JP5366833B2 - 電気メッキを利用した導電ビア形成 - Google Patents

電気メッキを利用した導電ビア形成 Download PDF

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Publication number
JP5366833B2
JP5366833B2 JP2009551767A JP2009551767A JP5366833B2 JP 5366833 B2 JP5366833 B2 JP 5366833B2 JP 2009551767 A JP2009551767 A JP 2009551767A JP 2009551767 A JP2009551767 A JP 2009551767A JP 5366833 B2 JP5366833 B2 JP 5366833B2
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JP
Japan
Prior art keywords
layer
wafer
conductive
electroplating
forming
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JP2009551767A
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English (en)
Japanese (ja)
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JP2010519780A (ja
JP2010519780A5 (cg-RX-API-DMAC10.html
Inventor
ジー． スパークス、テリー
イー． ジョーンズ、ロバート
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NXP USA Inc
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NXP USA Inc
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Publication of JP2010519780A5 publication Critical patent/JP2010519780A5/ja
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    • H10W20/023—
    • H10W20/0234—
    • H10W20/0242—
    • H10W20/0261—
    • H10P14/47—
    • H10W20/057—
    • H10W72/242—
    • H10W72/9415—
    • H10W72/944—

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electroplating Methods And Accessories (AREA)
JP2009551767A 2007-02-27 2008-01-25 電気メッキを利用した導電ビア形成 Active JP5366833B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/679,512 US7741218B2 (en) 2007-02-27 2007-02-27 Conductive via formation utilizing electroplating
US11/679,512 2007-02-27
PCT/US2008/051987 WO2008106256A1 (en) 2007-02-27 2008-01-25 Conductive via formation utilizing electroplating

Publications (3)

Publication Number Publication Date
JP2010519780A JP2010519780A (ja) 2010-06-03
JP2010519780A5 JP2010519780A5 (cg-RX-API-DMAC10.html) 2011-03-17
JP5366833B2 true JP5366833B2 (ja) 2013-12-11

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ID=39716386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009551767A Active JP5366833B2 (ja) 2007-02-27 2008-01-25 電気メッキを利用した導電ビア形成

Country Status (5)

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US (1) US7741218B2 (cg-RX-API-DMAC10.html)
JP (1) JP5366833B2 (cg-RX-API-DMAC10.html)
CN (1) CN101622700B (cg-RX-API-DMAC10.html)
TW (1) TWI483312B (cg-RX-API-DMAC10.html)
WO (1) WO2008106256A1 (cg-RX-API-DMAC10.html)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7939941B2 (en) 2007-06-27 2011-05-10 Taiwan Semiconductor Manufacturing Company, Ltd. Formation of through via before contact processing
US7872357B2 (en) * 2008-03-05 2011-01-18 Taiwan Semiconductor Manufacturing Company, Ltd. Protection for bonding pads and methods of formation
US8853830B2 (en) * 2008-05-14 2014-10-07 Taiwan Semiconductor Manufacturing Company, Ltd. System, structure, and method of manufacturing a semiconductor substrate stack
US8691664B2 (en) * 2009-04-20 2014-04-08 Taiwan Semiconductor Manufacturing Company, Ltd. Backside process for a substrate
TWI471977B (zh) * 2009-05-15 2015-02-01 精材科技股份有限公司 功率金氧半場效電晶體封裝體
TWI504780B (zh) * 2009-09-04 2015-10-21 穩懋半導體股份有限公司 一種利用無電解電鍍法將金屬種子層鍍在半導體晶片的背面及導孔的製程方法
US8304863B2 (en) * 2010-02-09 2012-11-06 International Business Machines Corporation Electromigration immune through-substrate vias
US8654541B2 (en) 2011-03-24 2014-02-18 Toyota Motor Engineering & Manufacturing North America, Inc. Three-dimensional power electronics packages
US9105628B1 (en) * 2012-03-29 2015-08-11 Valery Dubin Through substrate via (TSuV) structures and method of making the same
US9219032B2 (en) 2012-07-09 2015-12-22 Qualcomm Incorporated Integrating through substrate vias from wafer backside layers of integrated circuits
US9159699B2 (en) * 2012-11-13 2015-10-13 Delta Electronics, Inc. Interconnection structure having a via structure
JP6104772B2 (ja) * 2013-03-29 2017-03-29 ソニーセミコンダクタソリューションズ株式会社 積層構造体及びその製造方法
US9754883B1 (en) * 2016-03-04 2017-09-05 International Business Machines Corporation Hybrid metal interconnects with a bamboo grain microstructure
US10432172B2 (en) * 2016-09-01 2019-10-01 Samsung Electro-Mechanics Co., Ltd. Bulk acoustic filter device and method of manufacturing the same
JP6877290B2 (ja) * 2017-08-03 2021-05-26 東京エレクトロン株式会社 被処理体を処理する方法
US10699954B2 (en) 2018-04-19 2020-06-30 Teledyne Scientific & Imaging, Llc Through-substrate vias formed by bottom-up electroplating
KR102904447B1 (ko) 2019-07-23 2025-12-29 삼성전자주식회사 반도체 장치
US11949008B2 (en) 2020-12-30 2024-04-02 Win Semiconductors Corp. Semiconductor structure and method for forming the same
US12412810B2 (en) * 2022-03-25 2025-09-09 Applied Materials, Inc. Single side via fill process for through-vias

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08279510A (ja) 1995-04-04 1996-10-22 Murata Mfg Co Ltd 半導体装置の製造方法
JPH11135506A (ja) * 1997-10-31 1999-05-21 Nec Corp 半導体装置の製造方法
US6221769B1 (en) * 1999-03-05 2001-04-24 International Business Machines Corporation Method for integrated circuit power and electrical connections via through-wafer interconnects
US6852627B2 (en) * 2003-03-05 2005-02-08 Micron Technology, Inc. Conductive through wafer vias
US7179738B2 (en) * 2004-06-17 2007-02-20 Texas Instruments Incorporated Semiconductor assembly having substrate with electroplated contact pads
US7109068B2 (en) * 2004-08-31 2006-09-19 Micron Technology, Inc. Through-substrate interconnect fabrication methods
JP2006210369A (ja) * 2005-01-25 2006-08-10 Murata Mfg Co Ltd 半導体装置およびその製造方法
JP2007049103A (ja) * 2005-08-05 2007-02-22 Zycube:Kk 半導体チップおよびその製造方法、ならびに半導体装置
US7772116B2 (en) * 2005-09-01 2010-08-10 Micron Technology, Inc. Methods of forming blind wafer interconnects
US7608538B2 (en) * 2007-01-05 2009-10-27 International Business Machines Corporation Formation of vertical devices by electroplating

Also Published As

Publication number Publication date
TW200850102A (en) 2008-12-16
JP2010519780A (ja) 2010-06-03
CN101622700A (zh) 2010-01-06
US20080206984A1 (en) 2008-08-28
US7741218B2 (en) 2010-06-22
WO2008106256A1 (en) 2008-09-04
TWI483312B (zh) 2015-05-01
CN101622700B (zh) 2011-05-25

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