JP5412135B2 - オゾン水供給装置 - Google Patents

オゾン水供給装置 Download PDF

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Publication number
JP5412135B2
JP5412135B2 JP2009039144A JP2009039144A JP5412135B2 JP 5412135 B2 JP5412135 B2 JP 5412135B2 JP 2009039144 A JP2009039144 A JP 2009039144A JP 2009039144 A JP2009039144 A JP 2009039144A JP 5412135 B2 JP5412135 B2 JP 5412135B2
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ozone
ozone water
gas
water
water supply
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Japanese (ja)
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JP2010199124A (ja
JP2010199124A5 (https=
Inventor
誠 堀田
基典 柳
浩一 佐久間
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Nomura Micro Science Co Ltd
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Nomura Micro Science Co Ltd
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Publication of JP2010199124A5 publication Critical patent/JP2010199124A5/ja
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  • Cleaning Or Drying Semiconductors (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
JP2009039144A 2009-02-23 2009-02-23 オゾン水供給装置 Active JP5412135B2 (ja)

Priority Applications (1)

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JP2009039144A JP5412135B2 (ja) 2009-02-23 2009-02-23 オゾン水供給装置

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JP2009039144A JP5412135B2 (ja) 2009-02-23 2009-02-23 オゾン水供給装置

Publications (3)

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JP2010199124A JP2010199124A (ja) 2010-09-09
JP2010199124A5 JP2010199124A5 (https=) 2012-03-29
JP5412135B2 true JP5412135B2 (ja) 2014-02-12

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JP2009039144A Active JP5412135B2 (ja) 2009-02-23 2009-02-23 オゾン水供給装置

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6059871B2 (ja) * 2011-12-20 2017-01-11 野村マイクロ・サイエンス株式会社 気体溶解水製造装置及び気体溶解水製造方法
KR101818048B1 (ko) * 2015-11-19 2018-02-22 에스케이하이닉스 주식회사 순환형 오존수 공급 장치
JP6640630B2 (ja) * 2016-03-25 2020-02-05 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
CN110709153B (zh) * 2017-06-07 2022-03-01 三菱电机株式会社 水处理膜的清洁装置、清洁方法以及水处理系统
EP3814284B1 (en) 2018-08-29 2025-06-04 MKS Instruments, Inc. Ozonated water delivery system and method of use

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3332323B2 (ja) * 1996-10-29 2002-10-07 オルガノ株式会社 電子部品部材類の洗浄方法及び洗浄装置
JP2002066475A (ja) * 2000-08-25 2002-03-05 Dainippon Screen Mfg Co Ltd 基板洗浄装置
JP2003236481A (ja) * 2002-02-14 2003-08-26 Toshiba Corp 洗浄方法、洗浄装置ならびに半導体装置の製造方法およびアクティブマトリックス型表示装置の製造方法
JP4077845B2 (ja) * 2005-03-18 2008-04-23 セメス株式会社 機能水供給システム、及び機能水供給方法

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