JP5179687B2 - 室温精製器の回復方法 - Google Patents
室温精製器の回復方法 Download PDFInfo
- Publication number
- JP5179687B2 JP5179687B2 JP2001515054A JP2001515054A JP5179687B2 JP 5179687 B2 JP5179687 B2 JP 5179687B2 JP 2001515054 A JP2001515054 A JP 2001515054A JP 2001515054 A JP2001515054 A JP 2001515054A JP 5179687 B2 JP5179687 B2 JP 5179687B2
- Authority
- JP
- Japan
- Prior art keywords
- purifier
- gas
- getter
- nickel
- transition metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 55
- 238000011084 recovery Methods 0.000 title claims description 14
- 239000007789 gas Substances 0.000 claims description 78
- 239000000463 material Substances 0.000 claims description 60
- 229910052759 nickel Inorganic materials 0.000 claims description 46
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 43
- 239000001257 hydrogen Substances 0.000 claims description 43
- 229910052739 hydrogen Inorganic materials 0.000 claims description 43
- 239000007769 metal material Substances 0.000 claims description 38
- 229910052723 transition metal Inorganic materials 0.000 claims description 38
- 150000003624 transition metals Chemical class 0.000 claims description 38
- 229910045601 alloy Inorganic materials 0.000 claims description 22
- 239000000956 alloy Substances 0.000 claims description 22
- 239000012535 impurity Substances 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 11
- 238000000746 purification Methods 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229910052758 niobium Inorganic materials 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 229910052720 vanadium Inorganic materials 0.000 claims description 6
- 229910052726 zirconium Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims 1
- 229910052748 manganese Inorganic materials 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 92
- 239000002245 particle Substances 0.000 description 47
- 230000008569 process Effects 0.000 description 34
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 21
- 229910001868 water Inorganic materials 0.000 description 18
- 230000008929 regeneration Effects 0.000 description 16
- 238000011069 regeneration method Methods 0.000 description 16
- 229910052760 oxygen Inorganic materials 0.000 description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 13
- 239000001301 oxygen Substances 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 7
- 230000002745 absorbent Effects 0.000 description 7
- 239000002250 absorbent Substances 0.000 description 7
- 229910002091 carbon monoxide Inorganic materials 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 6
- 239000002808 molecular sieve Substances 0.000 description 6
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 5
- 238000007670 refining Methods 0.000 description 5
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- 229910008008 ZrCo Inorganic materials 0.000 description 4
- 229910002090 carbon oxide Inorganic materials 0.000 description 4
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 241000894007 species Species 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 239000011358 absorbing material Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- GNEMDYVJKXMKCS-UHFFFAOYSA-N cobalt zirconium Chemical compound [Co].[Zr] GNEMDYVJKXMKCS-UHFFFAOYSA-N 0.000 description 2
- 238000005247 gettering Methods 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- 230000002427 irreversible effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910000480 nickel oxide Inorganic materials 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 150000002835 noble gases Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- GDOPTJXRTPNYNR-UHFFFAOYSA-N CC1CCCC1 Chemical compound CC1CCCC1 GDOPTJXRTPNYNR-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910004337 Ti-Ni Inorganic materials 0.000 description 1
- 229910011209 Ti—Ni Inorganic materials 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- -1 and the like Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000037406 food intake Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- KHYBPSFKEHXSLX-UHFFFAOYSA-N iminotitanium Chemical compound [Ti]=N KHYBPSFKEHXSLX-UHFFFAOYSA-N 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000011403 purification operation Methods 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0012—In-line filters
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
- B01D46/003—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions including coalescing means for the separation of liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/06—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04
- B01J20/08—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising oxides or hydroxides of metals not provided for in group B01J20/04 comprising aluminium oxide or hydroxide; comprising bauxite
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/103—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate comprising silica
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/16—Alumino-silicates
- B01J20/18—Synthetic zeolitic molecular sieves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/30—Processes for preparing, regenerating, or reactivating
- B01J20/34—Regenerating or reactivating
- B01J20/3408—Regenerating or reactivating of aluminosilicate molecular sieves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/30—Processes for preparing, regenerating, or reactivating
- B01J20/34—Regenerating or reactivating
- B01J20/3433—Regenerating or reactivating of sorbents or filter aids other than those covered by B01J20/3408 - B01J20/3425
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/30—Processes for preparing, regenerating, or reactivating
- B01J20/34—Regenerating or reactivating
- B01J20/3483—Regenerating or reactivating by thermal treatment not covered by groups B01J20/3441 - B01J20/3475, e.g. by heating or cooling
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0433—Physical processing only
- C01B21/045—Physical processing only by adsorption in solids
- C01B21/0483—Physical processing only by adsorption in solids in getters
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
- C01B23/0052—Physical processing only by adsorption in solids
- C01B23/0084—Physical processing only by adsorption in solids in getters
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0042—Making ultrapure specific gas
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Gas Separation By Absorption (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/369,644 | 1999-08-06 | ||
| US09/369,644 US6521192B1 (en) | 1999-08-06 | 1999-08-06 | Rejuvenable ambient temperature purifier |
| PCT/US2000/021498 WO2001010548A1 (en) | 1999-08-06 | 2000-08-04 | Rejuvenable ambient temperature purifier |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003506207A JP2003506207A (ja) | 2003-02-18 |
| JP2003506207A5 JP2003506207A5 (enExample) | 2007-09-20 |
| JP5179687B2 true JP5179687B2 (ja) | 2013-04-10 |
Family
ID=23456305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001515054A Expired - Lifetime JP5179687B2 (ja) | 1999-08-06 | 2000-08-04 | 室温精製器の回復方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6521192B1 (enExample) |
| EP (1) | EP1204473A1 (enExample) |
| JP (1) | JP5179687B2 (enExample) |
| KR (1) | KR20020047114A (enExample) |
| TW (1) | TW505538B (enExample) |
| WO (1) | WO2001010548A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6521192B1 (en) | 1999-08-06 | 2003-02-18 | Saes Pure Gas, Inc. | Rejuvenable ambient temperature purifier |
| TW550307B (en) * | 2000-04-19 | 2003-09-01 | Getters Spa | A process for the purification of organometallic compounds or heteroatomic organic compounds with hydrogenated getter alloys |
| CN104118164B (zh) * | 2005-02-17 | 2018-09-07 | 泽斯吸气剂公司 | 柔性多层吸气器 |
| WO2009053969A2 (en) * | 2007-10-22 | 2009-04-30 | Advanced Getter Innovations Ltd. | Safe gas sorbents with high sorption capacity on the basis of lithium alloys |
| WO2010010563A2 (en) * | 2008-07-23 | 2010-01-28 | Freespace-Materials | Lithium or barium based film getters |
| TWI590335B (zh) * | 2010-08-18 | 2017-07-01 | 半導體能源研究所股份有限公司 | 膜形成設備及膜形成方法 |
| CN108097036A (zh) | 2012-02-10 | 2018-06-01 | 恩特格里斯公司 | 气体纯化器 |
| ITMI20120676A1 (it) * | 2012-04-24 | 2013-10-25 | Getters Spa | Metodo e dispositivo rigenerabile di purificazione a temperatura ambiente per monossido di diazoto |
| GB201418595D0 (en) * | 2014-10-20 | 2014-12-03 | Renishaw Plc | Additive manufacturing apparatus and methods |
| US10661223B2 (en) * | 2017-06-02 | 2020-05-26 | Applied Materials, Inc. | Anneal chamber with getter |
| CN115672254A (zh) * | 2022-11-17 | 2023-02-03 | 北京锦正茂科技有限公司 | 一种用于低温恒温器内部的免激活气体吸附剂及制备方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3609871A (en) | 1970-02-27 | 1971-10-05 | John M Ellison | Gas purification and getter regeneration apparatus and method |
| US4515528A (en) | 1983-07-05 | 1985-05-07 | General Electric Company | Hydrocarbon getter pump |
| US4713224A (en) | 1986-03-31 | 1987-12-15 | The Boc Group, Inc. | One-step process for purifying an inert gas |
| JPH0688765B2 (ja) | 1986-09-04 | 1994-11-09 | 松下電器産業株式会社 | 希ガス精製装置 |
| IT1227219B (it) | 1988-09-26 | 1991-03-27 | Getters Spa | Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno |
| JPH03126607A (ja) | 1989-10-09 | 1991-05-29 | Matsushita Electric Ind Co Ltd | 希ガスの精製方法 |
| JP2980425B2 (ja) | 1990-09-14 | 1999-11-22 | 日本パイオニクス株式会社 | 希ガスの精製方法 |
| IT1270875B (it) | 1993-04-29 | 1997-05-13 | Getters Spa | Procedimento di purificazione dell'idrogeno e purificatore relativo |
| RU2123971C1 (ru) | 1993-04-29 | 1998-12-27 | Саес Геттерс С.П.А. | Способ удаления газообразных примесей из потока водорода и устройство для его осуществления |
| US5399246A (en) | 1993-08-26 | 1995-03-21 | Ceramatec, Inc. | Inert gas purification |
| DE4342941C1 (de) | 1993-12-16 | 1995-07-06 | Forschungszentrum Juelich Gmbh | Wasserstoffgasentladungslampe |
| US5902561A (en) | 1995-09-29 | 1999-05-11 | D.D.I. Limited | Low temperature inert gas purifier |
| US5762132A (en) * | 1996-04-03 | 1998-06-09 | Ford Global Technologies, Inc. | Heat exchanger and method of assembly for automotive vehicles |
| IT1290451B1 (it) | 1997-04-03 | 1998-12-03 | Getters Spa | Leghe getter non evaporabili |
| US6521192B1 (en) | 1999-08-06 | 2003-02-18 | Saes Pure Gas, Inc. | Rejuvenable ambient temperature purifier |
-
1999
- 1999-08-06 US US09/369,644 patent/US6521192B1/en not_active Expired - Lifetime
-
2000
- 2000-08-04 WO PCT/US2000/021498 patent/WO2001010548A1/en not_active Ceased
- 2000-08-04 EP EP00953865A patent/EP1204473A1/en not_active Ceased
- 2000-08-04 JP JP2001515054A patent/JP5179687B2/ja not_active Expired - Lifetime
- 2000-08-04 KR KR1020027001619A patent/KR20020047114A/ko not_active Ceased
- 2000-09-21 TW TW089114862A patent/TW505538B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20020047114A (ko) | 2002-06-21 |
| JP2003506207A (ja) | 2003-02-18 |
| US6521192B1 (en) | 2003-02-18 |
| EP1204473A1 (en) | 2002-05-15 |
| TW505538B (en) | 2002-10-11 |
| WO2001010548A1 (en) | 2001-02-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4360505A (en) | Recovering hydrogen from gas stream using metal hydride | |
| RU2146722C1 (ru) | Неиспаряющийся газопоглотительный сплав и устройство, содержащее такой сплав | |
| US6890376B2 (en) | Gas purification system with an integrated hydrogen sorption and filter assembly | |
| JP5179687B2 (ja) | 室温精製器の回復方法 | |
| TWI341824B (en) | Production of carbon monoxide-free hydrogen and helium from a high-purity source | |
| JP3231781B2 (ja) | 室温でアンモニアから酸素を除去するための方法 | |
| CN111893360A (zh) | Ab5型储氢合金及其制备方法和应用以及含有机物氢气提纯方法 | |
| JP3094235B2 (ja) | 水素流からのガス状不純物除去のための改善方法 | |
| CA2137792C (en) | Process for the removal of gaseous impurities from a stream of hydrogen | |
| US5895519A (en) | Method and apparatus for purifying hydrogen gas | |
| Kim et al. | Performance of high power metal hydride reactors | |
| US4769225A (en) | System for exchange of hydrogen between liquid and solid phases | |
| AU6093200A (en) | Gas purification system with an integrated hydrogen sorption and filter assembly | |
| US7736609B1 (en) | Hydrogen purification system | |
| JP2977606B2 (ja) | 希ガスの精製方法 | |
| WO2021186658A1 (ja) | メタノール製造システム及びメタノール製造方法 | |
| US4215008A (en) | Rare earth-containing alloys and method for purification of hydrogen gas therewith | |
| Wang et al. | Effects of carbon monoxide on the hydriding reactions of the untreated and fluorinated LaNi4. 7Al0. 3 alloys | |
| JPS6348802B2 (enExample) | ||
| Tsuchiya et al. | Preliminary Characterization of Zr9Ni11 Alloy for Its Tritium Gettering Property in In-Ditu Irradiation Test | |
| JP3803833B2 (ja) | 繊維状充填層による特定気体の抽出回収方法 | |
| JPS6313925B2 (enExample) | ||
| Boffito et al. | A new Zr-based alloy for tritium recovery from tritiated water | |
| JPS598602A (ja) | 混合ガスから水素を分離する方法 | |
| JP2003277037A (ja) | 水素貯蔵用多孔質活性炭およびその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20040707 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070801 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070801 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20080617 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100827 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101126 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110916 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20111215 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20111222 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120215 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120222 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120314 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121221 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130110 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5179687 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D03 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |