JP5205241B2 - 分光モジュール - Google Patents

分光モジュール Download PDF

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Publication number
JP5205241B2
JP5205241B2 JP2008311057A JP2008311057A JP5205241B2 JP 5205241 B2 JP5205241 B2 JP 5205241B2 JP 2008311057 A JP2008311057 A JP 2008311057A JP 2008311057 A JP2008311057 A JP 2008311057A JP 5205241 B2 JP5205241 B2 JP 5205241B2
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JP
Japan
Prior art keywords
light
spectroscopic
substrate
detection element
light detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008311057A
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English (en)
Japanese (ja)
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JP2009300419A5 (https=
JP2009300419A (ja
Inventor
勝己 柴山
隆文 能野
真樹 廣瀬
将師 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
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Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2008311057A priority Critical patent/JP5205241B2/ja
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to EP09746522.3A priority patent/EP2287574B1/en
Priority to US12/992,398 priority patent/US8804118B2/en
Priority to CN200980117552.8A priority patent/CN102027343B/zh
Priority to KR1020167011626A priority patent/KR101774186B1/ko
Priority to PCT/JP2009/058617 priority patent/WO2009139315A1/ja
Priority to KR1020107015306A priority patent/KR20110005771A/ko
Publication of JP2009300419A publication Critical patent/JP2009300419A/ja
Publication of JP2009300419A5 publication Critical patent/JP2009300419A5/ja
Application granted granted Critical
Publication of JP5205241B2 publication Critical patent/JP5205241B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
    • G02B27/4244—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in wavelength selecting devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/025—Mountings, adjusting means, or light-tight connections, for optical elements for lenses using glue
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2008311057A 2008-05-15 2008-12-05 分光モジュール Active JP5205241B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2008311057A JP5205241B2 (ja) 2008-05-15 2008-12-05 分光モジュール
US12/992,398 US8804118B2 (en) 2008-05-15 2009-05-07 Spectral module
CN200980117552.8A CN102027343B (zh) 2008-05-15 2009-05-07 分光模块
KR1020167011626A KR101774186B1 (ko) 2008-05-15 2009-05-07 분광모듈
EP09746522.3A EP2287574B1 (en) 2008-05-15 2009-05-07 Spectral module
PCT/JP2009/058617 WO2009139315A1 (ja) 2008-05-15 2009-05-07 分光モジュール
KR1020107015306A KR20110005771A (ko) 2008-05-15 2009-05-07 분광모듈

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008128687 2008-05-15
JP2008128687 2008-05-15
JP2008311057A JP5205241B2 (ja) 2008-05-15 2008-12-05 分光モジュール

Publications (3)

Publication Number Publication Date
JP2009300419A JP2009300419A (ja) 2009-12-24
JP2009300419A5 JP2009300419A5 (https=) 2010-02-12
JP5205241B2 true JP5205241B2 (ja) 2013-06-05

Family

ID=41318686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008311057A Active JP5205241B2 (ja) 2008-05-15 2008-12-05 分光モジュール

Country Status (6)

Country Link
US (1) US8804118B2 (https=)
EP (1) EP2287574B1 (https=)
JP (1) JP5205241B2 (https=)
KR (2) KR20110005771A (https=)
CN (1) CN102027343B (https=)
WO (1) WO2009139315A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7054671B2 (ja) 2015-08-31 2022-04-14 メトラー－トレド ゲーエムベーハー 分光器

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5982364B2 (ja) * 2010-06-22 2016-08-31 センスペック・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングＳｅｎｓｐｅｃ Ｇｍｂｈ 測定媒体の成分または特性、特に生理的血液値を特定およびモニタするための装置ならびに方法
JP6234667B2 (ja) * 2012-08-06 2017-11-22 浜松ホトニクス株式会社 光学素子及びその製造方法
EP2857810A1 (en) * 2013-10-02 2015-04-08 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Monolith spectrometer
JP2015106106A (ja) 2013-12-02 2015-06-08 セイコーエプソン株式会社 電子デバイスおよび電子機器
JP6251073B2 (ja) * 2014-02-05 2017-12-20 浜松ホトニクス株式会社 分光器、及び分光器の製造方法
JP6395389B2 (ja) * 2014-02-05 2018-09-26 浜松ホトニクス株式会社 分光器
EP3372966B1 (en) * 2017-03-10 2021-09-01 Hitachi High-Tech Analytical Science Limited A portable analyzer using optical emission spectoscopy
US11639873B2 (en) * 2020-04-15 2023-05-02 Viavi Solutions Inc. High resolution multi-pass optical spectrum analyzer
CN113782644B (zh) * 2021-11-12 2022-01-25 同方威视技术股份有限公司 太赫兹探测装置的制造方法及探测设备

Family Cites Families (76)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4259014A (en) * 1979-04-03 1981-03-31 Princeton Applied Research Corporation Fiber optic polychromator
DE3509131A1 (de) * 1985-03-14 1986-09-18 Fa. Carl Zeiss, 7920 Heidenheim Verfahren zur justierten montage der optischen bauteile eines optischen geraetes
JP2592081B2 (ja) 1987-12-28 1997-03-19 スズキ株式会社 自動二輪車等のマフラ
DE4038638A1 (de) * 1990-12-04 1992-06-11 Zeiss Carl Fa Diodenzeilen-spektrometer
JPH04287001A (ja) 1991-03-15 1992-10-12 Sekinosu Kk 光回折格子の製造方法
JPH06167637A (ja) 1992-11-30 1994-06-14 Hitachi Ltd 多芯光コネクタ
JP2592081Y2 (ja) * 1993-08-13 1999-03-17 信越化学工業株式会社 光学素子の固定部品およびそれを応用した光アイソレータ
JPH08145794A (ja) 1994-11-17 1996-06-07 Shimadzu Corp 分光器
US6224912B1 (en) 1996-04-03 2001-05-01 The Rogo Institute Cancer-cell proliferation-suppressing material produced by cancer cells restricted by entrapment
US5995221A (en) * 1997-02-28 1999-11-30 Instruments S.A., Inc. Modified concentric spectrograph
US6303934B1 (en) * 1997-04-10 2001-10-16 James T. Daly Monolithic infrared spectrometer apparatus and methods
DE19717014A1 (de) 1997-04-23 1998-10-29 Inst Mikrotechnik Mainz Gmbh Verfahren und Form zur Herstellung miniaturisierter Formenkörper
DE19717015A1 (de) * 1997-04-23 1998-10-29 Inst Mikrotechnik Mainz Gmbh Miniaturisiertes optisches Bauelement sowie Verfahren zu seiner Herstellung
DE69712115T2 (de) 1997-11-28 2002-09-26 Hamamatsu Photonics K.K., Hamamatsu Festkörperbildaufnahmevorrichtung für analysevorrichtung
EP0942267B1 (de) * 1998-03-11 2006-08-30 Gretag-Macbeth AG Spektrometer
US6608679B1 (en) * 1998-12-21 2003-08-19 Xerox Corporation Spectrophotometric analysis of input light
US6249346B1 (en) * 1998-12-21 2001-06-19 Xerox Corporation Monolithic spectrophotometer
JP2000269472A (ja) 1999-03-15 2000-09-29 Canon Inc 撮像装置
EP1041372B1 (de) 1999-04-01 2006-03-01 Gretag-Macbeth AG Spektrometer
JP4287001B2 (ja) 1999-10-27 2009-07-01 帝人株式会社 透明導電積層体
US6538736B1 (en) * 1999-12-01 2003-03-25 Hach Company Concentric spectrometer with mitigation of internal specular reflections
AU2001276875A1 (en) * 2000-07-11 2002-01-21 Ibsen Photonics Monitoring apparatus for optical transmission systems
KR20030026326A (ko) * 2000-07-28 2003-03-31 오츠카 일렉트로닉스 가부시키가이샤 스펙트럼 광 검출장치
US6657723B2 (en) * 2000-12-13 2003-12-02 International Business Machines Corporation Multimode planar spectrographs for wavelength demultiplexing and methods of fabrication
US7002697B2 (en) 2001-08-02 2006-02-21 Aegis Semiconductor, Inc. Tunable optical instruments
JP2003139611A (ja) 2001-11-06 2003-05-14 Olympus Optical Co Ltd 分光光度計
JP3912111B2 (ja) 2002-01-09 2007-05-09 富士通株式会社 波長多重双方向光伝送モジュール
JP3818441B2 (ja) 2002-02-20 2006-09-06 日本電信電話株式会社 基板実装構造及び半導体装置
JP4221965B2 (ja) * 2002-07-22 2009-02-12 日立電線株式会社 回折格子、波長合分波器及びこれらを用いた波長多重信号光伝送モジュール
US6885107B2 (en) * 2002-08-29 2005-04-26 Micron Technology, Inc. Flip-chip image sensor packages and methods of fabrication
US7170600B2 (en) * 2002-09-20 2007-01-30 Nippon Sheet Glass Company, Limited Spectrometer using diffraction grating
FR2847978B1 (fr) 2002-12-02 2005-12-02 Technologie Optique Et Etudes Spectrometre compact a composant optique monolithique
JP2004191246A (ja) 2002-12-12 2004-07-08 Matsushita Electric Ind Co Ltd 凹凸検出センサ
DE10304312A1 (de) * 2003-02-04 2004-08-12 Carl Zeiss Jena Gmbh Kompakt-Spektrometer
CN101373783B (zh) 2003-03-10 2010-06-23 浜松光子学株式会社 光电二极管阵列及其制造方法
JP2004309146A (ja) * 2003-04-02 2004-11-04 Olympus Corp 分光光度計
JP4409860B2 (ja) * 2003-05-28 2010-02-03 浜松ホトニクス株式会社 光検出器を用いた分光器
US7623235B2 (en) * 2004-03-20 2009-11-24 Seng-Tiong Ho Curved grating spectrometer with very high wavelength resolution
US7283233B1 (en) * 2004-03-20 2007-10-16 Seng-Tiong Ho Curved grating spectrometer with very high wavelength resolution
JP4627410B2 (ja) 2004-04-20 2011-02-09 浜松ホトニクス株式会社 分光器を用いた測定装置
JP4720120B2 (ja) 2004-07-14 2011-07-13 ソニー株式会社 半導体イメージセンサ・モジュール
JP4473665B2 (ja) * 2004-07-16 2010-06-02 浜松ホトニクス株式会社 分光器
WO2006010367A2 (en) * 2004-07-26 2006-02-02 Danmarks Tekniske Universitet On-chip spectroscopy
JP4576961B2 (ja) 2004-09-28 2010-11-10 株式会社島津製作所 レプリカ回折格子の製造方法
JP2006322841A (ja) * 2005-05-19 2006-11-30 Shimadzu Corp 分光測定方法及び分光光度計
US7330258B2 (en) * 2005-05-27 2008-02-12 Innovative Technical Solutions, Inc. Spectrometer designs
US7289220B2 (en) * 2005-10-14 2007-10-30 Board Of Regents, The University Of Texas System Broadband cavity spectrometer apparatus and method for determining the path length of an optical structure
JP4811032B2 (ja) 2006-01-30 2011-11-09 株式会社島津製作所 反射型レプリカ光学素子
US7697137B2 (en) * 2006-04-28 2010-04-13 Corning Incorporated Monolithic Offner spectrometer
EP1882916A1 (en) * 2006-07-20 2008-01-30 Interuniversitair Microelektronica Centrum Compact catadioptric spectrometer
WO2008029852A1 (en) 2006-09-06 2008-03-13 Nikon Corporation Optical device, exposure apparatus, and method for manufacturing device
JP4490406B2 (ja) 2006-10-11 2010-06-23 浜松ホトニクス株式会社 固体撮像装置
JP4905193B2 (ja) * 2007-03-16 2012-03-28 コニカミノルタセンシング株式会社 凹面回折ミラー及びこれを用いた分光装置
CN101542251B (zh) 2007-06-08 2012-09-26 浜松光子学株式会社 分光器
EP2063239A4 (en) * 2007-06-08 2013-12-25 Hamamatsu Photonics Kk SPECTROSCOPIC MODULE
JP4891841B2 (ja) 2007-06-08 2012-03-07 浜松ホトニクス株式会社 分光モジュール
WO2008149930A1 (ja) * 2007-06-08 2008-12-11 Hamamatsu Photonics K.K. 分光モジュール
TWI342862B (en) * 2008-01-31 2011-06-01 Univ Nat Taiwan Method of micro/nano imprinting
KR101518518B1 (ko) * 2008-03-04 2015-05-07 하마마츠 포토닉스 가부시키가이샤 분광 모듈
JP5111163B2 (ja) * 2008-03-04 2012-12-26 浜松ホトニクス株式会社 分光器
JP5207938B2 (ja) * 2008-05-15 2013-06-12 浜松ホトニクス株式会社 分光モジュール及び分光モジュールの製造方法
JP5512961B2 (ja) * 2008-05-15 2014-06-04 浜松ホトニクス株式会社 分光モジュール及びその製造方法
JP5205239B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器
JP5074291B2 (ja) 2008-05-15 2012-11-14 浜松ホトニクス株式会社 分光モジュール
JP2009300418A (ja) * 2008-05-15 2009-12-24 Hamamatsu Photonics Kk 分光モジュール
JP5205243B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器
JP5415060B2 (ja) * 2008-05-15 2014-02-12 浜松ホトニクス株式会社 分光モジュール
JP5205238B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュール
JP5205240B2 (ja) * 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光モジュールの製造方法及び分光モジュール
JP5205242B2 (ja) 2008-05-15 2013-06-05 浜松ホトニクス株式会社 分光器の製造方法
JP5411778B2 (ja) * 2009-04-30 2014-02-12 キヤノン株式会社 分光測色装置、およびそれを用いた画像形成装置
JP2010261767A (ja) * 2009-05-01 2010-11-18 Canon Inc 分光装置及びそれを有する画像形成装置
JP5669434B2 (ja) * 2009-05-09 2015-02-12 キヤノン株式会社 回折素子及び回折素子の製造方法及びそれを用いた分光器
JP5421684B2 (ja) * 2009-07-29 2014-02-19 キヤノン株式会社 回折光学素子、それを用いた分光測色装置および画像形成装置
DE102009046831B4 (de) * 2009-11-18 2015-02-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Strahlungserzeugungsvorrichtung zum Erzeugen einer elektromagnetischen Strahlung mit einer einstellbaren spektralen Zusammensetzung und Verfahren zur Herstellung derselben
JP5335729B2 (ja) * 2010-04-01 2013-11-06 浜松ホトニクス株式会社 分光モジュール

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7054671B2 (ja) 2015-08-31 2022-04-14 メトラー－トレド ゲーエムベーハー 分光器

Also Published As

Publication number Publication date
CN102027343A (zh) 2011-04-20
CN102027343B (zh) 2014-03-19
EP2287574B1 (en) 2020-06-17
KR20160056945A (ko) 2016-05-20
US8804118B2 (en) 2014-08-12
US20110164247A1 (en) 2011-07-07
EP2287574A4 (en) 2014-01-08
EP2287574A1 (en) 2011-02-23
KR20110005771A (ko) 2011-01-19
WO2009139315A1 (ja) 2009-11-19
KR101774186B1 (ko) 2017-09-01
JP2009300419A (ja) 2009-12-24

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