JP5434772B2 - 接合方法 - Google Patents

接合方法 Download PDF

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Publication number
JP5434772B2
JP5434772B2 JP2010102354A JP2010102354A JP5434772B2 JP 5434772 B2 JP5434772 B2 JP 5434772B2 JP 2010102354 A JP2010102354 A JP 2010102354A JP 2010102354 A JP2010102354 A JP 2010102354A JP 5434772 B2 JP5434772 B2 JP 5434772B2
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Japan
Prior art keywords
bonding
base material
bonding film
film
energy
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Expired - Fee Related
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JP2010102354A
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English (en)
Japanese (ja)
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JP2010184500A5 (enrdf_load_stackoverflow
JP2010184500A (ja
Inventor
隆智 山本
充 佐藤
慎太郎 足助
義明 森
一博 五味
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2010102354A priority Critical patent/JP5434772B2/ja
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Publication of JP2010184500A5 publication Critical patent/JP2010184500A5/ja
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JP2010102354A 2010-04-27 2010-04-27 接合方法 Expired - Fee Related JP5434772B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010102354A JP5434772B2 (ja) 2010-04-27 2010-04-27 接合方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010102354A JP5434772B2 (ja) 2010-04-27 2010-04-27 接合方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007307620A Division JP2009132749A (ja) 2007-11-28 2007-11-28 接合方法および接合体

Publications (3)

Publication Number Publication Date
JP2010184500A JP2010184500A (ja) 2010-08-26
JP2010184500A5 JP2010184500A5 (enrdf_load_stackoverflow) 2011-01-20
JP5434772B2 true JP5434772B2 (ja) 2014-03-05

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ID=42765432

Family Applications (1)

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JP2010102354A Expired - Fee Related JP5434772B2 (ja) 2010-04-27 2010-04-27 接合方法

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JP (1) JP5434772B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102287811B1 (ko) * 2014-10-31 2021-08-09 삼성전자주식회사 2개 표면을 결합시키는 방법 및 그에 의하여 제조된 구조체, 및 상기 구조체를 포함하는 미세유동 장치

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09208829A (ja) * 1996-01-31 1997-08-12 Toray Dow Corning Silicone Co Ltd 硬化性オルガノポリシロキサン組成物および該組成物を使用して基材と被着体を接着させる方法
JPH09286971A (ja) * 1996-04-19 1997-11-04 Toray Dow Corning Silicone Co Ltd シリコーン系ダイボンディング剤、半導体装置の製造方法および半導体装置
US6057405A (en) * 1996-05-28 2000-05-02 General Electric Company Silicone contact adhesive compositions
JPH11158437A (ja) * 1997-11-28 1999-06-15 Sekisui Chem Co Ltd 接着方法
JP2000006561A (ja) * 1998-06-26 2000-01-11 Konica Corp Ｉｃカードの製造方法
JP2000235108A (ja) * 1999-02-15 2000-08-29 Olympus Optical Co Ltd 光学素子
JP2001019936A (ja) * 1999-07-08 2001-01-23 Dow Corning Toray Silicone Co Ltd 接着剤、および半導体装置
JP2001194598A (ja) * 2000-01-14 2001-07-19 Seiko Epson Corp 微細構造体、映像デバイスおよびそれらの製造方法
JP2003066299A (ja) * 2001-08-24 2003-03-05 Canon Inc 精密部材の固着方法および精密部材保持構造

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JP2010184500A (ja) 2010-08-26

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