JP5314150B2 - 反応性ガス制御 - Google Patents

反応性ガス制御 Download PDF

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Publication number
JP5314150B2
JP5314150B2 JP2011527812A JP2011527812A JP5314150B2 JP 5314150 B2 JP5314150 B2 JP 5314150B2 JP 2011527812 A JP2011527812 A JP 2011527812A JP 2011527812 A JP2011527812 A JP 2011527812A JP 5314150 B2 JP5314150 B2 JP 5314150B2
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liquid
gas
chamber
edge
guide surface
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English (en)
Japanese (ja)
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JP2012502792A (ja
JP2012502792A5 (enExample
Inventor
ジョーンズガード，マーク
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エアガード，インコーポレイテッド
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/10—Venturi scrubbers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/79—Injecting reactants
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0379—By fluid pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4643—Liquid valves

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Environmental & Geological Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Gas Separation By Absorption (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
JP2011527812A 2008-09-17 2009-09-15 反応性ガス制御 Active JP5314150B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/284,035 US7854792B2 (en) 2008-09-17 2008-09-17 Reactive gas control
US12/284,035 2008-09-17
PCT/US2009/005159 WO2010033184A1 (en) 2008-09-17 2009-09-15 Reactive gas control

Publications (3)

Publication Number Publication Date
JP2012502792A JP2012502792A (ja) 2012-02-02
JP2012502792A5 JP2012502792A5 (enExample) 2012-11-01
JP5314150B2 true JP5314150B2 (ja) 2013-10-16

Family

ID=41460196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011527812A Active JP5314150B2 (ja) 2008-09-17 2009-09-15 反応性ガス制御

Country Status (6)

Country Link
US (2) US7854792B2 (enExample)
EP (1) EP2340101B1 (enExample)
JP (1) JP5314150B2 (enExample)
KR (1) KR101659432B1 (enExample)
TW (1) TWI375767B (enExample)
WO (1) WO2010033184A1 (enExample)

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JP5851198B2 (ja) * 2011-10-25 2016-02-03 エヌ・ティ株式会社 スクラバーのガスインレット部の構造
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JP6659461B2 (ja) * 2016-05-23 2020-03-04 株式会社荏原製作所 排ガス処理装置
MY194516A (en) * 2017-07-07 2022-11-30 Siw Eng Pte Ltd Device and system for decomposing and oxidizing gaseous pollutant
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CN110917773A (zh) * 2019-12-09 2020-03-27 徐州中宜消防科技有限公司 一种具有环保功能的空气除尘设备
KR20230006729A (ko) 2021-07-02 2023-01-11 삼성전자주식회사 리액터 장치
JP7435660B2 (ja) * 2022-05-20 2024-02-21 栗田工業株式会社 排ガス処理設備の運転方法
DE102022212009A1 (de) * 2022-11-11 2024-05-16 Ebara Precision Machinery Europe Gmbh Vorrichtung und Verfahren zum Abreinigen eines mindestens ein Schadgas enthaltenden Prozessgases
WO2024219253A1 (ja) * 2023-04-19 2024-10-24 株式会社荏原製作所 排ガス処理装置および排ガス処理方法
US20250115994A1 (en) * 2023-10-09 2025-04-10 Highvac Corporation Abatement System Having an Injector with a Liquid Membrane

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Also Published As

Publication number Publication date
KR20110074535A (ko) 2011-06-30
WO2010033184A1 (en) 2010-03-25
US7854792B2 (en) 2010-12-21
US20110076211A1 (en) 2011-03-31
TWI375767B (en) 2012-11-01
KR101659432B1 (ko) 2016-09-23
JP2012502792A (ja) 2012-02-02
TW201031848A (en) 2010-09-01
EP2340101A1 (en) 2011-07-06
US8496741B2 (en) 2013-07-30
EP2340101B1 (en) 2018-05-09
US20100064891A1 (en) 2010-03-18

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