JP5422252B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5422252B2 JP5422252B2 JP2009105289A JP2009105289A JP5422252B2 JP 5422252 B2 JP5422252 B2 JP 5422252B2 JP 2009105289 A JP2009105289 A JP 2009105289A JP 2009105289 A JP2009105289 A JP 2009105289A JP 5422252 B2 JP5422252 B2 JP 5422252B2
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- 239000004065 semiconductor Substances 0.000 title claims description 80
- 238000004519 manufacturing process Methods 0.000 title description 18
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 124
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 25
- 229920005591 polysilicon Polymers 0.000 description 25
- 238000000605 extraction Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 16
- 239000000758 substrate Substances 0.000 description 12
- 239000011229 interlayer Substances 0.000 description 11
- 238000000059 patterning Methods 0.000 description 10
- 230000003071 parasitic effect Effects 0.000 description 7
- 238000005530 etching Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
- H01L29/42376—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the length or the sectional shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
- H01L29/4238—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the surface lay-out
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7811—Vertical DMOS transistors, i.e. VDMOS transistors with an edge termination structure
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
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- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
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- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
ドレイン領域となる第一導電型半導体層上に第二導電型半導体層を形成する工程と、
前記第二導電型半導体層を貫通し、互いに連結した第一乃至第三のトレンチを形成する工程と、
前記第一乃至第三のトレンチにソース配線層を埋め込み、かつ、前記第二のトレンチの上端より上に前記ソース配線層を突出させる工程と、
前記第一及び前記第三のトレンチをゲート電極で埋め込む工程と、
前記第二のトレンチの上端より上に突出させた前記ソース配線層とソース電極を接触させる工程と、
前記第三のトレンチ内で前記ゲート電極にゲート配線層を接触させる工程と、
を含む。
図4で示すゲート引き出し領域では、ソース配線層14はトランジスタ領域(図2)と同様に、トレンチ301に埋め込まれている。層間膜17には、ゲート電極16の一部を露出するコンタクトホールが形成され、このコンタクトホールを介してゲート電極16とゲート配線層19が接続される。
たとえば、実施形態では、トランジスタ領域(図2)とソース引き出し領域(図3)とゲート引き出し領域(図4)とでトレンチ301の開口幅がトレンチ101、201の幅の2倍である例を示した。しかしながら、ソース引き出し領域やゲート引き出し領域におけるトレンチ201、301の開口幅は、本発明を満足する範囲で、任意の幅に拡張して、それらの抵抗を低減することができる。
また、実施形態では、nチャネルMOSFETを例に挙げて説明したが、pチャネルMOSFETでも同様に実施可能である。また、MOSFETに限らず、IGBT(Insulated Gate Bipolar Transistor)にも適用できる。
他の実施の形態を以下に例示する。
[1] ドレイン領域となる第一導電型半導体層上に第二導電型半導体層を形成する工程と、
前記第二導電型半導体層を貫通し、互いに連結した第一乃至第三のトレンチを形成する工程と、
前記第一乃至第三のトレンチにソース配線層を埋め込み、かつ、前記第二のトレンチの上端より上に前記ソース配線層を突出させる工程と、
前記第一及び前記第三のトレンチをゲート電極で埋め込む工程と、
前記第二のトレンチの上端より上に突出させた前記ソース配線層とソース電極を接触させる工程と、
前記第三のトレンチ内で前記ゲート電極にゲート配線層を接触させる工程と、
を含む、半導体装置の製造方法。
[2]前記第一及び前記第三のトレンチを前記ゲート電極で埋め込む前記工程は、
前記第一及び前記第三のトレンチ内及び前記第二導電型半導体層上に前記ゲート電極となる導電膜を形成する工程と、
前記導電膜をエッチバックすることにより、前記第二のトレンチの上端より上に突出している前記ソース配線層の側壁に、前記導電膜により形成されたサイドウォールが形成される工程と、
を含む[1]に記載の半導体装置の製造方法。
[3]前記ソース配線層と前記ゲート電極とをポリシリコン膜で形成する、[1]または[2]に記載の半導体装置の製造方法。
[4]前記第一導電型半導体層は、
MOSトランジスタ構造が設けられたセル領域と、
前記セル領域に隣接しているターミナル領域と、
が設けられており、
前記第一乃至第三のトレンチを形成する前記工程において、前記セル領域に前記第一及び第二のトレンチを形成する、[1]乃至[3]いずれかに記載の半導体装置の製造方法。
[5] ドレイン領域となる第一導電型半導体層と、
前記第一導電型半導体層上に形成された第二導電型半導体層と、
前記第二導電型半導体層を貫通し、互いに連結した第一乃至第三のトレンチと、
前記第一乃至第三のトレンチに埋め込まれ、かつ、前記第二のトレンチの上端より上に突出しているソース配線層と、
前記第一及び前記第三のトレンチにそれぞれ埋め込まれ、前記ソース配線層上に形成されたゲート電極と、
前記第二のトレンチの上端より上に突出している前記ソース配線層に接触しているソース電極と、
前記第三のトレンチ内で前記ゲート電極に接触しているゲート配線層と、
を有する、半導体装置。
[6] 前記第二のトレンチの上端より上に突出している前記ソース配線層の側壁に、前記ゲート電極と同一の材料により形成されたサイドウォール状の導電膜を有する、[5]に記載の半導体装置。
11 n−型半導体層
12 p型半導体層
13 絶縁膜
14 ソース配線層
15 ゲート絶縁膜
16 ゲート電極
16a 導電膜
17 層間膜
18 ソース電極
19 ゲート配線層
101 トレンチ
102 p+層
103 n+層
104 単位セル
201 トレンチ
202 レジスト
301 トレンチ
1008 基板
1014 エピタキシャル層
1016 ベース領域
1018 ソース領域
1020 ソース電極
1032 ゲート絶縁膜
1033 層間絶縁層
1034 ポリシリコンゲート電極
1036 絶縁層
1038 ポリシリコンシールド層
1039 ゲート電極
CR セル領域
TR ターミナル領域
Claims (1)
- ドレイン領域となる第一導電型半導体層上に第二導電型半導体層を形成する工程と、
前記第二導電型半導体層を貫通し、互いに連結した第一乃至第三のトレンチを形成する工程と、
前記第一乃至第三のトレンチにソース配線層を埋め込み、かつ、前記第二のトレンチの上端より上に前記ソース配線層を突出させる工程と、
前記第一及び前記第三のトレンチをゲート電極で埋め込む工程と、
前記第二のトレンチの上端より上に突出させた前記ソース配線層とソース電極を接触させる工程と、
前記第三のトレンチ内で前記ゲート電極にゲート配線層を接触させる工程と、
を含む、半導体装置の製造方法。
Priority Applications (3)
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JP2009105289A JP5422252B2 (ja) | 2009-04-23 | 2009-04-23 | 半導体装置の製造方法 |
US12/662,485 US8071445B2 (en) | 2009-04-23 | 2010-04-20 | Method for manufacturing semiconductor device, and semiconductor device |
US13/317,697 US8748261B2 (en) | 2009-04-23 | 2011-10-26 | Method of manufacturing semiconductor device, and semiconductor device |
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JP2009105289A JP5422252B2 (ja) | 2009-04-23 | 2009-04-23 | 半導体装置の製造方法 |
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JP2010258153A JP2010258153A (ja) | 2010-11-11 |
JP2010258153A5 JP2010258153A5 (ja) | 2012-04-12 |
JP5422252B2 true JP5422252B2 (ja) | 2014-02-19 |
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JP (1) | JP5422252B2 (ja) |
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US8680607B2 (en) * | 2011-06-20 | 2014-03-25 | Maxpower Semiconductor, Inc. | Trench gated power device with multiple trench width and its fabrication process |
CN102956488B (zh) * | 2011-08-23 | 2015-02-04 | 上海华虹宏力半导体制造有限公司 | 功率晶体管的制作方法 |
JP2014063776A (ja) * | 2012-09-19 | 2014-04-10 | Toshiba Corp | 電界効果トランジスタ |
KR102030437B1 (ko) | 2013-07-05 | 2019-10-10 | 삼성전자주식회사 | 반도체 소자 |
JP6458994B2 (ja) * | 2015-03-30 | 2019-01-30 | サンケン電気株式会社 | 半導体装置 |
JP6872951B2 (ja) * | 2017-03-30 | 2021-05-19 | エイブリック株式会社 | 半導体装置及びその製造方法 |
EP3671825A1 (en) | 2018-12-20 | 2020-06-24 | IMEC vzw | Method for connecting a buried interconnect rail and a semiconductor fin in an integrated circuit chip |
JP7249269B2 (ja) * | 2019-12-27 | 2023-03-30 | 株式会社東芝 | 半導体装置およびその製造方法 |
Family Cites Families (15)
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US6621121B2 (en) * | 1998-10-26 | 2003-09-16 | Silicon Semiconductor Corporation | Vertical MOSFETs having trench-based gate electrodes within deeper trench-based source electrodes |
US5998833A (en) * | 1998-10-26 | 1999-12-07 | North Carolina State University | Power semiconductor devices having improved high frequency switching and breakdown characteristics |
EP1170803A3 (en) * | 2000-06-08 | 2002-10-09 | Siliconix Incorporated | Trench gate MOSFET and method of making the same |
TW543146B (en) | 2001-03-09 | 2003-07-21 | Fairchild Semiconductor | Ultra dense trench-gated power device with the reduced drain-source feedback capacitance and miller charge |
JP3979258B2 (ja) * | 2002-05-21 | 2007-09-19 | 富士電機デバイステクノロジー株式会社 | Mis半導体装置およびその製造方法 |
US7652326B2 (en) * | 2003-05-20 | 2010-01-26 | Fairchild Semiconductor Corporation | Power semiconductor devices and methods of manufacture |
US7449354B2 (en) * | 2006-01-05 | 2008-11-11 | Fairchild Semiconductor Corporation | Trench-gated FET for power device with active gate trenches and gate runner trench utilizing one-mask etch |
US7521773B2 (en) * | 2006-03-31 | 2009-04-21 | Fairchild Semiconductor Corporation | Power device with improved edge termination |
US8866255B2 (en) * | 2008-03-12 | 2014-10-21 | Infineon Technologies Austria Ag | Semiconductor device with staggered oxide-filled trenches at edge region |
US7807576B2 (en) * | 2008-06-20 | 2010-10-05 | Fairchild Semiconductor Corporation | Structure and method for forming a thick bottom dielectric (TBD) for trench-gate devices |
US8829624B2 (en) * | 2008-06-30 | 2014-09-09 | Fairchild Semiconductor Corporation | Power device with monolithically integrated RC snubber |
US8207567B2 (en) * | 2008-11-19 | 2012-06-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Metal-oxide-metal structure with improved capacitive coupling area |
JP2010147219A (ja) * | 2008-12-18 | 2010-07-01 | Renesas Electronics Corp | 半導体装置及びその製造方法 |
JP2010186760A (ja) * | 2009-02-10 | 2010-08-26 | Panasonic Corp | 半導体装置および半導体装置の製造方法 |
JP2010251571A (ja) * | 2009-04-16 | 2010-11-04 | Toshiba Corp | 半導体装置 |
-
2009
- 2009-04-23 JP JP2009105289A patent/JP5422252B2/ja not_active Expired - Fee Related
-
2010
- 2010-04-20 US US12/662,485 patent/US8071445B2/en not_active Expired - Fee Related
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2011
- 2011-10-26 US US13/317,697 patent/US8748261B2/en active Active
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Publication number | Publication date |
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US8071445B2 (en) | 2011-12-06 |
JP2010258153A (ja) | 2010-11-11 |
US8748261B2 (en) | 2014-06-10 |
US20120043603A1 (en) | 2012-02-23 |
US20100270613A1 (en) | 2010-10-28 |
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