JP5433899B2 - 3次元電子モジュールの集合的製作方法 - Google Patents
3次元電子モジュールの集合的製作方法 Download PDFInfo
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- JP5433899B2 JP5433899B2 JP2009525001A JP2009525001A JP5433899B2 JP 5433899 B2 JP5433899 B2 JP 5433899B2 JP 2009525001 A JP2009525001 A JP 2009525001A JP 2009525001 A JP2009525001 A JP 2009525001A JP 5433899 B2 JP5433899 B2 JP 5433899B2
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- 239000011347 resin Substances 0.000 claims description 11
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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- 230000000379 polymerizing effect Effects 0.000 description 1
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- 238000004544 sputter deposition Methods 0.000 description 1
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Description
その製作が集合的であり、かつ
各ダイiに対し、
A1)シリコンを含む厚さがe sである同一の薄い平らなウェーハの上に、一群のn個のダイiを製作するステップであって、該ウェーハは、1つの面上が、テスト端子と呼ばれる電気接続端子でカバーされ、そして次に、絶縁基板を形成し、かつ厚さがe iの薄い電気絶縁層を通じてテスト端子に接続される接続端子を含む少なくとも1つのシリコンの電子素子を備えた前記絶縁層でカバーされ、素子間の空間を満たす、厚さがe rの絶縁樹脂で該素子がコーティングされ、そのとき、L1の幅とe i+e r<P1<e i+e r+e sであるような深さP1とを有する第1の溝により互いに分離され、該素子の接続端子が溝と同一平面のトラックに接続されている、ステップ、
B1)素子側の面上に粘着性の支持体を堆積するステップ、
C1)テスト端子を露出するように、シリコンウェーハを除去するステップ、
D1)テスト端子を経由してウェーハの素子を電気的に試験し、そして有効な素子及び/又は不良の素子をマーキングするステップ、及び
E1)有効なダイを接着フィルムの上へ移動するステップであって、各ダイが、テスト端子に接続された有効な素子、絶縁樹脂、絶縁層、及び少なくとも1つのトラックを備え、ダイ同士が、有効な素子の接続トラックが同一平面にある、幅がL2の第2の溝によって分離されている、ステップ
からなる第1ステップと、
A2)第2の溝を実質的に次々と上に重ねるように、第1ステップの後に得られたK個のロットを積み重ねて組立てること、
B2)幅L3≧L2で、第3の溝をスタックの第2の溝の所に形成すること、及び
C2)ダイを第3の溝の壁の所で相互接続すること
からなる、第2ステップと
を含むことを特徴とする。
Claims (8)
- n個の電子モジュール(100)の製作方法であって、
nは1よりも大きい整数であり、1つのモジュールはK個の電子ダイ(50)のスタックを含み、前記各ダイは、絶縁層(4)上に少なくとも1つの電子素子(11)を備え、K個のダイは前記スタックの側面に位置する導体によって共に電気的に接続される方法において、
その製作方法が集合的であり、かつ
前記各ダイに対し、
A1)シリコンを含む厚さがesである一つの薄い平らなウェーハ(10)の上に一群の前記各ダイを製作するステップであって、該ウェーハは、1つの面上が、テスト端子と呼ばれる電気接続端子(20)でカバーされ、そして次に、厚さがeiの薄い前記絶縁層(4)を通じて前記テスト端子(20)に接続される接続端子(2)を含む少なくとも1つのシリコンの電気素子(11)を備えた前記絶縁層(4)でカバーされ、前記素子間の空間を満たす、厚さがerの絶縁樹脂(6)で前記素子がコーティングされ、そのとき、L1の幅とei+er<P1<ei+er+esであるような深さP1とを有する第1の溝(30)により互いに分離され、前記素子の前記接続端子(2)が前記溝(30)と同一平面のトラック(3)に接続されている、ステップ、
B1)前記素子側の面上に粘着性の支持体(40)を堆積するステップ、
C1)前記テスト端子(20)を露出するように、シリコンウェーハ(10)を除去するステップ、
D1)前記テスト端子(20)を経由して前記ウェーハの前記素子を電気的に試験し、そして有効な素子(11´)及び/又は不良の素子をマーキングするステップ、及び
E1)ダイ(50)を接着フィルム(41)の上へ移動するステップであって、各ダイが、テスト端子(20)及び少なくとも1つのトラック(3)に接続された有効な素子(11´)と、絶縁樹脂(6)と、前記絶縁層(4)とを備え、前記ダイ同士が、前記有効な素子(11´)の前記接続トラック(3)が同一平面にある、幅がL2の第2の溝(31)によって分離されている、ステップ
からなる第1のステップと、
A2)前記第2の溝(31)を実質的に次々と上に重ねるように、第1ステップの後に得られたK個のロットを積み重ねて組み立てること、
B2)幅L3≧L2で、第3の溝(32)を前記スタックの前記第2の溝の所に形成すること、及び
C2)前記ダイを前記第3の溝(32)の壁の所で相互接続すること
からなる、第2ステップと
を含むことを特徴とする方法。 - L2<L1であることを特徴とする請求項1に記載の方法。
- 前記素子側の面に粘着性の支持体を堆積するステップに先立ち、前記素子を含む前記ウェーハのその面を表面仕上げによって薄くするステップを含むことを特徴とする、請求項1または2に記載の方法。
- ステップC2が:
−金属層(33)を用いて前記第3の溝の前記壁を金属化するステップと、
−前記金属層にダイの相互接続のスキームを形成するステップと
からなるステップを含むことを特徴とする、請求項1〜3のいずれか一項に記載の方法。 - ステップA2の積み重ねが支持体(42)の上で行われることを特徴とする、請求項1〜4に記載の方法。
- 前記電子素子(11)が能動素子又は受動素子、あるいはMEMSであることを特徴とする、請求項1〜5のいずれか一項に記載の方法。
- 前記能動素子がチップであることを特徴とする請求項6に記載の方法。
- 少なくとも1つの受動素子が前記ウェーハ(10)内又は前記ウェーハ上に位置することを特徴とする、請求項1〜7のいずれか一項に記載の方法。
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PCT/EP2007/058090 WO2008022901A2 (fr) | 2006-08-22 | 2007-08-03 | Procede de fabrication collective de modules electroniques 3d |
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