JP2009524065A5 - - Google Patents

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JP2009524065A5
JP2009524065A5 JP2008551480A JP2008551480A JP2009524065A5 JP 2009524065 A5 JP2009524065 A5 JP 2009524065A5 JP 2008551480 A JP2008551480 A JP 2008551480A JP 2008551480 A JP2008551480 A JP 2008551480A JP 2009524065 A5 JP2009524065 A5 JP 2009524065A5
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piezoelectric layer
piezoelectric
distal end
adjacent end
coupled
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JP2009524065A (ja
JP4907670B2 (ja
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Priority claimed from PCT/US2007/001835 external-priority patent/WO2007087328A2/en
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JP2008551480A 2006-01-23 2007-01-23 自己励振・自己検出型圧電カンチレバーセンサー Expired - Fee Related JP4907670B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US76117206P 2006-01-23 2006-01-23
US60/761,172 2006-01-23
US80702006P 2006-07-11 2006-07-11
US60/807,020 2006-07-11
PCT/US2007/001835 WO2007087328A2 (en) 2006-01-23 2007-01-23 Self-exciting, self-sensing piezoelectric cantilever sensor

Related Child Applications (1)

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JP2011256656A Division JP2012068260A (ja) 2006-01-23 2011-11-24 自己励振・自己検出型圧電カンチレバーセンサー

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JP2009524065A JP2009524065A (ja) 2009-06-25
JP2009524065A5 true JP2009524065A5 (enExample) 2010-03-11
JP4907670B2 JP4907670B2 (ja) 2012-04-04

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JP2008551480A Expired - Fee Related JP4907670B2 (ja) 2006-01-23 2007-01-23 自己励振・自己検出型圧電カンチレバーセンサー
JP2011256656A Withdrawn JP2012068260A (ja) 2006-01-23 2011-11-24 自己励振・自己検出型圧電カンチレバーセンサー

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JP2011256656A Withdrawn JP2012068260A (ja) 2006-01-23 2011-11-24 自己励振・自己検出型圧電カンチレバーセンサー

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US (3) US7942056B2 (enExample)
EP (1) EP1977224B1 (enExample)
JP (2) JP4907670B2 (enExample)
CN (1) CN101371132B (enExample)
AU (1) AU2007208310B2 (enExample)
CA (1) CA2637930C (enExample)
ES (1) ES2412887T3 (enExample)
WO (1) WO2007087328A2 (enExample)

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CN111229577B (zh) * 2020-02-14 2021-06-01 山东理工大学 微梁超谐波同步共振信号倍频调谐放大装置
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