201206661 :=臂係於前端包含轴，上述轴藉由上下-對變 曲稱仟而相互連結， 述4曲構件之—者其一端固定於一轴並且向 向纏繞’向逆時針方向纏繞並且將另—端蚊於另^針 增曲構件之另一者其一端固定於上述一轴並且向逆 =向纏緣，向順時針方向纏繞並且將另一端固定於:述 於本电明中，若—臂彎曲且轴進行旋轉，則一對 之任者破拉伸從而另一臂亦同步進行彎曲。因此，可無逾 輪地使-對臂同步，而無齒輪之齒隙部分 之振遺：。3^ 將一對彎曲構件上下配置，故而省空間。 較佳為’將上述上下一對，彎曲構件各自製成麵帶構 件亦可為橡膠皮帶、鋼索、鍵條等，但鋼帶與鋼絲 故較佳’尤其鋼帶可利用較大之力使—對臂同步，又^ 於軸之滑動較小，伸長亦較小，故較佳。因此， 則可精簡化且確切地使左右―對臂同步。 用鋼帶’ 件更與外侧之一對板狀構 =夹入射之^而^於上述—對板狀構件之間，於設 置於上述軸之凹部m定上述固定件，並且 、 件與上述凹部之邊緣抵接。如此，藉由使固定件二板狀構 狀構件抵接於設置於㈣之„之_使^件之晨側之板 神甲之凹。p之邊緣，可支 100124895 之張力。又’鋼帶係利用舆-對板狀構件之摩擦而固二帶 4 201206661 定件。因此，與例如利用螺栓將鋼帶之端部直接固定於軸之 If況不同’不會產生鋼帶之破損亦不會產生螺栓之破損。 較佳為，設置由裏侧與外側之一對板狀構件所構成，且包 含相互連通之長狀張力輕構件，夾人鋼帶之—端而固定 於上述一對板狀構件之間，藉由貫通上述長孔之緊固件，自 •如地調整圓周方向位置，上述張力調整構件係固定於上述 軸。如此，藉由使長孔滑動，可調整施加於鋼帶之張力。於 此情況下，鋼帶亦利用摩擦力而固定於一對板狀構件。於實 施例中’利用上述g]定件固定鋼帶之—端，張力調整構 件固定另一端。然而，既可均利用張力調整構件固定兩端， '亦可均利用上述之固定件固定兩端。 '特佳為，包含螺栓，該螺栓係基端由上述軸支撐，前端於 與鋼帶相反側以螺絲固定於上述張力調整構件，藉由上述螺 栓上述張力調整構件之位置係調整自如。藉此，螺栓係作為 一種千斤頂而發揮作用，藉由螺栓之旋轉可容易地調整張力 調整構件之位置。 【實施方式】 . 以下表示用於實施本發明之最佳實施例。本發明之範圍鹿 根據申請專利範圍之記載’參酌說明書之記載與該領域中之 習知技術’按照熟悉該技術領略具有通常知識者之理解而規 定，但可在不脫離發明主旨之範圍内進行各種變更。尤其 可視需要任意組合本說明書中所寫之複數個實施形態及變201206661 :=The arm system includes a shaft at the front end, and the above-mentioned shafts are connected to each other by up-and-down bending, and one end of the four-curved member is fixed to one shaft and wound toward the winding direction in a counterclockwise direction and will be The other end of the other end of the other member of the other member is attached to the one axis and is reversed to the tangential edge, wound clockwise and fixed at the other end: as described in the present electric power, if - When the arm is bent and the shaft is rotated, either of the pair is stretched and the other arm is simultaneously bent. Therefore, it is possible to synchronize the pair of arms without overshooting without the vibration of the backlash portion of the gear: 3^ A pair of curved members are placed up and down, thus saving space. Preferably, the pair of upper and lower sides and the curved members are each made of a rubber belt, a steel cable, a key strip, etc., but the steel strip and the steel wire are preferably 'in particular, the steel strip can be made with a large force— It is better to synchronize the arms and to make the shaft slide less and the elongation is smaller. Therefore, it is possible to simplify and precisely synchronize the left and right arms. The steel strip 'piece is more than one of the outer side and the outer side of the plate is configured to be incident on the above-mentioned - between the plate-like members, the fixing member is fixed to the concave portion m of the shaft, and the member and the concave portion are The edges are abutted. In this way, by fixing the two-plate-shaped structural member of the fixing member to the concave edge of the plate provided on the morning side of the (4), the tension of the plate can be used to support the tension of 100124895. It uses the friction of the 舆-to-plate member to fix the two belts 2012-0661. Therefore, unlike the case where the end of the steel strip is directly fixed to the shaft by bolts, it does not cause damage to the steel strip. Preferably, the bolt is damaged. Preferably, one of the inner side and the outer side is formed of a plate-like member, and includes a long tension light member that communicates with each other, and the end of the steel strip is fixed to the pair of plates. Between the members, the position of the circumferential direction is adjusted by the fastener passing through the long hole, and the tension adjusting member is fixed to the shaft. Thus, by sliding the long hole, the tension applied to the steel strip can be adjusted. In this case, the steel strip is also fixed to the pair of plate-like members by frictional force. In the embodiment, the end of the steel strip is fixed by the above-mentioned g], and the tension adjusting member is fixed to the other end. Both ends are fixed by tension adjusting members , 'It is also possible to fix both ends by the above-mentioned fixing members. 'Specially, including bolts, the base end of the bolt is supported by the shaft, and the front end is screwed to the tension adjusting member on the opposite side of the steel strip by the screw. The position of the above-described tension adjusting member of the bolt is adjusted. Thus, the bolt functions as a jack, and the position of the tension adjusting member can be easily adjusted by the rotation of the bolt. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION The scope of the present invention is defined by the description of the scope of the patent application, the description of the specification and the prior art in the field, as defined by those skilled in the art, but not Various changes are made within the scope of the gist of the invention. In particular, any combination of the embodiments and variations described in this specification can be arbitrarily combined.
100124895 S 201206661 形例。 (實施例) 於圖1〜圖8中，表示實施例之雙水平多關節型機械臂2。 又水平夕關節型機械臂2係搭載於例如堆高起重機之升降 台4，來移載液晶基板、電漿顯示板基板等之晶匣。又，亦 可將雙水平多關節型機械臂2搭載於轉盤、或滑動裝置等， 擴大可移载之範圍。進而’雙水平多關節型機械臂2亦可設 置成負載埠等之IU定於地面上之設備，又，亦可搭載於無人 搬送車、有執式無人搬送車、高架移動式車等。 雙水平多關節型機械臂2之底部6係固定於升降台4，藉 由馬達m、M2而使左右-對基礎側臂8旋轉。而且，藉 由例如鏈輪、20與鏈條18，而與基礎側臂8同步，使^ 端側臂旋轉。臂8、1G係長度相等，前端側臂ig係向與 基礎側臂8相反之方向進行旋轉。一對前端側臂1〇、忉之 前端係於把手底部12進行連結’把手底部12係藉由圖3 之軸承36,相對於前端側臂1〇自如地旋轉。又，於把手底 部12固定有例如叉架狀之把手本體14。而且，左右一對臂 8、Π)係以同步彎曲及擴展之方式進行變形，若完全同步則 把手本體14之姿勢係保持為固定。 μ c又雯尚度, 且俯視時交叉之方式而上下配置。鋼帶24、26之兩* 定於前端側臂10、10前端之皮帶輪22、23。再者， 100124895 6 201206661 將鋼帶24、26簡稱為皮帶24、26。可使用鋼絲、橡膠皮帶、 鏈條等代替皮帶24、26，於此情況下，使用滚筒、鏈輪等 代替皮帶輪22、23。 如圖2所示，皮帶24係利用固定件32將一端固定於皮帶 輪23，沿著皮帶輪23向順時針方向纏繞，沿著皮帶輪22 向逆時針方向纏繞，藉由張力調整構件30將另一端固定於 皮帶輪22。又，皮帶26係利用固定件32將一端固定於皮 帶輪22,沿著皮帶輪22向逆時針方向纏繞，沿著皮帶輪23 向順時針方向纏繞，藉由張力調整構件30將另一端固定於 皮帶輪23。33係皮帶輪22、23之軸，與皮帶輪22、23為 一體。又，皮帶輪22、23與皮帶24、26接觸之範圍係被限 制，未與皮帶24、26接觸之部分亦可為非皮帶輪狀。進而， 皮帶輪22、23並非相對於臂10進行旋轉之構件，而是支撐 皮帶24、26，故外形僅形成為圓筒狀。 如圖3所示，皮帶24、26係改變高度位置而上下配置， 皮帶輪22、23係經由轴34而固定於前端側臂10。而且， 藉由軸34而旋轉自如地支撐軸承36，於軸承36固定有把 手底部12。 如圖4、圖5所示，於皮帶輪22、23中設置有一對凹部 38、40。於凹部38之底部之安裝面46上固定有張力調整構 件30,支撐構件54係藉由緊固件55而固定於凹部40之安 裝面53上。又，安裝面46、53之方向相差90°。張力調整 100124895 7 201206661 構件30係於裏側包含板狀構件45，亦於近前側包含板狀構 件44。將皮帶24、26夾入板狀構件44、45之間，利用螺 栓等緊固件52將板狀構件44、45與皮帶24、25結合成一 體，皮帶24、26係利用與構件44、45之摩擦力，而固定於 張力調整構件30。再者，亦可於支撐構件54之位置上存在 皮帶輪22、23之實心部，而利用皮帶輪22、23直接支撐螺 检56。 長度方向平行於皮帶輪22、23之圓周方向，例如，一對 長孔50、50係以將構件44、45連通之方式而設置。而且， 藉由貫通長孔50之螺栓等緊固件55，將張力調整構件30 固定於皮帶輪22、23。進而，於與抽出皮帶24、26之方向 相反側，由支撐構件54所支撐之螺栓56係以螺絲固定於裏 側之板狀構件45。而且，可藉由轉動螺栓56，使張力調整 構件30相對於緊固件48進退。藉此，調整施加於皮帶24、 26之張力。 由於皮帶24、26為鋼鐵製品，故若以鋁等輕金屬製造皮 帶輪22、23，則會產生電性腐蝕。因此，較佳為，如圖6 所示，於沿著皮帶輪22、23纏繞之範圍内，於鋼部60之表 面設置絕緣層61，對皮帶輪22、23進行電性絕緣。 於圖7、圖8中，表示利用固定件32之皮帶24、26之端 部之固定。固定件32係利用凹部42安裝於皮帶輪22、23， 為了進行安裝使用緊固件74,使裏側之板狀構件73抵接於 100124895 8 201206661 凹部42邊緣之抵接面70而定办。而日，监山 弋位。而且，將皮帶24、26失 入一對板狀構件72、73之間，^丨田1 间，利用緊固件75將板狀構件 72、73相互結合。又，利用， 711由來自緊固件74、75等之失緊 力引起之摩擦，而將鋼帶24、％田中。* + ' 4、26固疋。再者，抵接面7〇 係設置於抽出凹部42内之皮帶24、％之側。 對實施例之作用進行說明。_^山也丨辟1Λ 則端侧臂10、10係經由軸34 與皮帶輪22、23,利用皮帶24、26而相互結合。此處，於 使用馬達m、M2等之同步係不完全之情^f，把手本體 14之安勢會振盪。此處，於臂1()、1()之運動不同步之情況 下’皮帶24、26之一者之張力增加，而另—者之張力降低。 因此’-對臂10、10係強制進行同步運動，從而可消除把 ' 手之振盪。 皮f 24、26係自皮帶輪22、23之表面受到摩擦力，進而， 利用固定件32及張力調整構件3〇而固定於皮帶輪22、23。 固定件32係於抵接面70進行定位，張力調整構件3〇係藉 由螺栓56與長孔50而可容易地進行張力調整。而且，將皮 帶24、26夾入一對板狀構件(44、45)、（72、73)間並利用摩 " 擦力進行固定，藉此可防止皮帶24、26等之變形與損傷。 【圖式簡單說明】 圖1係實施例之雙水平多關節型機械臂之主要部分平面 圖。 圖2係實施例之雙水平多關節型機械臂之主要部分放大 100124895 9 201206661 平面圖，且卸除手罩而進行表示。 圖3係表示實施例之雙水平多關節型機械臂中之臂同步 用皮帶之安裝的主要部分放大側視圖。 圖4係表示實施例中之張力調整構件之圖。 圖5係表示張力調整構件對皮帶輪之安裝之圖。 圖6係與皮帶輪之接觸部中之皮帶之剖面圖。 圖7係表示皮帶之另一端對皮帶輪之安裝的主要部分放 大侧視圖。 圖8係表示皮帶之另一端對皮帶輪之安裝的主要部分放 大平面圖。 【主要元件符號說明 ] 2 雙水平多關節型機械臂 4 升降台 6 底部 8 基礎側臂 10 前端側臂 12 把手底部 14 把手本體 16、20 鏈輪 18 鏈條 22 > 23 皮帶輪 24、26 鋼帶 100124895 10 201206661 30 張力調整構件 32 固定件 33、34 軸 36 軸承 38 〜42 凹部 44、45、72 ' 73 板狀構件 46 ' 53 安裝面 48、52、55、74、75 緊固件 50 長孔 54 支撐構件 56 螺栓 60 鋼部 61 絕緣層 70 抵接面 Ml > M2 馬達 100124895 11 201206661 發明專利說明書 Γ" (本說明書格式、順序，請勿任意更動，※記號部分請勿填寫） ※申請案號：100124895 ※申請日·· 100/07/14 ※I P C 分類：(2006.01) 一、 發明名稱：（中文/英文） 雙水平多關節型機械臂 二、 中文發明摘要： 本發明係無齒隙地使雙水平多關節型機械臂之左右一對 C) 臂同步。 藉由雙水平多關節型機械臂之前端之把手，來移載物品。 i 藉由上下一對彎曲構件將左右一對臂之前端之軸相互連 —. 結。將彎曲構件之一者其一端固定於一軸並向順時針方向纏 繞該彎曲構件，且向逆時針方向進行纏繞而將另一端固定於 另一軸。將彎曲構件之另一者之一端固定於一軸並向逆時針 方向纏繞該彎曲構件，且向順時針方向進行纏繞而將另一端 ❹ 固定於另^一轴。 三、 英文發明摘要： 100124895 1100124895 S 201206661 Form. (Embodiment) A bi-level articulated arm 2 of an embodiment is shown in Figs. 1 to 8 . Further, the horizontal joint type robot 2 is mounted on, for example, the lifting platform 4 of the stacking crane to transfer wafers such as a liquid crystal substrate or a plasma display panel substrate. Further, the bi-level articulated arm 2 can be mounted on a turntable or a slide device to expand the range of transferability. Further, the 'double-level articulated arm 2 can be set as a device on the ground where the IU such as a load is placed on the ground, or can be mounted on an unmanned transport vehicle, an unmanned transport vehicle, or an overhead mobile vehicle. The bottom 6 of the bi-level articulated arm 2 is fixed to the elevating table 4, and the right and left-to-base side arms 8 are rotated by the motors m and M2. Further, the side arm is rotated in synchronization with the base side arm 8 by, for example, the sprocket 20 and the chain 18. The arms 8 and 1G are of equal length, and the distal end side arm ig is rotated in a direction opposite to the base side arm 8. The front ends of the pair of front end side arms 1 and 忉 are coupled to the handle bottom portion 12. The handle bottom portion 12 is rotatably rotated relative to the front end side arm 1 by the bearing 36 of Fig. 3 . Further, a handle body 14 such as a fork frame is fixed to the handle bottom portion 12. Further, the pair of left and right arms 8 and Π are deformed in such a manner as to be synchronously bent and expanded, and the posture of the handle body 14 is kept fixed when fully synchronized. μ c and Wen Shang degree, and are arranged up and down in a way that crosses when viewed from above. Two of the steel strips 24, 26 are positioned on the pulleys 22, 23 at the front end of the front end side arms 10, 10. Furthermore, 100124895 6 201206661 The steel strips 24, 26 are simply referred to as belts 24, 26. Instead of the belts 24, 26, a steel wire, a rubber belt, a chain or the like may be used. In this case, a drum, a sprocket or the like is used instead of the pulleys 22, 23. As shown in FIG. 2, the belt 24 is fixed to the pulley 23 by a fixing member 32, wound clockwise along the pulley 23, wound counterclockwise along the pulley 22, and fixed at the other end by the tension adjusting member 30. On the pulley 22 . Further, the belt 26 is fixed to the pulley 22 by a fixing member 32, wound counterclockwise along the pulley 22, wound clockwise along the pulley 23, and the other end is fixed to the pulley 23 by the tension adjusting member 30. The shafts of the 33 series pulleys 22 and 23 are integrated with the pulleys 22 and 23. Further, the range in which the pulleys 22, 23 are in contact with the belts 24, 26 is limited, and the portion not in contact with the belts 24, 26 may be in the form of a non-pulley. Further, the pulleys 22 and 23 are not members that rotate with respect to the arm 10, but support the belts 24 and 26, so that the outer shape is formed only in a cylindrical shape. As shown in FIG. 3, the belts 24 and 26 are arranged up and down by changing the height position, and the pulleys 22 and 23 are fixed to the front end side arm 10 via the shaft 34. Further, the bearing 36 is rotatably supported by the shaft 34, and the handle bottom 12 is fixed to the bearing 36. As shown in Figs. 4 and 5, a pair of recessed portions 38, 40 are provided in the pulleys 22, 23. A tension adjusting member 30 is fixed to the mounting surface 46 at the bottom of the recess 38, and the supporting member 54 is fixed to the mounting surface 53 of the recess 40 by a fastener 55. Further, the directions of the mounting faces 46, 53 differ by 90 degrees. Tension adjustment 100124895 7 201206661 The member 30 includes a plate member 45 on the inner side and a plate member 44 on the near side. The belts 24, 26 are sandwiched between the plate members 44, 45, and the plate members 44, 45 are integrated with the belts 24, 25 by fasteners 52 such as bolts, and the belts 24, 26 are utilized with the members 44, 45. The frictional force is fixed to the tension adjusting member 30. Further, the solid portions of the pulleys 22, 23 may be present at the position of the support member 54, and the screw 56 may be directly supported by the pulleys 22, 23. The longitudinal direction is parallel to the circumferential direction of the pulleys 22, 23, for example, a pair of elongated holes 50, 50 are provided to communicate the members 44, 45. Further, the tension adjusting member 30 is fixed to the pulleys 22 and 23 by a fastener 55 such as a bolt that passes through the long hole 50. Further, on the side opposite to the direction in which the belts 24 and 26 are pulled out, the bolt 56 supported by the support member 54 is screwed to the plate member 45 on the inner side. Moreover, the tension adjusting member 30 can be advanced and retracted relative to the fastener 48 by turning the bolt 56. Thereby, the tension applied to the belts 24, 26 is adjusted. Since the belts 24 and 26 are made of steel, if the belt pulleys 22 and 23 are made of a light metal such as aluminum, electrical corrosion occurs. Therefore, as shown in Fig. 6, in the range wound around the pulleys 22, 23, an insulating layer 61 is provided on the surface of the steel portion 60 to electrically insulate the pulleys 22, 23. In Figs. 7 and 8, the fixing of the ends of the belts 24, 26 by the fixing members 32 is shown. The fixing member 32 is attached to the pulleys 22 and 23 by the recesses 42. The fasteners 74 are used for mounting, and the plate-like members 73 on the back side are brought into contact with the abutting faces 70 of the edges of the recesses 42 of 100124895 8 201206661. On the same day, the mountain is in the position of the mountain. Further, the belts 24, 26 are lost between the pair of plate-like members 72, 73, and between the fields, the plate-like members 72, 73 are joined to each other by the fasteners 75. Further, the use of 711 is caused by the friction caused by the destabilizing forces from the fasteners 74, 75, etc., and the steel strip 24, % Tanaka. * + ' 4, 26 solid. Further, the abutting surface 7 is provided on the side of the belt 24, % in the drawing recess 42. The effect of the embodiment will be described. _^山丨1丨 The end side arms 10, 10 are coupled to each other via the shafts 34 and the pulleys 22, 23 by the belts 24, 26. Here, the safety of the handle body 14 oscillates when the synchronization system using the motors m, M2, etc. is incomplete. Here, in the case where the movement of the arms 1 () and 1 () is not synchronized, the tension of one of the belts 24, 26 is increased, and the tension of the other is lowered. Therefore, the pair of arms 10 and 10 are forced to move synchronously, thereby eliminating the oscillation of the hand. The skins f 24 and 26 are subjected to frictional force from the surfaces of the pulleys 22 and 23, and are fixed to the pulleys 22 and 23 by the fixing member 32 and the tension adjusting member 3〇. The fixing member 32 is positioned on the abutting surface 70, and the tension adjusting member 3 is easily tension-regulated by the bolt 56 and the long hole 50. Further, the belts 24 and 26 are sandwiched between the pair of plate-like members (44, 45) and (72, 73) and fixed by friction, whereby deformation and damage of the belts 24, 26 and the like can be prevented. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a main part of a bi-level articulated manipulator of an embodiment. Fig. 2 is a plan view showing the main part of the bi-level articulated manipulator of the embodiment 100124895 9 201206661, and the hand cover is removed. Fig. 3 is an enlarged side elevational view of the main part showing the installation of the belt for arm synchronization in the bi-level articulated arm of the embodiment. Fig. 4 is a view showing a tension adjusting member in the embodiment. Fig. 5 is a view showing the mounting of the tension adjusting member to the pulley. Figure 6 is a cross-sectional view of the belt in the contact portion with the pulley. Fig. 7 is a side elevational view showing the main part of the belt to the other end of the belt. Fig. 8 is a plan view showing the main part of the belt to the other end of the belt. [Main component symbol description] 2 Double horizontal articulated arm 4 Lifting table 6 Bottom 8 Base side arm 10 Front side arm 12 Handle bottom 14 Handle body 16, 20 Sprocket 18 Chain 22 > 23 Pulley 24, 26 Steel strip 100124895 10 201206661 30 Tension adjusting member 32 Fixing member 33, 34 Shaft 36 Bearing 38 ~ 42 Recessed portion 44, 45, 72 ' 73 Plate member 46 ' 53 Mounting surface 48, 52, 55, 74, 75 Fastener 50 Long hole 54 Support member 56 Bolt 60 Steel portion 61 Insulation layer 70 Abutment surface Ml > M2 Motor 100124895 11 201206661 Invention patent specification Γ" (The format and order of this manual are not subject to change, please do not fill in the ※ part) ※Application number :100124895 ※Application date··100/07/14 ※IPC Classification:(2006.01) I. Name of the invention: (Chinese/English) Double-level articulated robotic arm II. Abstract: The present invention makes the double without backlash The pair of left and right C) arms of the horizontal articulated arm are synchronized. The item is transferred by the handle of the front end of the bi-level articulated arm. i The shafts at the front ends of the left and right arms are connected to each other by a pair of upper and lower bending members. One of the bent members is fixed to one shaft at one end thereof and wound in the clockwise direction, and wound in the counterclockwise direction to fix the other end to the other shaft. One of the other ends of the curved member is fixed to one shaft and the curved member is wound counterclockwise, and wound in the clockwise direction to fix the other end to the other shaft. III. Abstract of English Invention: 100124895 1