JP5247014B2 - 5チャネルのフィントランジスタ及びその製造方法 - Google Patents
5チャネルのフィントランジスタ及びその製造方法 Download PDFInfo
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- JP5247014B2 JP5247014B2 JP2006221172A JP2006221172A JP5247014B2 JP 5247014 B2 JP5247014 B2 JP 5247014B2 JP 2006221172 A JP2006221172 A JP 2006221172A JP 2006221172 A JP2006221172 A JP 2006221172A JP 5247014 B2 JP5247014 B2 JP 5247014B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 238000005530 etching Methods 0.000 claims description 23
- 238000002955 isolation Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 10
- 238000009966 trimming Methods 0.000 claims description 7
- 239000007772 electrode material Substances 0.000 claims description 5
- 238000001039 wet etching Methods 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 2
- 239000004020 conductor Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
- H01L29/7853—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET the body having a non-rectangular crossection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
- H01L29/7851—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET with the body tied to the substrate
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Thin Film Transistor (AREA)
Description
前記第4の面は、前記第2の面と前記第5の面との間に設けられており、前記フィン活性領域の前記ゲート電極を挟んで対向する両端に、ソース領域およびドレイン領域がそれぞれ形成され、前記エッチングされた活性領域の幅は、前記フィン活性領域の幅よりも大きいことを特徴としている。
32 素子分離膜
33 活性領域
34 第1マスク
35 準フィン活性領域
35A フィン活性領域
36 ゲート絶縁膜
37A ゲート電極
38 第2マスク
Claims (11)
- 半導体基板に素子分離膜を形成することにより、該素子分離膜の間に活性領域を画定する第1ステップと、
前記活性領域上に第1マスクを形成する第2ステップと、
前記第1マスクを使用して前記活性領域を所定深さにエッチングして、前記エッチングされた活性領域に接続され、該エッチングされた活性領域の上に延びるフィン活性領域を形成する第3ステップと、
前記フィン活性領域の第1、第2、第3、第4および第5の面の上に、ゲート絶縁膜を形成する第4ステップと、
前記フィン活性領域の第1、第2、第3、第4および第5の面を覆うように、前記ゲート絶縁膜上にゲート電極を形成する第5ステップと
を含み、
前記第1および第2の面は、前記エッチングされた活性領域に近接し、
前記第5の面は、前記フィン活性領域の上部面であり、
前記第3の面は、前記第1の面と前記第5の面との間に設けられており、
前記第4の面は、前記第2の面と前記第5の面との間に設けられており、
前記フィン活性領域の前記ゲート電極を挟んで対向する両端に、ソース領域およびドレイン領域がそれぞれ形成され、
前記エッチングされた活性領域の幅は、前記フィン活性領域の幅よりも大きいことを特徴とするフィントランジスタの製造方法。 - 前記フィン活性領域を形成する前記第3ステップが、
前記第1マスクを使用して前記活性領域を所定深さにエッチングすることによって、前記半導体基板の表面に凸部を形成する第6ステップと、
前記半導体基板の素子分離膜を、所定深さにエッチングし、エッチングされた前記活性領域と同じ高さに形成する第7ステップと
を含むことを特徴とする請求項1に記載のフィントランジスタの製造方法。 - 前記第7ステップが、前記素子分離膜を、ウェットエッチングによりエッチングするステップであることを特徴とする請求項2に記載のフィントランジスタの製造方法。
- 前記フィン活性領域を形成する前記第3ステップが、トリミングを行うトリム工程を含むことを特徴とする請求項2又は3に記載のフィントランジスタの製造方法。
- 前記トリム工程が、前記凸部に対してエッチバックを行って、前記凸部の上部面及び両側面をエッチングする工程であることを特徴とする請求項4に記載のフィントランジスタの製造方法。
- 前記凸部の上部面及び両側面を、10Å〜500Åの範囲の厚さでエッチングすることを特徴とする請求項5に記載のフィントランジスタの製造方法。
- 前記フィン活性領域の前記第1、第2、第3、第4および第5の面を覆うように、前記ゲート電極を形成する前記第5ステップが、
前記トリム工程によりエッチングされて形成された前記フィン活性領域の前記第1、第2、第3、第4および第5の面を覆うように、100Å以上厚く形成するステップであることを特徴とする請求項4に記載のフィントランジスタの製造方法。 - 前記第5ステップが、前記フィン活性領域より500Å以上厚くゲート電極物質層を前記ゲート絶縁膜上に形成した後に、該ゲート電極物質層に対してCMPを行って、該ゲート電極物質層表面の段差を低減した後に、前記ゲート電極を形成するステップであること
を特徴とする請求項4に記載のフィントランジスタの製造方法。 - 前記ゲート電極を形成する前記第5ステップが、第2マスクを用いて前記ゲート電極物質層をパターニングする第8ステップを含むことを特徴とする請求項8に記載のフィントランジスタの製造方法。
- ゲート電極を形成するのに用いられる前記第2マスクが、前記フィン活性領域を形成するのに用いられた前記第1マスクと同じ線幅に形成されることを特徴とする請求項9に記載のフィントランジスタの製造方法。
- 前記第1マスクの線幅が、10nm〜100nmの範囲であることを特徴とする請求項10に記載のフィントランジスタの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2005-0130534 | 2005-12-27 | ||
KR1020050130534A KR100792384B1 (ko) | 2005-12-27 | 2005-12-27 | 5 채널 핀 트랜지스터 및 그 제조 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007180486A JP2007180486A (ja) | 2007-07-12 |
JP5247014B2 true JP5247014B2 (ja) | 2013-07-24 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006221172A Expired - Fee Related JP5247014B2 (ja) | 2005-12-27 | 2006-08-14 | 5チャネルのフィントランジスタ及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7547600B2 (ja) |
JP (1) | JP5247014B2 (ja) |
KR (1) | KR100792384B1 (ja) |
CN (1) | CN100563028C (ja) |
TW (1) | TWI323942B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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CA2527501A1 (en) * | 2003-05-28 | 2004-12-09 | Caymas Systems, Inc. | Multilayer access control security system |
CN102723366B (zh) * | 2007-07-27 | 2015-03-04 | 知识产权之桥一号有限责任公司 | 半导体装置 |
CN101877317B (zh) * | 2009-04-29 | 2013-03-27 | 台湾积体电路制造股份有限公司 | 非平坦晶体管及其制造方法 |
US8592320B2 (en) * | 2011-08-15 | 2013-11-26 | Nanya Technology Corporation | Method for forming fin-shaped semiconductor structure |
US9362406B2 (en) * | 2012-12-12 | 2016-06-07 | Taiwan Semiconductor Manufacturing Company Limited | Faceted finFET |
EP2775528B1 (en) * | 2013-03-05 | 2019-07-17 | IMEC vzw | Passivated III-V or Ge fin-shaped field effect transistor |
CN103413828A (zh) * | 2013-07-18 | 2013-11-27 | 清华大学 | 多边形沟道层多栅结构隧穿晶体管及其形成方法 |
KR102402761B1 (ko) * | 2015-10-30 | 2022-05-26 | 삼성전자주식회사 | 반도체 장치 및 이의 제조 방법 |
CN106449761B (zh) * | 2016-11-30 | 2019-05-31 | 上海华力微电子有限公司 | 半导体器件的形成方法 |
CN107481937B (zh) * | 2017-08-21 | 2020-07-03 | 扬州江新电子有限公司 | 双角度类梯形截面形状的鳍型场效应晶体管及其评价方法 |
US10825931B2 (en) * | 2018-02-13 | 2020-11-03 | Nanya Technology Corporation | Semiconductor device with undercutted-gate and method of fabricating the same |
Family Cites Families (13)
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JPH01241868A (ja) * | 1988-03-23 | 1989-09-26 | Nec Corp | 半導体装置 |
JPH06302818A (ja) * | 1993-04-16 | 1994-10-28 | Kawasaki Steel Corp | 半導体装置 |
US6720619B1 (en) * | 2002-12-13 | 2004-04-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor-on-insulator chip incorporating partially-depleted, fully-depleted, and multiple-gate devices |
EP1555688B1 (en) * | 2004-01-17 | 2009-11-11 | Samsung Electronics Co., Ltd. | Method of manufacturing a multi-sided-channel finfet transistor |
US7385247B2 (en) * | 2004-01-17 | 2008-06-10 | Samsung Electronics Co., Ltd. | At least penta-sided-channel type of FinFET transistor |
KR100577562B1 (ko) * | 2004-02-05 | 2006-05-08 | 삼성전자주식회사 | 핀 트랜지스터 형성방법 및 그에 따른 구조 |
KR100526889B1 (ko) * | 2004-02-10 | 2005-11-09 | 삼성전자주식회사 | 핀 트랜지스터 구조 |
JP2005236305A (ja) * | 2004-02-20 | 2005-09-02 | Samsung Electronics Co Ltd | トリプルゲートトランジスタを有する半導体素子及びその製造方法 |
KR100585131B1 (ko) * | 2004-02-20 | 2006-06-01 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
KR100549008B1 (ko) | 2004-03-17 | 2006-02-02 | 삼성전자주식회사 | 등방성식각 기술을 사용하여 핀 전계효과 트랜지스터를제조하는 방법 |
KR100576365B1 (ko) * | 2004-05-24 | 2006-05-03 | 삼성전자주식회사 | 부유게이트를 갖는 플래시메모리 셀 및 그 제조방법 |
US7371638B2 (en) * | 2004-05-24 | 2008-05-13 | Samsung Electronics Co., Ltd. | Nonvolatile memory cells having high control gate coupling ratios using grooved floating gates and methods of forming same |
KR100875737B1 (ko) * | 2004-05-31 | 2008-12-24 | 삼성전자주식회사 | 부유게이트를 갖는 플래시메모리 셀 및 그 제조방법 |
-
2005
- 2005-12-27 KR KR1020050130534A patent/KR100792384B1/ko not_active IP Right Cessation
-
2006
- 2006-05-24 TW TW095118349A patent/TWI323942B/zh active
- 2006-06-27 US US11/476,261 patent/US7547600B2/en active Active
- 2006-08-14 JP JP2006221172A patent/JP5247014B2/ja not_active Expired - Fee Related
- 2006-10-26 CN CNB2006101507907A patent/CN100563028C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN1992340A (zh) | 2007-07-04 |
KR20070068660A (ko) | 2007-07-02 |
TWI323942B (en) | 2010-04-21 |
TW200725882A (en) | 2007-07-01 |
KR100792384B1 (ko) | 2008-01-09 |
JP2007180486A (ja) | 2007-07-12 |
US20070145409A1 (en) | 2007-06-28 |
US7547600B2 (en) | 2009-06-16 |
CN100563028C (zh) | 2009-11-25 |
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