JP5192163B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5192163B2 JP5192163B2 JP2007075858A JP2007075858A JP5192163B2 JP 5192163 B2 JP5192163 B2 JP 5192163B2 JP 2007075858 A JP2007075858 A JP 2007075858A JP 2007075858 A JP2007075858 A JP 2007075858A JP 5192163 B2 JP5192163 B2 JP 5192163B2
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/20—Parameters
- H01L2924/207—Diameter ranges
- H01L2924/20756—Diameter ranges larger or equal to 60 microns less than 70 microns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/20—Parameters
- H01L2924/207—Diameter ranges
- H01L2924/20757—Diameter ranges larger or equal to 70 microns less than 80 microns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/20—Parameters
- H01L2924/207—Diameter ranges
- H01L2924/20758—Diameter ranges larger or equal to 80 microns less than 90 microns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/20—Parameters
- H01L2924/207—Diameter ranges
- H01L2924/20759—Diameter ranges larger or equal to 90 microns less than 100 microns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/20—Parameters
- H01L2924/207—Diameter ranges
- H01L2924/2076—Diameter ranges equal to or larger than 100 microns
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Wire Bonding (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007075858A JP5192163B2 (ja) | 2007-03-23 | 2007-03-23 | 半導体装置 |
| US12/054,087 US8222736B2 (en) | 2007-03-23 | 2008-03-24 | Semiconductor device with Al pad |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007075858A JP5192163B2 (ja) | 2007-03-23 | 2007-03-23 | 半導体装置 |
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| Publication Number | Publication Date |
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| JP2008235728A JP2008235728A (ja) | 2008-10-02 |
| JP2008235728A5 JP2008235728A5 (enExample) | 2010-05-06 |
| JP5192163B2 true JP5192163B2 (ja) | 2013-05-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2007075858A Active JP5192163B2 (ja) | 2007-03-23 | 2007-03-23 | 半導体装置 |
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| Country | Link |
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| US (1) | US8222736B2 (enExample) |
| JP (1) | JP5192163B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4952534B2 (ja) * | 2007-11-20 | 2012-06-13 | 三菱電機株式会社 | 窒化物半導体発光素子の製造方法 |
| JP5468804B2 (ja) * | 2009-03-31 | 2014-04-09 | 古河電気工業株式会社 | 半導体チップ、半導体パッケージ、パワーモジュール、及び半導体パッケージの製造方法 |
| JP2011040582A (ja) | 2009-08-11 | 2011-02-24 | Fuji Xerox Co Ltd | 発光素子およびその製造方法 |
| US20140209926A1 (en) * | 2013-01-28 | 2014-07-31 | Win Semiconductors Corp. | Semiconductor integrated circuit |
| JP6211867B2 (ja) * | 2013-09-24 | 2017-10-11 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
| JP6508601B2 (ja) * | 2014-08-11 | 2019-05-08 | パナソニックIpマネジメント株式会社 | 半導体装置 |
| JP6738169B2 (ja) * | 2016-03-11 | 2020-08-12 | Dowaエレクトロニクス株式会社 | 半導体光デバイスおよびその製造方法 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4388512A (en) * | 1981-03-09 | 1983-06-14 | Raytheon Company | Aluminum wire ball bonding apparatus and method |
| JPS59210656A (ja) * | 1983-05-16 | 1984-11-29 | Fujitsu Ltd | 半導体装置 |
| JPS61220462A (ja) * | 1985-03-27 | 1986-09-30 | Toshiba Corp | 化合物半導体装置 |
| US4880708A (en) * | 1988-07-05 | 1989-11-14 | Motorola, Inc. | Metallization scheme providing adhesion and barrier properties |
| JPH0760839B2 (ja) * | 1990-03-15 | 1995-06-28 | 株式会社東芝 | 半導体装置 |
| JPH04102358A (ja) * | 1990-08-21 | 1992-04-03 | Ngk Spark Plug Co Ltd | 配線基板 |
| EP0525644A1 (en) * | 1991-07-24 | 1993-02-03 | Denki Kagaku Kogyo Kabushiki Kaisha | Circuit substrate for mounting a semiconductor element |
| DE69330603T2 (de) * | 1993-09-30 | 2002-07-04 | Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno, Catania | Verfahren zur Metallisierung und Verbindung bei der Herstellung von Leistungshalbleiterbauelementen |
| JPH10189649A (ja) * | 1996-12-20 | 1998-07-21 | Sharp Corp | 化合物半導体素子及びその電極形成方法 |
| JP3379062B2 (ja) | 1997-12-02 | 2003-02-17 | 富士通カンタムデバイス株式会社 | 半導体装置及びその製造方法 |
| JP2000049184A (ja) * | 1998-05-27 | 2000-02-18 | Hitachi Ltd | 半導体装置およびその製造方法 |
| CA2343412A1 (en) * | 1998-09-11 | 2000-03-23 | William C. Maloney | Object control and tracking system with zonal transition detection |
| TW445616B (en) * | 1998-12-04 | 2001-07-11 | Koninkl Philips Electronics Nv | An integrated circuit device |
| US6511901B1 (en) * | 1999-11-05 | 2003-01-28 | Atmel Corporation | Metal redistribution layer having solderable pads and wire bondable pads |
| JP2002118121A (ja) * | 2000-10-10 | 2002-04-19 | Sanyo Electric Co Ltd | 化合物半導体装置の製造方法 |
| JP2002231748A (ja) * | 2001-02-01 | 2002-08-16 | Sanyo Electric Co Ltd | バンプ電極の形成方法 |
| JP2003209134A (ja) * | 2002-01-11 | 2003-07-25 | Hitachi Ltd | 半導体装置及びその製造方法 |
| JP2005166946A (ja) * | 2003-12-02 | 2005-06-23 | Espec Corp | 基板及びその製造方法 |
| US7394161B2 (en) * | 2003-12-08 | 2008-07-01 | Megica Corporation | Chip structure with pads having bumps or wirebonded wires formed thereover or used to be tested thereto |
| DE112004003008T5 (de) * | 2004-10-29 | 2007-10-25 | Spansion Llc, Sunnyvale | Halbleiterbauelement und Verfahren zur Herstellung desselben |
| JP4597653B2 (ja) | 2004-12-16 | 2010-12-15 | 住友電工デバイス・イノベーション株式会社 | 半導体装置、それを備える半導体モジュールおよび半導体装置の製造方法。 |
| JP2006245379A (ja) * | 2005-03-04 | 2006-09-14 | Stanley Electric Co Ltd | 半導体発光素子 |
| US7361993B2 (en) * | 2005-05-09 | 2008-04-22 | International Business Machines Corporation | Terminal pad structures and methods of fabricating same |
-
2007
- 2007-03-23 JP JP2007075858A patent/JP5192163B2/ja active Active
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2008
- 2008-03-24 US US12/054,087 patent/US8222736B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008235728A (ja) | 2008-10-02 |
| US20080230908A1 (en) | 2008-09-25 |
| US8222736B2 (en) | 2012-07-17 |
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