TWI487608B - Double level multi - articular manipulator - Google Patents
Double level multi - articular manipulator Download PDFInfo
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- TWI487608B TWI487608B TW100124895A TW100124895A TWI487608B TW I487608 B TWI487608 B TW I487608B TW 100124895 A TW100124895 A TW 100124895A TW 100124895 A TW100124895 A TW 100124895A TW I487608 B TWI487608 B TW I487608B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
Description
本發明係關於一種雙水平多關節型(SCARA)機械臂，尤其關於一對臂之同步。The present invention relates to a dual level articulated (SCARA) robotic arm, and more particularly to the synchronization of a pair of arms.
雙水平多關節型機械臂包含左右一對彎曲自如之臂，藉由安裝於一對臂之前端之把手來移載物品。此處，若左右一對臂不同步進行彎曲，則把手之姿勢會振盪。關於此方面，專利文獻1(JP2008-74550A)提出利用齒輪將臂之前端相互連結。然而，發明者發現若使用齒輪則產生齒隙之遊隙，從而一對臂不會正確地進行同步。因此，對消除伴隨齒隙之把手之振盪進行研究，從而完成了本發明。The bi-level articulated robotic arm includes a pair of left and right flexing arms that are loaded by the handles attached to the front ends of the pair of arms. Here, if the right and left arms are bent out of synchronization, the posture of the handle will oscillate. In this regard, Patent Document 1 (JP 2008-74550 A) proposes to use a gear to connect the front ends of the arms to each other. However, the inventors have found that if a gear is used, a play of backlash is generated, so that the pair of arms are not properly synchronized. Therefore, the present invention has been completed by studying the oscillation of the handle accompanying the backlash.
[先前技術文獻][Previous Technical Literature]
[專利文獻][Patent Literature]
[專利文獻1]JP2008-74550A[Patent Document 1] JP2008-74550A
本發明之課題在於無齒隙且確切地使雙水平多關節型機械臂之左右一對臂同步。An object of the present invention is to synchronize the pair of left and right arms of the bi-level articulated robot arm without any backlash.
本發明係藉由安裝於左右一對臂之前端之把手，來移載物品之雙水平多關節型機械臂，其特徵在於：上述左右一對臂係於前端包含軸，上述軸藉由上下一對彎曲構件而相互連結，上述彎曲構件之一者其一端固定於一軸並且向順時針方向纏繞，向逆時針方向纏繞並且將另一端固定於另一軸，上述彎曲構件之另一者其一端固定於上述一軸並且向逆時針方向纏繞，向順時針方向纏繞並且將另一端固定於上述另一軸。The present invention relates to a bi-level articulated manipulator for transferring articles by a handle attached to a front end of a pair of right and left arms, wherein the pair of left and right arms are coupled to the front end, and the shaft is supported by the upper and lower ends. One of the above-mentioned curved members is fixed to one shaft and wound in a clockwise direction, wound in a counterclockwise direction and fixed at the other end to the other shaft, and the other end of the curved member is fixed to one end of the curved member. The above one shaft is wound in a counterclockwise direction, wound in a clockwise direction and the other end is fixed to the other shaft.
於本發明中，若一臂彎曲且軸進行旋轉，則一對彎曲構件之任一者被拉伸從而另一臂亦同步進行彎曲。因此，可無齒輪地使一對臂同步，而無齒輪之齒隙部分之振盪。又，由於將一對彎曲構件上下配置，故而省空間。In the present invention, if one arm is bent and the shaft is rotated, either one of the pair of curved members is stretched and the other arm is also bent simultaneously. Therefore, the pair of arms can be synchronized without gears without the oscillation of the backlash portion of the gear. Moreover, since a pair of curved members are arranged up and down, space is saved.
較佳為，將上述上下一對彎曲構件各自製成鋼帶。彎曲構件亦可為橡膠皮帶、鋼索、鏈條等，但鋼帶與鋼絲伸長較小，故較佳，尤其鋼帶可利用較大之力使一對臂同步，又，相對於軸之滑動較小，伸長亦較小，故較佳。因此，若使用鋼帶，則可精簡化且確切地使左右一對臂同步。Preferably, each of the pair of upper and lower bending members is formed into a steel strip. The bending member may also be a rubber belt, a steel cable, a chain, etc., but the steel belt and the steel wire are less elongated, so it is preferable, especially the steel belt can use a large force to synchronize the pair of arms, and the sliding relative to the shaft is small. The elongation is also small, so it is preferred. Therefore, if a steel strip is used, it is possible to simplify and precisely synchronize the pair of right and left arms.
更佳為，設置由裏側與外側之一對板狀構件所構成之固定件，夾入鋼帶之一端而固定於上述一對板狀構件之間，於設置於上述軸之凹部固定上述固定件，並且上述裏側之板狀構件與上述凹部之邊緣抵接。如此，藉由使固定件之裏側之板狀構件抵接於設置於軸中之凹部之邊緣，可支撐施加於鋼帶之張力。又，鋼帶係利用與一對板狀構件之摩擦而固定於固定件。因此，與例如利用螺栓將鋼帶之端部直接固定於軸之情況不同，不會產生鋼帶之破損亦不會產生螺栓之破損。More preferably, a fixing member composed of one of the inner side and the outer side of the plate-like member is provided, and one end of the steel strip is sandwiched and fixed between the pair of plate-like members, and the fixing member is fixed to the concave portion provided in the shaft. And the plate-shaped member on the inner side is in contact with the edge of the concave portion. Thus, the tension applied to the steel strip can be supported by abutting the plate-like member on the inner side of the fixing member against the edge of the recess provided in the shaft. Further, the steel strip is fixed to the fixing member by friction with a pair of plate-like members. Therefore, unlike the case where the end portion of the steel strip is directly fixed to the shaft by bolts, for example, the steel strip is not damaged and the bolt is not damaged.
較佳為，設置由裏側與外側之一對板狀構件所構成，且包含相互連通之長孔之張力調整構件，夾入鋼帶之一端而固定於上述一對板狀構件之間，藉由貫通上述長孔之緊固件，自如地調整圓周方向位置，上述張力調整構件係固定於上述軸。如此，藉由使長孔滑動，可調整施加於鋼帶之張力。於此情況下，鋼帶亦利用摩擦力而固定於一對板狀構件。於實施例中，利用上述固定件固定鋼帶之一端，利用張力調整構件固定另一端。然而，既可均利用張力調整構件固定兩端，亦可均利用上述之固定件固定兩端。Preferably, the tension adjusting member is formed by one of the back side and the outer side, and includes a long hole that communicates with each other, and is sandwiched between one end of the steel strip and fixed between the pair of plate members. The fastener passing through the long hole is freely adjusted in the circumferential direction, and the tension adjusting member is fixed to the shaft. Thus, by sliding the long hole, the tension applied to the steel strip can be adjusted. In this case, the steel strip is also fixed to the pair of plate-shaped members by friction. In the embodiment, one end of the steel strip is fixed by the fixing member, and the other end is fixed by the tension adjusting member. However, both ends may be fixed by the tension adjusting member, and both ends may be fixed by the above-mentioned fixing members.
特佳為，包含螺栓，該螺栓係基端由上述軸支撐，前端於與鋼帶相反側以螺絲固定於上述張力調整構件，藉由上述螺栓上述張力調整構件之位置係調整自如。藉此，螺栓係作為一種千斤頂而發揮作用，藉由螺栓之旋轉可容易地調整張力調整構件之位置。More preferably, the bolt includes a bolt, and the base end of the bolt is supported by the shaft, and the tip end is screwed to the tension adjusting member on a side opposite to the steel strip, and the position of the tension adjusting member is adjusted by the bolt. Thereby, the bolt functions as a jack, and the position of the tension adjusting member can be easily adjusted by the rotation of the bolt.
以下表示用於實施本發明之最佳實施例。本發明之範圍應根據申請專利範圍之記載，參酌說明書之記載與該領域中之習知技術，按照熟悉該技術領略具有通常知識者之理解而規定，但可在不脫離發明主旨之範圍內進行各種變更。尤其，可視需要任意組合本說明書中所寫之複數個實施形態及變形例。The preferred embodiments for carrying out the invention are shown below. The scope of the present invention should be construed in accordance with the scope of the claims, the description of the specification and the prior art in the field, and the understanding of those skilled in the art will be understood by those skilled in the art, but without departing from the scope of the invention. Various changes. In particular, a plurality of embodiments and modifications described in the present specification may be arbitrarily combined as needed.
於圖1～圖8中，表示實施例之雙水平多關節型機械臂2。雙水平多關節型機械臂2係搭載於例如堆高起重機之升降台4，來移載液晶基板、電漿顯示板基板等之晶匣。又，亦可將雙水平多關節型機械臂2搭載於轉盤、或滑動裝置等，擴大可移載之範圍。進而，雙水平多關節型機械臂2亦可設置成負載埠等之固定於地面上之設備，又，亦可搭載於無人搬送車、有軌式無人搬送車、高架移動式車等。In Figs. 1 to 8, the bi-level articulated arm 2 of the embodiment is shown. The bi-level articulated arm 2 is mounted on, for example, a lifting platform 4 of a stacking crane to transfer crystals such as a liquid crystal substrate or a plasma display panel substrate. Further, the bi-level articulated arm 2 can be mounted on a turntable or a slide device to expand the range of transferability. Further, the double-level articulated arm 2 may be installed as a device fixed to the ground such as a load, or may be mounted on an unmanned transport vehicle, a rail-type unmanned transport vehicle, or an overhead mobile vehicle.
雙水平多關節型機械臂2之底部6係固定於升降台4，藉由馬達M1、M2而使左右一對基礎側臂8旋轉。而且，藉由例如鏈輪16、20與鏈條18，而與基礎側臂8同步，使前端側臂10旋轉。臂8、10係長度相等，前端側臂10係向與基礎側臂8相反之方向進行旋轉。一對前端側臂10、10之前端係於把手底部12進行連結，把手底部12係藉由圖3之軸承36，相對於前端側臂10自如地旋轉。又，於把手底部12固定有例如叉架狀之把手本體14。而且，左右一對臂8、10係以同步彎曲及擴展之方式進行變形，若完全同步則把手本體14之姿勢係保持為固定。The bottom 6 of the biscalal articulated arm 2 is fixed to the elevating table 4, and the pair of left and right base side arms 8 are rotated by the motors M1 and M2. Further, the front end side arm 10 is rotated in synchronization with the base side arm 8 by, for example, the sprockets 16, 20 and the chain 18. The arms 8 and 10 are of equal length, and the distal end side arm 10 is rotated in a direction opposite to the base side arm 8. The front ends of the pair of front end side arms 10, 10 are coupled to the handle bottom portion 12, and the handle bottom portion 12 is freely rotatable relative to the front end side arm 10 by the bearing 36 of FIG. Further, a handle body 14 such as a fork frame is fixed to the bottom portion 12 of the handle. Further, the pair of left and right arms 8 and 10 are deformed in such a manner as to be synchronously bent and expanded, and the posture of the handle body 14 is kept constant when fully synchronized.
於把手底部12內，一對鋼帶24、26係以改變高度位置、且俯視時交叉之方式而上下配置。鋼帶24、26之兩端係固定於前端側臂10、10前端之皮帶輪22、23。再者，以下，將鋼帶24、26簡稱為皮帶24、26。可使用鋼絲、橡膠皮帶、鏈條等代替皮帶24、26，於此情況下，使用滾筒、鏈輪等代替皮帶輪22、23。In the handle bottom portion 12, the pair of steel strips 24, 26 are arranged up and down so as to change the height position and intersect in a plan view. Both ends of the steel strips 24, 26 are fixed to the pulleys 22, 23 at the front end of the front end side arms 10, 10. Further, hereinafter, the steel strips 24, 26 are simply referred to as belts 24, 26. Instead of the belts 24, 26, a wire, a rubber belt, a chain, or the like may be used. In this case, a drum, a sprocket, or the like is used instead of the pulleys 22, 23.
如圖2所示，皮帶24係利用固定件32將一端固定於皮帶輪23，沿著皮帶輪23向順時針方向纏繞，沿著皮帶輪22向逆時針方向纏繞，藉由張力調整構件30將另一端固定於皮帶輪22。又，皮帶26係利用固定件32將一端固定於皮帶輪22，沿著皮帶輪22向逆時針方向纏繞，沿著皮帶輪23向順時針方向纏繞，藉由張力調整構件30將另一端固定於皮帶輪23。33係皮帶輪22、23之軸，與皮帶輪22、23為一體。又，皮帶輪22、23與皮帶24、26接觸之範圍係被限制，未與皮帶24、26接觸之部分亦可為非皮帶輪狀。進而，皮帶輪22、23並非相對於臂10進行旋轉之構件，而是支撐皮帶24、26，故外形僅形成為圓筒狀。As shown in FIG. 2, the belt 24 is fixed to the pulley 23 by a fixing member 32, wound clockwise along the pulley 23, wound counterclockwise along the pulley 22, and fixed at the other end by the tension adjusting member 30. On the pulley 22 . Further, the belt 26 is fixed to the pulley 22 by a fixing member 32, wound counterclockwise along the pulley 22, wound clockwise along the pulley 23, and the other end is fixed to the pulley 23 by the tension adjusting member 30. The shafts of the 33 series pulleys 22 and 23 are integrated with the pulleys 22 and 23. Further, the range in which the pulleys 22, 23 are in contact with the belts 24, 26 is restricted, and the portion not in contact with the belts 24, 26 may be in the form of a non-pulley. Further, the pulleys 22 and 23 are not members that rotate with respect to the arm 10, but support the belts 24 and 26, so that the outer shape is formed only in a cylindrical shape.
如圖3所示，皮帶24、26係改變高度位置而上下配置，皮帶輪22、23係經由軸34而固定於前端側臂10。而且，藉由軸34而旋轉自如地支撐軸承36，於軸承36固定有把手底部12。As shown in FIG. 3, the belts 24 and 26 are arranged up and down by changing the height position, and the pulleys 22 and 23 are fixed to the front end side arm 10 via the shaft 34. Further, the bearing 36 is rotatably supported by the shaft 34, and the handle bottom portion 12 is fixed to the bearing 36.
如圖4、圖5所示，於皮帶輪22、23中設置有一對凹部38、40。於凹部38之底部之安裝面46上固定有張力調整構件30，支撐構件54係藉由緊固件55而固定於凹部40之安裝面53上。又，安裝面46、53之方向相差90°。張力調整構件30係於裏側包含板狀構件45，亦於近前側包含板狀構件44。將皮帶24、26夾入板狀構件44、45之間，利用螺栓等緊固件52將板狀構件44、45與皮帶24、25結合成一體，皮帶24、26係利用與構件44、45之摩擦力，而固定於張力調整構件30。再者，亦可於支撐構件54之位置上存在皮帶輪22、23之實心部，而利用皮帶輪22、23直接支撐螺栓56。As shown in FIGS. 4 and 5, a pair of recessed portions 38, 40 are provided in the pulleys 22, 23. A tension adjusting member 30 is fixed to the mounting surface 46 at the bottom of the recess 38. The support member 54 is fixed to the mounting surface 53 of the recess 40 by a fastener 55. Further, the directions of the mounting faces 46, 53 differ by 90 degrees. The tension adjusting member 30 includes a plate member 45 on the back side and a plate member 44 on the near side. The belts 24, 26 are sandwiched between the plate members 44, 45, and the plate members 44, 45 are integrated with the belts 24, 25 by fasteners 52 such as bolts, and the belts 24, 26 are utilized with the members 44, 45. The frictional force is fixed to the tension adjusting member 30. Further, the solid portions of the pulleys 22, 23 may be present at the position of the support member 54, and the bolts 56 may be directly supported by the pulleys 22, 23.
長度方向平行於皮帶輪22、23之圓周方向，例如，一對長孔50、50係以將構件44、45連通之方式而設置。而且，藉由貫通長孔50之螺栓等緊固件55，將張力調整構件30固定於皮帶輪22、23。進而，於與抽出皮帶24、26之方向相反側，由支撐構件54所支撐之螺栓56係以螺絲固定於裏側之板狀構件45。而且，可藉由轉動螺栓56，使張力調整構件30相對於緊固件48進退。藉此，調整施加於皮帶24、26之張力。The longitudinal direction is parallel to the circumferential direction of the pulleys 22, 23, for example, a pair of elongated holes 50, 50 are provided to communicate the members 44, 45. Further, the tension adjusting member 30 is fixed to the pulleys 22 and 23 by a fastener 55 such as a bolt that passes through the long hole 50. Further, on the side opposite to the direction in which the belts 24 and 26 are pulled out, the bolt 56 supported by the support member 54 is screwed to the plate member 45 on the back side. Moreover, the tension adjusting member 30 can be advanced and retracted relative to the fastener 48 by turning the bolt 56. Thereby, the tension applied to the belts 24, 26 is adjusted.
由於皮帶24、26為鋼鐵製品，故若以鋁等輕金屬製造皮帶輪22、23，則會產生電性腐蝕。因此，較佳為，如圖6所示，於沿著皮帶輪22、23纏繞之範圍內，於鋼部60之表面設置絕緣層61，對皮帶輪22、23進行電性絕緣。Since the belts 24 and 26 are steel products, if the pulleys 22 and 23 are made of light metal such as aluminum, electrical corrosion occurs. Therefore, as shown in Fig. 6, in the range wound around the pulleys 22, 23, an insulating layer 61 is provided on the surface of the steel portion 60 to electrically insulate the pulleys 22, 23.
於圖7、圖8中，表示利用固定件32之皮帶24、26之端部之固定。固定件32係利用凹部42安裝於皮帶輪22、23，為了進行安裝使用緊固件74，使裏側之板狀構件73抵接於凹部42邊緣之抵接面70而定位。而且，將皮帶24、26夾入一對板狀構件72、73之間，利用緊固件75將板狀構件72、73相互結合。又，利用由來自緊固件74、75等之夾緊力引起之摩擦，而將鋼帶24、26固定。再者，抵接面70係設置於抽出凹部42內之皮帶24、26之側。In Figs. 7 and 8, the fixing of the ends of the belts 24, 26 by the fixing members 32 is shown. The fixing member 32 is attached to the pulleys 22 and 23 by the recessed portion 42. The fastener 74 is used for attachment, and the plate-like member 73 on the back side is brought into contact with the abutting surface 70 of the edge of the recessed portion 42 to be positioned. Further, the belts 24, 26 are sandwiched between the pair of plate-like members 72, 73, and the plate-like members 72, 73 are joined to each other by the fasteners 75. Further, the steel strips 24, 26 are fixed by friction caused by the clamping forces from the fasteners 74, 75 and the like. Further, the abutting surface 70 is provided on the side of the belts 24, 26 in the extraction recess 42.
對實施例之作用進行說明。前端側臂10、10係經由軸34與皮帶輪22、23，利用皮帶24、26而相互結合。此處，於使用馬達M1、M2等之同步係不完全之情況下，把手本體14之姿勢會振盪。此處，於臂10、10之運動不同步之情況下，皮帶24、26之一者之張力增加，而另一者之張力降低。因此，一對臂10、10係強制進行同步運動，從而可消除把手本體14之振盪。The effect of the embodiment will be described. The front end side arms 10, 10 are coupled to each other by the belts 24 and 26 via the shafts 34 and the pulleys 22, 23. Here, in the case where the synchronization system using the motors M1, M2 or the like is incomplete, the posture of the handle body 14 may oscillate. Here, in the case where the movement of the arms 10, 10 is not synchronized, the tension of one of the belts 24, 26 is increased, and the tension of the other is lowered. Therefore, the pair of arms 10, 10 are forcibly synchronized, so that the oscillation of the handle body 14 can be eliminated.
皮帶24、26係自皮帶輪22、23之表面受到摩擦力，進而，利用固定件32及張力調整構件30而固定於皮帶輪22、23。固定件32係於抵接面70進行定位，張力調整構件30係藉由螺栓56與長孔50而可容易地進行張力調整。而且，將皮帶24、26夾入一對板狀構件(44、45)、(72、73)間並利用摩擦力進行固定，藉此可防止皮帶24、26等之變形與損傷。The belts 24 and 26 are frictionally applied to the surfaces of the pulleys 22 and 23, and are fixed to the pulleys 22 and 23 by the fixing member 32 and the tension adjusting member 30. The fixing member 32 is positioned on the abutting surface 70, and the tension adjusting member 30 can be easily adjusted in tension by the bolt 56 and the long hole 50. Further, the belts 24 and 26 are sandwiched between the pair of plate-like members (44, 45) and (72, 73) and fixed by frictional force, whereby deformation and damage of the belts 24, 26 and the like can be prevented.
2．．．雙水平多關節型機械臂2. . . Double horizontal articulated arm
4．．．升降台4. . . Lifts
6．．．底部6. . . bottom
8．．．基礎側臂8. . . Foundation side arm
10．．．前端側臂10. . . Front side arm
12．．．把手底部12. . . Bottom of the handle
14．．．把手本體14. . . Handle body
16、20．．．鏈輪16, 20. . . Sprocket
18．．．鏈條18. . . Chain
22、23．．．皮帶輪22, 23. . . Pulley
24、26．．．鋼帶24, 26. . . Steel strip
30．．．張力調整構件30. . . Tension adjusting member
32．．．固定件32. . . Fastener
33、34．．．軸33, 34. . . axis
36．．．軸承36. . . Bearing
38～42．．．凹部38~42. . . Concave
44、45、72、73．．．板狀構件44, 45, 72, 73. . . Plate member
46、53．．．安裝面46, 53. . . Mounting surface
48、52、55、74、75．．．緊固件48, 52, 55, 74, 75. . . fastener
50．．．長孔50. . . Long hole
54．．．支撐構件54. . . Support member
56．．．螺栓56. . . bolt
60．．．鋼部60. . . Steel department
61．．．絕緣層61. . . Insulation
70．．．抵接面70. . . Abutment surface
M1、M2．．．馬達M1, M2. . . motor
圖1係實施例之雙水平多關節型機械臂之主要部分平面圖。Fig. 1 is a plan view of a main portion of a bi-level articulated robot of the embodiment.
圖2係實施例之雙水平多關節型機械臂之主要部分放大平面圖，且卸除手罩而進行表示。Fig. 2 is an enlarged plan view showing the main part of the bi-level articulated arm of the embodiment, and is shown by removing the hand cover.
圖3係表示實施例之雙水平多關節型機械臂中之臂同步用皮帶之安裝的主要部分放大側視圖。Fig. 3 is an enlarged side elevational view of the main part showing the installation of the belt for arm synchronization in the bi-level articulated arm of the embodiment.
圖4係表示實施例中之張力調整構件之圖。Fig. 4 is a view showing a tension adjusting member in the embodiment.
圖5係表示張力調整構件對皮帶輪之安裝之圖。Fig. 5 is a view showing the mounting of the tension adjusting member to the pulley.
圖6係與皮帶輪之接觸部中之皮帶之剖面圖。Figure 6 is a cross-sectional view of the belt in the contact portion with the pulley.
圖7係表示皮帶之另一端對皮帶輪之安裝的主要部分放大側視圖。Figure 7 is an enlarged side elevational view showing the main portion of the belt to the pulley.
圖8係表示皮帶之另一端對皮帶輪之安裝的主要部分放大平面圖。Fig. 8 is an enlarged plan view showing the main part of the belt to the other end of the belt.
10．．．前端側臂10. . . Front side arm
12．．．把手底部12. . . Bottom of the handle
14．．．把手本體14. . . Handle body
22、23．．．皮帶輪22, 23. . . Pulley
24、26．．．鋼帶24, 26. . . Steel strip
30．．．張力調整構件30. . . Tension adjusting member
32．．．固定件32. . . Fastener
33．．．軸33. . . axis
38、40、42．．．凹部38, 40, 42. . . Concave
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010160369A JP5177706B2 (en) | 2010-07-15 | 2010-07-15 | Double scalar arm |
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| Publication Number | Publication Date |
|---|---|
| TW201206661A TW201206661A (en) | 2012-02-16 |
| TWI487608B true TWI487608B (en) | 2015-06-11 |
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| TW100124895A TWI487608B (en) | 2010-07-15 | 2011-07-14 | Double level multi - articular manipulator |
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| Country | Link |
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| JP (1) | JP5177706B2 (en) |
| KR (1) | KR101414215B1 (en) |
| CN (1) | CN102416625B (en) |
| TW (1) | TWI487608B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5306102B2 (en) | 2009-08-04 | 2013-10-02 | 株式会社東芝 | Pattern forming method and semiconductor device manufacturing method |
| US10224232B2 (en) | 2013-01-18 | 2019-03-05 | Persimmon Technologies Corporation | Robot having two arms with unequal link lengths |
| KR102430044B1 (en) * | 2015-02-06 | 2022-08-05 | 퍼시몬 테크놀로지스 코포레이션 | Robot Having Arm With Unequal Link Lengths |
| JP6786291B2 (en) * | 2016-07-28 | 2020-11-18 | 日本電産サンキョー株式会社 | Industrial robot |
| JP6605432B2 (en) * | 2016-12-07 | 2019-11-13 | 株式会社神戸製鋼所 | Industrial robot |
| KR102214361B1 (en) * | 2019-05-07 | 2021-02-15 | 한국생산기술연구원 | Wire fixing bracket for joint of wire driven robot and wire driven robot having the same |
| CN111975757B (en) * | 2020-08-27 | 2023-12-12 | 广东三扬机器人有限公司 | Parameter setting method of SCARA robot |
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|---|---|---|---|---|
| JPH09283588A (en) * | 1996-04-08 | 1997-10-31 | Hitachi Ltd | Substrate conveyer and substrate conveying method |
| US20080152465A1 (en) * | 2006-12-22 | 2008-06-26 | Shinko Electric Co., Ltd. | Transportation apparatus and tension adjustment method of belt in the same |
| JP2008223974A (en) * | 2007-03-15 | 2008-09-25 | Yaskawa Electric Corp | Belt transmission device and robot equipped therewith |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03234495A (en) * | 1990-02-09 | 1991-10-18 | Matsushita Electric Ind Co Ltd | Steel band driving device of robot arm |
| JP3030667B2 (en) * | 1991-07-29 | 2000-04-10 | 東京エレクトロン株式会社 | Transfer device |
| JPH11262291A (en) * | 1998-03-11 | 1999-09-24 | Asmo Co Ltd | Window glass elevating equipment of vehicle |
| JP2008074550A (en) * | 2006-09-21 | 2008-04-03 | Murata Mach Ltd | Scara arm |
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2010
- 2010-07-15 JP JP2010160369A patent/JP5177706B2/en active Active
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2011
- 2011-06-23 KR KR1020110061084A patent/KR101414215B1/en active IP Right Grant
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09283588A (en) * | 1996-04-08 | 1997-10-31 | Hitachi Ltd | Substrate conveyer and substrate conveying method |
| US20080152465A1 (en) * | 2006-12-22 | 2008-06-26 | Shinko Electric Co., Ltd. | Transportation apparatus and tension adjustment method of belt in the same |
| JP2008157329A (en) * | 2006-12-22 | 2008-07-10 | Shinko Electric Co Ltd | Linear conveyance device for article, and belt tension regulating method for the device |
| JP2008223974A (en) * | 2007-03-15 | 2008-09-25 | Yaskawa Electric Corp | Belt transmission device and robot equipped therewith |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102416625B (en) | 2015-06-10 |
| TW201206661A (en) | 2012-02-16 |
| CN102416625A (en) | 2012-04-18 |
| KR20120007962A (en) | 2012-01-25 |
| JP2012020376A (en) | 2012-02-02 |
| KR101414215B1 (en) | 2014-07-01 |
| JP5177706B2 (en) | 2013-04-10 |
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