KR101659432B1 - 반응성 가스 제어 - Google Patents

반응성 가스 제어 Download PDF

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Publication number
KR101659432B1
KR101659432B1 KR1020117008595A KR20117008595A KR101659432B1 KR 101659432 B1 KR101659432 B1 KR 101659432B1 KR 1020117008595 A KR1020117008595 A KR 1020117008595A KR 20117008595 A KR20117008595 A KR 20117008595A KR 101659432 B1 KR101659432 B1 KR 101659432B1
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South Korea
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liquid
gas
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English (en)
Korean (ko)
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KR20110074535A (ko
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마크 존스가드
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에어가드, 인코포레이티드
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/10—Venturi scrubbers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/79—Injecting reactants
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0379—By fluid pressure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4643—Liquid valves

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Gas Separation By Absorption (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
KR1020117008595A 2008-09-17 2009-09-15 반응성 가스 제어 Active KR101659432B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/284,035 2008-09-17
US12/284,035 US7854792B2 (en) 2008-09-17 2008-09-17 Reactive gas control
PCT/US2009/005159 WO2010033184A1 (en) 2008-09-17 2009-09-15 Reactive gas control

Publications (2)

Publication Number Publication Date
KR20110074535A KR20110074535A (ko) 2011-06-30
KR101659432B1 true KR101659432B1 (ko) 2016-09-23

Family

ID=41460196

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117008595A Active KR101659432B1 (ko) 2008-09-17 2009-09-15 반응성 가스 제어

Country Status (6)

Country Link
US (2) US7854792B2 (enExample)
EP (1) EP2340101B1 (enExample)
JP (1) JP5314150B2 (enExample)
KR (1) KR101659432B1 (enExample)
TW (1) TWI375767B (enExample)
WO (1) WO2010033184A1 (enExample)

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FR2945333B1 (fr) * 2009-05-05 2015-08-07 Air Liquide Soupape a soufflet adaptee pour usage en cryogenie
CN102062395B (zh) * 2010-12-05 2012-09-05 王森 循环流化床锅炉气固分离器及含有该气固分离器的锅炉
JP5851198B2 (ja) * 2011-10-25 2016-02-03 エヌ・ティ株式会社 スクラバーのガスインレット部の構造
US9023303B2 (en) * 2013-04-15 2015-05-05 Airgard, Inc. Extended or multiple reaction zones in scrubbing apparatus
JP6659461B2 (ja) * 2016-05-23 2020-03-04 株式会社荏原製作所 排ガス処理装置
WO2019009811A2 (zh) 2017-07-07 2019-01-10 鑑鋒國際股份有限公司 用於控制氣體汙染物分解氧化的裝置及系統
US11786858B2 (en) * 2019-06-06 2023-10-17 Edwards Vacuum Llc Liquid filter apparatus for gas/solid separation for semiconductor processes
CN110917773A (zh) * 2019-12-09 2020-03-27 徐州中宜消防科技有限公司 一种具有环保功能的空气除尘设备
KR20230006729A (ko) 2021-07-02 2023-01-11 삼성전자주식회사 리액터 장치
JP7435660B2 (ja) * 2022-05-20 2024-02-21 栗田工業株式会社 排ガス処理設備の運転方法
DE102022212009A1 (de) * 2022-11-11 2024-05-16 Ebara Precision Machinery Europe Gmbh Vorrichtung und Verfahren zum Abreinigen eines mindestens ein Schadgas enthaltenden Prozessgases
WO2024219253A1 (ja) * 2023-04-19 2024-10-24 株式会社荏原製作所 排ガス処理装置および排ガス処理方法
US20250115994A1 (en) * 2023-10-09 2025-04-10 Highvac Corporation Abatement System Having an Injector with a Liquid Membrane

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US3690044A (en) * 1970-03-18 1972-09-12 Chemical Construction Corp Adjustable venturi gas scrubber

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US3690044A (en) * 1970-03-18 1972-09-12 Chemical Construction Corp Adjustable venturi gas scrubber

Also Published As

Publication number Publication date
US8496741B2 (en) 2013-07-30
JP2012502792A (ja) 2012-02-02
KR20110074535A (ko) 2011-06-30
US20110076211A1 (en) 2011-03-31
JP5314150B2 (ja) 2013-10-16
WO2010033184A1 (en) 2010-03-25
US7854792B2 (en) 2010-12-21
EP2340101B1 (en) 2018-05-09
TWI375767B (en) 2012-11-01
TW201031848A (en) 2010-09-01
US20100064891A1 (en) 2010-03-18
EP2340101A1 (en) 2011-07-06

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