JP5385360B2 - 耐放射線性のフッ化物結晶、特にフッ化カルシウム結晶の製造 - Google Patents
耐放射線性のフッ化物結晶、特にフッ化カルシウム結晶の製造 Download PDFInfo
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- JP5385360B2 JP5385360B2 JP2011250709A JP2011250709A JP5385360B2 JP 5385360 B2 JP5385360 B2 JP 5385360B2 JP 2011250709 A JP2011250709 A JP 2011250709A JP 2011250709 A JP2011250709 A JP 2011250709A JP 5385360 B2 JP5385360 B2 JP 5385360B2
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- 239000013078 crystal Substances 0.000 title claims description 139
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 title claims description 31
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 title claims description 19
- 229910001634 calcium fluoride Inorganic materials 0.000 title claims description 18
- 230000005855 radiation Effects 0.000 title claims description 14
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000000034 method Methods 0.000 claims description 49
- 239000002994 raw material Substances 0.000 claims description 35
- 239000000843 powder Substances 0.000 claims description 25
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 21
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 18
- 150000003863 ammonium salts Chemical class 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 15
- 239000000725 suspension Substances 0.000 claims description 15
- 239000002253 acid Substances 0.000 claims description 13
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 claims description 11
- 125000001153 fluoro group Chemical group F* 0.000 claims description 11
- -1 hexafluorosilicic acid Chemical compound 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 10
- 230000008018 melting Effects 0.000 claims description 10
- 238000010521 absorption reaction Methods 0.000 claims description 9
- 229910001618 alkaline earth metal fluoride Inorganic materials 0.000 claims description 9
- 229910021529 ammonia Inorganic materials 0.000 claims description 9
- 229910001515 alkali metal fluoride Inorganic materials 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 8
- 150000002148 esters Chemical class 0.000 claims description 8
- 239000012535 impurity Substances 0.000 claims description 8
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 6
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 4
- 239000000155 melt Substances 0.000 claims description 4
- YOYLLRBMGQRFTN-SMCOLXIQSA-N norbuprenorphine Chemical compound C([C@@H](NCC1)[C@]23CC[C@]4([C@H](C3)C(C)(O)C(C)(C)C)OC)C3=CC=C(O)C5=C3[C@@]21[C@H]4O5 YOYLLRBMGQRFTN-SMCOLXIQSA-N 0.000 claims description 4
- PNGLEYLFMHGIQO-UHFFFAOYSA-M sodium;3-(n-ethyl-3-methoxyanilino)-2-hydroxypropane-1-sulfonate;dihydrate Chemical compound O.O.[Na+].[O-]S(=O)(=O)CC(O)CN(CC)C1=CC=CC(OC)=C1 PNGLEYLFMHGIQO-UHFFFAOYSA-M 0.000 claims description 4
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- 239000002516 radical scavenger Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 11
- 229910004261 CaF 2 Inorganic materials 0.000 description 10
- 238000009835 boiling Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- KRHYYFGTRYWZRS-UHFFFAOYSA-N hydrofluoric acid Substances F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 8
- 239000007795 chemical reaction product Substances 0.000 description 7
- 230000007547 defect Effects 0.000 description 7
- 238000004821 distillation Methods 0.000 description 7
- 239000007787 solid Substances 0.000 description 6
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 235000014113 dietary fatty acids Nutrition 0.000 description 5
- 239000000194 fatty acid Substances 0.000 description 5
- 229930195729 fatty acid Natural products 0.000 description 5
- 150000004665 fatty acids Chemical class 0.000 description 5
- 150000002191 fatty alcohols Chemical class 0.000 description 5
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 239000011541 reaction mixture Substances 0.000 description 5
- 239000011575 calcium Substances 0.000 description 4
- 238000005886 esterification reaction Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 150000002905 orthoesters Chemical class 0.000 description 4
- 238000000746 purification Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910017855 NH 4 F Inorganic materials 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000002153 concerted effect Effects 0.000 description 3
- 150000004679 hydroxides Chemical class 0.000 description 3
- 229910001512 metal fluoride Inorganic materials 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000007086 side reaction Methods 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 239000002178 crystalline material Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229960002050 hydrofluoric acid Drugs 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- AJSTXXYNEIHPMD-UHFFFAOYSA-N triethyl borate Chemical compound CCOB(OCC)OCC AJSTXXYNEIHPMD-UHFFFAOYSA-N 0.000 description 2
- DQWPFSLDHJDLRL-UHFFFAOYSA-N triethyl phosphate Chemical compound CCOP(=O)(OCC)OCC DQWPFSLDHJDLRL-UHFFFAOYSA-N 0.000 description 2
- BHHYHSUAOQUXJK-UHFFFAOYSA-L zinc fluoride Chemical compound F[Zn]F BHHYHSUAOQUXJK-UHFFFAOYSA-L 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229910004573 CdF 2 Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 229940123973 Oxygen scavenger Drugs 0.000 description 1
- 229910008449 SnF 2 Inorganic materials 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001341 alkaline earth metal compounds Chemical class 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000010533 azeotropic distillation Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical class [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001393 microlithography Methods 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000012429 reaction media Substances 0.000 description 1
- 238000006479 redox reaction Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/12—Halides
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F11/00—Compounds of calcium, strontium, or barium
- C01F11/02—Oxides or hydroxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/04—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method adding crystallising materials or reactants forming it in situ to the melt
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Description
Claims (11)
- 紫外線放射に対する高い耐放射線性を有するフッ化物結晶を製造する方法であって、
アルカリ金属フッ化物又はアルカリ土類金属フッ化物を含有する結晶粉末(6)を供給して結晶原料塊(14)を形成するステップと、
該結晶原料塊(14)を結晶成長ユニット(11)内で溶融するステップと、
前記溶融した結晶原料塊(14)を冷却により凝固させるステップとを備え、
複合フルオロ酸のアンモニウム塩(7)及び脂肪族アルコール(8)を前記結晶粉末(6)又は前記結晶原料塊(14)に添加して、酸化物系不純物を減らす、方法。 - 請求項1に記載の方法において、前記複合フルオロ酸は、テトラフルオロホウ酸(HBF4)、ヘキサフルオロリン酸(HPF6)、ヘキサフルオロケイ酸(H2SiF6)、及びヘキサフルオロチタン酸(H2TiF6)からなる群から選択される、方法。
- 請求項1又は2に記載の方法において、前記脂肪族アルコール(8)は、メタノール(CH3OH)、エタノール(C2H5OH)、プロパノール(C3H7OH)、及びブタ
ノール(C4H9OH)からなる群から選択される、方法。 - 請求項1〜3のいずれか1項に記載の方法において、過剰な脂肪族アルコール(8)を前記結晶粉末(6)に添加して脂肪族アルコール懸濁液を形成する、方法。
- 請求項1〜4のいずれか1項に記載の方法において、前記複合フルオロ酸の前記アンモニウム塩を、0.01重量%〜7重量%の量で前記結晶粉末(6)又は前記結晶原料塊(14)に添加する、方法。
- 請求項1〜5のいずれか1項に記載の方法において、少なくとも前記溶融するステップを、200mbar未満の圧力下で実行する、方法。
- 請求項1〜6のいずれか1項に記載の方法において、少なくとも前記溶融するステップを、200℃〜1450℃の範囲の温度で実行する、方法。
- 請求項1〜7のいずれか1項に記載の方法において、アンモニア(10)を前記結晶粉末(6)又は前記結晶原料塊(14)に付加的に導入する、方法。
- 請求項1〜8のいずれか1項に記載の方法において、前記フッ化物結晶はフッ化カルシウム結晶である、方法。
- 請求項1〜9のいずれか1項に記載の方法により製造したフッ化物結晶であって、複合フルオロ酸のエステルを0.01ppm〜10ppm含有する、フッ化物結晶。
- 請求項10に記載のフッ化物結晶から製造した光学コンポーネント(21)であって、10×10−4l/cm未満の吸収係数の飽和値を有する、光学コンポーネント。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010044017.5 | 2010-11-17 | ||
DE102010044017A DE102010044017B4 (de) | 2010-11-17 | 2010-11-17 | Verfahren zur Herstellung von Alkali- oder Erdalkalifluorid-Kristallen und nach dem Verfahren hergestellte Kristalle |
Publications (2)
Publication Number | Publication Date |
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JP2012121795A JP2012121795A (ja) | 2012-06-28 |
JP5385360B2 true JP5385360B2 (ja) | 2014-01-08 |
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JP2011250709A Expired - Fee Related JP5385360B2 (ja) | 2010-11-17 | 2011-11-16 | 耐放射線性のフッ化物結晶、特にフッ化カルシウム結晶の製造 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9194057B2 (ja) |
JP (1) | JP5385360B2 (ja) |
CN (1) | CN102465331B (ja) |
DE (1) | DE102010044017B4 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103147119B (zh) * | 2013-03-21 | 2015-09-16 | 北京雷生强式科技有限责任公司 | 一种氟化镁晶体的制备方法及生长设备 |
JP6162625B2 (ja) * | 2014-02-27 | 2017-07-12 | 株式会社日立製作所 | 結晶育成用るつぼおよびそれを備えた結晶育成装置ならびに結晶育成方法 |
CN109252208A (zh) * | 2018-10-15 | 2019-01-22 | 江苏万邦微电子有限公司 | 一种抗辐照氟化铈晶体的制作方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1104182A (en) | 1965-03-12 | 1968-02-21 | Harshaw Chem Corp | Crystalline material |
JP2559040B2 (ja) * | 1987-07-24 | 1996-11-27 | 日本電信電話株式会社 | 金属フッ化物の製造方法 |
JP3337638B2 (ja) | 1997-03-31 | 2002-10-21 | キヤノン株式会社 | フッ化物結晶の製造方法及び光学部品の製造方法 |
JP4154744B2 (ja) | 1997-12-01 | 2008-09-24 | 株式会社ニコン | フッ化カルシウム結晶の製造方法および原料の処理方法 |
EP0939147B1 (en) | 1998-02-26 | 2003-09-03 | Nikon Corporation | A manufacturing method for calcium fluoride and calcium fluoride for photolithography |
FR2799194B1 (fr) | 1999-10-05 | 2001-12-14 | Corning Sa | Billes d'un fluorure d'alcalin ou d'alcalino-terreux polycristallin, leur preparation et leur utilisation pour preparer des monocristaux |
FR2822853B1 (fr) * | 2001-03-29 | 2003-06-27 | Corning Inc | Preaparation de (mono) cristaux |
DE10142651C5 (de) | 2001-08-31 | 2009-04-23 | Schott Ag | Verfahren zur Herstellung von hoch homogenen strahlenbeständigen streufreien Einkristallen, eines damit erhaltenen Ingots sowie deren Verwendung |
DE10297547T5 (de) * | 2001-12-13 | 2004-11-04 | Corning Incorporated | UV-optische Fluoridkristallelemente zur Laserlithografie mit λ<200nm und Verfahren derselben |
JP2004168590A (ja) * | 2002-11-20 | 2004-06-17 | Shin Etsu Chem Co Ltd | 希土類元素フッ化物及びその製造方法 |
CN101066775B (zh) * | 2007-04-12 | 2010-12-22 | 中国科学院长春应用化学研究所 | 一种稀土氟化物纳米粒子的制备方法 |
DE102009030203A1 (de) | 2008-09-19 | 2010-04-01 | Carl Zeiss Smt Ag | Ermitteln einer Kenngröße eines optischen Materials bei Bestrahlung |
-
2010
- 2010-11-17 DE DE102010044017A patent/DE102010044017B4/de not_active Expired - Fee Related
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2011
- 2011-11-16 JP JP2011250709A patent/JP5385360B2/ja not_active Expired - Fee Related
- 2011-11-17 US US13/298,925 patent/US9194057B2/en not_active Expired - Fee Related
- 2011-11-17 CN CN201110365130.1A patent/CN102465331B/zh active Active
Also Published As
Publication number | Publication date |
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US20120164061A1 (en) | 2012-06-28 |
CN102465331A (zh) | 2012-05-23 |
DE102010044017A1 (de) | 2012-05-24 |
JP2012121795A (ja) | 2012-06-28 |
CN102465331B (zh) | 2016-01-20 |
US9194057B2 (en) | 2015-11-24 |
DE102010044017B4 (de) | 2013-06-20 |
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