 2017-12-20 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、および、記録装置。
JP6150673B2 (ja) * 2013-08-27 2017-06-21 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、および、記録装置。
JP6833363B2 (ja) * 2016-06-30 2021-02-24 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、及び記録装置
JP2019010769A (ja) * 2017-06-29 2019-01-24 キヤノン株式会社 液体吐出ヘッド用基板および液体吐出ヘッド
JP7486259B2 (ja) 2020-01-27 2024-05-17 キヤノン株式会社 記録素子基板、記録ヘッド及び記録装置
JP7631053B2 (ja) * 2021-03-18 2025-02-18 キヤノン株式会社 電気配線部材および液体吐出ヘッド
JP2024081345A (ja) * 2022-12-06 2024-06-18 キヤノン株式会社 ヘッド用基板

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1104151A (zh) * 1993-09-08 1995-06-28 佳能株式会社 热记录头的基底,记录头,记录设备和驱动记录头的方法
US6315396B1 (en) * 1996-06-14 2001-11-13 Canon Kabushiki Kaisha Ink jet recording head and substrate
CN1724257A (zh) * 2004-07-21 2006-01-25 三星电子株式会社 喷墨头衬底、喷墨头及制造喷墨头衬底的方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4847630A (en) * 1987-12-17 1989-07-11 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
JPH035151A (ja) 1989-06-02 1991-01-10 Canon Inc 液体噴射記録ヘッド
JP2815959B2 (ja) * 1990-02-19 1998-10-27 キヤノン株式会社 液体噴射記録装置
JPH03246046A (ja) 1990-02-26 1991-11-01 Canon Inc 記録ヘッド,記録ヘッド用基板およびインクジェット記録装置
ATE194553T1 (de) * 1993-12-28 2000-07-15 Canon Kk Substrat für einen tintenstrahlkopf, tintenstrahlkopf und tintenstrahlgerät
JPH0938919A (ja) * 1995-08-03 1997-02-10 Dantoo Kk ノンスリップタイルとその製造方法
JP3706715B2 (ja) * 1996-07-09 2005-10-19 キヤノン株式会社 液体吐出ヘッド,液体吐出方法,ヘッドカートリッジ,液体吐出装置,プリントシステムならびに回復処理方法
JPH10109421A (ja) * 1996-10-08 1998-04-28 Canon Inc 液体噴射記録ヘッド用発熱基板
JPH11227209A (ja) * 1997-12-05 1999-08-24 Canon Inc 液体吐出ヘッド、ヘッドカートリッジおよび液体吐出装置
JP2003145765A (ja) * 2001-11-15 2003-05-21 Canon Inc 記録装置およびその吐出方法
KR100425328B1 (ko) * 2002-06-20 2004-03-30 삼성전자주식회사 잉크 젯 프린트 헤드 및 그 제조방법
TWI246462B (en) * 2003-06-10 2006-01-01 Canon Kk Ink-jet printhead substrate, driving control method, ink-jet printhead and ink-jet printing apparatus
JP4669278B2 (ja) * 2004-12-27 2011-04-13 キヤノン株式会社 記録ヘッド用素子基板、記録ヘッドおよび記録装置
JP2006198884A (ja) * 2005-01-20 2006-08-03 Canon Inc インクジェット吐出ヘッド用基板
JP2006224443A (ja) * 2005-02-17 2006-08-31 Canon Inc インクジェット記録ヘッド、記録装置、および記録方法
JP4574385B2 (ja) * 2005-02-17 2010-11-04 キヤノン株式会社 インクジェット記録ヘッドおよび記録装置
JP5025345B2 (ja) * 2007-06-19 2012-09-12 キヤノン株式会社 インクジェット記録ヘッドおよびインクジェット記録装置
KR101313946B1 (ko) * 2008-08-29 2013-10-01 캐논 가부시끼가이샤 액체 토출 헤드용 기판, 그 제조 방법 및 액체 토출 헤드
JP5038460B2 (ja) * 2009-05-08 2012-10-03 キヤノン株式会社 液体吐出ヘッド

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1104151A (zh) * 1993-09-08 1995-06-28 佳能株式会社 热记录头的基底,记录头,记录设备和驱动记录头的方法
US6315396B1 (en) * 1996-06-14 2001-11-13 Canon Kabushiki Kaisha Ink jet recording head and substrate
CN1724257A (zh) * 2004-07-21 2006-01-25 三星电子株式会社 喷墨头衬底、喷墨头及制造喷墨头衬底的方法

Also Published As

Publication number Publication date
CN101659154A (zh) 2010-03-03
US20100053278A1 (en) 2010-03-04
RU2414354C1 (ru) 2011-03-20
EP2159059B1 (en) 2014-04-02
KR101313946B1 (ko) 2013-10-01
KR20100026998A (ko) 2010-03-10
EP2159059A1 (en) 2010-03-03
US9242460B2 (en) 2016-01-26
JP2010076441A (ja) 2010-04-08
JP5436099B2 (ja) 2014-03-05

Similar Documents

Publication Publication Date Title
CN101659154B (zh) 液体排出头基板及其制造方法和液体排出头
US5635968A (en) Thermal inkjet printer printhead with offset heater resistors
EP0532877B1 (en) Recording apparatus, recording head and substrate therefor
US7909423B2 (en) Ink jet recording head
US9327499B2 (en) Liquid ejection head and substrate
US20070229566A1 (en) Liquid discharge head and liquid discharge apparatus using liquid discharge head
US8478085B2 (en) Inkjet head chip and inkjet print head using the same
US8449079B2 (en) Fluid ejection device having first and second resistors
EP3470228B1 (en) Element substrate, manufacturing method thereof, printhead, and printing apparatus
US6517195B1 (en) Ink jet head with an integrated charging control circuit
US20040085405A1 (en) Ink-jet printhead
US8246147B2 (en) Inkjet printhead substrate, method for manufacturing inkjet printhead substrate, inkjet print head, and inkjet recording apparatus
JP2006142823A (ja) 液滴イジェクタ及び液滴イジェクタ形成方法
US20080129782A1 (en) Element substrate, printhead, head cartridge, and printing apparatus
US20190001677A1 (en) Liquid ejection head substrate and liquid ejection head
EP2153996B1 (en) Thermal inkjet printhead and method of driving same
JP2011505272A (ja) 電気的に絶縁されるプリントヘッドダイ接地ネットワークをフレキシブル回路で電気的に接続する方法
US20120162318A1 (en) Liquid discharge head
JP2007320077A (ja) プリントヘッドアセンブリ
SE527852C2 (sv) Bläckstrålehuvud, bläckstrålehuvudmodul och metod för tillverkning av densamma
EP3582972B1 (en) Method of manufacturing a liquid discharge head
CN107443908A (zh) 元件基板、打印头和打印设备
US5946013A (en) Ink jet head having a protective layer with a controlled argon content
JP2008105224A (ja) インクジェット記録用基板及び該基板を備えた記録ヘッド及び記録装置
JPH08267748A (ja) インクジェットヘッド及びその製造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant