JP5379481B2 - 研磨材物品及び加工物の表面の修正方法 - Google Patents

研磨材物品及び加工物の表面の修正方法 Download PDF

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Publication number
JP5379481B2
JP5379481B2 JP2008536710A JP2008536710A JP5379481B2 JP 5379481 B2 JP5379481 B2 JP 5379481B2 JP 2008536710 A JP2008536710 A JP 2008536710A JP 2008536710 A JP2008536710 A JP 2008536710A JP 5379481 B2 JP5379481 B2 JP 5379481B2
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Prior art keywords
abrasive
resin
phase
workpiece
metal
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Expired - Fee Related
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Japanese (ja)
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JP2009512566A (ja
JP2009512566A5 (enExample
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ポール・エス・ラグ
ティモシー・ディ・フレッチャー
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28Resins or natural or synthetic macromolecular compounds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001Manufacture of flexible abrasive materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP2008536710A 2005-10-20 2006-10-16 研磨材物品及び加工物の表面の修正方法 Expired - Fee Related JP5379481B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/254,614 US7594845B2 (en) 2005-10-20 2005-10-20 Abrasive article and method of modifying the surface of a workpiece
US11/254,614 2005-10-20
PCT/US2006/040317 WO2007047558A1 (en) 2005-10-20 2006-10-16 Abrasive article and method of modifying the surface of a workpiece

Publications (3)

Publication Number Publication Date
JP2009512566A JP2009512566A (ja) 2009-03-26
JP2009512566A5 JP2009512566A5 (enExample) 2009-11-26
JP5379481B2 true JP5379481B2 (ja) 2013-12-25

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JP2008536710A Expired - Fee Related JP5379481B2 (ja) 2005-10-20 2006-10-16 研磨材物品及び加工物の表面の修正方法

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Country Link
US (1) US7594845B2 (enExample)
EP (1) EP1954446A4 (enExample)
JP (1) JP5379481B2 (enExample)
KR (1) KR101300874B1 (enExample)
CN (1) CN101291780A (enExample)
TW (1) TW200730304A (enExample)
WO (1) WO2007047558A1 (enExample)

Families Citing this family (75)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9463552B2 (en) 1997-04-04 2016-10-11 Chien-Min Sung Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods
US9409280B2 (en) 1997-04-04 2016-08-09 Chien-Min Sung Brazed diamond tools and methods for making the same
US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
US9221154B2 (en) 1997-04-04 2015-12-29 Chien-Min Sung Diamond tools and methods for making the same
US9238207B2 (en) 1997-04-04 2016-01-19 Chien-Min Sung Brazed diamond tools and methods for making the same
US9199357B2 (en) 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US20070060026A1 (en) * 2005-09-09 2007-03-15 Chien-Min Sung Methods of bonding superabrasive particles in an organic matrix
US8398466B2 (en) * 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8393934B2 (en) * 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8622787B2 (en) * 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8678878B2 (en) 2009-09-29 2014-03-25 Chien-Min Sung System for evaluating and/or improving performance of a CMP pad dresser
US9724802B2 (en) 2005-05-16 2017-08-08 Chien-Min Sung CMP pad dressers having leveled tips and associated methods
KR101281342B1 (ko) * 2005-11-22 2013-07-02 쓰리엠 이노베이티브 프로퍼티즈 컴파니 발광용품 어레이 및 이의 제조 방법
US20080153398A1 (en) * 2006-11-16 2008-06-26 Chien-Min Sung Cmp pad conditioners and associated methods
US20100051970A1 (en) * 2006-11-17 2010-03-04 Ouderkirk Andrew J Planarized led with optical extractor
CN101548397B (zh) * 2006-11-17 2011-12-21 3M创新有限公司 用于led光源的光学粘合组合物
US8013345B2 (en) * 2006-11-20 2011-09-06 3M Innovative Properties Company Optical bonding composition for LED light source
JP4561732B2 (ja) * 2006-11-20 2010-10-13 トヨタ自動車株式会社 移動体位置測位装置
US8323072B1 (en) * 2007-03-21 2012-12-04 3M Innovative Properties Company Method of polishing transparent armor
JP6017110B2 (ja) * 2007-05-29 2016-11-09 ティーピーケイ ホールディング カンパニー リミテッド 粒子含有表面とその関連方法
CN101903131B (zh) * 2007-11-13 2013-01-02 宋健民 Cmp垫修整器
TWI388402B (en) * 2007-12-06 2013-03-11 Methods for orienting superabrasive particles on a surface and associated tools
JP5597140B2 (ja) * 2007-12-31 2014-10-01 スリーエム イノベイティブ プロパティズ カンパニー プラズマ処理された研磨物品及び同物品の作製方法
DE102008021636B3 (de) * 2008-04-30 2009-11-19 Esk Ceramics Gmbh & Co. Kg Verfahren zum Fixieren eines Verbindungselements auf einem Werkstück und Bauteil aus einem Werkstück mit einem darauf fixierten Verbindungselement
JP2009302136A (ja) * 2008-06-10 2009-12-24 Panasonic Corp 半導体集積回路
US8226737B2 (en) * 2008-07-03 2012-07-24 3M Innovative Properties Company Fixed abrasive particles and articles made therefrom
KR20100013716A (ko) * 2008-07-31 2010-02-10 삼성전자주식회사 잉크젯 프린트헤드의 제조방법
WO2010022353A1 (en) * 2008-08-21 2010-02-25 Innova Meterials, Llc Enhanced surfaces, coatings, and related methods
US20100266862A1 (en) * 2009-04-17 2010-10-21 3M Innovative Properties Company Metal particle transfer article, metal modified substrate, and method of making and using the same
US20110104989A1 (en) * 2009-04-30 2011-05-05 First Principles LLC Dressing bar for embedding abrasive particles into substrates
US9221148B2 (en) 2009-04-30 2015-12-29 Rdc Holdings, Llc Method and apparatus for processing sliders for disk drives, and to various processing media for the same
US8801497B2 (en) 2009-04-30 2014-08-12 Rdc Holdings, Llc Array of abrasive members with resilient support
US8603350B2 (en) * 2009-07-17 2013-12-10 Ohara Inc. Method of manufacturing substrate for information storage media
US20110275282A1 (en) * 2010-05-07 2011-11-10 Popov Georgi M Hand-powered polishing apparatus and kit with diamond abrasive and method
EP2391027A1 (en) 2010-05-26 2011-11-30 Research In Motion Limited Method and apparatus for detecting and amplifying notification signals
US20110306275A1 (en) * 2010-06-13 2011-12-15 Nicolson Matthew D Component finishing tool
EP3651212A3 (en) 2010-08-07 2020-06-24 Tpk Holding Co., Ltd Device components with surface-embedded additives and related manufacturing methods
CN103299418A (zh) 2010-09-21 2013-09-11 铼钻科技股份有限公司 单层金刚石颗粒散热器及其相关方法
DE102010042040A1 (de) 2010-10-06 2012-04-12 Siltronic Ag Verfahren zum Schleifen einer Halbleiterscheibe
SG189227A1 (en) * 2010-10-15 2013-05-31 3M Innovative Properties Co Abrasive articles
CA2823578C (en) 2010-12-30 2016-09-20 Saint-Gobain Abrasives, Inc. Coated abrasive aggregates and products containing same
CA2827223C (en) * 2011-02-16 2020-01-07 3M Innovative Properties Company Coated abrasive article having rotationally aligned formed ceramic abrasive particles and method of making
CN103329253B (zh) 2011-05-23 2016-03-30 宋健民 具有平坦化尖端的化学机械研磨垫修整器
EP2748827A4 (en) * 2011-08-24 2015-05-27 Innova Dynamics Inc PATTERNED TRANSPARENT LADDER AND MANUFACTURING METHOD THEREFOR
WO2013049526A2 (en) 2011-09-29 2013-04-04 Saint-Gobain Abrasives, Inc. Abrasive products and methods for finishing hard surfaces
US9321947B2 (en) 2012-01-10 2016-04-26 Saint-Gobain Abrasives, Inc. Abrasive products and methods for finishing coated surfaces
US20130225051A1 (en) * 2012-02-27 2013-08-29 Raymond Vankouwenberg Abrasive pad assembly
MX353248B (es) * 2012-03-16 2018-01-05 Saint Gobain Abrasives Inc Productos abrasivos y metodos para el acabado de superficies.
US8968435B2 (en) 2012-03-30 2015-03-03 Saint-Gobain Abrasives, Inc. Abrasive products and methods for fine polishing of ophthalmic lenses
JP6188286B2 (ja) * 2012-07-13 2017-08-30 スリーエム イノベイティブ プロパティズ カンパニー 研磨パッド及びガラス、セラミックス、及び金属材料の研磨方法
CN104661794B (zh) * 2012-07-23 2018-03-06 Jh罗得股份有限公司 非平面的玻璃抛光垫及制造方法
JP6016301B2 (ja) 2013-02-13 2016-10-26 昭和電工株式会社 単結晶SiC基板の表面加工方法、その製造方法及び単結晶SiC基板の表面加工用研削プレート
US10160092B2 (en) * 2013-03-14 2018-12-25 Cabot Microelectronics Corporation Polishing pad having polishing surface with continuous protrusions having tapered sidewalls
JP6186809B2 (ja) 2013-03-29 2017-08-30 株式会社リコー 研磨ローラ、定着装置、及び画像形成装置
US9403258B2 (en) 2013-06-27 2016-08-02 Seagate Technology Llc Method for forming an abrasive lapping plate
CN105579194B (zh) 2013-09-25 2019-04-26 3M创新有限公司 多层抛光垫
US10293466B2 (en) 2013-11-12 2019-05-21 3M Innovative Properties Company Structured abrasive articles and methods of using the same
JP6178216B2 (ja) * 2013-11-13 2017-08-09 株式会社ナノテム 研削・ラップ・研磨方法およびその装置
JP6337458B2 (ja) * 2013-12-16 2018-06-06 株式会社リコー 研磨シート、及び、研磨具
KR20160147917A (ko) 2014-05-02 2016-12-23 쓰리엠 이노베이티브 프로퍼티즈 컴파니 불연속된 구조화된 연마 용품 및 작업편의 연마 방법
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
JP6545261B2 (ja) 2014-10-17 2019-07-17 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated 付加製造プロセスを使用する、複合材料特性を有するcmpパッド構造
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US10687613B2 (en) 2015-05-07 2020-06-23 Craig R. Smith Rotary cleaning tool for commode surfaces
CN105290981A (zh) * 2015-10-10 2016-02-03 薛典荣 一种银修饰金刚石磨料砂轮及其制备方法
CN112045557B (zh) * 2015-10-16 2022-11-01 应用材料公司 使用增材制造工艺形成先进抛光垫的方法和设备
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
US20180009032A1 (en) * 2016-07-08 2018-01-11 General Electric Company Metal objects and methods for making metal objects using disposable molds
US10195713B2 (en) * 2016-08-11 2019-02-05 3M Innovative Properties Company Lapping pads and systems and methods of making and using the same
WO2018118695A1 (en) * 2016-12-22 2018-06-28 3M Innovative Properties Company Abrasive article and method of making the same
JP6589039B1 (ja) * 2018-12-21 2019-10-09 株式会社ノリタケカンパニーリミテド センタレス加工用研磨ベルト、センタレス加工用砥石車、およびセンタレス加工用研磨ベルトの製造方法
CN110641052B (zh) * 2019-10-30 2021-05-14 仁新实业发展(信阳)有限公司 一种人造石英石板修复装置
CN116936344B (zh) * 2023-07-24 2025-08-26 江苏邑文微电子科技有限公司 一种半导体材料的减薄抛光方法及减薄抛光装置

Family Cites Families (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3528788A (en) * 1967-07-03 1970-09-15 Engelhard Ind Inc Etched metal coated diamond grains in grinding wheels
US3841852A (en) * 1972-01-24 1974-10-15 Christensen Diamond Prod Co Abraders, abrasive particles and methods for producing same
US3834883A (en) * 1972-11-20 1974-09-10 Gte Laboratories Inc Encapsulation for light-emitting diodes
US4581287A (en) * 1984-06-18 1986-04-08 Creative Products Resource Associates, Ltd. Composite reticulated foam-textile cleaning pad
NL8902294A (nl) * 1989-09-14 1991-04-02 Philips Nv Werkwijze voor het vervaardigen van een uit optische vezels samengestelde vezelbundel.
JPH0615571A (ja) * 1990-12-07 1994-01-25 I N R Kenkyusho:Kk 研削材
US5152917B1 (en) * 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5247765A (en) * 1991-07-23 1993-09-28 Abrasive Technology Europe, S.A. Abrasive product comprising a plurality of discrete composite abrasive pellets in a resilient resin matrix
GB2263911B (en) * 1991-12-10 1995-11-08 Minnesota Mining & Mfg Tool comprising abrasives in an electrodeposited metal binder dispersed in a binder matrix
US5437754A (en) * 1992-01-13 1995-08-01 Minnesota Mining And Manufacturing Company Abrasive article having precise lateral spacing between abrasive composite members
US5435816A (en) * 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
US5454844A (en) * 1993-10-29 1995-10-03 Minnesota Mining And Manufacturing Company Abrasive article, a process of making same, and a method of using same to finish a workpiece surface
JPH08197434A (ja) * 1995-01-23 1996-08-06 Sony Corp 研磨用パッド
US5689374A (en) * 1995-03-08 1997-11-18 Lightpath Technologies, Inc. GRIN lens and method of manufacturing
US5958794A (en) * 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US5692950A (en) * 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
US5792544A (en) * 1996-11-12 1998-08-11 Eastwind Lapidary, Inc. Flexible abrasive article and method for making the same
US5726730A (en) * 1996-12-19 1998-03-10 Xerox Corporation Optical equivalents of fiber optic face plates using reactive liquid crystals and polymers
US5876268A (en) * 1997-01-03 1999-03-02 Minnesota Mining And Manufacturing Company Method and article for the production of optical quality surfaces on glass
US6194317B1 (en) * 1998-04-30 2001-02-27 3M Innovative Properties Company Method of planarizing the upper surface of a semiconductor wafer
US6121143A (en) * 1997-09-19 2000-09-19 3M Innovative Properties Company Abrasive articles comprising a fluorochemical agent for wafer surface modification
ATE255079T1 (de) * 1997-09-26 2003-12-15 Element Six Pty Ltd Diamantpartikel, bestehend aus einem diamantenem kern und einem diamantenem überzug
JP2002503559A (ja) * 1998-02-19 2002-02-05 ミネソタ マイニング アンド マニュファクチャリング カンパニー ガラス研削用研磨製品および方法
KR100407227B1 (ko) * 1998-09-25 2003-11-28 미쓰비시 마테리알 가부시키가이샤 복합본드숫돌 및 수지결합상을 보유하는 숫돌
JP3791254B2 (ja) * 1998-09-25 2006-06-28 三菱マテリアル株式会社 複合ボンド砥石
US6706546B2 (en) * 1998-10-09 2004-03-16 Fujitsu Limited Optical reflective structures and method for making
US6634929B1 (en) * 1999-04-23 2003-10-21 3M Innovative Properties Company Method for grinding glass
US6394888B1 (en) * 1999-05-28 2002-05-28 Saint-Gobain Abrasive Technology Company Abrasive tools for grinding electronic components
JP2001009736A (ja) * 1999-06-24 2001-01-16 Daiwa Kasei Kogyo Kk シート状研磨材
US6319108B1 (en) * 1999-07-09 2001-11-20 3M Innovative Properties Company Metal bond abrasive article comprising porous ceramic abrasive composites and method of using same to abrade a workpiece
US6243520B1 (en) * 1999-08-16 2001-06-05 Schott Fiber Optics, Inc. Optical fiber bundle having an aligned optical fiber array and method of fabricating the same
DE60112740T2 (de) * 2000-05-09 2006-06-01 3M Innovative Properties Co., Saint Paul Poröser schleifgegenstand mit keramischen schleifcomposites, verfahren zur herstellung und verfahren zur verwendung
US7520800B2 (en) * 2003-04-16 2009-04-21 Duescher Wayne O Raised island abrasive, lapping apparatus and method of use
US8545583B2 (en) * 2000-11-17 2013-10-01 Wayne O. Duescher Method of forming a flexible abrasive sheet article
JP3943348B2 (ja) * 2001-06-06 2007-07-11 株式会社オハラ 光学ガラス
JP2003231051A (ja) * 2002-02-07 2003-08-19 Nihon Micro Coating Co Ltd 研磨装置及び方法
US6908784B1 (en) * 2002-03-06 2005-06-21 Micron Technology, Inc. Method for fabricating encapsulated semiconductor components
US6870311B2 (en) * 2002-06-07 2005-03-22 Lumileds Lighting U.S., Llc Light-emitting devices utilizing nanoparticles
US7429495B2 (en) * 2002-08-07 2008-09-30 Chang-Feng Wan System and method of fabricating micro cavities
US6790775B2 (en) * 2002-10-31 2004-09-14 Hewlett-Packard Development Company, L.P. Method of forming a through-substrate interconnect
US6768828B2 (en) * 2002-11-04 2004-07-27 Little Optics Inc. Integrated optical circuit with dense planarized cladding layer
US7221829B2 (en) * 2003-02-24 2007-05-22 Ngk Spark Plug Co., Ltd. Substrate assembly for supporting optical component and method of producing the same
DE10319274A1 (de) * 2003-04-29 2004-12-02 Osram Opto Semiconductors Gmbh Lichtquelle
US7009213B2 (en) * 2003-07-31 2006-03-07 Lumileds Lighting U.S., Llc Light emitting devices with improved light extraction efficiency
US7123015B2 (en) * 2004-09-29 2006-10-17 General Electric Company Magnetic resonance system and method
US20060091412A1 (en) * 2004-10-29 2006-05-04 Wheatley John A Polarized LED
US7304425B2 (en) * 2004-10-29 2007-12-04 3M Innovative Properties Company High brightness LED package with compound optical element(s)
US7330319B2 (en) * 2004-10-29 2008-02-12 3M Innovative Properties Company High brightness LED package with multiple optical elements
US20060091411A1 (en) * 2004-10-29 2006-05-04 Ouderkirk Andrew J High brightness LED package
US7329982B2 (en) * 2004-10-29 2008-02-12 3M Innovative Properties Company LED package with non-bonded optical element
US7404756B2 (en) * 2004-10-29 2008-07-29 3M Innovative Properties Company Process for manufacturing optical and semiconductor elements
US7494519B2 (en) * 2005-07-28 2009-02-24 3M Innovative Properties Company Abrasive agglomerate polishing method
US7169031B1 (en) * 2005-07-28 2007-01-30 3M Innovative Properties Company Self-contained conditioning abrasive article
KR101281342B1 (ko) * 2005-11-22 2013-07-02 쓰리엠 이노베이티브 프로퍼티즈 컴파니 발광용품 어레이 및 이의 제조 방법

Also Published As

Publication number Publication date
US7594845B2 (en) 2009-09-29
EP1954446A1 (en) 2008-08-13
US20070093181A1 (en) 2007-04-26
KR20080057295A (ko) 2008-06-24
CN101291780A (zh) 2008-10-22
WO2007047558A1 (en) 2007-04-26
JP2009512566A (ja) 2009-03-26
TW200730304A (en) 2007-08-16
KR101300874B1 (ko) 2013-08-27
EP1954446A4 (en) 2009-11-25

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