JP5342608B2 - 材料厚みを測定する装置及びシステム - Google Patents

材料厚みを測定する装置及びシステム Download PDF

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Publication number
JP5342608B2
JP5342608B2 JP2011156181A JP2011156181A JP5342608B2 JP 5342608 B2 JP5342608 B2 JP 5342608B2 JP 2011156181 A JP2011156181 A JP 2011156181A JP 2011156181 A JP2011156181 A JP 2011156181A JP 5342608 B2 JP5342608 B2 JP 5342608B2
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JP
Japan
Prior art keywords
sensor device
substrate
piezoelectric element
piezoelectric
piezoelectric sensor
Prior art date
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Expired - Fee Related
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JP2011156181A
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English (en)
Japanese (ja)
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JP2012027020A5 (https=
JP2012027020A (ja
Inventor
マシュー・クローン
ポール・アロイシアス・マイヤー
ジェームス・ノーマン・バーシンガー
イン・ファン
フレッド・マシューズ
ネイサン・スミス
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General Electric Co
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General Electric Co
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Publication of JP2012027020A5 publication Critical patent/JP2012027020A5/ja
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Expired - Fee Related legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/11—Analysing solids by measuring attenuation of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/228—Details, e.g. general constructional or apparatus details related to high temperature conditions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0258—Structural degradation, e.g. fatigue of composites, ageing of oils

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2011156181A 2010-07-21 2011-07-15 材料厚みを測定する装置及びシステム Expired - Fee Related JP5342608B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/840,485 2010-07-21
US12/840,485 US8264129B2 (en) 2010-07-21 2010-07-21 Device and system for measuring material thickness

Publications (3)

Publication Number Publication Date
JP2012027020A JP2012027020A (ja) 2012-02-09
JP2012027020A5 JP2012027020A5 (https=) 2012-11-29
JP5342608B2 true JP5342608B2 (ja) 2013-11-13

Family

ID=44584009

Family Applications (1)

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JP2011156181A Expired - Fee Related JP5342608B2 (ja) 2010-07-21 2011-07-15 材料厚みを測定する装置及びシステム

Country Status (5)

Country Link
US (2) US8264129B2 (https=)
EP (1) EP2410587A3 (https=)
JP (1) JP5342608B2 (https=)
CN (1) CN102346022A (https=)
CA (1) CA2745558C (https=)

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Also Published As

Publication number Publication date
EP2410587A3 (en) 2013-07-17
EP2410587A2 (en) 2012-01-25
US20120019105A1 (en) 2012-01-26
JP2012027020A (ja) 2012-02-09
CN102346022A (zh) 2012-02-08
US8264129B2 (en) 2012-09-11
CA2745558A1 (en) 2012-01-21
CA2745558C (en) 2018-09-04
US20120294124A1 (en) 2012-11-22

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