JP5360789B2 - p型酸化亜鉛薄膜及びその作製方法 - Google Patents
p型酸化亜鉛薄膜及びその作製方法 Download PDFInfo
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- JP5360789B2 JP5360789B2 JP2007176736A JP2007176736A JP5360789B2 JP 5360789 B2 JP5360789 B2 JP 5360789B2 JP 2007176736 A JP2007176736 A JP 2007176736A JP 2007176736 A JP2007176736 A JP 2007176736A JP 5360789 B2 JP5360789 B2 JP 5360789B2
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims description 420
- 239000010409 thin film Substances 0.000 title claims description 210
- 239000011787 zinc oxide Substances 0.000 title claims description 208
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 108
- 239000004065 semiconductor Substances 0.000 claims description 81
- 238000000137 annealing Methods 0.000 claims description 76
- 239000000758 substrate Substances 0.000 claims description 72
- 239000002019 doping agent Substances 0.000 claims description 61
- 239000012298 atmosphere Substances 0.000 claims description 60
- 238000000034 method Methods 0.000 claims description 51
- 230000005355 Hall effect Effects 0.000 claims description 50
- 238000005259 measurement Methods 0.000 claims description 49
- 229910052757 nitrogen Inorganic materials 0.000 claims description 46
- 239000010408 film Substances 0.000 claims description 37
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 26
- 229910052725 zinc Inorganic materials 0.000 claims description 26
- 239000011701 zinc Substances 0.000 claims description 26
- 229910052594 sapphire Inorganic materials 0.000 claims description 18
- 239000010980 sapphire Substances 0.000 claims description 18
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 14
- 230000003213 activating effect Effects 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 13
- 230000001590 oxidative effect Effects 0.000 claims description 13
- 239000011261 inert gas Substances 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 3
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 38
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 20
- 239000001272 nitrous oxide Substances 0.000 description 19
- 239000011574 phosphorus Substances 0.000 description 19
- 229910052698 phosphorus Inorganic materials 0.000 description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 17
- 239000001301 oxygen Substances 0.000 description 17
- 229910052760 oxygen Inorganic materials 0.000 description 17
- 239000007789 gas Substances 0.000 description 14
- 239000012299 nitrogen atmosphere Substances 0.000 description 14
- 238000005516 engineering process Methods 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 230000001678 irradiating effect Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000011160 research Methods 0.000 description 6
- 229910002601 GaN Inorganic materials 0.000 description 5
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 5
- 239000012300 argon atmosphere Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 4
- 230000004913 activation Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 3
- 125000004433 nitrogen atom Chemical group N* 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- 238000004549 pulsed laser deposition Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 241000723554 Pontia occidentalis Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 239000004637 bakelite Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002537 cosmetic Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000002829 nitrogen Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 238000003631 wet chemical etching Methods 0.000 description 1
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
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- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
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- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
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- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
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- Crystals, And After-Treatments Of Crystals (AREA)
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- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
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Description
(1)酸化亜鉛の薄膜中に添加したp型ドーパントを活性化する工程と、該工程の後の、酸化雰囲気中での低温アニールの工程とを組み合わせて、
上記前者が、薄膜を不活性ガス雰囲気中あるいは窒素ガス雰囲気中で、700〜1200℃の高温でアニールするか、あるいは、酸化亜鉛の薄膜を成長させる過程において、ドーパントの活性種を基板表面に照射することにより、p型ドーパントが活性化されている状態で薄膜中にドーピングする工程からなり、後者が、薄膜を酸化雰囲気中で200〜700℃の低い温度でアニールすることにより、酸化亜鉛半導体薄膜中でn型の原因となる膜中の過剰亜鉛を減少させる工程からなる方法により作製されたp型酸化亜鉛半導体薄膜であって、
1)ホール効果測定の結果のホール電圧−磁場特性のグラフの傾きが正であることでp型半導体であることが示されており、2)該薄膜中において、添加されたp型ドーパントが活性化された状態にあり、3)格子間の過剰亜鉛が取り除かれて存在しない状態にあり、4)その結果としてp型半導体化が実現されている状態にあり、5)ホール濃度が1×1015cm−3以上であり、6)電気抵抗率が100Ω・cm以下である、ことを特徴とするp型酸化亜鉛薄膜。
(2)基板を有し、該基板が、ガラス基板、サファイア基板、酸化亜鉛単結晶基板あるいは酸化亜鉛結晶性薄膜を表面層に有する基板であり、その上に作製するp型酸化亜鉛薄膜との格子定数の整合性や結晶の対称性を問わない、前記(1)に記載のp型酸化亜鉛薄膜。
(3)p型化させた酸化亜鉛薄膜が、単結晶性(エピタキシャル)薄膜あるいは多結晶性薄膜である、前記(1)に記載のp型酸化亜鉛薄膜。
(4)p型半導体であることが、ホールバーによるホール効果測定でホール電圧の磁場依存性から明確に示されるp型酸化亜鉛半導体薄膜を作製する方法であって、
酸化亜鉛のp型半導体特性を発現させるために、酸化亜鉛の薄膜中に添加したp型ドーパントを活性化する工程と、該工程の後の、酸化雰囲気中での低温アニールの工程とを組み合わせた構成からなり、
上記酸化亜鉛の薄膜中に添加したp型ドーパントを活性化する工程として、薄膜を不活性ガス雰囲気中あるいは窒素ガス雰囲気中で、700〜1200℃の高温でアニールするか、あるいは、酸化亜鉛の薄膜を成長させる過程において、ドーパントの活性種を基板表面に照射することにより、p型ドーパントが活性化されている状態で薄膜中にドーピングする工程を採り、上記低温アニールの工程として、薄膜を酸化雰囲気中で200〜700℃の低い温度でアニールすることにより、酸化亜鉛半導体薄膜中でn型の原因となる膜中の過剰亜鉛を減少させる工程を採り、これらによりp型半導体化を実現することを特徴とするp型酸化亜鉛薄膜の作製方法。
(5)酸化亜鉛をp型化するためのp型ドーパントとして、窒素を用い、これを単体あるいは他の元素と同時に添加する、前記(4)に記載のp型酸化亜鉛薄膜の作製方法。
(6)前記(1)から(3)のいずれか一項に記載のp型酸化亜鉛薄膜を基板上に形成した構造を有し、かつホール濃度が1×1015cm−3以上である該p型酸化亜鉛薄膜と、n型酸化亜鉛薄膜とを積層してp−n接合させた構造を有することを特徴とする発光素子。
(7)基板が、ガラス基板、サファイア基板、酸化亜鉛単結晶基板あるいは酸化亜鉛結晶性薄膜を表面に有する基板であり、その上に単結晶性(エピタキシャル)薄膜あるいは多結晶性薄膜を形成した構造を有する、前記(6)に記載の発光素子。
本発明は、高信頼性のp型酸化亜鉛半導体薄膜であって、薄膜中に添加されたp型ドーパントが活性化されていること、過剰亜鉛が取り除かれていること、ホール効果測定の結果のホール電圧−磁場特性のグラフの傾きからp型半導体であることが明確に示されていること、それにより、p型半導体化が実現されていること、を特徴とするものである。
(1)ホールバーによるホール効果測定において、ホール電圧の磁場依存性から明確にp型半導体であることが示されるp型酸化亜鉛薄膜、及びその作製方法を提供することができる。
(2)青色から紫外線に渡る波長の光を放射する発光素子を酸化亜鉛で実現するために必要な、p型の酸化亜鉛薄膜を、サファイア基板等の透明な基板上に形成する方法、それにより実現されるp型酸化亜鉛薄膜、及びその発光素子を提供することができる。
(3)酸化亜鉛を用いたワイドバンドギャップ半導体エレクトロニクス技術の基盤となるキャリア制御技術を提供することが可能となる。
(4)青色発光素子として広く使用されている窒化ガリウムに替わり得る高信頼性のp型酸化亜鉛の発光素子を提供することができる。
Claims (7)
- 酸化亜鉛の薄膜中に添加したp型ドーパントを活性化する工程と、該工程の後の、酸化雰囲気中での低温アニールの工程とを組み合わせて、
上記前者が、薄膜を不活性ガス雰囲気中あるいは窒素ガス雰囲気中で、700〜1200℃の高温でアニールするか、あるいは、酸化亜鉛の薄膜を成長させる過程において、ドーパントの活性種を基板表面に照射することにより、p型ドーパントが活性化されている状態で薄膜中にドーピングする工程からなり、後者が、薄膜を酸化雰囲気中で200〜700℃の低い温度でアニールすることにより、酸化亜鉛半導体薄膜中でn型の原因となる膜中の過剰亜鉛を減少させる工程からなる方法により作製されたp型酸化亜鉛半導体薄膜であって、
1)ホール効果測定の結果のホール電圧−磁場特性のグラフの傾きが正であることでp型半導体であることが示されており、2)該薄膜中において、添加されたp型ドーパントが活性化された状態にあり、3)格子間の過剰亜鉛が取り除かれて存在しない状態にあり、4)その結果としてp型半導体化が実現されている状態にあり、5)ホール濃度が1×1015cm−3以上であり、6)電気抵抗率が100Ω・cm以下である、ことを特徴とするp型酸化亜鉛薄膜。 - 基板を有し、該基板が、ガラス基板、サファイア基板、酸化亜鉛単結晶基板あるいは酸化亜鉛結晶性薄膜を表面層に有する基板であり、その上に作製するp型酸化亜鉛薄膜との格子定数の整合性や結晶の対称性を問わない、請求項1に記載のp型酸化亜鉛薄膜。
- p型化させた酸化亜鉛薄膜が、単結晶性(エピタキシャル)薄膜あるいは多結晶性薄膜である、請求項1に記載のp型酸化亜鉛薄膜。
- p型半導体であることが、ホールバーによるホール効果測定でホール電圧の磁場依存性から明確に示されるp型酸化亜鉛半導体薄膜を作製する方法であって、
酸化亜鉛のp型半導体特性を発現させるために、酸化亜鉛の薄膜中に添加したp型ドーパントを活性化する工程と、該工程の後の、酸化雰囲気中での低温アニールの工程とを組み合わせた構成からなり、
上記酸化亜鉛の薄膜中に添加したp型ドーパントを活性化する工程として、薄膜を不活性ガス雰囲気中あるいは窒素ガス雰囲気中で、700〜1200℃の高温でアニールするか、あるいは、酸化亜鉛の薄膜を成長させる過程において、ドーパントの活性種を基板表面に照射することにより、p型ドーパントが活性化されている状態で薄膜中にドーピングする工程を採り、上記低温アニールの工程として、薄膜を酸化雰囲気中で200〜700℃の低い温度でアニールすることにより、酸化亜鉛半導体薄膜中でn型の原因となる膜中の過剰亜鉛を減少させる工程を採り、これらによりp型半導体化を実現することを特徴とするp型酸化亜鉛薄膜の作製方法。 - 酸化亜鉛をp型化するためのp型ドーパントとして、窒素を用い、これを単体あるいは他の元素と同時に添加する、請求項4に記載のp型酸化亜鉛薄膜の作製方法。
- 請求項1から3のいずれか一項に記載のp型酸化亜鉛薄膜を基板上に形成した構造を有し、かつホール濃度が1×1015cm−3以上である該p型酸化亜鉛薄膜と、n型酸化亜鉛薄膜とを積層してp−n接合させた構造を有することを特徴とする発光素子。
- 基板が、ガラス基板、サファイア基板、酸化亜鉛単結晶基板あるいは酸化亜鉛結晶性薄膜を表面に有する基板であり、その上に単結晶性(エピタキシャル)薄膜あるいは多結晶性薄膜を形成した構造を有する、請求項6に記載の発光素子。
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US20120298998A1 (en) | 2011-05-25 | 2012-11-29 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming oxide semiconductor film, semiconductor device, and method for manufacturing semiconductor device |
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