JP5365829B2 - スイッチング素子およびその製造方法 - Google Patents
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- JP5365829B2 JP5365829B2 JP2007550242A JP2007550242A JP5365829B2 JP 5365829 B2 JP5365829 B2 JP 5365829B2 JP 2007550242 A JP2007550242 A JP 2007550242A JP 2007550242 A JP2007550242 A JP 2007550242A JP 5365829 B2 JP5365829 B2 JP 5365829B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 229910052751 metal Inorganic materials 0.000 claims abstract description 93
- 239000002184 metal Substances 0.000 claims abstract description 93
- 239000010416 ion conductor Substances 0.000 claims abstract description 76
- 229910021645 metal ion Inorganic materials 0.000 claims abstract description 27
- 150000002500 ions Chemical class 0.000 claims description 63
- 239000010410 layer Substances 0.000 claims description 56
- 238000000034 method Methods 0.000 claims description 37
- 239000011229 interlayer Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 20
- 238000011049 filling Methods 0.000 claims description 10
- 239000011148 porous material Substances 0.000 claims description 7
- 239000002244 precipitate Substances 0.000 claims description 5
- 238000001556 precipitation Methods 0.000 claims description 3
- 238000004090 dissolution Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 abstract description 7
- 230000008018 melting Effects 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 239000010949 copper Substances 0.000 description 44
- 239000007779 soft material Substances 0.000 description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 18
- 229910052802 copper Inorganic materials 0.000 description 18
- 239000000463 material Substances 0.000 description 17
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 238000003487 electrochemical reaction Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000008859 change Effects 0.000 description 7
- OMZSGWSJDCOLKM-UHFFFAOYSA-N copper(II) sulfide Chemical compound [S-2].[Cu+2] OMZSGWSJDCOLKM-UHFFFAOYSA-N 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 230000008021 deposition Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 4
- 229910001431 copper ion Inorganic materials 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052798 chalcogen Inorganic materials 0.000 description 2
- 150000004770 chalcogenides Chemical class 0.000 description 2
- 150000001787 chalcogens Chemical class 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910021612 Silver iodide Inorganic materials 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- 235000002597 Solanum melongena Nutrition 0.000 description 1
- 244000061458 Solanum melongena Species 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910004166 TaN Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- YRXWPCFZBSHSAU-UHFFFAOYSA-N [Ag].[Ag].[Te] Chemical compound [Ag].[Ag].[Te] YRXWPCFZBSHSAU-UHFFFAOYSA-N 0.000 description 1
- CDKKYSQRDKLOJV-UHFFFAOYSA-L [Cu](Cl)Cl.[Rb] Chemical compound [Cu](Cl)Cl.[Rb] CDKKYSQRDKLOJV-UHFFFAOYSA-L 0.000 description 1
- 229910052946 acanthite Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052789 astatine Inorganic materials 0.000 description 1
- RYXHOMYVWAEKHL-UHFFFAOYSA-N astatine atom Chemical compound [At] RYXHOMYVWAEKHL-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- GBRBMTNGQBKBQE-UHFFFAOYSA-L copper;diiodide Chemical compound I[Cu]I GBRBMTNGQBKBQE-UHFFFAOYSA-L 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 210000001787 dendrite Anatomy 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- -1 methylsiloxy Chemical group 0.000 description 1
- 239000011533 mixed conductor Substances 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052699 polonium Inorganic materials 0.000 description 1
- HZEBHPIOVYHPMT-UHFFFAOYSA-N polonium atom Chemical compound [Po] HZEBHPIOVYHPMT-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 229940045105 silver iodide Drugs 0.000 description 1
- 229940056910 silver sulfide Drugs 0.000 description 1
- XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/101—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including resistors or capacitors only
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/041—Modification of switching materials after formation, e.g. doping
- H10N70/046—Modification of switching materials after formation, e.g. doping by diffusion, e.g. photo-dissolution
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
- H10N70/8265—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices on sidewalls of dielectric structures, e.g. mesa-shaped or cup-shaped devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8822—Sulfides, e.g. CuS
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- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Description
本実施例の構成について説明する。図6A及び図6Bは、本実施例の2端子スイッチの一構成例を示す平面模式図および断面模式図である。図6A(平面図)のJJ’で切った部分の断面が図6B(断面図)に相当する。
図8A及び図8Bは、本実施例の2端子スイッチの一構成例を示す平面模式図および断面模式図である。図8A(平面図)のKK’で切った部分の断面が図8B(断面図)に相当する。
図9Aおよび図9Bは本実施例の3端子スイッチの一構成例を示す平面模式図および断面模式図である。図9A(平面図)のLL’で切った部分の断面が図9B(断面図)に相当する。
Claims (6)
- 金属イオンを供給可能な第1の電極と、
第2の電極と、
前記第1の電極および前記第2の電極に接触し、前記金属イオンがその内部を移動可能なイオン伝導体を含むイオン伝導部と、
硬度が前記イオン伝導体よりも小さく、前記第1の電極と前記第2の電極との間に前記イオン伝導部に沿って設けられた緩衝部と、
前記第1の電極と前記第2の電極との間に、前記第1の電極および前記第2の電極に達する開口部を有する絶縁膜と
を具備し、
前記第1の電極と前記第2の電極との間の電位差により、当該第1の電極と当該第2の電極との間で前記金属が析出または溶解することで、電気的特性が切り替わり、
前記緩衝部は、有孔性材料を含み、
前記イオン伝導部が前記開口部の側壁に配置され、
前記第2の電極が基板上に配置され、
前記イオン伝導部および前記緩衝部が前記第2の電極上に配置され、
前記第1の電極が前記イオン伝導部および前記緩衝部の上に配置されている
スイッチング素子。 - 請求項1に記載のスイッチング素子において、
前記イオン伝導部と接触し、前記金属イオンを供給可能な第3の電極を更に具備し、
前記第1の電極と前記第2電極と前記第3の電極との間の電位差により、当該第1の電極と前記第2の電極との間で前記金属が析出または溶解することで、電気的特性が切り替わる
スイッチング素子。 - 請求項2に記載のスイッチング素子において、
前記第1の電極および前記第3の電極が同一平面に設けられ、
前記第1の電極および前記第3の電極と前記第2の電極との間にこれら3つの電極に達する開口部を有する絶縁膜が設けられ、
前記イオン伝導部が前記開口部の側壁に配置されている
スイッチング素子。 - 請求項2又は3に記載のスイッチング素子において、
前記第2の電極が基板上に配置され、
前記イオン伝導部および前記緩衝部が前記第2の電極上に配置され、
前記第1の電極および前記第3の電極が前記イオン伝導部および前記緩衝部の上に配置されている
スイッチング素子。 - (a)基板上に第2の電極を形成する工程と、
(b)前記基板及び前記第2の電極を覆うように設けられた層間絶縁層に、前記第2の電極にかかるように、前記基板に略垂直に開口部を形成する工程と、
(c)前記開口部の側壁を覆うようにイオン伝導部を形成する工程と、
(d)前記イオン伝導部の内側に充填膜を充填する工程と、
(e)前記層間絶縁層、前記イオン伝導部及び前記充填膜の一部を覆うように第1の電極を形成する工程と
を具備し、
前記第1の電極は、金属イオンを供給可能であり、
前記イオン伝導部は、前記金属イオンがその内部を移動可能なイオン伝導体を含み、
前記充填膜は、硬度が前記イオン伝導体よりも小さく、有孔性材料を含み、
前記イオン伝導部および前記充填膜が前記第2の電極上に配置され、
前記第1の電極が前記イオン伝導部および前記充填膜の上に配置され、
前記第1の電極と前記第2の電極との間の電位差により、当該第1の電極と当該第2の電極との間で前記金属が析出または溶解することで、電気的特性が切り替わる
スイッチング素子の製造方法。 - 請求項5に記載のスイッチング素子の製造方法において、
前記(e)工程は、
(e1)前記層間絶縁層、前記イオン伝導部及び前記充填膜の一部を覆うように、前記第1の電極と離れて第3の電極を形成する工程を備える
スイッチング素子の製造方法。
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JP2007550242A JP5365829B2 (ja) | 2005-12-15 | 2006-12-15 | スイッチング素子およびその製造方法 |
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PCT/JP2006/325050 WO2007069725A1 (ja) | 2005-12-15 | 2006-12-15 | スイッチング素子およびその製造方法 |
JP2007550242A JP5365829B2 (ja) | 2005-12-15 | 2006-12-15 | スイッチング素子およびその製造方法 |
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JP5365829B2 true JP5365829B2 (ja) | 2013-12-11 |
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US (1) | US20090289371A1 (ja) |
JP (1) | JP5365829B2 (ja) |
WO (1) | WO2007069725A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102006030323A1 (de) * | 2006-04-21 | 2007-10-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Oberflächenbehandlung einer metallischen Substratoberfläche |
JP5170615B2 (ja) * | 2007-03-26 | 2013-03-27 | 株式会社船井電機新応用技術研究所 | スイッチング素子 |
JP5266654B2 (ja) * | 2007-03-27 | 2013-08-21 | 日本電気株式会社 | スイッチング素子およびスイッチング素子の製造方法 |
JP5088036B2 (ja) * | 2007-08-06 | 2012-12-05 | ソニー株式会社 | 記憶素子および記憶装置 |
US8664651B2 (en) | 2007-12-19 | 2014-03-04 | Nec Corporation | Switching device and method of manufacturing the same |
WO2009150751A1 (ja) | 2008-06-13 | 2009-12-17 | 株式会社船井電機新応用技術研究所 | スイッチング素子 |
WO2011016794A2 (en) * | 2009-07-28 | 2011-02-10 | Hewlett-Packard Development Company, L.P. | Memristors with asymmetric electrodes |
EP2966684B1 (en) * | 2013-03-09 | 2020-10-14 | Japan Science and Technology Agency | Electronic element |
JP2015060890A (ja) | 2013-09-17 | 2015-03-30 | 株式会社東芝 | 記憶装置 |
Citations (4)
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JPH06224412A (ja) * | 1992-09-22 | 1994-08-12 | Hitachi Ltd | 原子スイッチ回路及びシステム |
JP2000512058A (ja) * | 1996-05-30 | 2000-09-12 | アクソン テクノロジーズ コーポレイション | プログラマブルメタライゼーションセル構造およびその作製方法 |
WO2002021542A1 (en) * | 2000-09-08 | 2002-03-14 | Axon Technologies Corporation | Microelectronic programmable device and methods of forming and programming the same |
WO2003094227A1 (en) * | 2002-04-30 | 2003-11-13 | Japan Science And Technology Agency | Solid electrolyte switching device, fpga using same, memory device, and method for manufacturing solid electrolyte switching device |
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EP1044452B1 (en) * | 1997-12-04 | 2003-03-19 | Axon Technologies Corporation | Programmable sub-surface aggregating metallization structure and method of making same |
US6825489B2 (en) * | 2001-04-06 | 2004-11-30 | Axon Technologies Corporation | Microelectronic device, structure, and system, including a memory structure having a variable programmable property and method of forming the same |
US6635914B2 (en) * | 2000-09-08 | 2003-10-21 | Axon Technologies Corp. | Microelectronic programmable device and methods of forming and programming the same |
US6487106B1 (en) * | 1999-01-12 | 2002-11-26 | Arizona Board Of Regents | Programmable microelectronic devices and method of forming and programming same |
US6985378B2 (en) * | 1998-12-04 | 2006-01-10 | Axon Technologies Corporation | Programmable microelectronic device, structure, and system and method of forming the same |
EP1159743B1 (en) * | 1999-02-11 | 2007-05-02 | Arizona Board of Regents | Programmable microelectronic devices and methods of forming and programming same |
US7385219B2 (en) * | 2000-02-11 | 2008-06-10 | A{umlaut over (x)}on Technologies Corporation | Optimized solid electrolyte for programmable metallization cell devices and structures |
JP3593582B2 (ja) * | 2001-09-19 | 2004-11-24 | 彰 土井 | 銀イオン含有イオン伝導体の電界誘導黒化現象を利用した記憶素子 |
WO2003079463A2 (en) * | 2002-03-15 | 2003-09-25 | Axon Technologies Corporation | Programmable structure, an array including the structure, and methods of forming the same |
CN100407440C (zh) * | 2003-07-18 | 2008-07-30 | 日本电气株式会社 | 开关元件、驱动开关元件的方法、可重写的逻辑集成电路以及存储元件 |
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JPH06224412A (ja) * | 1992-09-22 | 1994-08-12 | Hitachi Ltd | 原子スイッチ回路及びシステム |
JP2000512058A (ja) * | 1996-05-30 | 2000-09-12 | アクソン テクノロジーズ コーポレイション | プログラマブルメタライゼーションセル構造およびその作製方法 |
WO2002021542A1 (en) * | 2000-09-08 | 2002-03-14 | Axon Technologies Corporation | Microelectronic programmable device and methods of forming and programming the same |
WO2003094227A1 (en) * | 2002-04-30 | 2003-11-13 | Japan Science And Technology Agency | Solid electrolyte switching device, fpga using same, memory device, and method for manufacturing solid electrolyte switching device |
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US20090289371A1 (en) | 2009-11-26 |
WO2007069725A1 (ja) | 2007-06-21 |
JPWO2007069725A1 (ja) | 2009-05-28 |
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