JP5328608B2 - 液体吐出ヘッド用基板、液体吐出ヘッド及びそれらの製造方法 - Google Patents

液体吐出ヘッド用基板、液体吐出ヘッド及びそれらの製造方法 Download PDF

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Publication number
JP5328608B2
JP5328608B2 JP2009245809A JP2009245809A JP5328608B2 JP 5328608 B2 JP5328608 B2 JP 5328608B2 JP 2009245809 A JP2009245809 A JP 2009245809A JP 2009245809 A JP2009245809 A JP 2009245809A JP 5328608 B2 JP5328608 B2 JP 5328608B2
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JP
Japan
Prior art keywords
discharge head
liquid discharge
substrate
electrode layer
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009245809A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010162870A (ja
JP2010162870A5 (enExample
Inventor
智 伊部
義則 田川
和宏 浅井
裕登 小宮山
敏明 黒須
正隆 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2009245809A priority Critical patent/JP5328608B2/ja
Publication of JP2010162870A publication Critical patent/JP2010162870A/ja
Publication of JP2010162870A5 publication Critical patent/JP2010162870A5/ja
Application granted granted Critical
Publication of JP5328608B2 publication Critical patent/JP5328608B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2009245809A 2008-12-15 2009-10-26 液体吐出ヘッド用基板、液体吐出ヘッド及びそれらの製造方法 Expired - Fee Related JP5328608B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009245809A JP5328608B2 (ja) 2008-12-15 2009-10-26 液体吐出ヘッド用基板、液体吐出ヘッド及びそれらの製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008318565 2008-12-15
JP2008318565 2008-12-15
JP2009245809A JP5328608B2 (ja) 2008-12-15 2009-10-26 液体吐出ヘッド用基板、液体吐出ヘッド及びそれらの製造方法

Publications (3)

Publication Number Publication Date
JP2010162870A JP2010162870A (ja) 2010-07-29
JP2010162870A5 JP2010162870A5 (enExample) 2012-12-13
JP5328608B2 true JP5328608B2 (ja) 2013-10-30

Family

ID=42239998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009245809A Expired - Fee Related JP5328608B2 (ja) 2008-12-15 2009-10-26 液体吐出ヘッド用基板、液体吐出ヘッド及びそれらの製造方法

Country Status (2)

Country Link
US (1) US8256878B2 (enExample)
JP (1) JP5328608B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5921142B2 (ja) * 2011-10-26 2016-05-24 キヤノン株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP2013173262A (ja) * 2012-02-24 2013-09-05 Canon Inc 液体吐出ヘッドの製造方法
US10035346B2 (en) 2015-01-27 2018-07-31 Canon Kabushiki Kaisha Element substrate and liquid ejection head
JP6598658B2 (ja) * 2015-01-27 2019-10-30 キヤノン株式会社 液体吐出ヘッドの素子基板及び液体吐出ヘッド

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3143307B2 (ja) 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US6238041B1 (en) * 1996-06-26 2001-05-29 Canon Kabushiki Kaisha Heat-generator supporting member for ink-jet head and ink-jet head employing the same
ES2232047T3 (es) 1998-06-03 2005-05-16 Canon Kabushiki Kaisha Cabezal para chorros de tinta, sustrato para cabezal para chorros de tinta y metodo para la fabricacion del cabezal.
JP4298350B2 (ja) * 2003-03-28 2009-07-15 キヤノン株式会社 記録ヘッド用基板、それを備える液体吐出記録ヘッド、記録装置、および、記録ヘッド用基板の製造方法

Also Published As

Publication number Publication date
US20100149280A1 (en) 2010-06-17
JP2010162870A (ja) 2010-07-29
US8256878B2 (en) 2012-09-04

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