JP5339974B2 - インダクタ装置及びその製造方法 - Google Patents

インダクタ装置及びその製造方法 Download PDF

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Publication number
JP5339974B2
JP5339974B2 JP2009057414A JP2009057414A JP5339974B2 JP 5339974 B2 JP5339974 B2 JP 5339974B2 JP 2009057414 A JP2009057414 A JP 2009057414A JP 2009057414 A JP2009057414 A JP 2009057414A JP 5339974 B2 JP5339974 B2 JP 5339974B2
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JP
Japan
Prior art keywords
layer
planar coil
insulating layer
pattern layer
inductor device
Prior art date
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Active
Application number
JP2009057414A
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English (en)
Japanese (ja)
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JP2010212468A (ja
JP2010212468A5 (enExample
Inventor
直寛 真篠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2009057414A priority Critical patent/JP5339974B2/ja
Priority to US12/708,829 priority patent/US8004382B2/en
Publication of JP2010212468A publication Critical patent/JP2010212468A/ja
Publication of JP2010212468A5 publication Critical patent/JP2010212468A5/ja
Application granted granted Critical
Publication of JP5339974B2 publication Critical patent/JP5339974B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H01F17/0013—Printed inductances with stacked layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041—Printed circuit coils
    • H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type
    • H01F17/0006—Printed inductances
    • H01F2017/008—Electric or magnetic shielding of printed inductances
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49073—Electromagnet, transformer or inductor by assembling coil and core

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
JP2009057414A 2009-03-11 2009-03-11 インダクタ装置及びその製造方法 Active JP5339974B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009057414A JP5339974B2 (ja) 2009-03-11 2009-03-11 インダクタ装置及びその製造方法
US12/708,829 US8004382B2 (en) 2009-03-11 2010-02-19 Inductor device, and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009057414A JP5339974B2 (ja) 2009-03-11 2009-03-11 インダクタ装置及びその製造方法

Publications (3)

Publication Number Publication Date
JP2010212468A JP2010212468A (ja) 2010-09-24
JP2010212468A5 JP2010212468A5 (enExample) 2012-02-23
JP5339974B2 true JP5339974B2 (ja) 2013-11-13

Family

ID=42730219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009057414A Active JP5339974B2 (ja) 2009-03-11 2009-03-11 インダクタ装置及びその製造方法

Country Status (2)

Country Link
US (1) US8004382B2 (enExample)
JP (1) JP5339974B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6283158B2 (ja) * 2012-04-12 2018-02-21 新光電気工業株式会社 配線基板、及び、配線基板の製造方法
KR20140011693A (ko) * 2012-07-18 2014-01-29 삼성전기주식회사 파워 인덕터용 자성체 모듈, 파워 인덕터 및 그 제조 방법
KR101771749B1 (ko) * 2012-12-28 2017-08-25 삼성전기주식회사 인덕터
KR20140094324A (ko) * 2013-01-22 2014-07-30 삼성전기주식회사 공통모드필터 및 이의 제조방법
JP6514708B2 (ja) * 2014-09-03 2019-05-15 ローム株式会社 配線内蔵基板およびその製造方法、およびモジュールおよびその製造方法
KR20160037652A (ko) * 2014-09-29 2016-04-06 엘지이노텍 주식회사 무선 전력 송신 장치 및 무선 전력 수신 장치
JP7529414B2 (ja) * 2020-02-26 2024-08-06 株式会社村田製作所 インダクタ部品
TWI888813B (zh) * 2022-03-30 2025-07-01 韓商斯天克有限公司 線圈基板及其製造方法和電子裝置
US20250246357A1 (en) * 2024-01-31 2025-07-31 Avago Technologies International Sales Pte. Limited Systems and methods for integrating inductors within printed circuit boards

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960006848B1 (ko) * 1990-05-31 1996-05-23 가부시끼가이샤 도시바 평면형 자기소자
JP3382215B2 (ja) * 1990-05-31 2003-03-04 株式会社東芝 平面型磁気素子及びその製造方法並びに平面型磁気素子を備えた半導体装置
JP3114392B2 (ja) * 1992-10-15 2000-12-04 富士電機株式会社 薄膜形磁気誘導素子
JPH0765650A (ja) * 1993-08-31 1995-03-10 Kyocera Corp 透明導電膜上の金属電極層およびその製造方法
AU6468198A (en) * 1997-05-02 1998-11-27 Board Of Trustees Of The Leland Stanford Junior University Patterned ground shields for integrated circuit inductors
JPH11354323A (ja) 1998-06-05 1999-12-24 Mitsubishi Electric Corp インダクタ
JP2000269035A (ja) * 1999-03-15 2000-09-29 Toshiba Corp 平面磁気素子
DE19945855A1 (de) * 1999-09-24 2001-03-29 Bosch Gmbh Robert Mikrospule
JP4811543B2 (ja) 2000-09-08 2011-11-09 学校法人早稲田大学 微細パターンの作製方法
US6593838B2 (en) * 2000-12-19 2003-07-15 Atheros Communications Inc. Planar inductor with segmented conductive plane
US6373121B1 (en) * 2001-03-23 2002-04-16 United Microelectronics Corp. Silicon chip built-in inductor structure
KR101001429B1 (ko) * 2002-03-05 2010-12-14 히다치 가세고교 가부시끼가이샤 수지 부착 금속박, 그를 이용한 프린트 배선판 및 그의 제조 방법
US20040195650A1 (en) * 2003-04-04 2004-10-07 Tsung-Ju Yang High-Q inductor device with a shielding pattern embedded in a substrate
WO2005032226A1 (ja) * 2003-09-29 2005-04-07 Tamura Corporation 多層積層回路基板
DE102004022139B4 (de) * 2004-05-05 2007-10-18 Atmel Germany Gmbh Verfahren zur Herstellung einer Spiralinduktivität auf einem Substrat und nach einem derartigen Verfahren hergestelltes Bauelement
JP2006059959A (ja) * 2004-08-19 2006-03-02 Oki Electric Ind Co Ltd 半導体装置、及び半導体装置の製造方法
JP4638322B2 (ja) * 2005-10-25 2011-02-23 Ｔｄｋ株式会社 コモンモードフィルタ
US7323948B2 (en) * 2005-08-23 2008-01-29 International Business Machines Corporation Vertical LC tank device
JP2008010697A (ja) * 2006-06-30 2008-01-17 Matsushita Electric Ind Co Ltd インダクタンス部品
JP2008010695A (ja) 2006-06-30 2008-01-17 Matsushita Electric Ind Co Ltd インダクタンス部品
JP4336996B2 (ja) * 2006-10-03 2009-09-30 セイコーエプソン株式会社 めっき基板の製造方法
TWI303957B (en) * 2006-12-11 2008-12-01 Ind Tech Res Inst Embedded inductor devices and fabrication methods thereof
JP2008205179A (ja) 2007-02-20 2008-09-04 Tdk Corp 薄膜磁気デバイス
WO2010140297A1 (ja) * 2009-06-04 2010-12-09 日本電気株式会社 半導体装置及び信号伝達方法

Also Published As

Publication number Publication date
JP2010212468A (ja) 2010-09-24
US20100231344A1 (en) 2010-09-16
US8004382B2 (en) 2011-08-23

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