JP5198947B2 - 元素分析装置 - Google Patents
元素分析装置 Download PDFInfo
- Publication number
- JP5198947B2 JP5198947B2 JP2008165096A JP2008165096A JP5198947B2 JP 5198947 B2 JP5198947 B2 JP 5198947B2 JP 2008165096 A JP2008165096 A JP 2008165096A JP 2008165096 A JP2008165096 A JP 2008165096A JP 5198947 B2 JP5198947 B2 JP 5198947B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- suction port
- upper electrode
- side suction
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004140 cleaning Methods 0.000 claims description 129
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 230000003028 elevating effect Effects 0.000 claims description 6
- 239000013013 elastic material Substances 0.000 claims description 5
- 238000000921 elemental analysis Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 9
- 238000004458 analytical method Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920001778 nylon Polymers 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating And Analyzing Materials By Characteristic Methods (AREA)
Description
R ・・・るつぼ
2 ・・・下部電極
3 ・・・上部電極
5 ・・・清掃機構
511 ・・・上部電極清掃体
51A ・・・上部電極側開口
51B ・・・アーム部側吸引口
513 ・・・吸気通路
51 ・・・アーム部
P ・・・離間位置(対向位置)
Q ・・・清掃位置
53 ・・・昇降駆動部
102A・・・本体側吸引口
55 ・・・連結体
512 ・・・下部電極清掃体
Claims (3)
- 上部電極及び当該上部電極に対して昇降移動する下部電極を備え、それら電極により、試料を収容するるつぼを挟持し、当該電極に電圧を印加することにより、前記るつぼを加熱して、前記試料によって生じるガスから前記試料の元素を分析する元素分析装置であって、
前記上部電極を清掃する清掃機構を具備し、当該清掃機構が、
前記上部電極を清掃する上部電極清掃体と、一端が上部電極側開口として上部電極清掃体の周囲に開口し、他端が前記上部電極側開口から空気を吸引するためのアーム部側吸引口として開口する吸気通路を有するアーム部と、
前記上部電極清掃体が上部電極を清掃する清掃位置、及び当該清掃位置から離間した離間位置との間で前記アーム部を昇降移動させる昇降駆動部と、
装置本体側に固定され、吸引機器が接続される本体側吸引口と、を備え、
前記アーム部側吸引口が、前記清掃位置において、前記本体側吸引口と連通するものである元素分析装置。 - 前記アーム部側吸引口又は前記本体側吸引口の周縁部に設けられ、前記清掃位置において前記アーム部側吸引口及び前記本体側吸引口を連通する、弾性材料からなる連結体を備える請求項1記載の元素分析装置。
- 前記アーム部が、下部電極を清掃する下部電極清掃体を有し、
前記上部電極清掃体を清掃位置に移動させて、前記アーム部側吸引口及び前記本体側吸引口が連通した後に、前記下部電極を上昇させて、前記下部電極及び前記下部電極清掃体を当接させて、当該下部電極を清掃する請求項1又は2記載の元素分析装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008165096A JP5198947B2 (ja) | 2008-06-24 | 2008-06-24 | 元素分析装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008165096A JP5198947B2 (ja) | 2008-06-24 | 2008-06-24 | 元素分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010008111A JP2010008111A (ja) | 2010-01-14 |
JP5198947B2 true JP5198947B2 (ja) | 2013-05-15 |
Family
ID=41588812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008165096A Active JP5198947B2 (ja) | 2008-06-24 | 2008-06-24 | 元素分析装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5198947B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3064938B1 (en) * | 2013-10-29 | 2019-09-11 | Horiba, Ltd. | Analysis device |
US20230098544A1 (en) * | 2020-03-11 | 2023-03-30 | Horiba, Ltd. | Elemental analysis device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5823886B2 (ja) * | 1980-07-05 | 1983-05-18 | 株式会社 堀場製作所 | 金属中のガス分析装置における抽出炉自動清掃装置 |
JPH0738963U (ja) * | 1993-12-25 | 1995-07-14 | 株式会社堀場製作所 | 燃焼炉用オートクリーニング装置 |
JP4157215B2 (ja) * | 1999-03-15 | 2008-10-01 | 株式会社堀場製作所 | 元素分析装置のガス抽出炉 |
JP2009053121A (ja) * | 2007-08-28 | 2009-03-12 | Horiba Ltd | 元素分析装置 |
-
2008
- 2008-06-24 JP JP2008165096A patent/JP5198947B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2010008111A (ja) | 2010-01-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5155751B2 (ja) | 元素分析装置 | |
JP2003203891A (ja) | 基板処理装置 | |
JP4971283B2 (ja) | 半導体ウエーハ汚染物質測定装置のスキャンステージ | |
JP2002184831A (ja) | Foupオープナ | |
CN104422779B (zh) | 全自动免疫分析仪 | |
JP5198947B2 (ja) | 元素分析装置 | |
JP5596071B2 (ja) | 液処理装置 | |
CN111649982A (zh) | 一种可监测箱内土壤湿度的温室气体采样箱 | |
WO2003102475A1 (fr) | Module d'assemblage propre, appareillage de production le contenant, robot industriel et systeme antipollution | |
JPH039607B2 (ja) | ||
JP5587263B2 (ja) | 燃焼炉自動清掃機 | |
JP2009053121A (ja) | 元素分析装置 | |
WO1998022230A1 (fr) | Dispositif rotatif et procede de mise en rotation | |
JP3982597B2 (ja) | ダイボンダのチップ吸着機構 | |
CN217766212U (zh) | 自动进样设备 | |
CN216067498U (zh) | 一种用于测试大直径硅片背面金属含量的新型机械手 | |
JP3836609B2 (ja) | 液体吸引装置 | |
TW200419687A (en) | Ion sampling system for wafer and method thereof | |
JPH0847827A (ja) | リング状パッキンの自動装着機 | |
KR100788005B1 (ko) | 박막 디스크용 카세트 뚜껑 개폐장치 | |
CN219655590U (zh) | 一种管道无损检测用爬行器 | |
CN217797790U (zh) | 晶圆清洁单元及晶圆处理装置 | |
JP3247665B2 (ja) | X線分析装置における試料交換機 | |
CN218823624U (zh) | 一种电器外壳耐压力检测装置 | |
CN214643743U (zh) | 吸附装置及吸附设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110201 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120731 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120911 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121108 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130205 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130207 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160215 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5198947 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R154 | Certificate of patent or utility model (reissue) |
Free format text: JAPANESE INTERMEDIATE CODE: R154 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |