JP5299268B2 - 半導体集積回路装置およびその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 87
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 239000000758 substrate Substances 0.000 claims description 51
- 238000000034 method Methods 0.000 claims description 23
- 238000000059 patterning Methods 0.000 claims description 17
- 238000002955 isolation Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 description 21
- 229910052814 silicon oxide Inorganic materials 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 239000007789 gas Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000000295 complement effect Effects 0.000 description 6
- 239000012528 membrane Substances 0.000 description 5
- 229910021332 silicide Inorganic materials 0.000 description 5
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
- H01L29/7843—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being an applied insulating layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Formation Of Insulating Films (AREA)
Description
11I 素子分離領域
11N nチャネルMOSトランジスタ形成領域
11P pチャネルMOSトランジスタ形成領域
11aN,11aP ソースエクステンション領域
11bN,11bP ドレインエクステンション領域
11cN,11cP ソース領域
11dN,11dP ドレイン領域
11s,14B,14P シリサイド領域
12N,12P ゲート絶縁膜
13N,13P ゲート電極
15,17 シリコン酸化膜
16 引張り応力膜
16D 引張りダミー応力膜パターン
18 圧縮応力膜
18D 圧縮ダミー応力膜パターン
19 層間絶縁膜
19A〜19D コンタクトプラグ
図1A〜1Iは、本発明の第1の実施形態による、応力印加pチャネルMOSトランジスタと応力印加nチャネルMOSトランジスタを集積化した半導体集積回路装置の製造方法を説明する図である。
[第2の実施形態]
図4は、前記素子分離領域11I中のダミー領域11Dに形成されるダミーパターン16D,18Dの例を示す。ただし図4では、前記ダミーパターン16D表面のシリコン酸化膜17Dの図示は省略している。
Claims (9)
- 素子領域及びダミー領域を有する半導体基板と、
前記素子領域に形成されたnチャネルMOSトランジスタとpチャネルMOSトランジスタと、
前記半導体基板上及び前記nチャネルMOSトランジスタ上に形成された引張り応力膜と、
前記半導体基板上及び前記pチャネルMOSトランジスタ上に形成された圧縮応力膜とを有し、
前記引張り応力膜及び前記圧縮応力膜の一方は、前記ダミー領域に第1のダミーパターンを有し、
前記引張り応力膜及び前記圧縮応力膜の他方は、前記ダミー領域に第2のダミーパターンを有し、
前記第1および第2のダミーパターンのいずれか一方は、前記ダミー領域中で前記第1および第2のダミーパターンの他方により囲まれて孤立しており、
前記半導体基板上の、前記引張り応力膜の総面積に対する前記圧縮応力膜の総面積の比率が、3/7から7/3の範囲内である半導体集積回路装置。 - 前記半導体基板上の、前記引張り応力膜の総面積に対する前記圧縮応力膜の総面積の比率が、2/3から3/2の範囲内である請求項1記載の半導体集積回路装置。
- 前記半導体基板に形成された素子分離領域を更に有し、
前記第1のダミーパターンは、前記素子分離領域上に形成される請求項1又は2記載の半導体集積回路装置。 - 前記第1のダミーパターンは前記ダミー領域に複数形成され、
前記第1のダミーパターンは前記第2のダミーパターンに囲まれて位置する請求項1又は2記載の半導体集積回路装置。 - 前記複数の第1のダミーパターンは、単一のダミーパターンを前記ダミー領域において一定の間隔で繰り返し配列することにより、形成される請求項4記載の半導体集積回路装置。
- 素子領域及びダミー領域を有する半導体基板の、前記素子領域にnチャネルMOSトランジスタとpチャネルトランジスタを形成する工程と、
前記半導体基板上及び前記nチャネルMOSトランジスタ上、前記pチャネルMOSトランジスタ上に、引張り応力を蓄積した引張り応力膜を形成する工程と、
前記引張り応力膜をパターニングして、前記pチャネルMOSトランジスタを露出するとともに、前記ダミー領域に第1のダミーパターンを形成する工程と、
前記引張り応力膜をパターニングした後、前記半導体基板上及び露出した前記pチャネルMOSトランジスタ上、パターニングされた前記引張り応力膜上に、圧縮応力を蓄積した圧縮応力膜を形成する工程と、
前記圧縮応力膜をパターニングして、前記nチャネルMOSトランジスタ上の前記圧縮応力膜及び前記第1のダミーパターン上の前記圧縮応力膜を除去するとともに、前記ダミー領域に第2のダミーパターンを形成する工程と、を有し、
前記第1および第2のダミーパターンのいずれか一方は、前記ダミー領域中で前記第1および第2のダミーパターンの他方により囲まれて孤立しており、
前記半導体基板上の、前記引張り応力膜の総面積に対する前記圧縮応力膜の総面積の比率が、3/7から7/3の範囲内である半導体集積回路装置の製造方法。 - 素子領域及びダミー領域を有する半導体基板の、前記素子領域にnチャネルMOSトランジスタとpチャネルトランジスタを形成する工程と、
前記半導体基板上及び、前記nチャネルMOSトランジスタ上、前記pチャネルMOSトランジスタ上に、圧縮応力を蓄積した圧縮応力膜を形成する工程と、
前記圧縮応力膜をパターニングして、前記nチャネルMOSトランジスタを露出するとともに、前記ダミー領域に第1のダミーパターンを形成する工程と、
前記圧縮応力膜をパターニングした後、前記半導体基板上及び露出した前記nチャネルMOSトランジスタ、パターニングされた前記圧縮応力膜上に、引張り応力を蓄積した引張り応力膜を形成する工程と、
前記引張り応力膜をパターニングして、前記pチャネルMOSトランジスタ上の前記引張り応力膜及び前記第1のダミーパターン上の前記引張り応力膜を除去するとともに、前記ダミー領域に第2のダミーパターンを形成する工程と、を有し、
前記第1および第2のダミーパターンのいずれか一方は、前記ダミー領域中で前記第1および第2のダミーパターンの他方により囲まれて孤立しており、
前記半導体基板上の、前記引張り応力膜の総面積に対する前記圧縮応力膜の総面積の比率が、3/7から7/3の範囲内である半導体集積回路装置の製造方法。 - 前記半導体基板上の、前記引張り応力膜の総面積に対する前記圧縮応力膜の総面積の比率が、2/3から3/2の範囲内である請求項6又は7に記載の半導体集積回路装置の製造方法。
- 前記第1のダミーパターンは前記ダミー領域に複数形成され、
前記複数の第1のダミーパターンは前記第2のダミーパターンに囲まれて位置する請求項6又は7に記載の半導体集積回路装置の製造方法。
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PCT/JP2007/057152 WO2008126264A1 (ja) | 2007-03-30 | 2007-03-30 | 半導体集積回路装置 |
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CN104734695B (zh) * | 2013-12-24 | 2018-05-04 | 澜起科技(上海)有限公司 | 信号发生器、电子系统以及产生信号的方法 |
KR102294323B1 (ko) * | 2014-07-09 | 2021-08-26 | 삼성전자주식회사 | 스트레스 검출 방법, 컴팩트 모델 트레이닝 방법, 스트레스 완화 방법 및 컴퓨팅 시스템 |
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JP4102334B2 (ja) * | 2004-06-16 | 2008-06-18 | 株式会社東芝 | 半導体装置及びその製造方法 |
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JP4586843B2 (ja) * | 2007-11-15 | 2010-11-24 | ソニー株式会社 | 半導体装置 |
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- 2007-03-30 JP JP2009508812A patent/JP5299268B2/ja not_active Expired - Fee Related
- 2007-03-30 CN CN200780052411.3A patent/CN101641778B/zh not_active Expired - Fee Related
- 2007-03-30 WO PCT/JP2007/057152 patent/WO2008126264A1/ja active Application Filing
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2009
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02206160A (ja) * | 1989-02-06 | 1990-08-15 | Matsushita Electron Corp | 半導体装置の製造方法 |
JP2006173432A (ja) * | 2004-12-17 | 2006-06-29 | Fujitsu Ltd | 半導体装置およびその製造方法 |
JP2007005626A (ja) * | 2005-06-24 | 2007-01-11 | Sony Corp | 半導体装置及びその製造方法 |
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Publication number | Publication date |
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CN101641778B (zh) | 2014-12-17 |
US8790974B2 (en) | 2014-07-29 |
WO2008126264A1 (ja) | 2008-10-23 |
US20100001350A1 (en) | 2010-01-07 |
CN101641778A (zh) | 2010-02-03 |
US8884375B2 (en) | 2014-11-11 |
US20140024224A1 (en) | 2014-01-23 |
JPWO2008126264A1 (ja) | 2010-07-22 |
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