JP5309626B2 - 振動アクチュエータ、振動子の製造方法及び振動アクチュエータの製造方法 - Google Patents

振動アクチュエータ、振動子の製造方法及び振動アクチュエータの製造方法 Download PDF

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Publication number
JP5309626B2
JP5309626B2 JP2008060499A JP2008060499A JP5309626B2 JP 5309626 B2 JP5309626 B2 JP 5309626B2 JP 2008060499 A JP2008060499 A JP 2008060499A JP 2008060499 A JP2008060499 A JP 2008060499A JP 5309626 B2 JP5309626 B2 JP 5309626B2
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JP
Japan
Prior art keywords
elastic body
manufacturing
piezoelectric
vibrator
vibration actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008060499A
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English (en)
Japanese (ja)
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JP2008259410A (ja
JP2008259410A5 (enExample
Inventor
高広 佐藤
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Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2008060499A priority Critical patent/JP5309626B2/ja
Priority to US12/047,687 priority patent/US20080284285A1/en
Publication of JP2008259410A publication Critical patent/JP2008259410A/ja
Priority to US12/884,463 priority patent/US8549728B2/en
Publication of JP2008259410A5 publication Critical patent/JP2008259410A5/ja
Application granted granted Critical
Publication of JP5309626B2 publication Critical patent/JP5309626B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G02B7/102—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens controlled by a microcomputer
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/084—Shaping or machining of piezoelectric or electrostrictive bodies by moulding or extrusion
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/4908—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49128—Assembling formed circuit to base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2008060499A 2007-03-14 2008-03-11 振動アクチュエータ、振動子の製造方法及び振動アクチュエータの製造方法 Expired - Fee Related JP5309626B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008060499A JP5309626B2 (ja) 2007-03-14 2008-03-11 振動アクチュエータ、振動子の製造方法及び振動アクチュエータの製造方法
US12/047,687 US20080284285A1 (en) 2007-03-14 2008-03-13 Vibration actuator, lens barrel, camera, manufacturing method for vibration body and manufacturing method for vibration actuator
US12/884,463 US8549728B2 (en) 2007-03-14 2010-09-17 Manufacturing method for vibration body and manufacturing method for vibration actuator

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007065126 2007-03-14
JP2007065126 2007-03-14
JP2008060499A JP5309626B2 (ja) 2007-03-14 2008-03-11 振動アクチュエータ、振動子の製造方法及び振動アクチュエータの製造方法

Publications (3)

Publication Number Publication Date
JP2008259410A JP2008259410A (ja) 2008-10-23
JP2008259410A5 JP2008259410A5 (enExample) 2011-04-28
JP5309626B2 true JP5309626B2 (ja) 2013-10-09

Family

ID=39982422

Family Applications (1)

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JP2008060499A Expired - Fee Related JP5309626B2 (ja) 2007-03-14 2008-03-11 振動アクチュエータ、振動子の製造方法及び振動アクチュエータの製造方法

Country Status (3)

Country Link
US (2) US20080284285A1 (enExample)
JP (1) JP5309626B2 (enExample)
KR (1) KR101522424B1 (enExample)

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Publication number Priority date Publication date Assignee Title
CN101819316B (zh) * 2009-02-27 2011-11-09 富士迈半导体精密工业（上海）有限公司 变焦镜头
CN102473658B (zh) * 2009-08-12 2014-11-26 库利克和索夫工业公司 用于引线接合的超声波换能器与使用超声波换能器形成引线接合的方法
DE102010009453A1 (de) * 2010-02-26 2011-09-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Schallwandler zum Einsetzen in ein Ohr
US8643252B2 (en) * 2010-05-11 2014-02-04 Canon Kabushiki Kaisha Vibration wave actuator
KR101153553B1 (ko) * 2010-07-28 2012-06-11 삼성전기주식회사 진동 장치 및 이를 갖는 전자 장치
EP2612065B1 (en) 2010-09-02 2017-05-17 Optotune AG Illumination source with variable divergence
WO2012155276A1 (en) * 2011-05-19 2012-11-22 Optotune Ag Positioning device
CN102299663B (zh) * 2011-09-06 2013-11-13 哈尔滨工业大学 采用弹簧块预紧的圆筒型行波超声电机振子
JP5959915B2 (ja) * 2012-04-19 2016-08-02 キヤノン株式会社 振動子の製造方法
CN103872241A (zh) * 2012-12-14 2014-06-18 深圳先进技术研究院 整平装置
KR101618101B1 (ko) 2014-09-04 2016-05-04 강남국 스프링임팩터가 구비된 오거천공기
KR101618099B1 (ko) 2014-09-04 2016-05-04 강남국 유압임팩터가 구비된 오거천공기

Family Cites Families (18)

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Publication number Priority date Publication date Assignee Title
JPS63220782A (ja) * 1987-03-10 1988-09-14 Olympus Optical Co Ltd 圧電素子
US5256928A (en) * 1990-10-26 1993-10-26 Matsushita Electric Industrial Co., Ltd. Ultrasonic motor with a vibrator having recesses
JPH05116329A (ja) * 1991-07-02 1993-05-14 Tokyo Electric Co Ltd インクジエツトプリンタヘツドの製作方法
JPH06171095A (ja) * 1992-12-03 1994-06-21 Brother Ind Ltd インク噴射装置の製造方法及びインク噴射装置
US5650810A (en) * 1992-12-03 1997-07-22 Brother Kogyo Kabushiki Kaisha Ink jet print head having a manifold wall portion and method of producing the same by injection molding
JPH07241091A (ja) * 1994-02-28 1995-09-12 Mitsubishi Materials Corp 進行波型超音波モータとその製造方法
JPH099651A (ja) * 1995-06-15 1997-01-10 Nikon Corp 超音波アクチュエータ
JP2001169572A (ja) * 1998-12-28 2001-06-22 Ngk Insulators Ltd 圧電／電歪デバイスおよびその製造方法
JP2001045774A (ja) * 1999-07-28 2001-02-16 Canon Inc 電気−機械エネルギー変換素子を振動源とする振動体、この振動体を駆動源とする振動波駆動装置、振動波駆動装置を有する装置およびこの振動体を搬送源とする搬送装置
US7129618B2 (en) * 2003-03-31 2006-10-31 Canon Kabushiki Kaisha Control apparatus capable of low-speed driving of vibration type driving apparatus, actuating apparatus using the control apparatus, control method capable of low-speed driving of vibration type driving apparatus, and storage medium storing program including program codes capable of realizing the control method
JP4532212B2 (ja) * 2004-08-31 2010-08-25 日本碍子株式会社 圧電／電歪デバイスセットの検査方法
JP2006295147A (ja) * 2005-03-17 2006-10-26 Osaka Industrial Promotion Organization 圧電アクチュエータ及びポンプ
EP1739762B1 (en) * 2005-05-26 2010-11-24 Nikon Corporation Vibrational Actuator and Method for Driving Vibrational Actuator
JP5116329B2 (ja) 2007-03-23 2013-01-09 三洋電機株式会社 非水電解質二次電池
JP5408935B2 (ja) * 2007-09-25 2014-02-05 キヤノン株式会社 電気機械変換素子及びその製造方法
JP5594986B2 (ja) * 2008-06-24 2014-09-24 キヤノン株式会社 機械電気変換素子及び機械電気変換装置の製造方法
JP5350092B2 (ja) * 2008-06-24 2013-11-27 キヤノン株式会社 機械電気変換素子及び機械電気変換装置の製造方法
JP5430245B2 (ja) * 2008-06-24 2014-02-26 キヤノン株式会社 機械電気変換素子及び機械電気変換装置の製造方法

Also Published As

Publication number Publication date
JP2008259410A (ja) 2008-10-23
US20080284285A1 (en) 2008-11-20
KR20080084711A (ko) 2008-09-19
US20110002057A1 (en) 2011-01-06
US8549728B2 (en) 2013-10-08
KR101522424B1 (ko) 2015-05-21

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