JP5177706B2 - ダブルスカラーアーム - Google Patents
ダブルスカラーアーム Download PDFInfo
- Publication number
- JP5177706B2 JP5177706B2 JP2010160369A JP2010160369A JP5177706B2 JP 5177706 B2 JP5177706 B2 JP 5177706B2 JP 2010160369 A JP2010160369 A JP 2010160369A JP 2010160369 A JP2010160369 A JP 2010160369A JP 5177706 B2 JP5177706 B2 JP 5177706B2
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- JP
- Japan
- Prior art keywords
- fixed
- pair
- steel belt
- shaft
- members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Description
前記左右一対のアームは先端に軸を備え、各軸は上下一対のスチールベルトにより互いに連結され、
一方のスチールベルトは、一方の軸に一端が固定されると共に時計回りに巻回され、他方の軸に反時計回りに巻回されると共に他端が固定され、
他方のスチールベルトは、前記一方の軸に一端が固定されると共に反時計回りに巻回され、前記他方の軸に時計回りに巻回されると共に他端が固定され、
前記一方のスチールベルトの一端と、前記他方のスチールベルトの他端とは、奧側と外側の一対の板状部材からなり、かつ互いに連通する長孔を備えたテンション調整部材の、一対の板状部材の間に挟み込まれて固定され、
前記長孔を貫通する締結具により、前記テンション調整部材が前記各軸に固定され、
さらに基端が前記各軸により支持され、先端がスチールベルトとは反対側で前記テンション調整部材にネジ止めされたボルトにより、前記テンション調整部材の位置が調整自在であり、
かつ前記一方のスチールベルトの他端と、前記他方のスチールベルトの一端とは、奧側と外側の一対の板状部材からなる固定具の、一対の板状部材の間に挟み込まれて固定され、かつ前記各軸に設けられた凹部に前記固定具が固定されると共に、前記凹部の端に奧側の板状部材が当接している、ことを特徴とする。
4 昇降台
6 基部
8 基礎側アーム
10 先端側アーム
12 ハンド基部
14 ハンド本体
16,20 スプロケット
18 チェーン
22,23 プーリー
24,26 スチールベルト
30 テンション調整部材
32 固定具
33,34 軸
36 ベアリング
38〜42 凹部
44,45 板状部材
46 取付面
48,52 締結具
50 長孔
53 取付面
54 支持部材
55 締結具
56 ボルト
60 スチール部
61 絶縁層
70 当接面
72,73 板状部材
74,75 締結具
M1,M2 モータ
Claims (1)
- 左右一対のアームの先端に取り付けられたハンドにより、物品を移載するダブルスカラーアームであって、
前記左右一対のアームは先端に軸を備え、各軸は上下一対のスチールベルトにより互いに連結され、
一方のスチールベルトは、一方の軸に一端が固定されると共に時計回りに巻回され、他方の軸に反時計回りに巻回されると共に他端が固定され、
他方のスチールベルトは、前記一方の軸に一端が固定されると共に反時計回りに巻回され、前記他方の軸に時計回りに巻回されると共に他端が固定され、
前記一方のスチールベルトの一端と、前記他方のスチールベルトの他端とは、奧側と外側の一対の板状部材からなり、かつ互いに連通する長孔を備えたテンション調整部材の、一対の板状部材の間に挟み込まれて固定され、
前記長孔を貫通する締結具により、前記テンション調整部材が前記各軸に固定され、
さらに基端が前記各軸により支持され、先端がスチールベルトとは反対側で前記テンション調整部材にネジ止めされたボルトにより、前記テンション調整部材の位置が調整自在であり、
かつ前記一方のスチールベルトの他端と、前記他方のスチールベルトの一端とは、奧側と外側の一対の板状部材からなる固定具の、一対の板状部材の間に挟み込まれて固定され、かつ前記各軸に設けられた凹部に前記固定具が固定されると共に、前記凹部の端に奧側の板状部材が当接している、ことを特徴とする、ダブルスカラーアーム。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010160369A JP5177706B2 (ja) | 2010-07-15 | 2010-07-15 | ダブルスカラーアーム |
KR1020110061084A KR101414215B1 (ko) | 2010-07-15 | 2011-06-23 | 더블 스카라 아암 |
CN201110189246.4A CN102416625B (zh) | 2010-07-15 | 2011-06-30 | 双scara型臂 |
TW100124895A TWI487608B (zh) | 2010-07-15 | 2011-07-14 | Double level multi - articular manipulator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010160369A JP5177706B2 (ja) | 2010-07-15 | 2010-07-15 | ダブルスカラーアーム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012020376A JP2012020376A (ja) | 2012-02-02 |
JP5177706B2 true JP5177706B2 (ja) | 2013-04-10 |
Family
ID=45613135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010160369A Active JP5177706B2 (ja) | 2010-07-15 | 2010-07-15 | ダブルスカラーアーム |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5177706B2 (ja) |
KR (1) | KR101414215B1 (ja) |
CN (1) | CN102416625B (ja) |
TW (1) | TWI487608B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8551393B2 (en) | 2009-08-04 | 2013-10-08 | Kabushiki Kaisha Toshiba | Patterning method and method for manufacturing semiconductor device |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10224232B2 (en) | 2013-01-18 | 2019-03-05 | Persimmon Technologies Corporation | Robot having two arms with unequal link lengths |
KR20230080488A (ko) * | 2015-02-06 | 2023-06-07 | 퍼시몬 테크놀로지스 코포레이션 | 동등하지 않은 링크 길이를 가진 아암을 구비한 로봇 |
JP6786291B2 (ja) * | 2016-07-28 | 2020-11-18 | 日本電産サンキョー株式会社 | 産業用ロボット |
JP6605432B2 (ja) * | 2016-12-07 | 2019-11-13 | 株式会社神戸製鋼所 | 産業用ロボット |
KR102214361B1 (ko) * | 2019-05-07 | 2021-02-15 | 한국생산기술연구원 | 와이어 구동 로봇관절의 와이어 고정 브라켓 및 이를 구비한 와이어 구동 로봇관절 |
CN111975757B (zh) * | 2020-08-27 | 2023-12-12 | 广东三扬机器人有限公司 | Scara机器人的参数设定方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03234495A (ja) * | 1990-02-09 | 1991-10-18 | Matsushita Electric Ind Co Ltd | ロボットアームのスチールバンド駆動装置 |
JP3030667B2 (ja) * | 1991-07-29 | 2000-04-10 | 東京エレクトロン株式会社 | 搬送装置 |
JPH09283588A (ja) * | 1996-04-08 | 1997-10-31 | Hitachi Ltd | 基板搬送装置及び基板の搬送方法 |
JPH11262291A (ja) * | 1998-03-11 | 1999-09-24 | Asmo Co Ltd | 車両の窓ガラス昇降装置 |
JP2008074550A (ja) * | 2006-09-21 | 2008-04-03 | Murata Mach Ltd | スカラーアーム |
JP4876898B2 (ja) * | 2006-12-22 | 2012-02-15 | シンフォニアテクノロジー株式会社 | 物品の直線搬送装置、及び当該装置におけるベルト体の張力調整方法 |
JP4816521B2 (ja) * | 2007-03-15 | 2011-11-16 | 株式会社安川電機 | ベルト伝動装置及びそれを備えたロボット |
-
2010
- 2010-07-15 JP JP2010160369A patent/JP5177706B2/ja active Active
-
2011
- 2011-06-23 KR KR1020110061084A patent/KR101414215B1/ko active IP Right Grant
- 2011-06-30 CN CN201110189246.4A patent/CN102416625B/zh active Active
- 2011-07-14 TW TW100124895A patent/TWI487608B/zh active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8551393B2 (en) | 2009-08-04 | 2013-10-08 | Kabushiki Kaisha Toshiba | Patterning method and method for manufacturing semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
CN102416625B (zh) | 2015-06-10 |
JP2012020376A (ja) | 2012-02-02 |
KR101414215B1 (ko) | 2014-07-01 |
TWI487608B (zh) | 2015-06-11 |
KR20120007962A (ko) | 2012-01-25 |
CN102416625A (zh) | 2012-04-18 |
TW201206661A (en) | 2012-02-16 |
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