JP5251031B2 - 圧電素子、液体噴射ヘッド、液体噴射装置、センサー - Google Patents

圧電素子、液体噴射ヘッド、液体噴射装置、センサー Download PDF

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Publication number
JP5251031B2
JP5251031B2 JP2007205320A JP2007205320A JP5251031B2 JP 5251031 B2 JP5251031 B2 JP 5251031B2 JP 2007205320 A JP2007205320 A JP 2007205320A JP 2007205320 A JP2007205320 A JP 2007205320A JP 5251031 B2 JP5251031 B2 JP 5251031B2
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Japan
Prior art keywords
layer
piezoelectric
film
electrode film
lower electrode
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Application number
JP2007205320A
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English (en)
Japanese (ja)
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JP2008091877A (ja
JP2008091877A5 (enExample
Inventor
剛 ▲斉▼藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2007205320A priority Critical patent/JP5251031B2/ja
Priority to US11/851,196 priority patent/US7535157B2/en
Publication of JP2008091877A publication Critical patent/JP2008091877A/ja
Publication of JP2008091877A5 publication Critical patent/JP2008091877A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2007205320A 2006-09-08 2007-08-07 圧電素子、液体噴射ヘッド、液体噴射装置、センサー Active JP5251031B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007205320A JP5251031B2 (ja) 2006-09-08 2007-08-07 圧電素子、液体噴射ヘッド、液体噴射装置、センサー
US11/851,196 US7535157B2 (en) 2006-09-08 2007-09-06 Piezoelectric element, actuator device, liquid-jet head, and liquid-jet apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006243769 2006-09-08
JP2006243769 2006-09-08
JP2007205320A JP5251031B2 (ja) 2006-09-08 2007-08-07 圧電素子、液体噴射ヘッド、液体噴射装置、センサー

Publications (3)

Publication Number Publication Date
JP2008091877A JP2008091877A (ja) 2008-04-17
JP2008091877A5 JP2008091877A5 (enExample) 2010-08-12
JP5251031B2 true JP5251031B2 (ja) 2013-07-31

Family

ID=39169162

Family Applications (1)

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JP2007205320A Active JP5251031B2 (ja) 2006-09-08 2007-08-07 圧電素子、液体噴射ヘッド、液体噴射装置、センサー

Country Status (2)

Country Link
US (1) US7535157B2 (enExample)
JP (1) JP5251031B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5083496B2 (ja) * 2006-09-21 2012-11-28 セイコーエプソン株式会社 アクチュエータ装置及び液体噴射ヘッド並びに画像記録装置
JP5320886B2 (ja) * 2008-07-28 2013-10-23 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置並びに圧電素子
US8164234B2 (en) * 2009-02-26 2012-04-24 Fujifilm Corporation Sputtered piezoelectric material
JP2010201830A (ja) * 2009-03-04 2010-09-16 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置並びに圧電素子
JP5660274B2 (ja) * 2010-01-05 2015-01-28 セイコーエプソン株式会社 液体噴射ヘッドの製造方法、圧電素子の製造方法、液体噴射ヘッド、液体噴射装置及び圧電素子
US8866367B2 (en) 2011-10-17 2014-10-21 The United States Of America As Represented By The Secretary Of The Army Thermally oxidized seed layers for the production of {001} textured electrodes and PZT devices and method of making
US9761785B2 (en) 2011-10-17 2017-09-12 The United States Of America As Represented By The Secretary Of The Army Stylo-epitaxial piezoelectric and ferroelectric devices and method of manufacturing
US20130320813A1 (en) 2012-06-04 2013-12-05 Tdk Corporation Dielectric device
US8981627B2 (en) * 2012-06-04 2015-03-17 Tdk Corporation Piezoelectric device with electrode films and electroconductive oxide film
JP2015079935A (ja) * 2013-09-11 2015-04-23 株式会社リコー 圧電アクチュエータ及び液滴吐出ヘッド、並びに画像形成装置
JP6263950B2 (ja) * 2013-10-22 2018-01-24 株式会社リコー 電気−機械変換素子とその製造方法及び電気−機械変換素子を備えた液滴吐出ヘッド、インクカートリッジ並びに画像形成装置
JP6282735B2 (ja) * 2014-06-24 2018-02-21 株式会社アルバック Ｐｚｔ薄膜積層体の製造方法
JP6460387B2 (ja) * 2015-01-26 2019-01-30 Tdk株式会社 圧電薄膜素子、圧電アクチュエータ、圧電センサ、並びにハードディスクドライブ、及びインクジェットプリンタ装置
CN112864304A (zh) * 2019-11-12 2021-05-28 应用材料公司 具有pmnpt层的压电装置的制造
WO2022151472A1 (en) * 2021-01-18 2022-07-21 Applied Materials, Inc. Deposition of piezoelectric films
WO2025204536A1 (ja) * 2024-03-26 2025-10-02 富士フイルム株式会社 圧電積層体、圧電素子及び圧電積層体の製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3890634B2 (ja) * 1995-09-19 2007-03-07 セイコーエプソン株式会社 圧電体薄膜素子及びインクジェット式記録ヘッド
JPH09129827A (ja) 1995-11-02 1997-05-16 Sony Corp 強誘電体キャパシタ
JP4144043B2 (ja) * 1997-04-16 2008-09-03 セイコーエプソン株式会社 圧電体薄膜素子の製造方法
JPH11151815A (ja) 1997-07-25 1999-06-08 Seiko Epson Corp インクジェット式記録ヘッド及びインクジェット式記録装置
JPH1197630A (ja) * 1997-09-22 1999-04-09 Sharp Corp 強誘電体薄膜の製造方法及び強誘電体メモリ素子
JP3589560B2 (ja) 1998-01-27 2004-11-17 株式会社リコー インクジェットヘッド及びその製造方法
US6398349B1 (en) * 1998-03-04 2002-06-04 Seiko Epson Corporation Piezoelectric device, ink-jet printing head, and method for manufacturing same, and printer
JPH11348277A (ja) 1998-06-04 1999-12-21 Ricoh Co Ltd インクジェットプリンタヘッド
JP3685318B2 (ja) * 1999-11-09 2005-08-17 セイコーエプソン株式会社 強誘電体薄膜素子の製造方法及び加熱処理装置
JP2001223403A (ja) * 2000-02-08 2001-08-17 Matsushita Electric Ind Co Ltd 強誘電体薄膜およびその形成方法とこれを用いた強誘電体薄膜素子
JP3567977B2 (ja) 2000-03-24 2004-09-22 セイコーエプソン株式会社 圧電体素子、インクジェット式記録ヘッド、プリンタ、及び圧電体素子の製造方法
US6534357B1 (en) * 2000-11-09 2003-03-18 Micron Technology, Inc. Methods for forming conductive structures and structures regarding same
JP4029162B2 (ja) 2002-03-08 2008-01-09 株式会社村田製作所 圧電素子の製造方法
JP4208234B2 (ja) 2003-03-24 2009-01-14 株式会社ノリタケカンパニーリミテド 圧電セラミック材用導体ペースト及びその利用
JP4761019B2 (ja) * 2004-10-04 2011-08-31 セイコーエプソン株式会社 電極膜、圧電素子、強誘電体キャパシタ及び半導体装置

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JP2008091877A (ja) 2008-04-17
US20080062228A1 (en) 2008-03-13

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