1303836 九、發明說明： 【發明所屬之技術領域】 、本發明係關於線圈零件，詳言之，係關於例如適於用 作為共模扼流圈等之線圈零件。 【先前技術】 專利文獻1中，提出了一種可以作為共模扼流圈等來 吏用之線圈零件。此線圈零件，係具備由上下磁性體基板 所挾之非磁性體層、以及形成在此非磁性體層内之一對線 圈電極的共模扼流圈。一對線圈電極，係在厚度方向透過 、、、邑、彖層積層對向配置。各線圈電極分別由兩層之並聯螺旋 狀電極所構成。螺旋狀電極，能以良好效率得到大共模阻 抗，且因磁通集中而能得到高耦合度。因此，具有此構成 之共模扼流圈，能得到大共模阻抗且線圈間之高耦合，而 旎將常模阻抗抑制得很低。此外，由於各線圈係分別由兩 層並列螺旋狀電極所構成，與一層電極相較，能使電極之 截面積成為兩倍，而將線圈之直流阻抗抑制得很低。 此外，專利文獻2中，主要係提出一種用來抑制在具 有咼速JFI號傳送糸統之數位電路等中所放射之電磁干擾的 共模扼流圈。此共模扼流圈，係在包含磁芯之磁路中透過 絕緣層對向配置由一對曲折（Meander)形狀之平行平板電極 所形成之電極圖案，並以平衡線路之微小區間的差動電感 (differential Inductance)與電容來調整特性阻抗。 專利文獻1 :特開2003-133 135號公報 專利文獻2 :特開2000-2773 35號公報 1303836 然而’先前技術之專利文獻！所記載之線圈零件 以下問題。也就是說’ & 了獲得所欲之特性阻抗而須降低 線圈間電容時，必須將對向之線圈線寬作細、或加大線圈 間距離、然而’由於僅將線圈線寬作細會使得直流阻抗變 大’因此並不一理想，此外，若僅加大線圈間距離，則磁性 體基板間之距離變寬使得阻抗之取得效率降低，且耦合度 亦會降低。又，相反的，為了獲得所欲之特性阻抗而須增 加線圈間電容時，必須將對向之線圈線寬作粗、或縮小線 圈間距離。然而，僅將線圈線寬作粗時由於空間上有限制、， 因此無法獲得所須之電感，此外，若僅縮小線圈間之距離， 則很難確保磁性體基板間之絕緣性，在信賴性上會有限 制0 另一方面，先前技術之專利文獻2所記載之共模扼流 圈零件有以下之問題。也就是說，將曲折（]^“11(1以）形狀之 平行平板電極藉由以既定間隔對向配置時雖能獲得均勻之 春特性阻抗，但由於是曲折（Meander)形狀，因此無法以良好 效率獲彳于大阻抗，且無法獲得高耦合度而使常模阻抗增 加，並不理想。再者，若欲獲得所欲之阻抗的話，在調整 線圈間之容量時，也會遇到與專利文獻丨相同之問題。 【發明内容】 本發明為解決上述問題，其目的在提供一種能促進小 型化及低南度化，並以低阻抗廣範圍的取得阻抗、提高線 圈間之耦合，並能提高特性阻抗之設計自由度的線圈零 1303836 本發明請求項1之線圈零件，包含上 基板，該等磁性It A „ 卜一對之磁性體 于_基板之間之非磁性體層 性體層内在上下方向分離 及在該非磁 卜第2線圈電極，其特徵在於··該第卜^置之一對第 分別具有彼此分離之至少兩層螺旋狀第線圈電極’ 該第卜第2線圈電極之各第〗圖案電極二圖案電極， 下方向最内側而彼舲斟A 你刀別配置在上 取_而彼此對向，且該第丨圖案 或小於分別配詈力盆从y 之面積大於、 刀則己置在其外側之第2圖案電極。 又，本發明請求項2之線圈零件，係★主 中，該第1、第2綠園 ’、明求項1之發明 、 電極皆具有兩層螺旋狀 又，本發明請求項3之_零件案電極/ 發明中，該第1同垒+ , 係明求項1或2之 不同弟圖案電極之線寬與該第2圖案電極之線寬 又，本發明請求項4之線圈零件，係請 員3之任一發明中，， 至咕衣 2圈索電極之線圈阻數不:囷索電極之線圏阻數與該第 捉進==請:項1〜請求項4之發明，提供-種能 摄古地 並以低阻抗廣範圍的取得阻抗、 “線圈間之麵合，並能提高特性阻抗之一“ ：1 圈零件。 寸丨王|且抗之5又叶自由度的線 【實施方式】 以：’根據圖1〜圖3所示之實施形態說明本發明。 本實施形態之線圈灾杜】Λ 氣很 固；件10,例如，如圖1〜圖3所示， 、備：上下之磁性體基板u，12，設在此等磁性體基板π,12 7 1303836 間且由複數個絕緣層13A，13B層積而成之非磁性體層13， 在此非磁性體層13内於上下方向彼此對向配置、在俯視 形狀呈螺旋狀之一對第1、，第2線圈電極14，1 5，以及與 此等線圈電極14，15之兩端部分別電氣連接之二對第i、 第2外部電極16A，16B，17A，17B，而用作為例如共模扼 流圈。又，在上側之磁性體基板12與非磁性體層13之間 設有用來黏著此兩者之黏著層1 8。 線圈零件10，通常，可在母基板上同時形成複數個。 第1、第2線圈電極14，15等之内部配線可藉由微影技術 等來形成。又，以下敘述中，將包含上下之磁性體基板i】， 12、非磁性體層13及第丨、第2線圈電極14, 15的線圈零 件本體’視需要稱為線圈零件本體1〇A。 磁性體基板11，12 ’只要是由磁性材料形成的話即無 特別限制’作為磁性體材料，以使用具有良好高頻特性： 絲鐵（Ferdte)材料較f為了在磁性體基板n，12上形 成絶緣層13 ’其接合面之表面粗度Ra最好是研磨至〇乃 非磁性體I 13，係由複數個絕緣層13A，UB層積形 成二如圖3所示，在非層性體層13巾、位於由上面算起 之弟3層及第4層之絕緣層 0 ^ θ 係在第1線圈電極14盥 弟2線圈電極15之間，用來 ^ 的声… 以-疋線圈零件10之特性阻抗 0層 此等絕緣層i 3 A i 3Β之报忐 可使用3β之形成方法無特別限制，例如 J便用$疋轉塗布法。 絕緣層13Α，13Β，只要是使 疋便用非磁性絕緣性材料形成 1303836 並無特別限制’作為絕緣性材料，例如以使用聚醯 _脂、環氧樹脂、苯並環丁歸等熱硬化性樹脂或是吨 、破璃㈣較佳。此外，作為絕緣性材料，亦可視 獨使用具有感光性之感光性樹脂材料或是與上述材 科組合使i由感光性樹脂材料形成之絕緣層13A 13B， ==緣層13A’ 13B形成貫通孔（viahc>ie)時使用。欲形 時’係在將絕緣層13A，13B^罩遮住後，使絕 之：广UB曝光’經顯影處理來形成貫通孔。絕緣層"A 予又，例如以之範圍較佳，絕緣層uB之厚度， ==定特性阻抗’因此…一之範圍較佳。用 化性樹脂。 了乂使用t醯亞胺樹脂等之熱硬 第1、第2線圈電極14, 15，如圖！及圖3所示，係 位置Lr以彼此對稱之方式對向配置，具有彼此重疊之 別二；各線圈電極A 15 ’如後述般，具有實質上分 卜1為相同大小之螺旋形狀之第1、第2圖案電極，第 弟2圖案電極係透過各自之引出電極連接於第丄外部 及第2外部電極i7a，i7b(參照圖⑽。由 、$ 2電極14, 15分別形成為螺旋狀，因此可獲得 只關之阻抗4促進線圈零件1Q之小型化、低高度化。 第1、第2線圈電極！ 4 !^欠& a β 過s 14, 15各自之第1圖案電極，透 分別：:〇心厚之絕緣層UB彼此對向配置，並與配置在 以奸 弟2圖案電極有不同之面積。線圈零件1〇，係 第2線圈電極14’ 15分別對向之第1圖案電極面 9 1303836 積之大小’來調整第丨、 而能在不降低共模阻抗二:圈電極14, 15間之電容， 抗。亦即，本發明中，心馬合度的情形下，調整特性阻 a - ^ 糸將第1、第2線圈電極14 15 | 自之弟1圖案電極之面積 4, 15各 而能能將線圈零件10=小於第2圖案電極之面積， 將Κ 艾特性阻抗設定得較高，相反地， 積，=第1圖案電極之面積作成大於第2圖案電極之面 '、p旎將線圈零件10之特性阻抗設定得較低。 以下，具體說明第 造。第彳^ h 第2線圈電極14, 15之線圈構 弟2線圈電極14，15，除了只在分別第ι、第2 極面積之大小關係為上下顛倒之上下對稱構造外， ^具有實質上之相同構造，因此以第1線 中心進行說明。 馬 第1線圈電極14’如圖1(b)〜圖3所示，係透過絕緣 曰13B位於第2線圈電極⑽之上側。第卜線圈電極μ， 如圖3所示，具有：透過絕緣層UA彼此上下配置且並聯 =二層螺旋狀的第1、第2圖案電極141A，14ib，以及由 第第2圖案電極14lA，141B之兩端部分別拉出至第工 外部電極16A，16B之各個的一對引出電極142A，l42B， 143/，143B，一邊之引出電極142A，143A分別連接於一邊 之第1外部電極16A，另一邊之引出電極142B，143B則分 別連接至另-邊之第i外部電極16B。帛1線圈電極i4， 由於上下一層之第1、第2圖案電極141八，係透過第 1外邠包極1 6A，1 6B並聯，因此截面積大致增加一倍，直 流阻抗變低。 1303836 第1線圈電極14，其第1圖案電極141A位於上下方 向内側（上侧），第2圖案電極141B位於上下方向外側（下 側）。第2線圈電極15，其第}圖案電極151A位於上下方 向内側（上側），第2圖案電極ϊ 5 1B位於上下方向外侧（下 側）。接著，第1圖案電極141A，151A之線寬，分別較第 2圖案電極141B，1 5 1 B之線寬細，形成為較小之面積。藉 由縮j上下之弟1、弟2線圈電極14，15分別對向之第1 圖案電極141A，151A之面積，即能在不降低共模阻抗與耦 合度之情況下，縮小兩線圈14，15間之電容，提高線圈零 件10之特性阻抗。此外，即使1圖案電極i4iA，BIB之 線寬較細，但只要使第2圖案電極141B，mB之線寬較粗 的話，即能避免第i、帛2線圈電極14, 15直流阻抗之增 加0 、，接著，參照圖2、圖3說明第丨、第2圖案電極141A，MiB 之亚如構造。χ ’圖2⑷中第丨圖案電極141A係以虛線 顯不。圖2(b)、(c)中，以細線顯示線寬較細之第工圖案電 2 141A ’以粗線顯示線寬較寬之第2圖案電極141b，以 前頭方向顯示電流方向。 第i圖案電極⑷A’如圖2⑷、圖3所示，係以一引 电極142A為起點’以順時針方向描繪出矩形狀螺旋， 2緣層13B之大致中心為終點。第1圖案電極MU之 :引出電極142B，由於係位於絕緣層πΒ上第丨圖案 。141A之外側’無法在絕緣層13B上直接連接另—引 出電極 11 1303836 系，無法直接連接帛1圖案電極141A之終點與另一引出 錢刚的區間係中斷，如後述般將此部份之引㈣線 以弟2圖案電極141B之引出配線來加以取代。 另-方面，第2圖案電極141B，如圖2⑷、w 3所示， 與第1圖案電極141A相同的’係以—引出電極題為起 點’以順時針方向描畫出螺旋狀，以I㈣UA之大致中 心為終點。此終點與配置於第2圖案電極i4ib外側之另1303836 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a coil component, and more particularly to a coil component suitable for use as a common mode choke coil or the like. [Prior Art] Patent Document 1 proposes a coil component that can be used as a common mode choke coil or the like. The coil component includes a non-magnetic layer which is formed by the upper and lower magnetic substrates, and a common mode choke coil formed in the pair of coil electrodes in the non-magnetic layer. The pair of coil electrodes are arranged to face each other in the thickness direction, and the 邑 and 彖 layers are opposed to each other. Each coil electrode is composed of two parallel spiral electrodes. The spiral electrode can obtain large common mode impedance with good efficiency, and high coupling can be obtained due to concentration of magnetic flux. Therefore, the common mode choke coil having this configuration can obtain a large common mode impedance and a high coupling between coils, and 抑制 suppresses the normal mode impedance to a low level. Further, since each of the coils is composed of two parallel spiral electrodes, the cross-sectional area of the electrode can be doubled as compared with the one electrode, and the DC resistance of the coil can be suppressed to be low. Further, Patent Document 2 mainly proposes a common mode choke coil for suppressing electromagnetic interference radiated in a digital circuit or the like having an idle JFI number transmission system. The common mode choke coil is formed by arranging an electrode pattern formed by a pair of meander-shaped parallel plate electrodes in the magnetic circuit including the magnetic core through the insulating layer, and is differentially arranged in a minute interval of the balanced line. Differential Inductance and capacitance to adjust the characteristic impedance. Patent Document 1: JP-A-2003-133 135 Patent Document 2: JP-A-2000-2773 35 No. 1303836 However, the patent document of the prior art! The coil parts described are as follows. That is to say, '& to obtain the desired characteristic impedance and to reduce the inter-coil capacitance, you must make the opposite coil line width thin, or increase the distance between the coils, but 'because only the coil line width will be fine It is not preferable to increase the DC resistance. Further, if only the distance between the coils is increased, the distance between the magnetic substrates becomes wider, so that the impedance acquisition efficiency is lowered and the degree of coupling is also lowered. On the contrary, in order to increase the inter-coil capacitance in order to obtain the desired characteristic impedance, it is necessary to make the line width of the opposite coil thick or to reduce the distance between the coils. However, when the coil line width is made thick, the space is limited, so that the required inductance cannot be obtained. Further, if only the distance between the coils is reduced, it is difficult to ensure insulation between the magnetic substrates, and reliability is obtained. There is a limitation in the above. On the other hand, the common mode choke coil described in the prior art Patent Document 2 has the following problems. In other words, a parallel plate electrode having a meandering shape of 11 (1) can be obtained with a uniform spring characteristic impedance by being disposed oppositely at a predetermined interval, but since it is a meander shape, it cannot be Good efficiency is obtained by large impedance, and it is not ideal to increase the high coupling degree and increase the normal mode impedance. Moreover, if you want to obtain the desired impedance, you will encounter The present invention has been made to solve the above problems, and an object of the present invention is to provide a method for improving the miniaturization and the low southness, and obtaining impedance with a wide range of low impedance and improving coupling between coils. The coil zero of the design freedom of the characteristic impedance is 1303836. The coil component of claim 1 of the present invention comprises an upper substrate, and the magnetic properties of the pair of magnetic materials are in the non-magnetic layer of the non-magnetic layer between the substrates. Directional separation and in the non-magnetic second coil electrode, wherein one of the pair of the first electrodes has at least two layers of helical coil electrodes separated from each other The second pattern electrode of each of the second coil electrodes is the second pattern electrode, and the lower side is the innermost side, and the other side of the second coil electrode is disposed on the upper side and opposite to each other, and the second pattern is smaller than the corresponding force basin. The area of y is larger than the second pattern electrode which is placed on the outer side of the knife. The coil part of the second aspect of the invention is the invention of the first and second green gardens, and the invention of the first item The electrode has two layers of spiral shape, and in the invention, the third embodiment of the electrode/invention of the present invention, the first line of the same base +, is the line width of the different pattern electrode of the first or second item and the second The line width of the pattern electrode is further, in the invention of the coil component of claim 4, in any of the inventions of the invention, the number of coil resistances of the cable electrode of the lap is not: the resistance of the cable of the chord electrode and the The first capture == please: Item 1 ~ The invention of claim 4 provides a kind of ability to capture the ancient land and obtain impedance with a wide range of low impedance, "the surface between the coils, and can improve one of the characteristic impedances": 1 Circle parts. Inch 丨王| and the line of resistance to 5 and leaf degrees of freedom [Embodiment] To: 'According to the implementation shown in Figure 1 to Figure 3 The present invention is described in the present invention. The coil of the present embodiment is very solid; the member 10 is, for example, as shown in Figs. 1 to 3, and the upper and lower magnetic substrates u and 12 are provided in the magnetic body. The non-magnetic layer 13 in which the plurality of insulating layers 13A and 13B are laminated between the substrates π and 12 7 1303836 is disposed in the non-magnetic layer 13 in the vertical direction, and is spirally arranged in a plan view. First, the second coil electrodes 14, 15 and two pairs of the i-th and second external electrodes 16A, 16B, 17A, 17B electrically connected to the both end portions of the coil electrodes 14, 15 are used as For example, a common mode choke coil is provided, and an adhesive layer 18 for adhering the both is provided between the upper magnetic substrate 12 and the non-magnetic layer 13. The coil component 10, generally, can be formed in plurality at the same time on the mother substrate. The internal wirings of the first and second coil electrodes 14, 15 and the like can be formed by lithography or the like. In the following description, the coil component body ′ including the upper and lower magnetic substrates i, 12, the non-magnetic layer 13, and the second and second coil electrodes 14 and 15 is referred to as a coil component body 1A as needed. The magnetic substrate 11, 12' is not particularly limited as long as it is formed of a magnetic material. As a magnetic material, it has good high-frequency characteristics: a ferrite material is formed on the magnetic substrate n, 12 The surface roughness Ra of the insulating layer 13' is preferably polished to a non-magnetic body I 13, and is formed by laminating a plurality of insulating layers 13A, UB as shown in FIG. 3, in the non-layered body layer 13 The towel, the insulation layer 0 ^ θ located on the third and fourth layers of the above-mentioned brother is between the first coil electrode 14 and the coil electrode 15 of the second coil, and is used for the sound of ^... The characteristic impedance is 0. The formation method of the insulating layer i 3 A i 3 Β can be used without any particular limitation. For example, J is formed by the 疋 涂布 coating method. The insulating layer 13Α, 13Β is not particularly limited as long as it is made of a non-magnetic insulating material for the sputum. As an insulating material, for example, a thermosetting property such as polyfluorene, an epoxy resin, or a benzocyclobutene is used. Resin or ton, broken glass (four) is preferred. Further, as the insulating material, it is also possible to use a photosensitive photosensitive resin material alone or in combination with the above materials to form an insulating layer 13A 13B formed of a photosensitive resin material, and the edge layer 13A' 13B is formed as a through hole. (viahc>ie) is used. When the shape is desired, the insulating layer 13A, 13B is covered, and then the wide UB exposure is subjected to development processing to form a through hole. The insulating layer "A is further preferably in the range of, for example, the thickness of the insulating layer uB, == constant characteristic impedance'. Chemical resin. The crucible using the t-imine resin or the like, the first and second coil electrodes 14, 15, as shown in the figure! As shown in Fig. 3, the system positions Lr are arranged opposite to each other in a symmetrical manner, and have the other two overlaps; each of the coil electrodes A 15 ' has a spiral shape which is substantially the same size as the spiral electrode 1 as described later. The second pattern electrode and the second pattern electrode are connected to the second outer electrode and the second outer electrode i7a, i7b through the respective extraction electrodes (see FIG. 10). The two electrodes 14 and 15 are formed in a spiral shape. It is possible to obtain the impedance 4 that is only closed to promote the miniaturization and lowering of the coil component 1Q. The first and second coil electrodes! 4 !^ 欠 & a β The first pattern electrodes of s 14, 15 are respectively: The insulating layer UB is disposed opposite to each other and has a different area from the electrode arranged in the pattern of the traitor 2. The coil component is 1 〇, and the second coil electrode 14' 15 is opposed to the first pattern electrode surface. 9 1303836 The size of the product 'is adjusted to the third, and can not reduce the common mode impedance two: the capacitance between the coil electrodes 14, 15 , that is, in the present invention, in the case of the heart-to-horse, adjust the characteristic resistance a - ^ 第 first and second coil electrodes 14 15 | The area 4, 15 can be made to have the coil component 10 = smaller than the area of the second pattern electrode, and the 特性 characteristic impedance is set higher, and conversely, the area of the first pattern electrode is made larger than that of the second pattern electrode. The surface ', p旎 sets the characteristic impedance of the coil component 10 to be low. Hereinafter, the details will be described. The second coil electrode 14 and the coil body of the second coil electrode 14, 15 are only in the respective The size relationship between the first and second pole areas is upside down and the upper symmetrical structure, and ^ has substantially the same structure, so the first line center will be described. The horse first coil electrode 14' is as shown in Fig. 1(b)~ As shown in Fig. 3, the insulating coil 13B is located on the upper side of the second coil electrode (10). As shown in Fig. 3, the first coil electrode μ has a first layer that is vertically disposed through the insulating layer UA and is connected in parallel to a two-layer spiral shape. The second pattern electrodes 141A, 14ib and the pair of extraction electrodes 142A, l42B, 143/, 143B which are respectively pulled out from the both end portions of the second pattern electrodes 14lA, 141B to the first working external electrodes 16A, 16B, One side of the lead electrodes 142A, 143A are connected to one side The first outer electrode 16A and the other lead electrodes 142B and 143B are respectively connected to the other side of the i-th external electrode 16B. The first coil electrode i4 is transmitted through the first and second pattern electrodes 141 of the upper and lower layers. When the first outer package poles are connected in parallel, the cross-sectional area is substantially doubled, and the DC resistance is lowered. 1303836 The first coil electrode 14 has the first pattern electrode 141A located in the vertical direction (upper side), and the second The pattern electrode 141B is located on the outer side (lower side) in the vertical direction. In the second coil electrode 15, the first pattern electrode 151A is located in the upper and lower sides (upper side), and the second pattern electrode ϊ 5 1B is located on the outer side (lower side) in the vertical direction. Then, the line widths of the first pattern electrodes 141A and 151A are thinner than the lines of the second pattern electrodes 141B and 1 5 1 B, respectively, and are formed to have a small area. By narrowing the area of the first pattern electrodes 141A, 151A of the first and second coil electrodes 14, 15 of the upper and lower sides, the two coils 14 can be reduced without lowering the common mode impedance and the coupling degree. A capacitance of 15 increases the characteristic impedance of the coil component 10. Further, even if the line width of the pattern electrode i4iA, BIB is thin, if the line width of the second pattern electrode 141B, mB is made thicker, the increase in the DC impedance of the ith, 帛2 coil electrode 14, 15 can be avoided. Next, the structure of the second and second pattern electrodes 141A and MiB will be described with reference to FIGS. 2 and 3 .丨 ' The second pattern electrode 141A in Fig. 2 (4) is indicated by a broken line. In Figs. 2(b) and 2(c), the second pattern electrode 141b having a wider line width is displayed by a thin line showing the second pattern electrode 141b having a wider line width, and the current direction is displayed in the front direction. As shown in Fig. 2 (4) and Fig. 3, the i-th pattern electrode (4) A' draws a rectangular spiral in a clockwise direction starting from a lead electrode 142A, and the approximate center of the second edge layer 13B is an end point. The first pattern electrode MU: the extraction electrode 142B is located on the insulating layer π 丨 on the second pattern. The outer side of 141A cannot directly connect the other-extracting electrode 11 1303836 to the insulating layer 13B, and it is impossible to directly connect the end point of the 图案1 pattern electrode 141A with another interval of the money-extracting section, and the part is referred to as described later. (4) The line is replaced by the lead wiring of the pattern electrode 141B of the brother 2. On the other hand, as shown in Figs. 2(4) and w3, the second pattern electrode 141B is the same as the first pattern electrode 141A, and is drawn in a clockwise direction in the same manner as the first electrode 141A. The center is the end point. This end point is disposed on the outside of the second pattern electrode i4ib
引出电極143B，係在絕緣層13八上以引出配線144相 連接’並以此引出配線144取代f i圖案電極i4iA之引 出配線使第1圖案電極141A之電流以引出配線與 第2圖案電極141B合流。 、 也就是說，如圖2(b)所示，第1圖案電極141A之終 點與第2圖案電極_之終點（引出配線144之一端），係 透過貫通絕緣層13A中央部之貫通孔導體M5A來電氣連 接’使得第1圖案電極141A利用第2圖案電極i4ib之引 出配線144。再者，位於第2圖案電極ΐ4ΐβ外側之引出配 線144之另一端，同樣地透過貫通絕緣層13A中央部之貫 通孔導體（未圖示）與第i圖案電極i41a之引出電極142β 來電氣連接。其結果’帛i圖案電極14ia之電流，在引 出配線144 一端與第2圖案電極141B之電流合流，在引 出配線144之另一端回到引出電極142β，143β。 又，由於第2圖案電極14ιΒ在引出配線144所通過 之口P分’ &目2(a)、圖3所示被中斷，因此此部份係由第 1圖案電極141A來取代。此時，在引出配線144兩側彼此 12 1303836 對峙之第2圖案電極141B之中斷點，分別如圖2(c)所示， 亦係透過貫通絕緣層13A之貫通導體145B，145C與第1 圖案電極141A來電氣連接。第2圖案電極141B之電流， 在貝通孔145B與第1圖案電極！ 41A之電流合流，透過貫 通孔導體145C回到第2圖案電極141B。 此外’第2線圈電極1 5亦與第1線圈電極14同樣的， 具有第卜第2圖案電極151A，151B及各自之引出電極152八， 152B，153A，153B，按照第！線圈電極14所構成。不過， 如前所述，第1圖案電極151A係位於上側，第2圖案電 極1 5 1B則位於下側。 第1、第2線圈電極14, 15及貫通孔導體之導電 料，只要是導電性佳之金屬的話即無特別限制，但作為此 類金屬’例如可使用Ag、Pd、Cu、A1。 在製作線圈零件10時，例如使用旋轉塗布法形成絕緣 層，然後使用濺鍍法在絕緣層形成線圈電極。在分別形成 絕緣層之貫通孔與線圈電極層之圖案時，係使用光微影技 術與蝕刻技術，在每一層形成並加以積層。例如，在預先 製作之磁性體基板η上塗佈如絕緣性材料（例如聚酿亞胺 樹脂）形成絕緣層13Α，在加熱、硬化之後，使其冷卻。接 著’在絕緣層ηΑ上以濺鍍方式形成導電層後，在此導電 層上塗佈感光性光阻材料，將此光阻材層透過光罩加以曝 光、顯影後，對導電層進行_以形成第2線圈電極15 之第2圖案電極151Β後，剝離光阻層。 接著，塗佈感光性絕緣㈣（例如\有感純之聚酿亞 13 1303836 胺樹脂）並使其乾燥形成絕緣層1 3 A，透過光罩進行曝光、 顯影後，以既定圖案形成貫通孔，並加熱、使其硬化。進 一步的，使用濺鍍法形成導電層後，在此導電層上塗佈感 光性光阻材，將此光阻材層透過光罩予以曝光、顯影後， 對導電層進行蝕刻以形成第2線圈電極15之第1圖案電 極15 1A後，剝離光阻層。藉此，第2線圈電極15之第1、 第2圖案電極151A，151B即透過貫通孔電氣連接。 之後’依照上述要領，連續形成第2線圈電極15與第 I 1線圈電極14間之絕緣層13B，13A後，依序在絕緣層ι3Β 上形成第1線圈電極14之第1圖案電極141A，以及在絕 緣層13A上形成第2圖案電極141B，再形成最上層之絕 緣層1 3 A，而在磁性體基板n上形成電路積層體。 形成電路積層體後，在惰性氣體環境或真空下，進行 磁性體基板1 2之加熱加壓將其透過黏著層丨8黏著在電路 積層體上面，一次製作複數個線圈零件本體1 〇。接著，進 攀行切割等切斷加工來切出一個一個線圈零件本體丨〇並加 以分割後，設置第1外部電極丨6 A，丨6B及第2外部電極丨7 A， 17B，而得到線圈零件1〇。 如以上說明，若根據本實施形態，具備：上下一對之 磁性體基板11，12，設在此等磁性體基板n，12間之非磁 性體層1 3，以及在此非磁性體層内丨3在上下方向分離形 成、且彼此對向配置上下對稱之一對第i、第2線圈電極 14，15，一對第1、第2線圈電極14，15，分別具有透過絕 緣層1 3A彼歧分離g己置且兩層之螺旋狀第丨、、第2圖案電 14 1303836 極141A，141B及第1、第2圖案電極151A，151B，且一對 第1、第2線圈電極14，15，由於其分別配置在上下方向 最内側而彼此對向之第1圖案電極141 A, 141B之線寬，八 別小於另一第2電極圖案141B，15 1B之線寬，因此能使其 小型化及低高度化，且取得阻抗之範圍廣、線圈間之搞合 度高、直流阻抗低，並能將特性阻抗設高。 接著，根據圖4所示之實施形態說明將特性阻抗設低 之情形。以下，與上述實施形態相同或相當之部分係附賦 予相同符號，以本實施形態之特徵為中心進行說明，本實 施形態之線圈零件之其他部分係按照上述實施形態之線圈 零件來構成。 本實施形態之線圈零件1 〇，如圖4所示，具備··上下 一對之磁性體基板1 1，1 2，設於該等磁性體基板丨丨，12間 之非磁性體層13,以及在此非磁性體層13内分離形成且 彼此透過絕緣層13B對向配置之一對第丨、第2線圈電極 14，;第1、第2線圈電極14, 15，分別具有彼此透過絕 、’、彖層13B分離對向之螺旋狀第！圖案電極M1A，ι51α及 第2圖案電極141Β，151Β。 此外’第1、第2線圈電極14，15分別彼此對ν向之第 1圖案電極141Α，151Α之線寬係設定成寬於第2圖案電極 141Β，151Β之線寬，第i圖案電極141Α，151Α之面積則 形成為大於第2圖案電極141Β，151Β之面積。因此，可以 將第1圖案電極141Α5 151Α間之電容加大，藉此將線圈零 件1 〇之特性阻抗設低。 15 1303836 士 所述將第1圖案電極141A，151A之面積設大時， 由於空間上之限制使第1圖案電極⑷A，151…數減 少，因此有可能無法得到必須之電感值。因此，當無法到 必須之電感值時，則；I*知筮1 ， 幻日加弟2圖案電極141B，151B之匝數 來補足第1圖案電極141A，151A之不足部分。當可以得到 必須之電感值’如上述實施形態般，亦可將帛1、第2 圖案電極141A，141B並聯。本實施形態中，如圖*所示， 係將第1圖案電極141 A 1 ς 1 Λ & &、^ + 4iA，151Α與第2圖案電極141Β，151Β 串聯，使第2圖案電極141β，151β之隨多於第i圖案電 極141A，151A之臣數，來獲得所須之電感值。 ^接著’說明第1線圈電極14之第i圖案電極⑷八與 第2圖案電極141B之串聯構造，如圖*所示，第五圖案 包極141A起點（外鳊）之引出電極J 42 a位於磁性體基板^ , 12之一側面，其終點（内端）位於第工圖案電極之内 側又，第2圖案電極141B之起點（内端）位於第！圖案電 極141A内側之正上方，其終點（外端）之引出電極位 於與磁性體基板U，12對向之側面。第i、第2圖案電極 141A，141B分別在其内端透過貫通孔145連接。第2線圈 包極15亦按照第1線圈電極丨4為串聯。又，圖4中， 為連接第2線圈電極15之第i圖案電極i5iA與第2圖案 電極151B之貫通孔導體。 如以上之說明，根據本實施形態，由於係將第丨、第2 線，M，15彼此對向之第！圖案電極i4ia，⑸八之 線寬，設定成大於各自之第2圖案電極141B，iMB之線寬 16 1303836 以加大面積，因此第1、第2線圈電極14，15間之電容變 大’而能將特性阻抗設低。此外，即使將第1圖案電極141a， 1 5 1A之面積加大而使得匝數減少，亦能藉由增加分別串聯The extraction electrode 143B is connected to the lead wiring 144 on the insulating layer 13 and the lead wiring 144 is replaced by the lead wiring 144 instead of the lead wiring of the fi pattern electrode i4iA. The current of the first pattern electrode 141A is led to the wiring and the second pattern electrode 141B. confluence. In other words, as shown in FIG. 2(b), the end point of the first pattern electrode 141A and the end point of the second pattern electrode_ (one end of the lead line 144) pass through the through-hole conductor M5A penetrating the central portion of the insulating layer 13A. Electrical connection is made such that the first pattern electrode 141A uses the lead wiring 144 of the second pattern electrode i4ib. Further, the other end of the lead-out wiring 144 located outside the second pattern electrode ΐ4ΐβ is similarly electrically connected to the lead-out electrode 142β of the i-th pattern electrode i41a through a through-hole conductor (not shown) penetrating through the center of the insulating layer 13A. As a result, the current of the ?i pattern electrode 14ia merges with the current of the second pattern electrode 141B at one end of the lead line 144, and returns to the lead electrodes 142?, 143? at the other end of the lead line 144. Further, since the second pattern electrode 14 ι is interrupted by the opening P of the lead wiring 144 and the object 2 (a) is broken as shown in Fig. 3, this portion is replaced by the first pattern electrode 141A. At this time, as shown in FIG. 2(c), the break point of the second pattern electrode 141B facing each other on the both sides of the lead wiring 144 is also transmitted through the through conductors 145B, 145C and the first pattern penetrating the insulating layer 13A. The electrode 141A is electrically connected. The current of the second pattern electrode 141B is in the passhole 145B and the first pattern electrode! The current of 41A merges and passes through the via hole conductor 145C to return to the second pattern electrode 141B. Further, the second coil electrode 15 is similar to the first coil electrode 14, and includes the second pattern electrodes 151A and 151B and the respective extraction electrodes 152, 152B, 153A, and 153B. The coil electrode 14 is formed. However, as described above, the first pattern electrode 151A is located on the upper side, and the second pattern electrode 15 1B is located on the lower side. The conductive material of the first and second coil electrodes 14 and 15 and the through-hole conductor is not particularly limited as long as it is a metal having good conductivity. However, as such a metal, for example, Ag, Pd, Cu, or A1 can be used. When the coil component 10 is fabricated, an insulating layer is formed, for example, by a spin coating method, and then a coil electrode is formed on the insulating layer by sputtering. When the patterns of the through holes and the coil electrode layers of the insulating layer are respectively formed, they are formed and laminated in each layer by using photolithography and etching techniques. For example, an insulating material (e.g., a polyimide resin) is applied onto the magnetic substrate η which is prepared in advance to form an insulating layer 13, which is cooled and then cooled. Then, after forming a conductive layer on the insulating layer ηΑ by sputtering, a photosensitive photoresist material is coated on the conductive layer, and the photoresist layer is exposed and developed through the reticle, and then the conductive layer is _ After the second pattern electrode 151 of the second coil electrode 15 is formed, the photoresist layer is peeled off. Next, a photosensitive insulating layer (4) (for example, a sensible pure polystyrene 13 1303836 amine resin) is applied and dried to form an insulating layer 13 3 A, which is exposed and developed through a photomask, and then a through hole is formed in a predetermined pattern. Heat and harden it. Further, after the conductive layer is formed by sputtering, a photosensitive photoresist is coated on the conductive layer, and the photoresist layer is exposed and developed through the mask, and then the conductive layer is etched to form a second coil. After the first pattern electrode 15 1A of the electrode 15, the photoresist layer is peeled off. Thereby, the first and second pattern electrodes 151A and 151B of the second coil electrode 15 are electrically connected to each other through the through holes. Then, in accordance with the above method, the insulating layers 13B and 13A between the second coil electrode 15 and the first one coil electrode 14 are continuously formed, and then the first pattern electrode 141A of the first coil electrode 14 is sequentially formed on the insulating layer ι3Β, and The second pattern electrode 141B is formed on the insulating layer 13A, and the uppermost insulating layer 13 3 A is formed, and a circuit laminated body is formed on the magnetic substrate n. After the circuit laminate is formed, the magnetic substrate 12 is heated and pressurized in an inert gas atmosphere or under vacuum, and adhered to the circuit laminate by the adhesive layer 8 to form a plurality of coil component bodies 1 at a time. Then, the cutting process such as climbing cutting is performed to cut out one coil component body 丨〇 and divide it, and then the first external electrodes 丨6 A, 丨6B and the second external electrodes 丨7 A, 17B are provided to obtain a coil. Part 1〇. As described above, according to the present embodiment, the pair of upper and lower magnetic substrates 11 and 12, the non-magnetic layer 13 provided between the magnetic substrates n and 12, and the non-magnetic layer 丨3 are provided. The i-th and second coil electrodes 14, 15 and the pair of first and second coil electrodes 14, 15 are separated and formed in the vertical direction and disposed opposite to each other, respectively, and have a transparent insulating layer 13 3A. g has two layers of spiral shape, second pattern electric 14 1303836 poles 141A, 141B and first and second pattern electrodes 151A, 151B, and a pair of first and second coil electrodes 14, 15 due to The line widths of the first pattern electrodes 141 A and 141B which are disposed on the innermost side in the up-and-down direction and are opposite to each other are smaller than the line widths of the other second electrode patterns 141B and 15 1B, so that it can be made smaller and lower. The height is increased, the range of impedance is wide, the degree of engagement between the coils is high, the DC impedance is low, and the characteristic impedance can be set high. Next, the case where the characteristic impedance is set low will be described based on the embodiment shown in Fig. 4 . In the following, the same or equivalent portions as those of the above-described embodiment are denoted by the same reference numerals, and the other features of the coil component of the present embodiment are constructed in accordance with the coil component of the above embodiment. As shown in FIG. 4, the coil component 1 of the present embodiment includes a pair of upper and lower magnetic substrates 1 1, 1 2, a non-magnetic layer 13 provided between the magnetic substrates 12 and 12, and The first and second coil electrodes 14 are disposed separately in the non-magnetic layer 13 and are disposed opposite to each other through the insulating layer 13B, and the first and second coil electrodes 14 and 15 respectively pass through each other. The enamel layer 13B separates the opposite spiral shape! The pattern electrodes M1A, ι51α and the second pattern electrodes 141, 151 are. Further, the line widths of the first and second coil electrodes 14 and 15 facing the first pattern electrodes 141 to 151, respectively, are set to be wider than the line width of the second pattern electrodes 141 to 151, and the i-th pattern electrode 141 is The area of 151 Å is formed to be larger than the area of the second pattern electrode 141 Β, 151 。. Therefore, the capacitance between the first pattern electrodes 141 Α 5 151 can be increased, whereby the characteristic impedance of the coil component 1 设 can be set low. When the area of the first pattern electrodes 141A, 151A is set to be large, the number of the first pattern electrodes (4) A, 151 is reduced due to spatial constraints, and thus the necessary inductance value may not be obtained. Therefore, when the necessary inductance value cannot be reached, the number of turns of the first pattern electrodes 141A, 151A is complemented by the number of turns of the pattern electrodes 141B and 151B. When the necessary inductance value can be obtained, the 帛1 and the second pattern electrodes 141A and 141B can be connected in parallel as in the above embodiment. In the present embodiment, as shown in Fig. 6, the first pattern electrodes 141 A 1 ς 1 Λ &&, ^ + 4iA, 151 Α are connected in series with the second pattern electrodes 141 Β, 151 , to form the second pattern electrode 141β, 151β is more than the number of the i-th pattern electrodes 141A, 151A to obtain the required inductance value. Next, the series structure of the ith pattern electrode (4) VIII of the first coil electrode 14 and the second pattern electrode 141B will be described. As shown in FIG. *, the extraction electrode J 42 a of the start point (outer 鳊) of the fifth pattern envelope 141A is located. One side surface of the magnetic substrate ^12, the end point (inner end) is located inside the electrode pattern electrode, and the starting point (inner end) of the second pattern electrode 141B is located at the first! Immediately above the inner side of the pattern electrode 141A, the extraction electrode of the end point (outer end) is located on the side opposite to the magnetic substrate U, 12. The i-th and second pattern electrodes 141A and 141B are respectively connected to the inner end through the through hole 145. The second coil pole 15 is also connected in series in accordance with the first coil electrode 丨4. Further, in Fig. 4, the through-hole conductors of the i-th pattern electrode i5iA and the second pattern electrode 151B of the second coil electrode 15 are connected. As described above, according to the present embodiment, the third and second lines, M, and 15 are opposite to each other! The line widths of the pattern electrodes i4ia, (5) are set to be larger than the respective second pattern electrodes 141B, and the line width of iMB is 16 1303836 to increase the area, so that the capacitance between the first and second coil electrodes 14 and 15 becomes larger. The characteristic impedance can be set low. Further, even if the area of the first pattern electrode 141a, 1 5 1A is increased to reduce the number of turns, it is possible to increase the number of series by increasing
到此等圖案電極141A，151A之第2圖案電極141B，151B 之阻數’來確保所須之電感值。本實施形態中，除了可以 將特性阻抗設低之外，亦能獲得與上述實施形態相同之作 用效果。 • 又，上述各實施形態中，雖係就第1、第2線圈電極14, 15具有第1圖案電極141A，151A及第2圖案電極141B， 之兩層圖案電極的情形作了說明，但各自之圖案電極 亦可以為二層以上。此外，上述實施形態中，雖係就第1 線圈電極14之第i圖案電極141A在下層、第2圖案電極 141B在上層之情形作了說明，但亦可以是第^圖案電極 141A在上層、第2圖案電極141B在下層。此時，第i線 圈電極14之第2圖案電極141B與第2線圈電極15之第t •圖案電極151A對向。總而言之，只要第 對向之圖案電極面積，與各自之其他圖案電極面積不同即 可。 哭t發明’能廣泛的利用於可作為適用於電腦等數位機 之南速動作傳送線之共模扼流圈的線圈零件。 【圖式簡單說明】 圖Ua)、⑻，係顯示本發明線圈零件之—實施形態的 圖，⑷為外觀之立體圖、（b)為⑷之B—B線方向之截面圖。 圖2(a)〜r、 加以顯示的圖，圖1所示之線圈零件之線圈電極 顯示第i回（a)顯不其第卜第2圖案電極之俯視圖、（b)(c) 固 / 2圖案電極連接狀態之說明圖。 = 係分解顯示圖丨所示線圈零件的分解立體圖。 B1 4，孫 -， 立體！a ^發明線圈零件之其他實施形態的分解 【主要元件符號說明】 10 線圈零件 11，12 磁性體基板 13 非磁性體層 14 弟1線圈電極 15 弟2線圈電極 141A， 151A 第1圖案電極 141B, 151B 第2圖案電極The resistance of the second pattern electrodes 141B, 151B of the pattern electrodes 141A, 151A is ensured to ensure the required inductance value. In the present embodiment, in addition to the fact that the characteristic impedance can be made low, the same effects as those of the above embodiment can be obtained. In each of the above-described embodiments, the first and second coil electrodes 14, 15 have the first pattern electrodes 141A, 151A and the second pattern electrode 141B, and the two pattern electrodes are described. The pattern electrode may also be two or more layers. In the above-described embodiment, the ith pattern electrode 141A of the first coil electrode 14 is in the upper layer and the second pattern electrode 141B is on the upper layer. However, the second pattern electrode 141A may be on the upper layer or the second layer. 2 The pattern electrode 141B is on the lower layer. At this time, the second pattern electrode 141B of the i-th coil electrode 14 faces the t-th pattern electrode 151A of the second coil electrode 15. In summary, as long as the area of the pattern electrode in the opposite direction is different from the area of the other pattern electrodes. It is widely used in coil parts that can be used as a common mode choke coil for a south-speed motion transmission line of a digital computer such as a computer. BRIEF DESCRIPTION OF THE DRAWINGS FIGS. Ua) and (8) are views showing an embodiment of a coil component of the present invention, (4) is a perspective view of the appearance, and (b) is a cross-sectional view taken along line B-B of (4). 2(a) to 2r, the coil electrode shown in Fig. 1 shows the i-th (a) shows a plan view of the second pattern electrode, and (b) (c) solid/ 2 explanatory diagram of the pattern electrode connection state. = Decomposes the exploded perspective view of the coil part shown in Figure 。. B1 4, Sun -, Stereo! a ^Invention of other embodiments of the invention of the coil component [Description of main components] 10 Coil component 11, 12 Magnetic substrate 13 Non-magnetic layer 14 Younger coil electrode 15 Younger 2 coil electrode 141A, 151A First pattern electrode 141B, 151B Second pattern electrode
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