JP5304978B2 - 圧電素子、液体噴射ヘッド、およびプリンタ - Google Patents

圧電素子、液体噴射ヘッド、およびプリンタ Download PDF

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Publication number
JP5304978B2
JP5304978B2 JP2007290426A JP2007290426A JP5304978B2 JP 5304978 B2 JP5304978 B2 JP 5304978B2 JP 2007290426 A JP2007290426 A JP 2007290426A JP 2007290426 A JP2007290426 A JP 2007290426A JP 5304978 B2 JP5304978 B2 JP 5304978B2
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Prior art keywords
layer
piezoelectric element
piezoelectric
buffer layer
substrate
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Expired - Fee Related
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JP2007290426A
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Japanese (ja)
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JP2009117687A5 (https=
JP2009117687A (ja
Inventor
弘 宮澤
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Seiko Epson Corp
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Seiko Epson Corp
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JP2007290426A 2007-11-08 2007-11-08 圧電素子、液体噴射ヘッド、およびプリンタ Expired - Fee Related JP5304978B2 (ja)

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JP2007290426A JP5304978B2 (ja) 2007-11-08 2007-11-08 圧電素子、液体噴射ヘッド、およびプリンタ

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JP2007290426A JP5304978B2 (ja) 2007-11-08 2007-11-08 圧電素子、液体噴射ヘッド、およびプリンタ

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JP2009117687A JP2009117687A (ja) 2009-05-28
JP2009117687A5 JP2009117687A5 (https=) 2010-08-12
JP5304978B2 true JP5304978B2 (ja) 2013-10-02

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013114857A1 (ja) * 2012-01-31 2013-08-08 パナソニック株式会社 圧電アクチュエータデバイスとその製造方法
JP6347086B2 (ja) * 2014-02-18 2018-06-27 アドバンストマテリアルテクノロジーズ株式会社 強誘電体セラミックス

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002286560A (ja) * 2001-03-26 2002-10-03 Mitsumi Electric Co Ltd 温度センサの検査方法及び検査装置
JP4222965B2 (ja) * 2004-04-15 2009-02-12 ヒタチグローバルストレージテクノロジーズネザーランドビーブイ 垂直磁気記録媒体及びその製造方法、磁気記録装置
JP2006019935A (ja) * 2004-06-30 2006-01-19 Toshiba Corp 薄膜圧電共振器及びその製造方法
JP4611847B2 (ja) * 2005-09-07 2011-01-12 昭和電工株式会社 磁気記録媒体及び磁気記録再生装置
JP2007237717A (ja) * 2006-03-13 2007-09-20 Seiko Epson Corp 液滴吐出ヘッドの製造方法、及び液滴吐出装置
JP5196105B2 (ja) * 2007-03-07 2013-05-15 セイコーエプソン株式会社 圧電素子、液体噴射ヘッド、並びに、プリンタ

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