JP5396780B2 - 圧電デバイス - Google Patents
圧電デバイス Download PDFInfo
- Publication number
- JP5396780B2 JP5396780B2 JP2008227974A JP2008227974A JP5396780B2 JP 5396780 B2 JP5396780 B2 JP 5396780B2 JP 2008227974 A JP2008227974 A JP 2008227974A JP 2008227974 A JP2008227974 A JP 2008227974A JP 5396780 B2 JP5396780 B2 JP 5396780B2
- Authority
- JP
- Japan
- Prior art keywords
- support member
- vibrating piece
- piezoelectric
- electrode
- base portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000605 extraction Methods 0.000 claims description 33
- 229920005989 resin Polymers 0.000 claims description 21
- 239000011347 resin Substances 0.000 claims description 21
- 239000002184 metal Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 11
- 230000001070 adhesive effect Effects 0.000 claims description 11
- 230000005284 excitation Effects 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000010931 gold Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 13
- 239000004020 conductor Substances 0.000 description 11
- 230000010355 oscillation Effects 0.000 description 7
- 230000035515 penetration Effects 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008227974A JP5396780B2 (ja) | 2008-09-05 | 2008-09-05 | 圧電デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008227974A JP5396780B2 (ja) | 2008-09-05 | 2008-09-05 | 圧電デバイス |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011181324A Division JP5510414B2 (ja) | 2011-08-23 | 2011-08-23 | 圧電デバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010062973A JP2010062973A (ja) | 2010-03-18 |
| JP2010062973A5 JP2010062973A5 (enrdf_load_stackoverflow) | 2011-10-27 |
| JP5396780B2 true JP5396780B2 (ja) | 2014-01-22 |
Family
ID=42189263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008227974A Expired - Fee Related JP5396780B2 (ja) | 2008-09-05 | 2008-09-05 | 圧電デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5396780B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014093734A (ja) * | 2012-11-06 | 2014-05-19 | Sii Crystal Technology Inc | 電子デバイス及び電子デバイスの製造方法 |
| JP7211082B2 (ja) * | 2018-12-28 | 2023-01-24 | セイコーエプソン株式会社 | 振動デバイスおよび振動モジュール |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5847885B2 (ja) * | 1976-01-29 | 1983-10-25 | セイコーインスツルメンツ株式会社 | 振動子の支持構造 |
| JPS5352094A (en) * | 1976-10-22 | 1978-05-12 | Seiko Instr & Electronics Ltd | Support structure of piezo-resonator |
| JPH01125112A (ja) * | 1987-11-10 | 1989-05-17 | Seiko Electronic Components Ltd | 水晶振動子の支持構造 |
| JPH0575372A (ja) * | 1991-09-10 | 1993-03-26 | Murata Mfg Co Ltd | 圧電共振子及びその製造方法 |
| JPH0681135U (ja) * | 1993-04-28 | 1994-11-15 | キンセキ株式会社 | 圧電振動子 |
| JP2001144580A (ja) * | 1999-11-12 | 2001-05-25 | Nippon Dempa Kogyo Co Ltd | 水晶振動子 |
| JP2002176318A (ja) * | 2000-09-27 | 2002-06-21 | Citizen Watch Co Ltd | 圧電発振器及びその実装構造 |
| US6628048B2 (en) * | 2000-11-29 | 2003-09-30 | Samsung Electro-Mechanics Co., Ltd. | Crystal oscillator with improved shock resistance |
| JP4245908B2 (ja) * | 2002-11-25 | 2009-04-02 | 日本電波工業株式会社 | 表面実装用の水晶発振器 |
| JP2005143042A (ja) * | 2003-11-10 | 2005-06-02 | Seiko Epson Corp | 圧電デバイス |
| JP4916775B2 (ja) * | 2006-05-31 | 2012-04-18 | 京セラキンセキ株式会社 | 圧電発振器 |
| WO2008038767A1 (fr) * | 2006-09-30 | 2008-04-03 | Citizen Finetech Miyota Co., Ltd. | dispositif piézoélectrique |
-
2008
- 2008-09-05 JP JP2008227974A patent/JP5396780B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2010062973A (ja) | 2010-03-18 |
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