JP5347355B2 - 振動片、振動子及び加速度センサ - Google Patents

振動片、振動子及び加速度センサ Download PDF

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Publication number
JP5347355B2
JP5347355B2 JP2008183508A JP2008183508A JP5347355B2 JP 5347355 B2 JP5347355 B2 JP 5347355B2 JP 2008183508 A JP2008183508 A JP 2008183508A JP 2008183508 A JP2008183508 A JP 2008183508A JP 5347355 B2 JP5347355 B2 JP 5347355B2
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JP
Japan
Prior art keywords
thin film
piezoelectric thin
piezoelectric
axis direction
main surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2008183508A
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English (en)
Japanese (ja)
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JP2009081836A (ja
JP2009081836A5 (enExample
Inventor
誠 古畑
政宏 押尾
天光 樋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2008183508A priority Critical patent/JP5347355B2/ja
Priority to US12/204,746 priority patent/US8004165B2/en
Publication of JP2009081836A publication Critical patent/JP2009081836A/ja
Publication of JP2009081836A5 publication Critical patent/JP2009081836A5/ja
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Publication of JP5347355B2 publication Critical patent/JP5347355B2/ja
Expired - Fee Related legal-status Critical Current
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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2008183508A 2007-09-05 2008-07-15 振動片、振動子及び加速度センサ Expired - Fee Related JP5347355B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008183508A JP5347355B2 (ja) 2007-09-05 2008-07-15 振動片、振動子及び加速度センサ
US12/204,746 US8004165B2 (en) 2007-09-05 2008-09-04 Tuning fork oscillating piece, tuning fork oscillator, and acceleration sensor

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007229816 2007-09-05
JP2007229816 2007-09-05
JP2008183508A JP5347355B2 (ja) 2007-09-05 2008-07-15 振動片、振動子及び加速度センサ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008253523A Division JP2009081858A (ja) 2007-09-05 2008-09-30 圧電薄膜音叉振動片、圧電薄膜音叉振動子及び加速度センサ

Publications (3)

Publication Number Publication Date
JP2009081836A JP2009081836A (ja) 2009-04-16
JP2009081836A5 JP2009081836A5 (enExample) 2011-08-04
JP5347355B2 true JP5347355B2 (ja) 2013-11-20

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ID=40656229

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008183508A Expired - Fee Related JP5347355B2 (ja) 2007-09-05 2008-07-15 振動片、振動子及び加速度センサ
JP2008253523A Withdrawn JP2009081858A (ja) 2007-09-05 2008-09-30 圧電薄膜音叉振動片、圧電薄膜音叉振動子及び加速度センサ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2008253523A Withdrawn JP2009081858A (ja) 2007-09-05 2008-09-30 圧電薄膜音叉振動片、圧電薄膜音叉振動子及び加速度センサ

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JP (2) JP5347355B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011004035A (ja) * 2009-06-17 2011-01-06 Seiko Epson Corp 屈曲振動片および屈曲振動片の製造方法
KR101105085B1 (ko) 2009-12-31 2012-01-16 중앙대학교 산학협력단 철-폴리머 일렉트릿을 이용한 가속도계
JP2013239895A (ja) * 2012-05-15 2013-11-28 Seiko Epson Corp 振動子の製造方法
CN105210295B (zh) * 2013-05-13 2017-10-03 株式会社村田制作所 振动装置
JP2015001420A (ja) * 2013-06-14 2015-01-05 セイコーエプソン株式会社 ジャイロセンサー素子、ジャイロ装置、電子機器および移動体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1047971A (ja) * 1996-08-05 1998-02-20 Nippon Soken Inc 角速度センサ
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP2004251663A (ja) * 2003-02-18 2004-09-09 Fujitsu Media Device Kk 角速度センサ
JP4599848B2 (ja) * 2004-02-18 2010-12-15 パナソニック株式会社 角速度センサ
JP4515180B2 (ja) * 2004-07-20 2010-07-28 Ｎｅｃトーキン株式会社 音叉型圧電振動ジャイロ装置
JP2007071757A (ja) * 2005-09-08 2007-03-22 Citizen Watch Co Ltd 振動体及びそれを用いた振動ジャイロ
JP2007183147A (ja) * 2006-01-06 2007-07-19 Matsushita Electric Ind Co Ltd 振動素子およびこの振動素子を用いた角速度センサ

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Publication number Publication date
JP2009081836A (ja) 2009-04-16
JP2009081858A (ja) 2009-04-16

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