JP5178209B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP5178209B2 JP5178209B2 JP2008006992A JP2008006992A JP5178209B2 JP 5178209 B2 JP5178209 B2 JP 5178209B2 JP 2008006992 A JP2008006992 A JP 2008006992A JP 2008006992 A JP2008006992 A JP 2008006992A JP 5178209 B2 JP5178209 B2 JP 5178209B2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- transfer
- charge
- forming
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 239000004065 semiconductor Substances 0.000 title claims description 20
- 239000012535 impurity Substances 0.000 claims description 69
- 238000002834 transmittance Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 9
- 150000002500 ions Chemical class 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000004615 ingredient Substances 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims 2
- 238000000034 method Methods 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
- H01L21/2652—Through-implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/762—Charge transfer devices
- H01L29/765—Charge-coupled devices
- H01L29/768—Charge-coupled devices with field effect produced by an insulated gate
- H01L29/76816—Output structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/762—Charge transfer devices
- H01L29/765—Charge-coupled devices
- H01L29/768—Charge-coupled devices with field effect produced by an insulated gate
- H01L29/76866—Surface Channel CCD
- H01L29/76875—Two-Phase CCD
Description
図1は、第1の実施形態に係るCCD装置を示し、同図(a)はこのCCD装置を示す上面図であり、同図(b)は、同図(a)の破線A−A’構造断面図である。
図13は、第2の実施形態に係るCCD装置を示し、同図(a)はこのCCD装置を示す上面図であり、同図(b)は、同図(a)の破線A−A’構造断面図である。
12、22:埋め込みチャネル
13、23−1:(第1の)不純物領域
23−2:第2の不純物領域
14、24:酸化膜
15、25:転送電極
16、26:電荷
17:レジスト層
17’:レジストマスク
18:グレーティングマスク
19:光
20:不純物
31:下に凸の濃度プロファイルを有する不純物領域
32:下に凸のポテンシャルプロファイル
33:電荷
101:光電変換素子
102:読み出しゲート
103:埋め込みチャネル
103−1:垂直転送チャネル
103−2:水平転送チャネル
104:出力回路
105:読み出しゲート電極
106−1:垂直転送電極
106−2:垂直転送電極
Claims (4)
- 半導体基板に埋め込みチャネルを形成する工程と、
前記埋め込みチャネルの上部に酸化膜を介してレジスト層を一様に形成する工程と、
電荷の転送方向に沿って光の透過率が連続的に変化する複数の透過領域が電荷の転送方向に沿って列状に配列されたグレーティングマスクを用いて前記レジスト層を露光する工程と、
露光された前記レジスト層を現像することにより、電荷の転送方向に沿って膜厚が連続的に変化する複数の領域が電荷の転送方向に沿って列状に配列されたレジストマスクを形成する工程と、
前記レジストマスクを介して前記埋め込みチャネルにイオンを注入することにより、それぞれが電荷の転送方向に沿って連続的に変化する不純物濃度を有し、電荷の転送方向に沿って列状に配列された複数の第1の不純物領域を形成する工程と、
前記レジストマスクを除去後、前記複数の第1の不純物領域上の所定の位置にそれぞれ、酸化膜を介して転送電極を形成する工程と、
を具備することを特徴とする半導体装置の製造方法。 - 複数の前記転送電極を形成後、さらに、
これらの転送電極をマスクとしてそれぞれの前記第1の不純物領域にイオンを注入することにより、複数の第2の不純物領域を形成する工程、
を具備することを特徴とする請求項1に記載の半導体装置の製造方法。 - 前記グレーティングマスクは、前記透過領域の光の透過率の変化をドットの密度で制御するマスクであることを特徴とする請求項1または2に記載の半導体装置の製造方法。
- 前記埋め込みチャネル、前記第1の不純物領域、および前記第2の不純物領域の導電型はそれぞれn型であり、前記グレーティングマスクは、前記透過領域のドットの密度を制御することにより、電荷の転送方向に沿って光の透過率が高く変化するマスクであることを特徴とする請求項2に記載の半導体装置の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008006992A JP5178209B2 (ja) | 2008-01-16 | 2008-01-16 | 半導体装置の製造方法 |
TW097149078A TWI397950B (zh) | 2008-01-16 | 2008-12-16 | 半導體ccd裝置的製造方法 |
US12/352,799 US7838344B2 (en) | 2008-01-16 | 2009-01-13 | Method for manufacturing a charge coupled device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008006992A JP5178209B2 (ja) | 2008-01-16 | 2008-01-16 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009170653A JP2009170653A (ja) | 2009-07-30 |
JP5178209B2 true JP5178209B2 (ja) | 2013-04-10 |
Family
ID=40850998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008006992A Expired - Fee Related JP5178209B2 (ja) | 2008-01-16 | 2008-01-16 | 半導体装置の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7838344B2 (ja) |
JP (1) | JP5178209B2 (ja) |
TW (1) | TWI397950B (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010287656A (ja) * | 2009-06-10 | 2010-12-24 | Toshiba Corp | 固体撮像装置の製造方法 |
JP2011197553A (ja) | 2010-03-23 | 2011-10-06 | Toshiba Corp | 露光用マスク、不純物層を有する半導体装置の製造方法および固体撮像装置 |
JP2012015283A (ja) * | 2010-06-30 | 2012-01-19 | Toshiba Corp | 固体撮像装置の製造方法 |
JP5204184B2 (ja) | 2010-09-17 | 2013-06-05 | 株式会社東芝 | 半導体装置の製造方法 |
JP2012069574A (ja) | 2010-09-21 | 2012-04-05 | Toshiba Corp | 不純物層の形成方法、露光用マスクおよび固体撮像装置の製造方法 |
JP2013042074A (ja) * | 2011-08-19 | 2013-02-28 | Toshiba Corp | 固体撮像装置および固体撮像装置の製造方法 |
CN102881571B (zh) | 2012-09-28 | 2014-11-26 | 京东方科技集团股份有限公司 | 有源层离子注入方法及薄膜晶体管有源层离子注入方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
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US4842633A (en) * | 1987-08-25 | 1989-06-27 | Matsushita Electric Industrial Co., Ltd. | Method of manufacturing molds for molding optical glass elements and diffraction gratings |
JPH04367237A (ja) * | 1991-06-14 | 1992-12-18 | Sony Corp | Ccd固体撮像素子 |
JP3185339B2 (ja) * | 1992-03-19 | 2001-07-09 | ソニー株式会社 | 電荷結合素子の製造方法 |
JPH06151475A (ja) * | 1992-11-16 | 1994-05-31 | Matsushita Electron Corp | 電荷転送装置及びその製造方法 |
JP3611613B2 (ja) * | 1994-12-27 | 2005-01-19 | Hoya株式会社 | 三次元形状の形成方法、該方法により形成した三次元構造体およびプレス成形型 |
KR0161389B1 (ko) * | 1995-02-16 | 1999-01-15 | 윤종용 | 마스크 및 이를 사용한 패턴형성방법 |
KR100223847B1 (ko) * | 1997-05-06 | 1999-10-15 | 구본준 | 반도체 소자의 구조 및 제조 방법 |
JPH11266003A (ja) * | 1998-03-17 | 1999-09-28 | Texas Instr Japan Ltd | 半導体装置およびその製造方法 |
GB2349237A (en) * | 1999-04-24 | 2000-10-25 | Sharp Kk | An optical element, method of manufacture thereof and a display device incorporating said element. |
US7176074B1 (en) * | 2006-08-10 | 2007-02-13 | Chunghwa Picture Tubes, Ltd. | Manufacturing method of thin film transistor array substrate |
-
2008
- 2008-01-16 JP JP2008006992A patent/JP5178209B2/ja not_active Expired - Fee Related
- 2008-12-16 TW TW097149078A patent/TWI397950B/zh not_active IP Right Cessation
-
2009
- 2009-01-13 US US12/352,799 patent/US7838344B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TWI397950B (zh) | 2013-06-01 |
JP2009170653A (ja) | 2009-07-30 |
TW200933709A (en) | 2009-08-01 |
US20090181501A1 (en) | 2009-07-16 |
US7838344B2 (en) | 2010-11-23 |
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