JP5312100B2 - 測定方法及び測定装置 - Google Patents

測定方法及び測定装置 Download PDF

Info

Publication number
JP5312100B2
JP5312100B2 JP2009049734A JP2009049734A JP5312100B2 JP 5312100 B2 JP5312100 B2 JP 5312100B2 JP 2009049734 A JP2009049734 A JP 2009049734A JP 2009049734 A JP2009049734 A JP 2009049734A JP 5312100 B2 JP5312100 B2 JP 5312100B2
Authority
JP
Japan
Prior art keywords
measured
measurement
partial
error
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009049734A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010203915A5 (enExample
JP2010203915A (ja
Inventor
裕貴 大島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2009049734A priority Critical patent/JP5312100B2/ja
Priority to US12/716,699 priority patent/US8762099B2/en
Publication of JP2010203915A publication Critical patent/JP2010203915A/ja
Publication of JP2010203915A5 publication Critical patent/JP2010203915A5/ja
Application granted granted Critical
Publication of JP5312100B2 publication Critical patent/JP5312100B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2009049734A 2009-03-03 2009-03-03 測定方法及び測定装置 Expired - Fee Related JP5312100B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009049734A JP5312100B2 (ja) 2009-03-03 2009-03-03 測定方法及び測定装置
US12/716,699 US8762099B2 (en) 2009-03-03 2010-03-03 Measurement method and measurement apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009049734A JP5312100B2 (ja) 2009-03-03 2009-03-03 測定方法及び測定装置

Publications (3)

Publication Number Publication Date
JP2010203915A JP2010203915A (ja) 2010-09-16
JP2010203915A5 JP2010203915A5 (enExample) 2012-04-19
JP5312100B2 true JP5312100B2 (ja) 2013-10-09

Family

ID=42679002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009049734A Expired - Fee Related JP5312100B2 (ja) 2009-03-03 2009-03-03 測定方法及び測定装置

Country Status (2)

Country Link
US (1) US8762099B2 (enExample)
JP (1) JP5312100B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5725883B2 (ja) * 2011-01-26 2015-05-27 キヤノン株式会社 部分計測を合成する形状計測方法
DE102012019026A1 (de) * 2012-09-26 2014-03-27 Blum-Novotest Gmbh Verfahren und Vorrichtung zum Vermessen eines in einer Werkstückbearbeitungsmaschine aufgenommenen Werkzeugs
JP6452086B2 (ja) * 2013-10-31 2019-01-16 キヤノン株式会社 形状算出装置及び方法、計測装置、物品製造方法、及び、プログラム
JP7119949B2 (ja) * 2018-11-28 2022-08-17 セイコーエプソン株式会社 判定装置及び判定方法
DE102019204096A1 (de) 2019-03-26 2020-10-01 Carl Zeiss Smt Gmbh Messverfahren zur interferometrischen Bestimmung einer Oberflächenform

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3162355B2 (ja) * 1989-03-31 2001-04-25 キヤノン株式会社 面形状等測定方法及び装置
JPH1137732A (ja) 1997-07-19 1999-02-12 Fuji Xerox Co Ltd 形状測定方法および装置
JP3403668B2 (ja) 1999-05-27 2003-05-06 理化学研究所 部分測定データの合成方法
JP2001066123A (ja) 1999-08-27 2001-03-16 Ricoh Co Ltd ３次元形状の形状測定装置及び形状測定方法
US7455407B2 (en) * 2000-02-11 2008-11-25 Amo Wavefront Sciences, Llc System and method of measuring and mapping three dimensional structures
JP2002372415A (ja) * 2001-06-15 2002-12-26 Olympus Optical Co Ltd 形状測定方法
US6956657B2 (en) * 2001-12-18 2005-10-18 Qed Technologies, Inc. Method for self-calibrated sub-aperture stitching for surface figure measurement
JP2003269952A (ja) * 2002-03-13 2003-09-25 Canon Inc ３次元形状測定装置および方法
US7728987B2 (en) * 2004-05-14 2010-06-01 Carl Zeiss Smt Ag Method of manufacturing an optical element
US7221461B2 (en) * 2004-08-13 2007-05-22 Zygo Corporation Method and apparatus for interferometric measurement of components with large aspect ratios
US7593599B2 (en) * 2005-06-30 2009-09-22 Corning Incorporated Method of assembling a composite data map having a closed-form solution
WO2009126269A2 (en) * 2008-04-08 2009-10-15 Qed Technologies International, Inc. Stitching of near-nulled subaperture measurements

Also Published As

Publication number Publication date
US20100228519A1 (en) 2010-09-09
US8762099B2 (en) 2014-06-24
JP2010203915A (ja) 2010-09-16

Similar Documents

Publication Publication Date Title
US8472014B2 (en) Refractive index distribution measuring method and refractive index distribution measuring apparatus
US8104905B2 (en) Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface
KR101458257B1 (ko) 근제로화 부분 구경 측정의 스티칭 방법
JP5312100B2 (ja) 測定方法及び測定装置
US10323938B2 (en) Method for calibrating a measuring device
JP5486379B2 (ja) 面形状計測装置
US9234739B2 (en) In situ calibration of interferometers
US9239964B2 (en) Surface shape measurement method, surface shape measurement apparatus, non-transitory computer-readable storage medium, optical element, and method of manufacturing optical element
EP2369319A2 (en) Aspheric object measuring method and apparatus
CN102506759A (zh) 一种大口径非球面朗奇检测方法
Polack et al. An LTP stitching procedure with compensation of instrument errors: Comparison of SOLEIL and ESRF results on strongly curved mirrors
JP2013108932A (ja) 屈折率分布測定方法および屈折率分布測定装置
JPH1096679A (ja) 波面収差測定装置
Płowucha Point-straight line distance as model for uncertainty evaluation of coordinate measurement
JP5305741B2 (ja) 測定方法
EP2990759A1 (en) Shape measurement method and shape measurement apparatus
KR20110065365A (ko) 비구면체 측정 방법 및 장치
Olesch et al. Deflectometric self-calibration for arbitrary specular surfaces
Gąska et al. Analysis of changes in coordinate measuring machines accuracy made by different nodes density in geometrical errors correction matrix
RU2667323C1 (ru) Способ и устройство дифференциального определения радиуса кривизны крупногабаритных оптических деталей с использованием датчика волнового фронта
JP2013160742A (ja) 回折格子を用いた３次元干渉計参照面の校正方法、および３次元干渉計
Garbusi et al. Advanced studies on the measurement of aspheres and freeform surfaces with the tilted-wave interferometer
JP2006126103A (ja) 非球面形状測定方法
US20150120232A1 (en) Shape calculation apparatus and method, measurement apparatus, method of manufacturing article, storage medium
JPH08233531A (ja) 焦点距離計測装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120301

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120301

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130409

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130416

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130604

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130702

R151 Written notification of patent or utility model registration

Ref document number: 5312100

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

LAPS Cancellation because of no payment of annual fees