JP2009081836A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2009081836A5 JP2009081836A5 JP2008183508A JP2008183508A JP2009081836A5 JP 2009081836 A5 JP2009081836 A5 JP 2009081836A5 JP 2008183508 A JP2008183508 A JP 2008183508A JP 2008183508 A JP2008183508 A JP 2008183508A JP 2009081836 A5 JP2009081836 A5 JP 2009081836A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- element according
- resonator element
- driving
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 2
- 230000001133 acceleration Effects 0.000 claims 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910002113 barium titanate Inorganic materials 0.000 claims 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims 1
- 238000005452 bending Methods 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims 1
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008183508A JP5347355B2 (ja) | 2007-09-05 | 2008-07-15 | 振動片、振動子及び加速度センサ |
| US12/204,746 US8004165B2 (en) | 2007-09-05 | 2008-09-04 | Tuning fork oscillating piece, tuning fork oscillator, and acceleration sensor |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007229816 | 2007-09-05 | ||
| JP2007229816 | 2007-09-05 | ||
| JP2008183508A JP5347355B2 (ja) | 2007-09-05 | 2008-07-15 | 振動片、振動子及び加速度センサ |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008253523A Division JP2009081858A (ja) | 2007-09-05 | 2008-09-30 | 圧電薄膜音叉振動片、圧電薄膜音叉振動子及び加速度センサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009081836A JP2009081836A (ja) | 2009-04-16 |
| JP2009081836A5 true JP2009081836A5 (enExample) | 2011-08-04 |
| JP5347355B2 JP5347355B2 (ja) | 2013-11-20 |
Family
ID=40656229
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008183508A Expired - Fee Related JP5347355B2 (ja) | 2007-09-05 | 2008-07-15 | 振動片、振動子及び加速度センサ |
| JP2008253523A Withdrawn JP2009081858A (ja) | 2007-09-05 | 2008-09-30 | 圧電薄膜音叉振動片、圧電薄膜音叉振動子及び加速度センサ |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008253523A Withdrawn JP2009081858A (ja) | 2007-09-05 | 2008-09-30 | 圧電薄膜音叉振動片、圧電薄膜音叉振動子及び加速度センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP5347355B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011004035A (ja) * | 2009-06-17 | 2011-01-06 | Seiko Epson Corp | 屈曲振動片および屈曲振動片の製造方法 |
| KR101105085B1 (ko) | 2009-12-31 | 2012-01-16 | 중앙대학교 산학협력단 | 철-폴리머 일렉트릿을 이용한 가속도계 |
| JP2013239895A (ja) * | 2012-05-15 | 2013-11-28 | Seiko Epson Corp | 振動子の製造方法 |
| CN105210295B (zh) * | 2013-05-13 | 2017-10-03 | 株式会社村田制作所 | 振动装置 |
| JP2015001420A (ja) * | 2013-06-14 | 2015-01-05 | セイコーエプソン株式会社 | ジャイロセンサー素子、ジャイロ装置、電子機器および移動体 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1047971A (ja) * | 1996-08-05 | 1998-02-20 | Nippon Soken Inc | 角速度センサ |
| JP3972790B2 (ja) * | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ |
| JP2004251663A (ja) * | 2003-02-18 | 2004-09-09 | Fujitsu Media Device Kk | 角速度センサ |
| JP4599848B2 (ja) * | 2004-02-18 | 2010-12-15 | パナソニック株式会社 | 角速度センサ |
| JP4515180B2 (ja) * | 2004-07-20 | 2010-07-28 | Ｎｅｃトーキン株式会社 | 音叉型圧電振動ジャイロ装置 |
| JP2007071757A (ja) * | 2005-09-08 | 2007-03-22 | Citizen Watch Co Ltd | 振動体及びそれを用いた振動ジャイロ |
| JP2007183147A (ja) * | 2006-01-06 | 2007-07-19 | Matsushita Electric Ind Co Ltd | 振動素子およびこの振動素子を用いた角速度センサ |
-
2008
- 2008-07-15 JP JP2008183508A patent/JP5347355B2/ja not_active Expired - Fee Related
- 2008-09-30 JP JP2008253523A patent/JP2009081858A/ja not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102144355B (zh) | 压电发电装置 | |
| JP6604200B2 (ja) | 加速度センサー、計測システム、および計測装置 | |
| JP2009081836A5 (enExample) | ||
| Lei et al. | MEMS-based thick film PZT vibrational energy harvester | |
| WO2008150536A3 (en) | Piezo devices with air-spaced cantilever | |
| US20140290362A1 (en) | Vibrator element and method of manufacturing the same | |
| US9729087B2 (en) | Vibration power generator, vibration monitoring device, and vibration monitoring system | |
| CN108020362B (zh) | 力检测传感器、力觉传感器以及机器人 | |
| JP2010028536A5 (enExample) | ||
| JP2009225503A5 (enExample) | ||
| JP2010078333A (ja) | 検出センサ、振動子 | |
| WO2008059781A1 (en) | Electronic component and method for manufacturing the same | |
| JP5251667B2 (ja) | 電子部品 | |
| CN103138701B (zh) | 电子装置及其调整方法 | |
| Wixom et al. | A new acoustic transducer with a pressure-deformed piezoelectric diaphragm | |
| JP2007171059A (ja) | センサ装置 | |
| JP2011191091A5 (ja) | 振動片、振動子およびセンサー装置 | |
| JP2016176892A5 (enExample) | ||
| CN103546115A (zh) | 振动片、振子、电子装置、电子设备、移动体 | |
| JPWO2021131121A5 (enExample) | ||
| JP6392679B2 (ja) | ガスセンサ | |
| JP2010103805A (ja) | 屈曲振動片、屈曲振動子、および圧電デバイス | |
| JP2003166828A5 (enExample) | ||
| JP2007279592A5 (enExample) | ||
| JP6064342B2 (ja) | 振動片および電子機器 |