JP2009524065A5 - - Google Patents

Download PDF

Info

Publication number
JP2009524065A5
JP2009524065A5 JP2008551480A JP2008551480A JP2009524065A5 JP 2009524065 A5 JP2009524065 A5 JP 2009524065A5 JP 2008551480 A JP2008551480 A JP 2008551480A JP 2008551480 A JP2008551480 A JP 2008551480A JP 2009524065 A5 JP2009524065 A5 JP 2009524065A5
Authority
JP
Japan
Prior art keywords
piezoelectric layer
piezoelectric
distal end
adjacent end
coupled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008551480A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009524065A (ja
JP4907670B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2007/001835 external-priority patent/WO2007087328A2/en
Publication of JP2009524065A publication Critical patent/JP2009524065A/ja
Publication of JP2009524065A5 publication Critical patent/JP2009524065A5/ja
Application granted granted Critical
Publication of JP4907670B2 publication Critical patent/JP4907670B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008551480A 2006-01-23 2007-01-23 自己励振・自己検出型圧電カンチレバーセンサー Expired - Fee Related JP4907670B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US76117206P 2006-01-23 2006-01-23
US60/761,172 2006-01-23
US80702006P 2006-07-11 2006-07-11
US60/807,020 2006-07-11
PCT/US2007/001835 WO2007087328A2 (en) 2006-01-23 2007-01-23 Self-exciting, self-sensing piezoelectric cantilever sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011256656A Division JP2012068260A (ja) 2006-01-23 2011-11-24 自己励振・自己検出型圧電カンチレバーセンサー

Publications (3)

Publication Number Publication Date
JP2009524065A JP2009524065A (ja) 2009-06-25
JP2009524065A5 true JP2009524065A5 (enExample) 2010-03-11
JP4907670B2 JP4907670B2 (ja) 2012-04-04

Family

ID=38255042

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008551480A Expired - Fee Related JP4907670B2 (ja) 2006-01-23 2007-01-23 自己励振・自己検出型圧電カンチレバーセンサー
JP2011256656A Withdrawn JP2012068260A (ja) 2006-01-23 2011-11-24 自己励振・自己検出型圧電カンチレバーセンサー

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011256656A Withdrawn JP2012068260A (ja) 2006-01-23 2011-11-24 自己励振・自己検出型圧電カンチレバーセンサー

Country Status (8)

Country Link
US (3) US7942056B2 (enExample)
EP (1) EP1977224B1 (enExample)
JP (2) JP4907670B2 (enExample)
CN (1) CN101371132B (enExample)
AU (1) AU2007208310B2 (enExample)
CA (1) CA2637930C (enExample)
ES (1) ES2412887T3 (enExample)
WO (1) WO2007087328A2 (enExample)

Families Citing this family (59)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
US8171795B1 (en) 2006-01-23 2012-05-08 Drexel University Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air
CA2637930C (en) * 2006-01-23 2016-09-06 Drexel University Self-exciting, self-sensing piezoelectric cantilever sensor
WO2007133619A1 (en) * 2006-05-10 2007-11-22 Drexel University Molecular control of surface coverage
WO2008021187A2 (en) * 2006-08-09 2008-02-21 Drexel University Flow cells for peizoelectric cantilever sensors
US8481335B2 (en) 2006-11-27 2013-07-09 Drexel University Specificity and sensitivity enhancement in cantilever sensing
US8927259B2 (en) 2006-11-28 2015-01-06 Drexel University Piezoelectric microcantilever sensors for biosensing
US7992431B2 (en) 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
AU2008223285A1 (en) * 2007-02-01 2008-09-12 Drexel University A hand-held phase-shift detector for sensor applications
US7892759B2 (en) 2007-02-16 2011-02-22 Drexel University Enhanced sensitivity of a cantilever sensor via specific bindings
US8512947B2 (en) 2007-02-16 2013-08-20 Drexel University Detection of nucleic acids using a cantilever sensor
US8191421B2 (en) 2007-05-07 2012-06-05 Raytheon Company Digital ballistic impact detection system
US8056391B2 (en) 2007-05-07 2011-11-15 Raytheon Company Digital wound detection system
WO2009035732A2 (en) * 2007-05-30 2009-03-19 Drexel University Detection and quantification of biomarkers via a piezoelectric cantilever sensor
US8241569B2 (en) 2007-11-23 2012-08-14 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
JP2009133772A (ja) * 2007-11-30 2009-06-18 National Institute Of Advanced Industrial & Technology 検出センサ、振動子
US8225655B2 (en) * 2007-12-18 2012-07-24 Sae Magnetics (H.K.) Ltd. Altitude sensing systems for flying height adjustment
US8236508B2 (en) * 2008-01-29 2012-08-07 Drexel University Detecting and measuring live pathogens utilizing a mass detection device
US8741663B2 (en) 2008-03-11 2014-06-03 Drexel University Enhanced detection sensitivity with piezoelectric sensors
US8562546B2 (en) 2008-05-16 2013-10-22 Drexel University System and method for evaluating tissue
US7522029B1 (en) 2008-07-24 2009-04-21 International Business Machines Corporation Phase change actuator
US8349611B2 (en) * 2009-02-17 2013-01-08 Leversense Llc Resonant sensors and methods of use thereof for the determination of analytes
EP2409153B1 (en) * 2009-03-20 2014-05-14 Attana AB Method of detecting ligand binding making use of a mass-sensitive sensor comprising immobilised cells on its surface
WO2010135435A2 (en) * 2009-05-19 2010-11-25 Drexel University Detection and measurement of mass change using an electromechanical resonator
US8204174B2 (en) 2009-06-04 2012-06-19 Nextray, Inc. Systems and methods for detecting an image of an object by use of X-ray beams generated by multiple small area sources and by use of facing sides of adjacent monochromator crystals
WO2010141735A2 (en) 2009-06-04 2010-12-09 Nextray, Inc. Strain matching of crystals and horizontally-spaced monochromator and analyzer crystal arrays in diffraction enhanced imaging systems and related methods
US8722427B2 (en) * 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
US20110086368A1 (en) * 2009-10-08 2011-04-14 Drexel University Method for immune response detection
US10139270B2 (en) 2010-07-07 2018-11-27 Drexel University Asymmetric sensor
EP2630479B1 (en) 2010-10-20 2020-04-08 Qorvo US, Inc. Apparatus and method for measuring binding kinetics and concentration with a resonating sensor
US9222867B2 (en) 2011-01-05 2015-12-29 Brian L. Norling Resonant micromachined biochemical sensor
FR2971851A1 (fr) * 2011-02-22 2012-08-24 Commissariat Energie Atomique Procede de fabrication d'un biocapteur
US20130047710A1 (en) * 2011-08-26 2013-02-28 Purdue Research Foundation Nonlinear, bifurcation-based mass sensor
US9121785B2 (en) 2012-04-24 2015-09-01 Sarcos Lc Non-powered impact recorder
CN103828393B (zh) * 2012-09-21 2016-09-14 京瓷株式会社 声音产生器、声音产生装置以及电子设备
SG10201608433QA (en) * 2012-09-24 2016-12-29 Sekisui Chemical Co Ltd Leakage detector, leakage detection method, and pipe network monitoring apparatus
WO2014168924A1 (en) * 2013-04-08 2014-10-16 Northeastern University A novel sensor system utilizing piezoelectric microcantilever coupled with resonating circuit
CN103424327B (zh) * 2013-07-25 2015-06-17 大连理工大学 一种基于变厚度梁结构的高阶模态微质量传感器
JP6390119B2 (ja) * 2014-03-06 2018-09-19 富士通株式会社 センサユニット、並びに分析装置、及び分析方法
CN104362894B (zh) * 2014-11-04 2017-01-18 福建工程学院 一种用于泥泞环境行走的超声电机及使用方法
JP6392679B2 (ja) * 2015-02-09 2018-09-19 オリンパス株式会社 ガスセンサ
CN108349723B (zh) 2015-07-13 2024-03-01 勇愿公司 用于通过基部激励进行微悬臂致动的系统和方法
CN105510641A (zh) * 2015-11-26 2016-04-20 国家纳米科学中心 一种高次谐振型石英音叉微悬臂及制作方法
CN105403734A (zh) * 2015-11-26 2016-03-16 国家纳米科学中心 高次谐振型原子力显微镜微悬臂及其制作方法
CN105890722A (zh) * 2016-06-13 2016-08-24 常州大学 利用共振原理测量dna分子质量的方法
CN106130402A (zh) * 2016-06-29 2016-11-16 上海理工大学 一种柔性涡流摆动能量的捕获与测量流体流速的装置
US20180003677A1 (en) * 2016-06-30 2018-01-04 Intel Corporation Piezoelectric package-integrated chemical species-sensitive resonant devices
EP3431982A1 (en) * 2017-07-18 2019-01-23 Nanosurf AG Microcantilever
CN108180979A (zh) * 2017-12-11 2018-06-19 杨松 部件状态检测的装置及方法
US10352888B2 (en) * 2017-12-19 2019-07-16 International Business Machines Corporation Ultrasensitive sensor based on a piezoelectric transistor
KR102692565B1 (ko) * 2018-11-20 2024-08-07 삼성전자주식회사 공진기, 이를 포함하는 공진기 시스템 및 공진기 제조 방법
CN110044469B (zh) * 2019-03-19 2022-04-22 深圳大学 一种运动检测装置及制备方法与应用
US11631800B2 (en) 2019-08-16 2023-04-18 Globalfoundries Singapore Pte. Ltd. Piezoelectric MEMS devices and methods of forming thereof
CN110987157A (zh) * 2019-12-26 2020-04-10 西安交通大学 悬臂梁挠曲电效应矢量水听器
CN111229577B (zh) * 2020-02-14 2021-06-01 山东理工大学 微梁超谐波同步共振信号倍频调谐放大装置
KR102371459B1 (ko) 2020-05-25 2022-03-08 한국과학기술연구원 물체 인식 장치
KR102892297B1 (ko) 2020-11-03 2025-11-26 삼성전자주식회사 미소 기계식 공진기 및 이를 채용한 공진기 시스템
CN113405947B (zh) * 2021-06-21 2022-07-26 电子科技大学 一种基于qcm的液体粘度检测仪
CN119198440B (zh) * 2024-10-31 2025-12-05 西安交通大学 一种振动耦合双微悬臂板mems黏度传感器芯片及其工作方法

Family Cites Families (70)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4186599A (en) * 1976-12-29 1980-02-05 Rosemount Inc. Vortex shedding flowmeter assembly
US4791818A (en) * 1987-07-20 1988-12-20 Itt Corporation Cantilever beam, insertable, vortex meter sensor
US5212988A (en) * 1988-02-29 1993-05-25 The Reagents Of The University Of California Plate-mode ultrasonic structure including a gel
US5283037A (en) * 1988-09-29 1994-02-01 Hewlett-Packard Company Chemical sensor utilizing a surface transverse wave device
US5079199A (en) * 1989-04-14 1992-01-07 Nec Corporation Method of manufacturing dielectric ceramic compositions of lead-based perovskite
US5116759A (en) * 1990-06-27 1992-05-26 Fiberchem Inc. Reservoir chemical sensors
US5162691A (en) * 1991-01-22 1992-11-10 The United States Of America As Represented By The Secretary Of The Army Cantilevered air-gap type thin film piezoelectric resonator
JPH0773732A (ja) * 1993-06-23 1995-03-17 Sharp Corp 誘電体薄膜素子及びその製造方法
US5445008A (en) * 1994-03-24 1995-08-29 Martin Marietta Energy Systems, Inc. Microbar sensor
US6183815B1 (en) * 1994-04-01 2001-02-06 University Of Pittsburgh Method and composition for surface treatment of metals
US5883705A (en) * 1994-04-12 1999-03-16 The Board Of Trustees Of The Leland Stanford, Jr. University Atomic force microscope for high speed imaging including integral actuator and sensor
US5742377A (en) * 1994-04-12 1998-04-21 The Board Of Trustees Of The Leland Stanford, Jr. University Cantilever for scanning probe microscope including piezoelectric element and method of using the same
US5583300A (en) * 1994-05-06 1996-12-10 The Foxboro Company Dual sensor vortex flow meter
US5631514A (en) * 1994-06-09 1997-05-20 The United States Of America As Represented By The United States Department Of Energy Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
US5719324A (en) * 1995-06-16 1998-02-17 Lockheed Martin Energy Systems, Inc. Microcantilever sensor
US5825275A (en) * 1995-10-27 1998-10-20 University Of Maryland Composite shape memory micro actuator
SE9701721D0 (sv) * 1997-05-07 1997-05-07 Pacesetter Ab Sensor
WO1998050773A2 (en) * 1997-05-08 1998-11-12 University Of Minnesota Microcantilever biosensor
DE69834645T2 (de) * 1997-07-29 2007-05-03 Polyprobe, Inc. Dendritische nukleinsäuren mit maximaler selbstzusammenlagerung
US6465934B1 (en) * 1997-09-08 2002-10-15 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device
US6170981B1 (en) * 1998-05-07 2001-01-09 Purdue Research Foundation In situ micromachined mixer for microfluidic analytical systems
JP3545269B2 (ja) 1998-09-04 2004-07-21 日本碍子株式会社 質量センサ及び質量検出方法
DE19850803A1 (de) * 1998-11-04 2000-05-11 Bosch Gmbh Robert Sensoranordnung und ein Verfahren zur Ermittlung der Dichte und der Viskosität einer Flüssigkeit
US6289717B1 (en) * 1999-03-30 2001-09-18 U. T. Battelle, Llc Micromechanical antibody sensor
GB9909308D0 (en) * 1999-04-22 1999-06-16 Univ Cambridge Tech Measurement and use of molecular interactions
US7763475B2 (en) * 1999-04-22 2010-07-27 Inverness Medical Switzerland Gmbh Measurement and use of molecular interactions
US6336366B1 (en) * 1999-09-24 2002-01-08 Ut-Battelle, Llc Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film
GB9925373D0 (en) * 1999-10-27 1999-12-29 Schlumberger Ltd Downhole instrumentation and cleaning system
WO2001033226A1 (en) * 1999-11-03 2001-05-10 International Business Machines Corporation Cantilever sensors and transducers
WO2001077624A2 (en) * 2000-04-05 2001-10-18 The Charles Stark Draper Laboratory, Inc. Apparatus and method for measuring the mass of a substance
EP1274966B1 (en) * 2000-04-20 2005-04-06 The University of Bristol Resonant probe driving arrangement and scanning probe microscope
US7148017B1 (en) * 2000-07-12 2006-12-12 Cornell Research Foundation, Inc. High sensitivity mechanical resonant sensor
US6545273B1 (en) * 2000-10-24 2003-04-08 Advanced Micro Devices, Inc. Use of multiple tips on AFM to deconvolve tip effects
US20020170290A1 (en) * 2001-05-18 2002-11-21 Victor Bright Multi-dimensional micro-electromechanical assemblies and method of making same
US20030020377A1 (en) * 2001-07-30 2003-01-30 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element and piezoelectric/electrostrictive device and production method thereof
US20060198760A1 (en) * 2001-08-02 2006-09-07 General Electric Company Opto-acoustic sensor device and associated method
CN2504633Y (zh) 2001-11-16 2002-08-07 复旦大学 分子筛修饰的谐振式微梁化学生物传感器
CN1714458A (zh) * 2002-05-07 2005-12-28 加利福尼亚技术学院 用于gaas nems的二维电子气激励和传导的装置和方法
KR100479687B1 (ko) * 2002-05-30 2005-03-30 한국과학기술연구원 캔틸레버 센서 및 그 제조 방법
WO2003102218A2 (en) * 2002-06-03 2003-12-11 Arizona Board Of Regents Hybrid microcantilever sensors
EP1530581A4 (en) * 2002-06-12 2006-08-30 Datascope Investment Corp POLYMERIC MARKING MOLECULES
CA2496777A1 (en) * 2002-08-29 2004-05-06 Bioscale, Inc. Resonant sensor and sensing system
KR100494561B1 (ko) * 2002-11-25 2005-06-13 한국전자통신연구원 스위칭 소자 및 이를 구비하는 전자 회로 장치
JP2004356206A (ja) * 2003-05-27 2004-12-16 Fuji Photo Film Co Ltd 積層構造体及びその製造方法
EP1644473B1 (en) * 2003-06-03 2014-01-15 Cantimer Incorporated Phase change sensor
US7329536B2 (en) * 2003-06-05 2008-02-12 Oakland University Piezoimmunosensor
US20050016276A1 (en) * 2003-06-06 2005-01-27 Palo Alto Sensor Technology Innovation Frequency encoding of resonant mass sensors
US6990852B2 (en) * 2003-07-28 2006-01-31 Becton Dickinson & Company System and method for detecting particles
US7232545B2 (en) * 2003-09-16 2007-06-19 Steris Inc. Sensor for determining concentration of fluid sterilant
WO2005043126A2 (en) * 2003-10-27 2005-05-12 Drexel University Piezoelectric cantilever sensors
KR100552696B1 (ko) 2003-11-12 2006-02-20 삼성전자주식회사 발진회로가 적용된 미세 질량 측정 장치 및 방법
KR100613398B1 (ko) * 2003-11-25 2006-08-17 한국과학기술연구원 캔틸레버 센서형 분석 시스템, 제조 방법 및 이를 이용한극미세 물질 감지 방법
US7194891B2 (en) * 2004-04-20 2007-03-27 Massachusetts Institute Of Technology High-temperature gas sensors
US7497133B2 (en) * 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
US7066004B1 (en) * 2004-09-02 2006-06-27 Sandia Corporation Inertial measurement unit using rotatable MEMS sensors
KR100583233B1 (ko) 2004-09-16 2006-05-26 한국과학기술연구원 생체물질 측정 시스템 및 방법
EP1872474A2 (en) * 2005-04-06 2008-01-02 Bioscale, Inc. Electrically responsive device
US7263874B2 (en) * 2005-06-08 2007-09-04 Bioscale, Inc. Methods and apparatus for determining properties of a fluid
US7819011B2 (en) * 2005-08-23 2010-10-26 Georgia Tech Research Corporation High-Q longitudinal block resonators with annexed platforms for mass sensing applications
CA2637930C (en) * 2006-01-23 2016-09-06 Drexel University Self-exciting, self-sensing piezoelectric cantilever sensor
WO2007133619A1 (en) * 2006-05-10 2007-11-22 Drexel University Molecular control of surface coverage
WO2008021187A2 (en) * 2006-08-09 2008-02-21 Drexel University Flow cells for peizoelectric cantilever sensors
WO2008021189A2 (en) * 2006-08-09 2008-02-21 Drexel University Controlling accumulation of select adsorbers on a piezoelectric cantilever sensor
KR100834829B1 (ko) * 2006-12-19 2008-06-03 삼성전자주식회사 멀티 비트 전기 기계적 메모리 소자 및 그의 제조방법
US8512947B2 (en) * 2007-02-16 2013-08-20 Drexel University Detection of nucleic acids using a cantilever sensor
US7892759B2 (en) * 2007-02-16 2011-02-22 Drexel University Enhanced sensitivity of a cantilever sensor via specific bindings
WO2009035732A2 (en) * 2007-05-30 2009-03-19 Drexel University Detection and quantification of biomarkers via a piezoelectric cantilever sensor
US8236508B2 (en) * 2008-01-29 2012-08-07 Drexel University Detecting and measuring live pathogens utilizing a mass detection device
US7522029B1 (en) * 2008-07-24 2009-04-21 International Business Machines Corporation Phase change actuator
WO2010135435A2 (en) * 2009-05-19 2010-11-25 Drexel University Detection and measurement of mass change using an electromechanical resonator

Similar Documents

Publication Publication Date Title
JP2009524065A5 (enExample)
JP3388060B2 (ja) 流体の特性測定用素子及び流体の特性測定装置
JP2011254569A5 (enExample)
CN104081171B (zh) 用于确定和/或监测至少一个过程变量的设备
JP2014062032A5 (enExample)
JP2013539254A5 (enExample)
JP2012156493A5 (enExample)
JP2009517129A5 (enExample)
JP2010028536A5 (enExample)
JP2015537439A5 (enExample)
JP2007060465A5 (enExample)
JP2014166942A5 (enExample)
JP2013128073A5 (enExample)
JP2009124791A5 (enExample)
JP2010028610A5 (enExample)
JP2014062034A5 (enExample)
EP2073284A3 (en) Piezoelectric/electrostrictive membrane element
CN105378614B (zh) 按压检测传感器
JP2006147839A (ja) 圧電／電歪デバイス
JP2014062035A5 (enExample)
JP2014063994A5 (enExample)
JP2014168054A5 (enExample)
JP2009005024A5 (enExample)
Shi et al. Exact analysis of multi-layer piezoelectric/composite cantilevers
WO2007123278A1 (ja) 圧電／電歪膜型素子