KR102430044B1 - Robot Having Arm With Unequal Link Lengths - Google Patents

Abstract

at least one driving unit; An apparatus comprising a first robot having a first upper arm, a first forearm and a first end effector is disclosed. The first upper arm is connected to the at least one drive in the first axis of rotation. The second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation spaced apart from the first axis of rotation. The first and second robot arms are configured to position the end effectors in first retracted positions such that the substrates positioned between the end effectors are at least partially loaded one over the other. The first and second robot arms are configured to extend the end effectors from first retracted positions in a first direction along first parallel paths, at least in part one positioned over the other.

Description

Robot Having Arm With Unequal Link Lengths

The disclosed embodiment relates to a robot having an arm having unequal link lengths, and more particularly to a robot having one or more arms having unequal link lengths, each arm holding one or more substrates. support

A vacuum, atmospheric, and controlled environment for applications such as those related to the fabrication of semiconductors, LEDs, solar, MEMS or other devices transports substrates and carriers associated with the substrates to and from a storage location, processing location or other locations and storage locations; It uses robotics and other forms of automation to transfer from a processing location or other locations. Such transfer of substrates may move individual substrates, groups of substrates, with a single arm carrying one or more substrates, or multiple arms each carrying one or more substrates. Many automated transfers are performed while minimizing transfer times results in reduced cycle times and increased throughput and use of associated equipment. Accordingly, there is a need to provide substrate transfer automation that requires minimal footprint and workspace volume for a given range of transfer applications with minimized transfer times.

It is an object of the present invention to provide a robot-like apparatus and method that can solve the above problems.

The following summary is exemplary. The abstract is not intended to limit the scope of the claims.

According to an aspect of an exemplary embodiment, a conveying apparatus includes at least one drive unit; It has a first robotic arm comprising a first upper arm, a first forearm and a first end effector. A first upper arm is connected to the at least one drive in the first axis of rotation. The second robot arm includes a first robot arm; and a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation spaced apart from the first axis of rotation. The first and second robotic arms are configured to position the end effectors in first retracted positions to at least partially load substrates positioned on the end effectors one over the other. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along first parallel paths at least partially one positioned directly over the other. The first and second robotic arms are configured to extend the end effectors in at least one second direction along second mutually spaced paths that are not positioned above each other. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

According to another aspect of the exemplary embodiment, a method comprises providing a first robot having a first upper arm, a first forearm and a first end effector, wherein the first upper arm and the first forearm are effectively different. having a length; providing a second robotic arm comprising a second upper arm, a second forearm and a second end effector, the second upper arm and the second forearm having different effective lengths; connecting the first upper arm to the at least one drive in the first axis of rotation; and coupling a second upper arm to at least one drive at a second axis of rotation spaced from the first axis of rotation, wherein at least partially loading substrates positioned on the end effectors one over the other. the first and second robotic arms are configured to position the end effectors in first retracted positions to position the end effectors in first retracted positions to and wherein the first and second robot arms are configured to extend the end effectors from first retracted positions in a first direction along first parallel paths, one positioned directly over the other, and wherein the first and second robotic arms are positioned one over the other. and extend the end effectors in at least one second direction along second paths spaced apart from each other that are not positioned.

According to another aspect of the exemplary embodiment, the method includes actuating first and second ends of first and second respective robot arms to at least partially load substrates positioned on end effectors one on the other. positioning the bodies in first retracted positions, wherein the first robot arm has a first upper arm, a first forearm and a first end effector, the first upper arm having at least one drive in a first axis of rotation. wherein the second robot arm comprises a second upper arm, a second forearm and a second end effector, the second upper arm being connected to the at least one drive at a second axis of rotation spaced apart from the first axis of rotation , step; moving the first and second robot arms to move the end effectors from first retracted positions in a first direction, at least partially in parallel first paths one positioned directly over the other, in a first direction; and moving the first and second robot arms to move the end effectors to extend the end effectors in at least one second direction along second paths spaced from each other and not positioned on top of each other. do.

According to another aspect of an exemplary embodiment, a transport apparatus includes: a first robotic arm having a first upper arm, a first forearm and a first end effector; a second robotic arm having a second upper arm, a second forearm and a second end effector; and a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at a first rotational axis, and the second upper arm is connected to the driving unit at a second rotational axis spaced from the first rotational axis. and the drive includes only three motors for rotating the first and second upper arms, the first and second robotic arms to at least partially load substrates positioned on the end effectors one above the other. configured to position the end effector from the first retracted positions, wherein the first and second robotic arms are first retracted in a first direction along first parallel paths, one positioned at least partially directly over the other. configured to extend the end effectors from positions, wherein the first and second robotic arms are configured to extend the end effectors in at least one second direction along second paths spaced apart from each other that are not positioned above each other. is composed

According to another aspect of the exemplary embodiment, a method comprises a first of first and second individual robot arms in a first retracted position such that substrates positioned on end effectors are at least partially loaded one over the other. positioning the end effector and the second end effector, wherein the first robot arm comprises a first upper arm, a first forearm and a first end effector, the first upper arm comprising a drive portion at a first axis of rotation. connected, wherein the second robot arm includes a second upper arm, a second forearm and a second end effector, the second upper arm coupled to the drive at a second axis of rotation spaced apart from the first axis of rotation; moving the first and second robot arms to move the end effectors from first retracted positions in a first direction along parallel first paths, one at least partially directly positioned over the other; moving the first and second robot arms to move the end effectors to extend the end effectors in at least one second direction along second paths spaced apart from each other, one not positioned over the other; rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation; moving from the first retracted positions in a first direction; The moving and rotating steps to extend the end effectors in two directions are accomplished using only the three motors of the drive unit.

According to another aspect of the exemplary embodiment, a method includes providing a first robotic arm having a first upper arm, a first forearm and a first end effector; providing a second robotic arm having a second upper arm, a second forearm and a second end effector; connecting the first upper arm to the driving unit at the first rotational shaft; and coupling the second upper arm to the drive at a second axis of rotation spaced apart from the first axis of rotation; The first and second robotic arms are configured to position the end effectors in the retracted positions, the first retracted positions in a first direction along first parallel paths at least partially positioned one directly over the other. wherein the first and second robot arms are configured to rotate to extend the end effectors from The first and second robot arms are configured to rotate, the drive having only three motors, the motors rotating the first and second robot arms to extend the end effectors and the first and second axes of rotation for rotating the first and second robot arms about a third axis of rotation spaced from the poles.

According to another aspect of an exemplary embodiment, an apparatus comprises: a first robotic arm having a first upper arm, a first forearm and a first end effector; a second robotic arm having a second upper arm, a second forearm and a second end effector; and a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at a first rotational axis, and the second upper arm is connected to the driving unit at a second rotational axis spaced from the first rotational axis, and , the driving unit includes five motors for rotating the first and second upper arms, the first of the motors being connected to the first and second robot arms to drive the first and second arms to the first and second rotating about a third axis of rotation spaced apart from the second axis of rotation, wherein second and third of the motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively, and a fourth one of the motors and fifth motors are coupled to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently from the first robot arm, the first and second robot arms being positioned on the end effectors. configured to position the end effectors in first retracted positions such that at least partially one over the other, the first and second robotic arms are at least partially parallel to one another positioned directly over the other; configured to extend the end effectors from first retracted positions in a first direction along first paths, the first and second robot arms being at least one along second paths spaced apart from each other not positioned above each other configured to extend the end effectors in a second direction of

According to another aspect of the exemplary embodiment, a method includes moving first and second individual robot arms from first retracted positions to at least partially load substrates positioned on end effectors one onto the other. positioning first and second end effectors, wherein a first robotic arm includes a first upper arm, a first forearm and a first end effector, the first upper arm coupled to the drive at a first axis of rotation wherein the second robot arm includes a second upper arm, a second forearm and a second end effector, the second upper arm coupled to the drive at a second axis of rotation spaced apart from the first axis of rotation; moving the first and second robot arms to move the end effector from first retracted positions in a first direction according to at least partially parallel first paths one positioned over the other; moving the first and second robot arms to move the end effectors to extend the end effectors in at least one second direction along second paths spaced from each other that are not positioned above each other; rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation; moving from the first retracted positions in a first direction; Moving and rotating to extend the end effectors in the direction are accomplished using five motors of the drive, a first of the motors being connected to the first and second robot arms about a third axis of rotation. rotates the first and second arms, the second and third of the motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively, and the fourth and third of the robot arms 5 is connected to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently from the first robot arm.

According to another aspect of the exemplary embodiment, a method includes providing a first robotic arm having a first upper arm, a first forearm and a first end effector; providing a second robotic arm having a second upper arm, a second forearm and a second end effector; connecting the first upper arm to the drive at the first rotational shaft; and coupling a second upper arm to the drive at a second axis of rotation spaced apart from the first axis of rotation; First and second robotic arms are configured to position the end effectors in retracted positions, first retracted positions in a first direction along parallel first paths at least partially positioned one directly over the other to extend the end effectors in at least one second direction along second mutually spaced paths, the first and second robot arms being configured to rotate to extend the end effectors from The first and second robot arms are configured to rotate, the drive having five motors, the motors rotating the first and second robot arms to extend the end effectors and spaced apart from the first and second axes of rotation for rotating the first and second robot arms about a third axis of rotation, a first of the motors being connected to the first and second robot arms to rotate the first and second arms about a third axis of rotation and second and third of the motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively, and the fourth and fifth of the robot arms are connected to the second robot arm to rotate the second upper arm and the second forearm independently of the first robot arm, respectively.

According to another aspect of the exemplary embodiment, an apparatus comprises: a first robotic arm comprising a first upper arm, a first forearm and a first end effector; a second robotic arm comprising a second upper arm, a second forearm and a second end effector; and a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at a first rotational axis, and the second upper arm is connected to the driving unit at a second rotational axis spaced from the first rotational axis. and the drive unit has four motors for rotating the first and second upper arms, a first one of the motors connected to the first upper arm, and a second one of the motors connected to the second upper arm. wherein a third of the motors is connected to the first forearm, a fourth of the motors is connected to the second forearm, and the third and fourth motors have a common shaft spaced apart from the first and second axes. wherein the first motor is aligned to the first axis, the second motor is aligned to the second axis, and the second motor is aligned to at least partially load substrates positioned on the end effectors one over the other. The first and third robotic arms are configured to position the end effectors in first retracted positions, wherein the first retracted position in a first direction along first parallel paths at least partially positioned one directly over the other. The first and second robotic arms are configured to extend the end effectors from each other and first to extend the end effectors in at least one second direction along second mutually spaced paths that are not positioned above each other. and second robot arms are configured.

These and other aspects will be described in the following description with reference to the accompanying drawings.
1A is a plan view of a conveying device;
1b is a side view of the conveying device;
Fig. 2a is a schematic plan view of a conveying device;
Figure 2b is a schematic and partial cross-sectional side view of the conveying device;
3a is a plan view of the conveying device;
3b is a plan view of the conveying device;
Fig. 3c is a plan view of the conveying device;
4 is a graphical plot.
Fig. 5a is a plan view of the conveying device;
5b is a side view of the conveying device;
6a is a schematic and partial plan view of a conveying device;
6b is a schematic and partial cross-sectional side view of a conveying device;
7A is a plan view of the conveying device;
7B is a plan view of the conveying device;
7C is a plan view of the conveying device;
8 is a graphical plot.
9 is a schematic and partial side cross-sectional view of a conveying device;
10A is a plan view of the conveying device;
10B is a side view of the conveying device;
11A is a plan view of the conveying device;
11B is a side view of the conveying device;
12 is a schematic and partial cross-sectional side view of a conveying device;
13 is a schematic partial cross-sectional side view of a transport device;
14A is a plan view of the conveying device;
14B is a plan view of the conveying device;
14C is a plan view of the conveying device;
15A is a plan view of the conveying device;
15B is a side view of the conveying device;
16A is a plan view of the conveying device;
16B is a side view of the conveying device;
17A is a plan view of the conveying device;
17B is a side view of the conveying device;
18 is a schematic and partial side cross-sectional view of a conveying device;
19 is a schematic partial cross-sectional side view of a transport device;
20A is a plan view of the conveying device;
Fig. 20B is a plan view of the conveying device;
20C is a plan view of the conveying device;
21A is a top view of the conveying device;
21B is a side view of the conveying device;
22A is a plan view of the conveying device;
22B is a side view of the conveying device;
23 is a schematic and partial side cross-sectional view of a transport device;
24A is a plan view of the conveying device;
24B is a plan view of the conveying device;
24C is a plan view of the conveying device;
25A is a plan view of the conveying device;
25B is a side view of the conveying device;
26A is a plan view of the conveying device;
26B is a plan view of the conveying device;
26C is a plan view of the conveying device;
27A is a plan view of the conveying device;
27B is a side view of the conveying device;
28A is a plan view of the conveying device;
28B is a side view of the conveying device;
29A is a plan view of the conveying device;
29B is a plan view of the conveying device;
29C is a plan view of the conveying device;
30A is a plan view of the conveying device;
30B is a side view of the conveying device;
31A is a plan view of the conveying device;
31B is a side view of the conveying device;
32A is a plan view of the conveying device;
32B is a plan view of the conveying device;
32C is a plan view of the conveying device;
32D is a plan view of the conveying device;
33A is a plan view of the conveying device;
33B is a side view of the conveying device;
34A is a plan view of the conveying device;
34B is a plan view of the conveying device;
34C is a plan view of the conveying device;
35A is a plan view of the conveying device;
35B is a side view of the conveying device;
Fig. 36 is a plan view of the conveying device;
37A is a plan view of the conveying device;
37B is a side view of the conveying device;
38A is a plan view of the conveying device;
38B is a side view of the conveying device;
39 is a plan view of the conveying device;
40A is a plan view of the conveying device;
40B is a side view of the conveying device;
Fig. 41 is a plan view of the conveying device;
42 is a plan view of the conveying device;
43A is a plan view of the conveying device;
43B is a side view of the conveying device;
44 is a plan view of the conveying device;
45 is a plan view of the conveying device;
46A is a plan view of the conveying device;
46B is a side view of the conveying device;
47A is a plan view of the conveying device;
47B is a side view of the conveying device;
48 is a plan view of the conveying device;
49 is a plan view of the conveying device;
50A is a plan view of the conveying device;
50B is a side view of the conveying device;
51 is a plan view of the conveying device;
52A is a plan view of the conveying device;
52B is a side view of the conveying device;
53 is a plan view of the conveying device;
54A is a plan view of the conveying device;
54B is a side view of the conveying device;
55A is a plan view of the conveying device;
55B is a plan view of the conveying device;
55C is a plan view of the conveying device;
56A is a plan view of the conveying device;
56B is a side view of the conveying device;
57A is a plan view of the conveying device;
57B is a plan view of the conveying device;
57C is a plan view of the conveying device;
58A is a plan view of the conveying device;
58B is a side view of the conveying device;
59A is a plan view of the conveying device;
59B is a plan view of the conveying device;
59C is a plan view of the conveying device;
60A is a plan view of the conveying device;
60B is a side view of the conveying device;
61A is a plan view of the conveying device;
61B is a plan view of the conveying device;
61C is a plan view of the conveying device;
62 is a plan view of the conveying device;
63 is a schematic diagram illustrating an exemplary pulley.
64 is a plan view of the conveying device;
65 is a plan view of the conveying device;
66A is a plan view of the conveying device;
66B is a perspective view of the conveying device; ;
66C shows the end of the conveying device.
66D is a side view of the conveying device; ;
67A is a is a plan view of the conveying device;
67B is a perspective view of the conveying device;
67C shows the end of the conveying device.
67D is a side view of the conveying device;
68A is a plan view of the conveying device;
68B is a plan view of the conveying device;
Fig. 69 AF is a plan view of the conveying device;
70 AF is a plan view of the conveying device;
71 AE is a plan view of the conveying device;
72 AB are top and side views of the conveying device;
72 CD is a top view and a side view of the conveying device.
73 AB is a top view and a side view of the conveying device;
73 CD is a top view and a side view of the conveying device;
74A is a plan view of the conveying device;
74B is a plan view of the conveying device;
75 AF is a plan view of the conveying device;
76A is a plan view of the conveying device;
76B is a plan view of the conveying device;
76C is a plan view of the conveying device;
76D is a plan view of the conveying device;
77 AB is a top view and a side view of the conveying device;
77 CD is a top view and a side view of the conveying device;
78 AB is a top view and a side view of the conveying device;
79A is a plan view of the conveying device;
79B is a plan view of the conveying device;
Fig. 80A is a plan view of the conveying device;
Fig. 80B is a plan view of the conveying device;

With the exception of the embodiment set forth below, the disclosed embodiment is capable of other embodiments and of being performed or practiced in various ways. Therefore, it should be understood that the disclosed embodiment is not limited to the configuration and structure of the components described in the following description or shown in the drawings in the present application. If only one embodiment is described herein, the claims are not limited to that embodiment. Moreover, the claims should not be construed as limiting unless there is clear and convincing evidence specifying any exclusion, limitation or waiver.

1A and 1B , a top view and a side view of a robot 10 having a driving unit 12 and an arm 14 are shown, respectively. Arm 14 is shown in a retracted position. Arm 14 has an upper arm or first link 16 rotatable about a central axis of rotation 18 of drive 12 . Arm 14 further has a forearm or second link 20 rotatable about an elbow axis of rotation 22 . The arm 14 further has an end effector or third link 24 rotatable about a wrist axis of rotation 26 . The end effector 24 supports the substrate 28 . As will be explained, the arm 14 is configured to work with the drive 12 such that the substrate 28 is parallel to, or for example, a linear path 32 coincident with the central axis of rotation 18 of the drive 12 . It is transported along a path such as for example paths 34 and 36 , or along a radial path 30 which may coincide with (a path as shown in FIG. 1A ). In the illustrated embodiment, the joint-to-joint length of the forearm or second link 20 is greater than the joint-to-joint length of the upper arm or first link 16 . In the illustrated embodiment, the lateral offset 38 of the end effector or third link 24 corresponds to the difference in articulation-to-joint lengths of the forearm 20 and the upper arm 14 . As will be described in detail later, the lateral offset 38 remains substantially constant during extension and retraction of the arm 14 , such that the substrate 28 or end effector 24 does not rotate relative to the linear path. while moving the substrate 28 along a linear path. This is accomplished with an internal configuration for the arm 14 , which will be described later, without the use of an additional control axis to control the rotation of the end effector 24 in the wrist 26 relative to the forearm 20 . In one aspect of the disclosed embodiment, with reference to FIG. 1A , the center of gravity of the third link or end effector 24 may be on the wrist centerline or axis of rotation 26 . Alternatively, the center of gravity of the third link or end effector 24 may be along the path 40 offset 38 from the central axis of rotation 18 . In this way, interference with the bands limiting the end effector 24 with respect to the links 16 and 18 is a moment applied as a result of the mass being differentially offset during extension and retraction of the arm. can be minimized due to Here, the center of gravity may be determined with or without a substrate or the center of gravity may be in between. Alternatively, the center of gravity of the third link or end effector 24 may be at any suitable location. In the illustrated embodiment, a substrate transport apparatus 10 transports a substrate 28 with a movable arm assembly 14 coupled to a drive section 12 on a central axis of rotation 18 . The substrate support 24 is coupled to an arm assembly 14 on a wrist axis of rotation 26, wherein the arm assembly 14 has a central axis of rotation 18 during extension and retraction as can be seen with respect to FIGS. 3A-3C . ) is rotated around The wrist axis of rotation 26 moves along a wrist path 40 that is parallel to and offset 38 or otherwise offset in a radial path relative to the central axis of rotation 18 during extension and retraction, for example a path It moves along (30, 34, 36). The substrate support 24 likewise moves parallel to the radial path 30 without rotation during extension and retraction. As detailed in other aspects of the disclosed embodiments, the principles and structures of limiting an end effector to move in substantially pure radial motion may be applied where the length of the forearm is less than the length of the upper arm. . Also, the above features may apply where one or more substrates are being handled by the end effector. Also, the above features may apply if a second arm is used in connection with a drive that handles one or more additional substrates. Accordingly, all such variations may be encompassed.

2A and 2B , there are shown partial and schematic top and side views, respectively, of a system 10 , the inner configuration used to drive the individual links of the arm 14 shown in FIGS. 1A and 1B , respectively. indicates Drive (12) has first and second motors (52,54), said motors having corresponding first and second encoders (56,58) coupled to housing (60), first and second motors (52,54) 2 Shafts 62 and 64 are driven, respectively. Here the shaft 62 may be coupled to a pulley 66 , the shaft 64 may be coupled to the upper arm 64 , and the shafts 62 , 64 may be concentric or otherwise disposed. can be In an alternative aspect, any suitable drive may be provided. Housing 60 may be in communication with chamber 68 , wherein bellows 70 , chamber 68 and an inner portion of housing 60 isolate vacuum environment 72 from atmospheric environment 74 . make it Housing 60 may be slid in the z direction as a carrier on slide 76, provided with a lead screw or other suitable vertical or linear z drive 78 to provide housing 60 and an arm coupled thereto 14) is selectively moved in the z direction (80). In the illustrated embodiment, the upper arm 16 is driven by a motor 54 about a central axis of rotation 18 . Likewise, the forearm is driven by a motor 52 via a band drive having pulleys 66,82 and bands 84,86 such as conventional circular pulleys and bands. In an alternative aspect, any suitable structure may be provided to drive the forearm 20 relative to the upper arm 16 . The ratio between the pulleys 66 and 82 may be 1:1, 2:1, or any other suitable ratio. The third link 24 having an end effector comprises a pulley 88 based in relation to the link 16, a pulley 90 based in relation to an end effector or third link 24 and said pulley ( It can be limited by bands 92 and 94 limiting 88,90. As will be explained, the ratio between the pulleys 88 , 90 may not be constant in order for the third link 24 to follow a radial path without rotation during extension and retraction of the arm 14 . This is achieved where the pulleys 88 and 90 may be one or more non-circular pulleys, such as two non-circular pulleys, or where one of the pulleys 88, 90 may be circular and the other non-circular. can be Alternatively, any suitable coupling or linkage arrangement may be provided to limit the path of the third link or end effector 24 as described above. In the embodiment shown, the at least one non-circular pulley includes an upper arm 16 and Compensate for the effect of unequal lengths of the forearm 20 . Embodiments will be described with respect to which pulley 90 is not circular and pulley 88 is circular. Alternatively, the pulley 88 may not be circular or the pulley 90 may be circular. Alternatively, the pulleys 88 and 92 may be non-circular or some suitable coupling may be provided to limit the links of the arm 14 as described. As an example, US Pat. No. 4,865,577 (9/12/1989) “Non-Circular Drive” describes a pulley or sprocket that is not circular, which is incorporated herein by reference. Alternatively, any suitable coupling as described may be provided to limit the links of the arm 14 as described above, for example any suitable variable ratio drive or coupling, linkage. Gears or sprockets, cams or others are used alone or in combination with suitable linkages or other couplings. In the illustrated embodiment, an elbow pulley 88 is coupled to the upper arm 16 , which is shown round or circular, a wrist pulley coupled to a wrist or third link 24 , 90) is shown as non-circular. The wrist pulley shape is not circular and may have symmetry about a line 96 that is perpendicular to the radial trajectory 30, which trajectory is, for example, as shown in FIG. It may be parallel to or coincident with the line between the two pulleys 88 , 90 when the forearm 20 and the upper arm 16 are straight across each other while closest to the axis 18 . The shape of the pulley 90 is such that when the arm 14 is extended and retracted, the bands 92 and 94 are held taut to establish contact points 98 and 100 on opposite sides of the pulley 90 to establish the wrist rotation axis 26 . It is adapted to vary the radial distances 102 and 104 from . For example, in the orientation shown in FIG. 3B , each of the contact points 98 , 100 of the two bands on the pulley are at equal radial distances 102 , 104 from the wrist axis of rotation 26 . This will be further explained in connection with FIG. 4 , which shows the individual proportions. In order to rotate the arm 14, the drive shafts 62, 64 of the robot need to move in the direction of rotation of the arm by the same amount. In order for the end effector 24 to retract and extend radially along a straight path, the two drive shafts 62 and 64 need to move in a coordinated manner, for example the example presented later in this section. It is necessary to move according to the inverse kinematic equations. Here, the substrate transport apparatus 10 is adapted to transport the substrate 28 . The forearm 20 is rotatably coupled to the upper arm 16 and is rotatable about an elbow axis 22 that is offset from the central axis 18 by the length of the upper arm linkage. The end effector 24 is rotatably coupled to the forearm 20 and is rotatable about a wrist axis 26 that is offset from the elbow axis 22 by a forearm link length. Wrist pulley 90 is secured to end effector 24 and coupled to elbow pulley 88 with bands 92 and 94 . Here, the forearm link length is different from the upper arm link length and the end effector is constrained with respect to the upper arm by an elbow pulley, wrist pulley and band, such that the substrate travels in a linear radial path with respect to the central axis 18 . (30) is followed. Here, the substrate support 24 is coupled to the upper arm 16 by means of a substrate support coupling 92 and is subject to relative movement between the upper arm 16 and the forearm 20 about the elbow axis of rotation 22 . It is driven around the wrist rotation shaft 26 by the. Figures 3a, 3b and 3c show the stretching movement of the robot of Figures 1 and 2; 3A shows a top view of the robot 10 with the arm 14 in the retracted position. 3B shows a partially elongated arm 14 with a forearm 20 aligned on top of an upper arm 16, wherein the lateral offset 38 of the end effector is offset from the forearm 20 and corresponding to the difference in joint-to-joint length of the upper arm 16 . 3C shows the arm 14 in the extended position, although not fully extended.

Exemplary direct kinematics may be provided. In an alternative aspect, any suitable direct kinematics may be provided to correspond to the alternative structure. The following exemplary equations can be used to determine the position of the end effector as a function of the position of the motors.

x ₂ = l ₁ cosθ ₁ + l ₂ cosθ ₂ (1.1)

y ₂ = l ₁ sin θ ₁ +l ₂ sin θ ₂ (1.2)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (1.3)

T ₂ = atan2(y ₂ ,x ₂ ) (1.4)

α ₃ = asin(d ₃ /R ₂ ) where d ₃ = l ₂ -l ₁ (1.5)

α ₁₂ = θ ₁ -θ ₂ (1.6)

If α ₁₂ <π: R = sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = T ₂ +α ₃ , else R = -sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = T ₂ -α ₃ +π (1.7)

An exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematics may be provided to correspond to the alternative structure. The following exemplary equations can be used to determine the position of the motors that achieve a particular position of the end effector.

x ₃ = R cos T (1.8)

y₃ = R sin T (1.9)

x ₂ = x ₃ -l ₃ cos T+d ₃ sin T (1.10)

y ₂ = y ₃ -l ₃ sin Td ₃ cos T (1.11)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (1.12)

T ₂ = atan2(y ₂ ,x ₂ ) (1.13)

α ₁ = acos((R ₂ ² +l ₁ ² -l ₂ ² )/(2 R ₂ l ₁ )) (1.14)

α ₂ = acos((R ₂ ² -l ₁ ² +l ₂ ² )/(2 R ₂ l ₂ )) (1.15)

If R>l ₃ : θ ₁ = T ₂ +α ₁ , θ ₂ = T ₂ -α ₂ , else: θ ₁ = T ₂ -α ₁ ,θ ₂ = T ₂ +α ₂ (1.16)

The following names may be used in kinematic equations.

d ₃ = lateral offset of the end effector (m)

l ₁ = joint-to-joint length of the first link (m)

l ₂ = joint-to-joint length of the second link (m)

l ₃ = length of third link with end effector, measured from wrist joint to reference point on end effector (m)

R = Radial position of the end effector (m)

R ₂ = Radial coordinates of the list joint (m)

T = angular position of the end effector (rad)

T ₂ = angular coordinates of the list joint (rad)

x ₂ = x-coordinate of the list joint (m)

x ₃ = x-coordinate of the end effector (m)

y ₂ = y-coordinate of the list joint (m)

y ₃ = y-coordinate of the end effector (m)

θ ₁ = angular position (rad) of the drive shaft coupled to the first link

θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

The above exemplary kinematic equations can be used to design an appropriate drive, eg, a band drive that limits the orientation of the third link 24 , such that the two first links 16 of the arm 14 , 20 , the end effector 24 is oriented in the radial direction 30 .

4 , the band limiting the orientation of the third link as a function of normalized extension from the center of the robot to the root of the end effector, ie (Rl ₃ )/l ₁ . A plot 1200 is shown for the drive unit's transmission ratio r ₃₁ 122. The transmission ratio r ₃₁ is the angular velocity ω ₁₂ of the pulley attached to the first link, both defined relative to the second link. ) to the ratio of the angular velocity (ω ₃₂ ) of the pulley attached to the third link, the figure graphs the transmission ratio (r ₃₁ ) for different l ₂ /l ₁ (from 0.5 to 1.0 of 0.1 increments, increments of 0.2 from 1.0 to 2.0) The profile of the non-circular pulley(s) can be calculated to achieve the transmission ratio r ₃₁ according to figure 4 , for example shown in figures 2a, 54A, 54B The profile is like that.

In the disclosed embodiment, a longer reach may be achieved as compared to an equivalent link arm having the same limiting volume by using one or more of the non-circular pulley(s) or other suitable device to limit end effector movement. In alternative aspects, the first link may be driven directly by a motor, or may be driven through some kind of coupling or transmission arrangement. Here, any suitable transmission ratio may be used. Alternatively, the band drive actuating the second link may be replaced with any other configuration having equivalent functionality, for example, a belt drive, cable drive, linkage-base mechanism, or any combination thereof. can also be replaced. Likewise, the band drive limiting the third link may be replaced with any other suitable configuration, for example, a belt drive, cable drive, non-circular gears, linkage-base mechanism, or any combination thereof. is also replaced. The end effector may, but need not, be oriented radially here. For example, the end effector may be positioned relative to the third link with any suitable offset and may be oriented in any suitable direction. Also, in an alternative aspect, the third link may retain one or more end effectors or substrates. Any suitable number of end effectors and/or material holders may be carried by the third link. Moreover, in alternative aspects, the joint-to-joint length of the forearm may be less than the joint-to-joint length of the upper arm, eg, as indicated by l ₂ /l ₁ < 1 in FIG. 4 . and as described and shown in connection with FIGS. 25 to 34 and FIGS. 43 to 53 .

Referring now to FIGS. 5A and 5B , a top view and a side view, respectively, of robot 150 including some features of robot 10 are shown. Robot 150 is shown with drive 12 with arm 152 shown in a retracted position. Arm 152 has features similar to those of arm 14 except as described herein. As an example, the joint-to-joint length of the forearm or second link 158 is greater than the joint-to-joint length of the upper arm or first link 154 . Likewise, the lateral offset 168 of the end effector or third link 162 corresponds to the difference in articulation-to-joint lengths of the forearm 158 and the upper arm 154 . 6A and 6B, there is shown a drive 150 with inner configurations used to drive the individual links of the arm. In the illustrated embodiment, the upper arm 154 is driven by one motor via the shaft 64 described with respect to the arm 14 of FIGS. 1 and 2 . Likewise, the end effector or third link 162 is constrained relative to the upper arm 154 by the non-circular pulley configuration described with respect to the arm 14 of FIGS. 1 and 2 . An exemplary difference between arm 152 and arm 14 is that forearm 158 is coupled to shaft 62 and other motors of drive 12 via a band configuration with at least one non-circular pulley. . Here, the coupling or band configuration has the features described herein or with respect to the pulley drives 88 and 90 of FIGS. 1 and 2 . The coupling or band configuration has a non-circular pulley 202 coupled to a shaft 62 of the drive 12 , and is rotatable about an axis 18 on which the shaft 62 resides. The band configuration of the arm 152 further has a circular pulley 204 , which is coupled to the upper arm link 158 and is rotatable about an elbow axis 156 . The circular pulley 204 is coupled to the non-circular pulley 202 via bands 206 , 208 , which may be held taut by the profile of the non-circular pulley 202 . In alternative aspects, any combination of pulleys or other suitable transmission may be provided. Rotation of upper arm 154 relative to pulley 202 (eg, retaining pulley 202 is stationary while upper arm 154 rotates) extends wrist joint 160 along a straight line. and pulleys 202 , 204 and bands 206 , 208 together to retract, the straight line being parallel to and offset 168 from the desired radial path 180 of the end effector. Here, a third link 162 with an end effector is constrained by the band drive described in relation to the arm 14, for example with at least one non-circular pulley, whereby the two first links ( Regardless of the position 154 , 158 , the end effector is oriented in the radial direction 180 . Here, any suitable coupling may be provided to limit the links of the arm 14 as described, for example, one or more suitable variable ratio drives or couplings, linkage gears or sprockets, cams. or others are used alone or in combination with suitable linkages or other couplings. In the illustrated embodiment, elbow pulley 204 is coupled to a forearm 158 and appears round or circular, where shoulder pulley 204 coupled to shaft 62 appears non-circular. The shaft pulley shape is not circular and may be symmetrical about a line 218 perpendicular to the radial trajectory 180 , for example, the wrist axis 160 is at the shoulder axis 18 as shown in FIG. 7B . The trajectory may be parallel or coincident with the line between the two pulleys 202 and 204 when closest and the forearm 158 and upper arm 154 lined up on top of each other. The shape of the pulley 202 is such that the bands 206 and 208 are held taut as the arm 152 is extended and retracted to establish contact points 210 and 212 on opposite sides of the pulley 202 to establish the shoulder axis of rotation 18. Vary the radial distances 214 and 215 from For example, in the orientation shown in FIG. 7B , each of the contact points 210 , 212 of the two bands on the pulley are at the same radial distance 214 , 216 from the shoulder axis of rotation 18 . This will be explained with reference to FIG. 8 , which shows the individual proportions. In order for the arm 152 to rotate, both drive shafts 62 and 64 of the robot need to move the same amount in the direction of rotation of the arm. In order for the end effector 162 to extend and contract radially along a straight path, the two drive shafts 62 and 64 need to move in a coordinated manner, for example, the exemplary It needs to move according to the reciprocal kinematic equation, for example a drive shaft coupled to the upper arm needs to move according to the reciprocal kinematic equation given below while the other motor is held stationary. 7A, 7B and 7C show the stretching movement of the robot 150 of FIGS. 5 and 6 . 7A shows a top view of the robot with the arm 152 in the retracted position. 7B shows the arm partially elongated with the forearm aligned on top of the upper arm, the end effector corresponding to the difference in the joint-to-joint length of the forearm 158 and upper arm 154 . A lateral offset 168 of 162 is shown. 7C shows the arm in an extended position, but not fully extended.

Exemplary direct kinematics may be provided. In an alternative aspect, any suitable direct kinematics may be provided to correspond to the alternative structure. The following exemplary equations can be used to determine the position of the end effector as a function of the position of the motors.

d ₁ = l ₁ sin(θ ₁ - θ ₂ ) (2.1)

If (θ ₁ - θ ₂ )<π/2: θ _2l = θ ₂ - l ₂ asin((d ₁ + d ₃ )/l ₂ ), else θ _2l = θ ₂ + l ₂ asin((d ₁ + d ₃ )/l ₂ )+ π (2.2)

x ₂ = l ₁ cos θ ₁ + l ₂ cosθ _2l (2.3)

y ₂ = l ₁ sin θ ₁ +l ₂ sin θ _2l (2.4)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (2.5)

T ₂ = atan2(y ₂ ,x ₂ ) (2.6)

If (θ ₁ - θ ₂ )<π/2: R = sqrt(R ₂ ² -d ₃ ² )+l ₃ , T = θ ₂ , otherwise R = -sqrt(R ₂ ² -d ₃ ² )+ l ₃ , T = θ ₂ (2.7)

An exemplary inverse kinematics may be provided. In alternative aspects, any suitable inverse kinematics may be provided to correspond to the alternative structure. The following exemplary equations may be used to determine the position of the motors to achieve a particular position of the end effector.

x ₃ = R cos T (2.8)

y ₃ = R sin T (2.9)

x ₂ = x ₃ -l ₃ cos T+d ₃ sin T (2.10)

y ₂ = y ₃ -l ₃ sin Td ₃ cos T (2.11)

R ₂ = sqrt(x ₂ ² +y ₂ ² ) (2.12)

T ₂ = atan2(y ₂ ,x ₂ ) (2.13)

α ₁ = acos((R ₂ ² +l ₁ ² -l ₂ ² )/(2 R ₂ l ₁ )) (2.14)

If R>l ₃ : θ ₁ = T ₂ +α ₁ , θ ₂ = T, else: θ ₁ = T ₂ -α ₁ , θ ₂ = T (2.15)

The following names are used in kinematic equations:

d ₃ = lateral offset of the end effector (m)

l ₁ = joint-to-joint length of the first link (m)

l ₂ = joint-to-joint length of second link (m)

l ₃ = Length of third link with end effector, measured from wrist joint to reference point on end effector (m)

R = Radial position of the end effector (m)

R ₂ = Radial coordinates of the list joint (m)

T = angular position of the end effector (rad)

T ₂ = angular coordinates of the list joint (rad)

x ₂ = x-coordinate of list joint (m)

x ₃ = x-coordinate of end effector (m)

y ₂ = y-coordinate of the list joint (m)

y ₃ = y-coordinate of the end effector (m)

θ ₁ = angular position (rad) of the drive shaft coupled to the first link

θ ₂ = angular position (rad) of the drive shaft coupled to the second link.

The kinematic equations above can be used to design the band drive that controls the second link 158 such that rotation of the upper arm 154 causes the wrist joint 160 to travel the desired radial path of the end effector 162 . Let it stretch and contract along a straight line parallel to (180).

Referring to FIG. 8 , the transmission ratio of the band drive driving the second link as a function of the normalized elongation of the arm measured from the center of the robot to the root of the end effector, ie (Rl ₃ )/l ₁ . A graph 270 depicting (r ₂₀ 272) is shown. The transmission ratio r ₂₀ is defined as the ratio of the angular velocity ω ₂₁ of the pulley attached to the second link to the angular velocity ω ₀₁ of the pulley attached to the second motor, all defined for the first link do. The figure shows the transmission ratio r ₂₀ for different l ₂ /l ₁ .

The profile of the non-circular pulley(s) for the band drive driving the second link is calculated according to FIG. 8 to achieve the transmission ratio r ₂₀ 272 . An exemplary pulley profile is shown in FIG. 6A and will be described with respect to FIGS. 55A and 55B .

The transmission ratio r ₃₁ of the band driver limiting the orientation of the third link 168 may be as shown in FIG. 4 with respect to the embodiment of FIGS. 1 and 2 . The transmission ratio (r ₃₁ ) is defined as the ratio of the angular velocity of the pulley attached to the third link (ω ₃₂ ) to the angular velocity of the pulley attached to the first link (ω ₁₂ ), all defined for the second link do. The figure graphs the transmission ratio r ₃₁ for different l ₂ /l ₁ (from 0.5 to 1.0 in increments of 0.1, from 1.0 to 2.0 in increments of 0.2). The profile of the non-circular pulley(s) of the band drive limiting the third link 162 can be calculated according to FIG. 4 to achieve the transmission ratio r ₃₁ . An exemplary pulley profile is shown in FIG. 6A .

In the illustrated embodiment, a longer reach may be obtained compared to an equivalent link arm having the same confinement volume while using other suitable mechanisms or non-circular pulleys to constrain the end effector as described. In comparison to the embodiment shown in FIGS. 1 and 2 , one or more band drives with non-circular pulleys may be substituted for the conventional one in the shoulder shaft 18 . In alternative aspects, the first link may be driven directly by a motor or through some kind of coupling or transmission arrangement, for example any suitable transmission ratio may be used. Alternatively, the band drive actuating the second link and limiting the third link may be replaced by any other configuration with equivalent functionality, for example a belt drive, a cable drive, a non-circular gear, a linkage-base. may be replaced by any mechanism or any combination of the above. Furthermore, the third link may be constrained to radially retain the end effector via a conventional two-stage band configuration synchronizing the third link with respect to a pulley driven by a second motor as shown in FIG. 9 . . Alternatively, the two stage band arrangement may be replaced by any suitable arrangement such as a belt drive, cable drive, gear drive, linkage-base mechanism or any combination of the above. Also, the end effector may not need to be radially oriented. For example, the end effector may be positioned relative to the third link with any suitable offset and may be oriented in any suitable direction. In an alternative aspect, the third link may retain one or more end effectors or substrates. Here, any suitable number of end effectors and/or material retainers may be carried by the third link. Moreover, the joint-to-joint length of the forearm may be smaller than the joint-to-joint length of the upper arm, for example, as indicated by l ₂ /l ₁ < 1 in FIG. 8 .

Referring to FIG. 9 , an alternative robot 300 is shown, wherein the third link is an end effector through a conventional two-stage band configuration synchronizing the third link with respect to a pulley driven by a second motor. may be constrained to keep in the radial direction. The robot 300 is shown having a drive 12 and an arm 302 . Arm 302 may have an upper arm or first link 304 , which is coupled to shaft 64 and may rotate about a central or shoulder axis 18 . Arm 302 has a forearm or second link 308 rotatably coupled to upper arm 304 at elbow axis 306 . Links 304 and 308 may have unequal lengths as previously described. A third link or end effector 312 may be rotatably coupled to a second link or forearm 308 on a wrist axis 310 , wherein the end effector 312 is not equivalent as previously described. Links 304 and 308 having different link lengths may transport the substrate 28 along a radial path without rotation. In the illustrated embodiment, the shaft 62 is coupled to two pulleys 314 and 315, the pulley 314 may be circular and the pulley 316 may not be circular. Here, the circular pulley 314 radially drives the end effector 312 through a conventional two-stage circular band configuration 318 , 320 that synchronizes the third link 312 to the pulley driven by the shaft 314 . Limit the third link 312 to maintain The two-step configuration 318 , 320 has a pulley 314 coupled by bands 322 to an elbow pulley 324 coupled to an elbow pulley 326 , the elbow pulley 326 being wristed through a band 330 . It is coupled to the pulley 328 . The forearm 308 may further have an elbow pulley 332 , which may be circular and coupled to a shoulder pulley 316 via a band 334 , wherein the shoulder pulley includes: It may not be circular and may be coupled to pulley 314 and shaft 62 .

The disclosed embodiment may be further implemented in the context of robots having robot drives with additional axes, the arms coupled to the robot drive may have additional independently operable end effectors capable of carrying one or more substrates. . As an example, arms having two independently operable arm links or “dual arm” configurations may be provided, wherein each independently operable arm includes one, two or any It may have an end effector adapted to support an appropriate number of substrates. As described herein and hereinafter, each independently operable arm may have first and second links having different link lengths, wherein the end effector and the substrate coupled to and supported by the links are described above. It works as and performs tracking. Here, the substrate transport apparatus is capable of transporting first and second substrates and has first and second independently movable arm assemblies coupled to a drive section on a common axis of rotation. First and second substrate supports are respectively coupled to first and second arm assemblies on first and second wrist axes of rotation. One or both of the first and second arm assemblies rotate about a common axis of rotation during extension and retraction. The first and second wrist axes of rotation move along first and second wrist paths parallel to and offset from the radial path with respect to a common axis of rotation during extension and retraction. The first and second substrate supports move parallel to the radial path during extension and retraction without rotation. Variations of the disclosed embodiment with a plurality of independently operable arms are provided below, although in alternative aspects any suitable combination of features may be provided.

10A and 10B , a top view and a side view, respectively, of a robot 350 having a dual arm configuration are shown. The robot 350 has an arm 352 having a common upper arm 356 and independently operable forearms 356,358, each having a respective end effector 360,362. In the illustrated embodiment, both links are shown in their retracted position. The lateral offset of the end effectors 366 corresponds to the difference in articulation-to-joint lengths of the upper arms 356 , 358 and the forearm 354 . In the illustrated embodiment, the upper arms may have the same length and are longer than the forearm. In addition, end effectors 360 and 362 are positioned above the forearm 356 and 358 . 11A and 11B now show a top view and a side view, respectively, of the robot 375 with the arms in an alternative configuration. In the illustrated embodiment, arm 377 may have the features described with respect to FIGS. 10A and 10B with both linkages in their retracted positions. In this configuration, the third link with the end effector 382 of the upper linkage arrangement hangs below the forearm 380 to reduce the vertical spacing between the two end effectors 382 , 384 . Here, a similar effect can be achieved by step down 368 the end effector 360 on top of the configuration of FIGS. 10A and 10B . 12 and 13 , the inner configurations of robots 350 and 375 respectively used to drive the individual links of the arms of FIGS. 10 and 11 are shown. In the illustrated embodiment, drive 390 may have first, second and third drive motors 392, 394, 396, which drive concentric shafts 398, 400, 402, respectively, and a rotor having position encoders 404, 406, and 408, respectively. stator configurations. Z drive 410 may drive motors in a vertical direction, wherein the motors may be partially or wholly contained within housing 412 and bellows 414 evacuate the inner volume of housing 412 into chamber 416 . ), the interior and interior spaces of chamber 416 may be operated in an isolated environment, such as a vacuum or otherwise. In the illustrated embodiment, the common upper arm 354 is driven by one motor 396 . Each of the two forearms 356 and 358 pivots on a common axis 420 at the elbow of the upper arm 354 and drives motors 394 and 396 through band drives 422 and 424, respectively, which may have conventional pulleys. independently driven by The third links with end effectors 360 and 362 are each bounded by band drives 426 and 428, each having at least one non-circular pulley, which is equivalent to the upper arms and the forearm. Compensate for the effect of the length not done. Here, the band drivers in each of the link devices can be designed using the methodology described in Figs. 1 and 2, and the kinematic equations presented for Figs. It may be used for each of the devices. In order to rotate the arm, all three drive shafts 398 , 400 , 402 of the robot need to move the same amount in the direction of rotation of the arm. In order to extend and retract one of the end effectors radially along a straight path, the drive shaft coupled to the forearm associated with the activated end effector and the drive shaft of the common upper arm are coupled to the kinematics of FIGS. 1 and 2 . It is necessary to move in a coordinated manner according to the reciprocal equation. At the same time, the driveshaft coupled to the other forearm needs to rotate in synchronization with the driveshaft of the common upper arm to ensure that the deactivated end effector remains uncontracted. 14A, 14B and 14C , the arm of FIGS. 11A and 11B is shown when the upper and lower links are extended. Here, the inactive linkages 356 and 360 rotate while the active linkages 358 and 362 are stretched. As an example, when the lower link devices 356 and 360 are extended, the upper link devices 358 and 362 are extended, and when the upper link devices 358 and 362 are extended, the lower link devices 356 and 360 are rotated. In the embodiment disclosed in Figures 10 and 11, set up and control can be simplified, wherein the arm configuration can be simplified while providing a longer reach compared to arms of equivalent link length with the same receiving volume. It can be used without a dynamic seal on a coaxial drive. No bridge is used here to support any of the end effectors. In the illustrated embodiment, the inactive arm rotates while the active arm is extended. One of the wrist joints moves over the lower end effector (closer to the wafer than in an equal-link arrangement).

Referring now to FIGS. 15A and 15B , a top view and a side view, respectively, of a robot 450 having a dual arm configuration are shown. The robot 450 has an arm 452 having a common upper arm 454 and independently operable forearm 456,458, each forearm having a respective end effector 460,462. In the illustrated embodiment, both linkages are shown in the retracted position. The lateral offset of the end effector 466 corresponds to the difference in articulation-to-joint lengths of the forearm 454 and upper arms 456 and 458 . In the illustrated embodiment, the upper arms may be of the same length and are longer than the forearm. In addition, end effectors 460 , 462 are positioned above the forearm 456 , 458 . 16A and 16B show a top view and a side view, respectively, of a robot 475 having an arm in an alternative configuration. Again, both linkages are shown in retracted positions. In this configuration, the end effector 482 and the third link of the left linkage mechanism hang below the forearm 480 to reduce the vertical spacing between the two end effectors 482 , 484 . A similar effect can be achieved by stepping down 468 the upper end effector of the FIGS. 15A and 15B configurations. Alternatively, a bridge may be used to support one of the end effectors. The combined upper arm link 454 may be a single member as shown in FIGS. 15 and 16 or in two or more sections 470 , 472 as shown in the example of FIGS. 17A and 17B . can be formed by Here, the two section design can be provided with a lighter and less used material, where the left 472 section and the right 470 section can be the same component. Here, the two-member design may also have provision for adjustment of the angular offset between the left and right sections, which may be convenient when different retracted positions need to be supported. Referring to FIGS. 18 and 19 , the inner structures used to drive the individual links of the arm of FIGS. 15 and 16 are shown, respectively. The combined upper arm 554 is shown driven by one motor having a shaft 402 . Each of the two forearms 456 and 458 are independently driven by a single motor through shafts 400 and 398 through conventional pulleyed band drives 490 and 492 . Here, links 456 and 458 rotate on separate axes 494 and 496 respectively. The third links having end effectors 460 and 462 are each limited by band drives 498 and 500, each of which has at least one non-circular pulley, which has unequal lengths of the upper arm and the forearm. compensate for the effect of Here, the band drivers 498,500 in each of the link devices 456,460 and 458,462 are designed using the methodology described with respect to FIGS. Here, the kinematic equations presented with respect to FIGS. 1 and 2 may be used for each of the dual arm two link devices 456 , 460 and 458 , 462 . In order for the arm 452 to rotate, all three drive shafts 398 , 400 , 402 of the robot need to move the same amount in the direction of rotation of the arm. In order to allow one of the end effectors to extend and contract radially along a straight path, the drive shaft of the common upper arm and the drive shaft coupled to the forearm associated with the end effector are combined with reference to FIGS. 1 and 2 . It is necessary to move in a coordinated manner according to the presented inverse kinematic equation. At the same time, the driveshaft coupled to the other forearm needs to rotate in synchronization with the driveshaft of the common upper arm in order for the inactive end effector to remain retracted. Referring to Figures 20A, 20B and 20C, the arms of Figures 16A and 16B are shown when the left linkage devices 458,462 and the right linkage devices 456,460 are extended. It should be noted that the active link arrangements 458 and 462 are elongated while the inactive link arrangements 456 and 460 rotate. Here, when the left link devices 458 and 462 are extended, the right link devices 456 and 460 rotate, and when the right link devices 456 and 460 are extended, the left link devices 458 and 462 rotate. The illustrated embodiment takes advantage of the coaxial drive and solid link design, which is easy to set up and control, as a means to provide a longer reach compared to equivalent link arms with the same receiving volume. while no dynamic seal is required. Here, no bridge is needed to support any of the end effectors. The inactive arm rotates while the active arm is stretched. One of the wrist joints moves closer to the wafer than in an equivalent link configuration, above the lower end effector. In this case, the unsupported length of the bridge may be longer compared to an equivalent link arm design. Also, the retraction angle may be more difficult to change, compared to a configuration having a common elbow joint, for example shown in FIGS. 10 and 11 , and independent dual arms shown, for example, in FIGS. 21 and 22 . have.

Referring now to FIGS. 21A and 21B , a top view and a side view of a robot 520 with independent dual arms 522 and 524 are shown, respectively. In the illustrated embodiment, both linkages 522 and 524 are shown in a retracted position. Arm 522 has an independently operable upper arm 526 , a forearm 528 , and a third link having an end effector 530 . In the illustrated embodiment, forearms 528 and 534 are shown being longer than upper arms 526 and 532 and end effectors 530 and 536 are positioned above forearms 528 and 534, respectively. 22A and 22B, there is shown a top and side view of a robot 550 with features similar to those of robot 520, with the arms having an alternative configuration and both linkages shown in retracted positions. have. In this configuration, the end effector 552 and the third link of the left linkage hang below the forearm 554 to reduce the vertical spacing between the two end effectors. A similar effect can be achieved by stepping down the upper end effector of the FIG. 21 configuration. Alternatively, a bridge may be used to support one of the end effectors. 21 and 22 , the right upper arm 532 is positioned below the left upper arm 526 . As an alternative, for example, the upper left arm may be positioned above the upper right arm, and one link arrangement may rest within the other. Referring to FIG. 23 , the inner configurations used to drive the individual links of the arm of FIGS. 21A and 21B are shown. Here, in order to clearly show the drawing, in order to avoid overlapping of the components, the elevation of the links is adjusted. Each of the two upper arms 526 and 532 are each independently driven through shafts 398 and 402 by a single motor. Forearms 528 and 534 are coupled via shaft 400 to a third motor via band configurations 570 and 572 each having at least one non-circular pulley. The third linkages 530,536 with end effectors are limited by band drives 574,576, each of which has at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 526,532 causes the corresponding linkage 528,530 and 534,536 respectively to extend and retract along a straight line while the other linkage is held stationary. The band drivers in each of the link devices can be designed using the methodology described with respect to FIGS. 5 and 6 , where the kinematic equations presented for FIGS. 5 and 6 are the dual arm two link devices. may be used for each. For the arm to rotate, all three drive shafts 398 , 400 , 402 of the robot need to move the same amount in the direction of rotation of the arm. In order for one of the end effectors to extend and contract radially along a straight path, the drive shaft of the upper arm associated with the active end effector needs to be rotated according to the reciprocal kinematic equation for FIGS. 5 and 6 , The other two drive shafts need to be kept stationary. Referring to Figs. 24A, 24B and 24C, the arm of Fig. 22 is shown when the left link device 522 and the right link device 524 are extended. It should be noted that the inactive linkage 524 remains stationary when the active linkage 522 is extended. That is, the left link device 522 does not move while the right link device 524 is extended, and the right link device 524 does not move when the left link device 522 is extended. The illustrated embodiment provides a longer reach compared to an equivalent link arm with the same receiving volume. Here, the bridge is not used to support any of the end effectors and the inactive linkage remains stationary while the active linkage is elongated, potentially leading to higher throughput when the active linkage is stretched. This is because it stretches or contracts faster without load). The illustrated embodiment may be more complex than that shown in FIGS. 15 and 16 and has two or more band drives with non-circular pulleys instead of the conventional ones. One of the wrist joints moves over the lower end effector as shown in FIG. 24 . This can be avoided by using a bridge (not shown) that supports an overlying end effector. In this case, the unsupported length of the bridge is longer compared to the equivalent link arm design.

Referring now to FIGS. 25A and 25B , a top and side view, respectively, of a robot 600 having an arm 602 is shown. In the illustrated embodiment, both linkages are shown in the retracted position. The lateral offset of the end effectors 604 corresponds to the difference in articulation-to-joint lengths of the upper arm 606 and the forearm 608,612, in this embodiment the forearm 608,612 having a common upper arm. shorter than arm 606 . The inner configurations used to drive the individual links of the arm may be similar to FIGS. 10-13 , for example as in FIG. 13 , but in this example the forearms are shorter than the common upper arm. Here, the common upper arm is driven by one motor. Each of the two forearms is independently driven by one motor through a band drive with conventional pulleys. The third links 614 , 616 with end effectors are limited by band drives, each having at least one non-circular pulley, which compensates for the offset of unequal lengths of the upper arms and forearms. do. The band drivers of each of the links may be designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for FIGS. 1 and 2 may be used for each of the two links of the dual arm. 26A, 26B and 26C, the arm of FIGS. 25A and 25B is shown when the upper linkages 612, 616 are extended. The lateral offset 604 of the end effector corresponds to the difference in articulation-to-joint lengths of the upper arm and the forearm, wherein the wrist joint is offset relative to the trajectory of the center of the wafer by the difference. move along a straight line. It should be noted that the inactive linkage 608,614 rotates while the active linkage 612,616 is stretched. For example, the upper link device rotates when the lower link device is extended, and the lower link device rotates when the upper link device is extended. Here, Fig. 26a shows the arm with both linkages in the retracted position. 26B shows the upper linkage devices 612 and 616 partially elongated in a position where the wrist joint of the upper linkage device is closest to the wafer held by the lower linkage device. It is observed that the wrist joint of the upper linkage does not move across the wafer (but moves in the plane above the wafer). 26C shows the upper linkage devices 612 and 616 extended further. The illustrated embodiment may provide ease of set up and control, and may be used on coaxial or tri axial drives or other suitable drives without dynamic seals. Here, the bridge may not be used to support any of the end effectors. The wrist joint of the upper linkage mechanism does not move across the wafer on the lower end effector, which is the case for an equivalent link design (but moves in a plane over the wafer on the end effector). Here, the inactive arm rotates while the active arm is stretched. Elbow joints can be more complex, which can translate to larger turning radii or shorter reach. Here, due to the overlapping forearm 608,612, the arm may be larger than that shown in FIGS. 30, 31 and 33 .

Referring now to FIGS. 27A and 27B , a top and side view, respectively, of a robot 630 having an arm 632 is shown. Arm 630 may have features similar to those disclosed with respect to FIGS. 15-19 , except that forearm 636 , 640 is shown as having a shorter link length than upper arm 636 . Both linkages are shown in the retracted position. The lateral offset 634 of the end effectors 642 , 646 corresponds to the difference in articulation-to-joint length of the upper arm 636 and the forearm 638 , 640 . The combined upper arm link 636 may be a single member as shown in FIGS. The two section design can be lightweight with less material and the left section 636' and the right section 636" can be the same component. A tolerance can be provided for adjustment of the angular offset between the left section 636' and the right section 636", eg when different retracted positions need to be supported. Arm 632 The inner configurations used to drive the individual links of ) may be similar to those shown in Figures 15-19, eg similar to those shown in Figure 19. A common upper arm 636 is attached to one motor. Each of the two forearms 638 and 640 is independently driven by one motor through a band drive with conventional pulleys The third links with end effectors 642 and 646 are band driven may be limited by drives, each of which has at least one non-circular pulley, which compensates for the effect of unequal lengths of upper arm 636 and forearm 638, 640. Each of the linkages The band drivers can be designed using the methodology of Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 may be used for each of the two link devices of the dual arm, Figures 29a, 29b. and Fig. 29C, there is shown the right arm of Figs 27A and 27B when the upper linkages 640, 646 are elongated.The lateral offset 634 of the end effector is the upper arm and forearm. corresponding to the difference in joint-to-joint length of , the wrist joint moves along a straight line offset with respect to the trajectory of the center of the wafer by this difference. (640, 646) rotates during extension.For example, the upper linkage rotates when the lower linkage is extended, and the lower linkage rotates when the upper linkage is extended. In Fig. 29A, the arm with both links is in the retracted position, Fig. 29B is the articulation joint of the upper right linker 640, 646. The right upper linkage device 640,646 is shown partially elongated at the position closest to the wafer held by the left lower linkage device 638,642. Here the wrist joint of the upper right linkage device 640, 646 does not move across the wafer, but in the plane above the wafer. 29C shows the right upper linkage devices 640 and 646 extended further. The illustrated embodiment incorporates the ease of design, setup and control of a solid link and the advantages of, for example, a coaxial drive without a dynamic seal. The bridge is not used to support any end effectors. The wrist joint of the upper linkage mechanism does not move across the wafer on the lower end-effector, which is the case for an equivalent link design, but it moves in a plane above the wafer on the lower end-effector. The inactive arms 638 and 642 rotate while the active arms 640 and 646 are extended. The retraction angle is more difficult to change as compared to a configuration having a common elbow joint, eg shown in FIGS. 25A and 25B , and an independent dual arm shown eg in FIGS. 33A and 33B . Moreover, the forearm 640 is shown at a higher elevation than the forearm 638 , so the arm appears larger than in FIGS. 30 and 31 and FIGS. 33A and 33B .

Referring now to FIGS. 30A and 30B , a top and side view, respectively, of a robot 660 having an arm 662 is shown. Arm 662 may have the features described with respect to FIGS. 27-29 but employs a bridge and has two forearms at the same height as described below. Both linkages are shown in the retracted position. The lateral offset 664 of the end effectors corresponds to the difference in articulation-to-joint lengths of the upper arm 66 and the forearm 668 , 670 . The combined upper arm link 666 may be a single member as shown in FIGS. 30A and 30B , or in two or more sections 666', 666" as shown in the example of FIGS. 31A and 31B . The inner configurations used to drive the individual links of the arm are the same as for Figures 15-19, but the forearm 668,670 is shorter than the upper arm 666. Common upper arm 666 is driven by one motor Each of the two forearm 668,670 is independently driven by one motor through a band drive with conventional pulleys The third links with end effectors 672 and 674 are limited by band drives, each with at least one non-circular pulley, which compensates for the effect of unequal lengths of the upper arm and forearms.The band drives in each of the linkages are shown in Figure 1 and It can be designed using the methodology described with respect to Figure 2. The kinematic equations presented for Figures 1 and 2 may be used for each of the two link arrangements of the dual arm Third link and end effector 674 has a bridge 680 having an upper end effector portion 682 , a side offset support portion 684 offset from the wrist axis between link 670 and link 674 , , also has a lower support portion 686 that couples the wrist axis to an offset support portion 684. A bridge 680 and a third (which may include a wafer) as seen below with respect to Fig. 32 . Bridge 680 allows forearms 668 and 670 to be packaged at the same height, while providing clearance for the portions sandwiched between link and end effector 672 . The bridge 680 allows any moving parts such as, for example, two wrist joints to be placed under the wafer surface during transport. Provides an existing configuration. 32A, 32B, 32C and 32D, there is shown a top view of the robot arm of FIGS. 30A and 30B when the right linkage device 670,674 is extended. The lateral offset 664 of the end effector corresponds to the difference in articulation-to-joint lengths of the upper arm 666 and the forearm 670 , and the wrist joint 690 causes the difference of the wafer 692 by the difference. It moves along a straight line that is offset with respect to the locus of the center. It should be noted that the inactive link devices 668 and 672 rotate while the active link devices 670 and 674 are stretched. For example, when the lower link device is extended, the upper link device is rotated, and when the upper link device is extended, the lower link device is rotated. 32A, 32B, 32C and 32D, FIG. 32A shows the arm with both linkages in the retracted position. 32B shows the worst case play (or adjacent to the worst case play) between the end effector 672 of the left link device 668 , 672 and the bridge 680 of the right link 670 , 674 . The right link devices 670 and 674 are shown partially elongated. 32C shows the right linkage devices 670 and 674 partially extended in position when the forearm 670 is aligned with the upper arm 666 . The lateral offset of the end effector corresponds to the difference in the joint-to-joint lengths of the upper arm and the forearm. The wrist joint 690 axis moves along a straight line that is offset with respect to the center trajectory of the wafer 692 due to this difference. 32D shows the right linkage devices 670,674 being further elongated. The illustrated embodiment combines the advantages of a side-by-side dual scara configuration, solid link design and coaxial drive, such as a thin profile, for example, resulting in a shallow chamber with a small volume. . The bridge 680 on the right linkage 670,674 is lower and the unsupported length between the vertical member 684 and the wrist 690 is shorter than in prior art coaxial dual scara arms, and all The joints are under the end effector. Here, the inactive arms 668 and 672 rotate while the active arms 670 and 674 are extended. As described below, in another aspect of the disclosed embodiment, an arm that does not exhibit the above behavior may be provided with different band configurations with non-circular pulleys instead of the conventional ones disclosed herein. Alternatively, the bridge supporting the upper end effector may be removed by using a configuration similar to those described above with respect to FIGS. 25A and 25B and FIGS. 27 and 28 .

Referring now to FIGS. 33A and 33B , a top and side view, respectively, of a robot 700 having an arm 702 is shown. Arm 702 may have features similar to the arms shown in FIGS. 21-23 , but with a forearm length that is shorter than the superior arm length and employs the bridge described with respect to bridge 680 as an example and employs the forearm. The arms are positioned at the same height. Both linkages are shown in retracted positions. 33A and 33B , the right upper arm 708 is positioned above the left upper arm 706 . Alternatively, the upper left arm 706 may be positioned above the upper right arm 708 . Similarly, the third link and end effector 716 of the right linkage arrangement 712 , 716 features a bridge, which bridge extends over the third link and end effector 714 of the left link arrangement 710 , 714 . . Alternatively, the third link and end effector 714 of the left linkage 710,714 may feature a bridge that may extend across the third link and end effector 716 of the left linkage 712,716. have. The inner configuration used to drive the individual links of the arm may be similar to the embodiment shown in FIGS. 21-23 . Each of the two upper arms 706 and 708 is independently driven by one motor. Forearms 710 and 712 are coupled to the third motor via a band configuration, each having at least one non-circular pulley. The third links 714 , 716 with end effectors are limited by band drives each having at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 706,708 stretches and retracts the corresponding linkage along a straight line while the other linkage is held stationary. The band drivers in each of the link devices are designed using the methodology described with respect to the embodiment shown in FIGS. 5 and 6 . The kinematic equations presented for the embodiment shown in Figures 5 and 6 can be used for each of the dual arm two link devices. 34A, 34B and 34C, the arm of FIGS. 33A and 33B is shown when the right link devices 708, 712, 716 are extended. Here, the inactive link devices 706, 710, and 714 remain stationary as the active link devices 712, 716 are stretched. That is, the left link device does not move while the right link device is extended, and the right link device does not move when the left link device is extended. The illustrated embodiment combines the advantages of a side-by-side dual scara configuration and coaxial drive, such as, for example, a thin profile resulting in a shallow chamber with a small volume. The bridge on the right linkage is much lower and its unsupported length is shorter than in existing coaxial dual scara arms, and all joints are below the end effectors. The inactive link remains stationary while the active link device is stretched, potentially leading to high throughput, since the active link device can be stretched or retracted without load. Alternatively, the bridge supporting the upper end effector may be removed by using a configuration similar to that described with respect to FIGS. 25 , 27 and 28 .

Referring now to FIGS. 35A and 35B , a top and side view of a robot 730 with an arm 732 is shown with both links shown in a retracted position. Each linkage has a dual-holder end-effector 740, 742, each supporting two substrates offset from each other relative to all four supportable substrates. The inner configurations used to drive the individual links of the arm 732 may be consistent with FIGS. 10 and 11 , such as with FIG. 13 . The common upper arm 734 is driven by one motor. Each of the two forearms 736 and 738 is independently driven by a single motor through a band drive with a conventional pulley. The third links with end effectors 740 and 742 are limited by band drives, each with at least one non-circular pulley, which compensates for the effect of unequal lengths of the upper arm and forearm. The illustrated embodiment has a forearm longer than the upper arm. Alternatively, they may be short. The band drivers of each of the link devices are designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented with respect to FIGS. 1 and 2 may be used for each of the dual arm two link arrangements. Referring to Fig. 36, the arms of Figs. 35A and 35B are shown when one linkage 738,742 is extended. It should be noted that the inactive links 736 and 740 rotate while the active link devices 738 and 742 are elongated. For example, the upper link rotates when the lower link is extended, and the lower link rotates when the upper link is extended. 37 and 38, the end effector need not be shaped to avoid interference with opposing elbows.

Referring now to FIGS. 37A and 37B , a top view and a side view, respectively, of a robot having an arm 750 are shown. Both linkages are shown in their retracted position and each linkage has dual holder end effectors 758 and 760 . The combined upper arm link 752 may be a single member as shown in FIGS. 37A and 37B or by two or more sections 752', 752" as shown in the example of FIGS. 38A and 38B The inner configurations used to drive the individual links of the arm can be like Figures 15-19, for example Figure 19. Combined upper arms 752 can be driven by one motor Each of the two forearms 754 and 756 is driven by one motor through a band drive with conventional pulleys A third link 758, 760 with end effectors is limited by the band drives, Each of them has at least one non-circular pulley, which compensates for the effect of unequal length of upper arm and forearm.The embodiment shown has a longer forearm than upper arm.Alternatively, they can be shorter The band drives in each of the link devices are designed using the methodology described with respect to Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 will be used for each of the two link devices of the dual arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm so that one of the end effector assemblies extends and retracts radially along a straight path. In order to do so, the drive shaft of the common upper arm and the drive shaft coupled to the forearm associated with the active linkage need to move in a coordinated manner according to the reciprocal kinematic equations for Figures 1 and 2. At the same time, the other forearm The drive shaft coupled to the inactive linkage needs to be rotated in synchronization with the drive shaft of the common upper arm to keep the inactive linkage retracted. The arms of 37A and 37B are shown, wherein the active link The inactive linkage devices 754 and 758 rotate while the device is stretched. For example, the right link device rotates when the left link device is extended, and the left link device rotates when the right link device is extended. The illustrated embodiment is bridgeless. The upper wrist moves over one of the wafers on the lower end effector. Here, the arm and end effectors need not be designed such that the upper elbow clears the lower end effector.

40A and 40B , a top and side view, respectively, of a robot 750 having an arm 752 is shown. Both linkages are in the retracted position and each linkage has dual-holder end-effectors 792 and 794 . The inner configurations used to drive the individual links of the arm may be consistent with FIGS. 21-23 . Each of the two upper arms 784 and 786 is independently driven by one motor. Forearms 788 and 790 are coupled to the third motor through band configurations, each of which has at least one non-circular pulley. The third links with end effectors 792 and 794 are limited by band drives, each of the band configurations having at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms stretches and retracts the corresponding link along a straight line while the other linkage is held stationary. The illustrated embodiment has a forearm longer than the upper arm. Alternatively, they may be short. The band drivers in each of the link devices are designed using the methodology described with respect to FIGS. 5 and 6 . The kinematic equations presented for FIGS. 5 and 6 may be used for each of the dual arm two link arrangements. In order for the arm to rotate, not all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. In order for one of the end effector assemblies to extend and retract radially along a straight path, the drive shaft of the upper arm associated with the active linkage needs to be rotated according to the reciprocal kinematic equation for FIGS. 5 and 6 . and the other two drive shafts need to be kept stationary. Referring to Fig. 41, the arms of Figs. 40A and 40B are shown when one linkage device 784, 788, 794 is extended. It should be noted that the inactive link devices 786, 790, and 792 remain stationary while the active link devices 794, 788, and 794 are stretched. That is, the left link does not move while the right link device is extended, and the right link device does not move when the left link device is extended. As an alternative, the left and right linkage devices can move independently in the radial direction at the same time, for example, as shown in FIG. 42 , the right linkage device is independently slightly elongated compared to FIG. 41 . The movement of the elbow of the upper linkage mechanism may be limited due to potential interference with the wafer on the lower end effector, which may limit the reach of the robot shown in FIG. 41 . This limitation can be relaxed by slightly elongating the lower linkage arrangement to achieve full reach and provide additional clearance as shown in FIG. 42 . The illustrated embodiment does not have a bridge. The list of upper linkage devices is movable over the wafer on the lower end effector.

43A and 43B , a top and side view, respectively, of a robot 810 having an arm 812 is shown. Both linkages are in a retracted position and each linkage has a dual holder end effector 820 , 822 . The inner configurations used to drive the individual links of the arm may be consistent with FIGS. 10-13 . The common upper arm 814 is driven by one motor. Each of the two forearms 816 and 818 is independently driven by a single motor through a band drive with a conventional pulley. A third link with end effectors 820 and 822 is limited by band drives, each having at least one non-circular pulley, which compensates for the effect of unequal lengths of the upper arms and forearms. . In the illustrated embodiment, the forearms are shorter than the upper arms; Alternatively, they may be longer. The band drivers in each of the link devices are designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic discharge equations presented for FIGS. 1 and 2 may be used for each of the dual arm two link devices. Referring to FIGS. 44 and 45 , the arms of FIGS. 43A and 43B are shown when the upper linkages 818 and 822 are extended. It should be noted that the inactive link devices 816 and 820 rotate while the active link devices 818 and 822 extend. For example, the upper link device rotates when the lower link device is extended, and the lower link device rotates when the upper link device is extended. 44 and 45 show that the wrist joint 824 of the upper linkage device 818,822 does not move beyond the wafer 826 held by the lower linkage device 816,820 of the arm. The illustrated embodiment does not have a bridge. 46 and 47, the end effector need not be shaped to avoid interference with opposing elbows.

46A and 46B , a top and side view, respectively, of a robot 840 having an arm 842 is shown. Both linkages are shown in a retracted position and each linkage has a dual holder end effector 850 , 852 . The combined upper arm link 844 may be a single member as shown in FIGS. 46A and 46B or in two or more sections 844', 844" as shown in the example of FIGS. 47A and 47B. The inner configurations used to drive the individual links of the arm can be consistent with Figures 15-19, eg, Figure 19. The combined upper arm 844 is one Driven by a motor Each of the two forearms 846 and 848 is independently driven by a single motor through a band drive with a conventional pulley Third links with end effectors 850 and 852 are band drives , each of which has at least one non-circular pulley, which compensates for the effect of unequal lengths of the upper arms and the forearms In the illustrated embodiment, the forearms are shorter than the upper arms; Alternatively they could be longer The band drives in each of the link arrangements are described using the methodology described for Figures 1 and 2. The kinematic equations presented for Figures 1 and 2 are the two of the dual arm It can also be used for each of the linkages.In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm.One of the end effector assemblies must follow a straight path. Thus, to allow radial extension and retraction, the drive shaft coupled to the forearm associated with the active linkage and the drive shaft of the common upper arm 844 are matched according to the reciprocal kinematic equations for FIGS. 1 and 2 . At the same time, the drive shaft coupled to the other forearm needs to be rotated in synchronization with the drive shaft of the common upper arm so that the inactive linkage remains retracted. Referring now, the arms of FIGS. 46A and 46B are shown when the upper linkage devices 848 and 852 are extended. have. Here, inactive link devices 846 and 850 rotate while active link devices 848 and 852 extend. For example, the upper linkage rotates when the lower linkage is extended, and the lower linkage rotates when the upper linkage is extended. 48 and 49 show that the wrist joint 854 of the upper linkage does not move beyond the wafer 856 held by the lower linkage of the arm. The illustrated embodiment does not have a bridge and the wrist joint of the upper linkage does not move beyond the wafer held by the lower link. Here, the inactive arm rotates less, allowing a higher rate of motion when the active arm is retracted or extended without load.

50A and 50B , a top and side view, respectively, of a robot 870 having an arm 872 is shown. Both linkages are shown in a retracted position and each link has dual holder end effectors 880 and 882 . The combined upper arm link 974 may be a single member as shown in FIGS. 50A and 50B or may be formed by two or more sections as shown in the example of FIGS. 47A and 47B . The inner configurations used to drive the individual links of the arm may be the same as in FIGS. 15-19 , eg the same as in FIG. 18 . The combined upper arms 874 are driven by one motor. Each of the two forearms 876 and 878 is independently driven by a single motor through a band drive with a conventional pulley. The third links with end effectors are limited by band drives, each with at least one non-circular pulley, which compensates for the effect of unequal lengths of the upper arms and forearms. In the illustrated embodiment, the forearms are shorter than the upper arms; Alternatively, they may be longer. The band drivers in each of the linkages can be designed using the methodology described with respect to FIGS. 1 and 2 . The kinematic equations presented for FIGS. 1 and 2 may be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. To allow one of the end effector assemblies to extend and retract radially along a straight path, the drive shaft of a common upper arm 874 and the drive shaft coupled to the forearm associated with the active linkage are shown in Figs. It is necessary to move in a harmonious manner according to the kinematic reciprocal equations of 2. At the same time, the drive shaft coupled to the other forearm needs to rotate in synchronization with the drive shaft of the common upper arm 874 in order to keep the inactive linkage retracted. Referring to FIG. 51 , the arm of FIGS. 50A and 50B is shown with one linkage 878 , 882 extended. Here, the inactive linkages 876 and 880 are rotated while the active linkages 878 and 882 are extended. For example, when the lower linkage is extended, the upper linkage is rotated, and when the upper linkage is extended, the lower linkage is rotated. The illustrated embodiment has short forearm links that can be more taut as a short band, the forearm being positioned side by side to facilitate a shallow chamber. Here, the short links can cause more rotation of the inactive arm compared to FIGS. 46 and 47 , which can be solved by the long upper arms. A bridge 884 is provided, and the arms and end effectors may be designed such that the bridge 884 clears the inactive end effector 880 during movement of the extension.

Referring now to FIGS. 52A and 52B , a top and side view, respectively, of a robot 900 having an arm 902 is shown. Both linkages are shown in a retracted position and each linkage has a dual holder end effector. The inner configurations used to drive the individual links of the arm are the same as in FIGS. 21-23 . Each of the two upper arms 904 and 906 is independently driven by one motor. Forearms 908 and 910 are coupled to the third motor via a band configuration, each of which has at least one non-circular pulley. The third links having end effectors 912 and 914 are limited by band drives, each having at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 904,906 stretches and retracts the corresponding linkage along a straight line while the other linkages remain stationary. In the illustrated embodiment, the forearms are shorter than the upper arms; Alternatively, they may be longer. The band drivers in each of the linkages are designed using the methodology described with respect to FIGS. 5 and 6 . The kinematic equations presented in FIGS. 5 and 6 may be used for each of the two linkages of the dual arm. In order for the arm to rotate, all three drive shafts of the robot need to move the same amount in the direction of rotation of the arm. In order for one of the end effector assemblies to extend and retract radially along a straight path, the drive shaft of the upper arm associated with the active linkage device needs to be rotated according to the reciprocal kinematic equation for FIGS. 5 and 6 . and the other two drive shafts need to be kept stationary. Referring to FIG. 53 , the arms of FIGS. 52A and 52B are shown with one linkage 906 , 910 , 914 extending therethrough. While active link devices 906,910, and 914 are stretched with bridge 916, inactive link devices 904, 908, and 912 remain stationary. That is, the left link device does not need to move while the right link device is extended, and the right link device does not need to move when the left link device is extended, although the left link device can independently move radially. The illustrated embodiment facilitates shallow chambers by having side-by-side forearms and short links that can be taut with short bands. Alternatively, the forearms may be longer than the upper arms in the bridged configuration.

54-55, coupled dual arms 930 with opposing end effectors 938 and 940 are shown. 54a and 54b show a top view and a side view, respectively, of a robot with arms; Both linkages are shown in the retracted position, and the lateral offset of the end effectors corresponds to the difference in articulation-to-joint lengths of the upper arm 932 and forearm 934,936. The combined upper arm link 932 may be a single member shown in FIG. 54 , or may be formed of two or more sections. As an example, a two section design can be lightweight with less material, where the left and right sections can be the same component. The inner configurations used to drive the individual links of the arm may be based on what is shown in connection with FIGS. 18 and 19 or other. The common upper arm 932 is driven by one motor. Each of the two forearms 934 and 936 is independently driven by a single motor through a band drive with conventional pulleys. The third links with end effectors 938 , 940 are limited by band drives, each having at least one non-circular pulley, which is not equivalent to upper arm 934 , 936 and forearm 932 . Compensate for the effect of non-length The band drivers in each of the link devices are designed using the methodology described with respect to FIG. 1 or otherwise. The kinematic equations presented with respect to FIG. 1 may be used for each of the two links of the dual arm. 55A-55C show the arm of FIG. 54 when the first linkage 934,938 and the second linkage 936,940 are extended from the retracted position. The lateral offset of the end effector corresponds to the difference in articulation-to-joint length of the upper arm 934,936 and forearm 932, wherein the wrist joint 942,944 is offset relative to the trajectory of the center of the wafer by the difference. move along a straight line. It should be noted that the inactive linkage rotates while the active linkage is stretched. For example, when the first link device is extended, the second link device is rotated, and when the second link device is extended, the first link device is rotated. Fig. 55a shows the arm with both linkages in the retracted position. Figure 55b shows the first linkage 934, 938 is elongated. 55C shows the second linkage 936 and 940 elongated. The arm shown has a low profile as the forearm moves in the same plane and the end effectors move in the same plane, allowing for a shallow vacuum chamber with a small volume. Since the retracted position of the wrist of one linkage is limited by the list of other links, the limiting radius of the arm can be large, so that the diameter of the chamber is governed by the size of the slot valves. The arm is particularly suitable for applications with Due to the low profile, the arm can replace a flogleg type arm with opposing end effectors. In the illustrated embodiment, the forearms are shorter than the upper arms; Alternatively, they may be elongated, for example where the forearms are of different heights and overlap.

56 and 57, an independent dual arm 960 with opposing end effectors 970 and 972 is shown. 56a and 56b show a top view and a side view of a robot with arms. Both linkages are shown in their retracted position. In FIG. 56 , the upper arm 962 of the first linkage is positioned above the upper arm 964 of the second linkage. Alternatively, the upper arm of the second linkage may be positioned above the upper arm of the first linkage. The inner configurations used to drive the individual links of the arm may be based on FIG. 23 or otherwise. Here, each of the two upper arms 962 and 964 can be independently driven by one motor. Forearms 966 and 968 are coupled to the third motor through band configurations, each having at least one non-circular pulley. The third links with end effectors 970 and 972 are limited by band drives, each having at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms extends and retracts the corresponding linkage along a straight line while the other linkage is held stationary. The band drivers in each of the linkages are designed using the methodology described with respect to FIG. 5 . The kinematic equation presented with respect to FIG. 5 may be used for each of the two linkages of the dual arm. 57A-57C show the arm of FIG. 56 when the first linkage 962 , 966 , 970 and the second linkage 964 , 968 , 972 are extended from the retracted position. Here, the inactive linkage remains stationary (but need not be) while the active linkage is stretched. That is, while the second link device is extended, the second link device does not move, and when the second link device is extended, the first link device does not move. As the forearm moves in the same plane and the end effectors move in the same plane, the arm has a low profile, allowing a shallow vacuum chamber with a small volume. Because the retracted position of the list of one link is constrained by the list of other links, the containment radius of the arm becomes large, which can accommodate multiple process modules, where the diameter of the chamber is governed by the size of the slot valves. The arm makes it particularly suitable for applications with Because of this low profile, the arm can replace a frogleg type arm with opposing end effectors. In the illustrated embodiment, the forearms are shorter than the upper arms; Alternatively, they may be longer, eg if the forearms are of different heights and overlap.

Referring to FIG. 58 , a coupled dual arm 990 with angularly offset end effectors 998 , 1000 is shown. 58a and 58b show a top view and a side view of a robot with arms; Both linkages are shown in the retracted position. The lateral offset 1002 , 1004 of the end effectors corresponds to the difference in the joint-to-joint length of the upper arm 994 , 996 and the forearm 992 . The combined upper arm link 992 may be a single member as shown in FIG. 59 or may be formed of two or more sections. The inner configurations used to drive the individual links of the arm may be based on or different from FIGS. 18 and 19 . Here, the common upper arm 992 may be driven by one motor. Each of the two forearms 994 and 996 can be independently driven by a single motor through a band drive with a conventional pulley. The third links with end effectors 998 and 1000 are limited by band drives, each having at least one non-circular pulley, which has the effect of unequal lengths of the upper arms and forearms. compensate The band drivers of each of the linkages are designed using the methodology described with respect to FIG. 1 or otherwise designed. The kinematic equations presented with respect to FIG. 1 may be used for each of the two linkages of the dual arm. 59A-59C, the arm of FIG. 58 is shown when the left linkages 994,998 and the right linkages 996,100 are extended. The lateral offsets 1002 and 1004 of the end effectors correspond to differences in the joint-to-joint lengths of the upper arm and forearm, and the wrist joint forms a straight line offset by this difference with respect to the trajectory of the center of the wafer. So move. Here, the inactive linkage rotates while the active linkage is stretched. For example, when the left link device is extended, the right link device is rotated, and when the right link device is extended, the left link device is rotated. 59a shows the arm with both linkages in the retracted position. 59B shows that the left linkage devices 994 and 998 are elongated. 59C shows that the right linkers 996 and 1000 are extended. Here, the inactive arm is rotated while the active arm is extended. In the illustrated embodiment, the forearms are shorter than the upper arms; Alternatively, they may be longer, for example if the forearms are at different heights and overlap. In the embodiment shown, the end effectors may be 90 degrees apart; As an alternative, any separation angle may be provided.

Referring to FIG. 60 , an independent dual arm 1030 is shown having angularly offset end effectors 1040 , 1042 . Here, FIGS. 60A and 60B show a top view and a side view of a robot with arms. Both linkages are shown in the retracted position. In FIG. 60 , the upper right arm 1034 is positioned below the upper left arm 1032 . Alternatively, the upper left arm may be positioned below the upper right arm. The inner configurations used to drive the individual links of the arm can be based on FIG. 23 . Each of the two upper arms 1032 and 1034 may be each independently driven by one motor. The forearms are coupled to the third motor via band configurations, each of which has at least one non-circular pulley. The third links with end effectors 1040 and 1042 are limited by band drives, each having at least one non-circular pulley. The band drives are designed such that rotation of one of the upper arms 1032, 1034 stretches and retracts the corresponding linkage along a straight line while the other linkage is held stationary. The band drivers of each of the linkages may be designed or otherwise made using the methodology described with respect to FIG. 5 . The kinematic equations presented with respect to FIG. 5 may be used for each of the two linkages of the dual arm. 61A-61C show the arm of FIG. 60 when the left linkage 1032, 1036, 1040 and then the right linker 1034, 1038, 1042 are extended. Here, the inactive linkage remains stationary (but need not) while the active linkage is extended. That is, while the right link device is extended, the left link device does not move, and when the left link device is extended, the right link device does not move. Here, the inactive linkage remains stationary while the active linkage extends. In the illustrated embodiment, the forearm is shorter than the upper arm; Alternatively they may be longer, for example if the forearm are at different heights and overlap. In the embodiment shown, the end effectors may be spaced 90 degrees apart; As an alternative, any separation angle may be provided.

As an example in connection with FIG. 62 or as another example, third link and end effectors 1060 , 1062 , each of which may be referred to as a third link assembly, has a center of mass as the corresponding linkage of the arm extends and retracts. (1064, 1066) may be designed to be on or close to the straight trajectory of the wrist joint (1068, 1070), respectively. This reduces the load in the band configuration limiting the third link assembly by reducing the moment due to the inertia force at the center of mass of the third link assembly and the reaction force at the wrist joint. The third link assembly may be further designed so that the center of mass of the third link assembly is on one side of the wrist joint trajectory when a load is present, and is on the other side of the trajectory when there is no load. Alternatively, the center of mass of the third link assembly when a load is present is substantially on the wrist joint trajectory, as the best straight-line tracking performance is typically required in the presence of a load as shown in FIG. 62 . The third link assembly may be designed to In Figure 62, 1L is the linear trajectory of the center of the wrist joint of the left linker, 2L is the center 1070 of the wrist joint of the left linkage, and 3L is the center of mass of the third link assembly of the left linkage (1066) , 4L is the force acting on the third link assembly of the left link when the left linker is accelerated at the start of the extension movement (or when the left linker is decelerated at the end of the retracting movement), 5L is the left linker at the start of the extension movement is the inertial force acting on the center of mass of the third link assembly of the left linkage when it is accelerated (or decelerated at the end of the retracting motion). Similarly, 1R is the linear trajectory of the center of the wrist joint of the right linker, 2R is the center 1068 of the wrist joint of the right linker, 3R is the center of mass 1064 of the third link assembly of the right linker, 4R is the force acting on the third link assembly of the right linker when the right linker is decelerated at the end of the extension movement (or accelerated at the beginning of the retracting movement), and 5R is the force acting on the third link assembly of the right linker at the end of the extension movement. It is the inertial force acting on the center of mass of the third link assembly of the right linkage when decelerated (or accelerated at the start of the retracting movement). In the illustrated embodiment, dual wafer end effectors are provided. In alternative aspects, any suitable end effector and arm or link geometry may be provided.

In alternative aspects, in any aspect of the embodiment the upper arms may be driven directly by a motor or by some kind of coupling or transmission arrangement. Any transmission ratio can be used. Alternatively, the band drives actuating the second link and limiting the third link may be replaced by any other configuration of equivalent functionality, for example belt drives, cable drives, circular and non-circular gears, linkages. - may be replaced by the base mechanism or any combination thereof. Alternatively, for example in the dual and quad arm aspects of the embodiment, similar to the single arm concept of FIG. 9 , the third link of each linkage is end actuated via a conventional two stage band configuration. Constrained to hold the sieve radially, the two stage band configuration synchronizes a third link to a pulley driven by a second motor, similar to the single arm concept of FIG. 9 . Alternatively, the two-stage band configuration may be replaced by any suitable configuration, for example by a belt drive, a cable drive, a gear drive, a linkage-base mechanism, or a combination thereof. Alternatively, the upper arms in the dual arm and quad arm aspects of this embodiment may not be configured in a coaxial manner. It may have a separate shoulder joint. The two link arrangements of a dual arm and a quad arm need not have the same length of the upper arms and the same length of the forearms. The length of the upper arm of one link device may be different from the length of the upper arm of the other link device, and the length of the forearm of one link device may be different from the length of the forearm of the other link device. The forearm-to-upper arm ratio may be different for the two link arrangements. In the dual and quad arm aspects of the embodiment having different heights of the links of the left link device and the right link device, the left link device and the right link device may be interchanged. The two link devices of dual and quad arm need not extend along the same direction. The arms may be configured such that each linkage extends in a different direction. In any aspect of the embodiment the two link arrangements may consist of more or less than three links (first link=upper arm, second link=forearm, third link=link with end effector). In the dual and quad arm aspects of this embodiment, each link device may have a different number of links. In single arm aspects of the embodiment, the third link may retain one or more end effectors. Any suitable number of end effectors and/or material retainers may be retained by the third link. Likewise, in the dual arm aspect of the embodiment, each linkage may hold any suitable number of end effectors. In either case, the end effectors may be coplanar, placed on top of each other, disposed in a combination of the two, or disposed in any other suitable manner. Moreover, for a dual arm configuration, each arm may be independently operable, eg, independently operable in rotation, extension, and/or z (vertical), see, eg, Pending U.S. Application No. 13/670,004 <Robot System with Independent Arms> (filed date: 11.6, 2012), which is incorporated herein by reference. Accordingly, all modifications, combinations and variations are encompassed.

Referring to FIG. 63 , a graphical representation 1100 of an exemplary pulley is shown. An exemplary pulley profile may be for arms with unequal link lengths, as will be described later. For example, the graph 1100 may represent a profile for a wrist pulley when the elbow pulley is circular. Here, the following example design is used for Re/12=0.2, where Re is the radius of the elbow pulley and 12 is the joint-to-joint length of the forearm. Alternatively, any suitable ratio may be provided. For clarity, the graph shows the extreme design case compared to a pulley for an equivalent link arm. The outermost profile 1110 is for 12/11=2, where 12 is the joint-to-joint length of the forearm and 11 is the joint-to-joint length of the upper arm, for example in this case represents the long forearm. The intermediate profile 1112 is 12/11=1, for example, with equivalent link lengths. The innermost profile 1114 is 12/11=0.5, for example in this case representing a short forearm. In the illustrated embodiment, a polar coordinate system 1120 is used. Here, the radial distance is normalized with respect to the radius of the elbow pulley and is expressed, for example, as a multiple of the radius of the elbow pulley. That is, Rw/Re is shown, where Rw represents the polar coordinates of the wrist pulley and Re represents the elbow pulley. The angular coordinate is deg and zero is oriented along the direction 1122 of the end effector, eg, the end effector is oriented to the right with respect to the figure.

Referring now to FIGS. 64 and 65 , two additional configurations of an arm with unequal link lengths 1140 , 1150 are shown. Arm 1140 is shown with a forearm 1144 that is longer than upper arm 1142 , wherein single arm configurations have the features disclosed in connection with FIGS. 1-4 and 5-8 , or otherwise. is available. In the illustrated embodiment, the two end effectors 1146 , 1148 supporting respective substrates 1150 , 1152 are rigidly connected to each other and oriented in opposite directions. The substrates move in a radial path offset 1154 from the list and coincident with the center 1156 of the robot 1140, as shown. Likewise, arm 1160 is shown having a forearm 1164 that is shorter than upper arm 1162 , wherein the single arm configuration may be configured with features disclosed with respect to FIGS. 1-4 and 5-8 , or other features are available. In the illustrated embodiment, the two end effectors 1166, 1168 supporting the respective substrates 1170, 1172 are rigidly connected to each other and oriented in opposite directions. The substrates move in a radial path offset 1174 from the list and coincident with the center 1176 of the robot 1160, as shown. Here, features of the disclosed embodiments may be similarly shared with any of the other disclosed embodiments.

Referring now to FIGS. 66 and 67 , a dual arm robot 1310 is disclosed and has a stacked, side-by-side end effector configuration. The device is described in U.S. Patent Application No. US Publication No. 13/618,117 based on Sep. 14, 2012. <Low Variability Robot> of 2013/0071218 (2013.3.21) or U.S. Patent Application No. 14/601,455 (2015.1.21) can be used in combination with the transport mechanism and apparatus disclosed in <Substrate Transport Platform>, which is incorporated herein by reference. Alternatively, the embodiment may be used in any suitable device or application. The disclosed apparatus can provide a robot 1310 having two end effectors, (i) having a small footprint to be able to rotate and move within a narrow tunnel, (ii) having both end effectors and The same station may be accessed independently or simultaneously, and (iii) stations that are offset side-by-side may be accessed independently or simultaneously.

Exemplary embodiments of a robot 1310 are schematically illustrated in FIGS. 66A-66D and 67A-67D. The robot may consist of a robot drive unit 1312 having a robot arm 1316 and a pivoting base 1314 about an axis 1334 . Robot arm 1316 features two linkages, namely a left linkage 1318 and a right linkage 1320 . 66A to 66D show a robot in which both link devices are contracted, and FIGS. 67A to 67D show a robot in which the left link device 1318 is extended.

The left linkage device 1318 may be comprised of a left upper arm 1322 , a left forearm 1324 , and a left end effector 1326 . The upper left arm 1322 may be coupled to the base through a rotary joint or shaft 1336 , and the left forearm 1324 may be coupled to the left upper arm 1322 by another rotary joint or shaft 1338 . and the left end effector 1326 may be coupled to the left forearm 1324 by another rotary joint or shaft 1340 .

Likewise, the right linkage device 1320 may consist of a right upper arm 1328 , a right forearm 1330 , and a right end effector 1332 . The upper right arm 1328 may be coupled to the base via a rotary joint or shaft 1342 , and the right upper arm 1330 may be coupled to the right upper arm 1328 by another rotary joint or shaft 1344 . and the right end effector 1332 may be coupled to the right forearm 1330 by another rotary joint or shaft 1346 .

The joint-to-joint length of the left forearm may be longer than the joint-to-joint length of the upper left arm. Alternatively, the joint-to-joint length of the left forearm may be equal to the joint-to-joint length of the left upper arm. Alternatively, the left forearm and left upper arm may have any other suitable lengths.

Likewise, the joint-to-joint length of the right forearm may be longer than the joint-to-joint length of the right upper arm. Alternatively, the joint-to-joint length of the right forearm may be equal to the joint-to-joint length of the right upper arm. Alternatively, the right forearm and right upper arm may have any other suitable length.

In the example of FIGS. 66A-66D and 67A-67D, the joint-to-joint lengths of the left and right upper arms and the left and right forearm are shown to be the same. Likewise, the dimensions of the left and right end effectors, including length and lateral offset, are shown to be the same. However, the linkage may feature any suitable dimensions of the upper arm, forearm and end effectors.

To allow two end effectors to simultaneously access stations that are offset side by side, the distance between the joints coupling the left and right upper arms to the base may be selected to satisfy the following relationship.

D = 2d0 (1)

where D = center-to-center distance of side-by-side offset stations and d0 is the distance (m) between the joints coupling the left and right upper arms to the base.

Moreover, so that two end effectors can access the same station simultaneously, the dimensions of the linkages may be selected to satisfy the following relationship.

d0 = l2L -l1L + d3L + l2R -l1R + d3R (2)

The following designations are used in equation (2) above: d3L = lateral offset of left end effector (m), d3R = lateral offset of right end effector (m), 11L = articulation of left upper arm- Great-joint length (m), 11R=joint-to-joint length of right upper arm (m), 12L=joint-to-joint length of left forearm (m), 12R=joint-to-joint-to-joint length of right forearm arm Joint length (m).

When the robot arm is symmetrical, that is, when the left linkage and the right linkage have the same dimensions, equation (2) can be simplified as follows.

d0 = 2(l2 -l1 + d3) (3)

where d3 is the lateral offset of the end effector in m, 11 is the joint-to-joint length of the upper arms in m, and 12 is the joint-to-joint length of the forearm in m.

68A and 68B schematically depict an exemplary configuration 1398 , 1438 that may be used to drive the robot's base and individual links, ie, upper arms, forearms and end effectors. 68A and 68B , the base may be driven by drive shafts 1400 , 1448 , for example driven by TO.

Left upper arm 1402 , 1454 may be actuated by drive shaft T1L , 1420 , 1440 . The left forearm 1406, 1456 may be coupled to another drive shaft T2L, 1422, 1442 via a band configuration with at least one non-circular pulley. Band configuration such that rotation of the upper left arm extends and contracts the left wrist joint, ie the joint coupling the left end effector to the left forearm, along a straight line parallel to the desired straight path of the left end effector. This can be designed

The left end effector 1410 may be constrained by another band configuration with at least one non-circular pulley, which compensates for the effect of unequal lengths of the left upper arm and left forearm so that the left end effector 1410 is You can move along a straight line while maintaining the desired orientation.

Alternatively, if 11L=12L, conventional pulleys may be used as shown in Fig. 68B. In this embodiment, the band configuration for coupling the left forearm to the shaft T2L is designed such that the diameter of the pulley coupled to the shaft T2L is twice the diameter of the pulley coupled to the left forearm. The band configuration is designed to restrict the left end effector such that the diameter of the pulley attached to the upper left arm is half the diameter of the pulley attached to the left end effector.

Likewise, the upper left arm 1404 , 1450 may be actuated by the drive shaft T1R 1424 , 1444 . The right forearm 1408 , 1452 may be coupled to another drive shaft T2R 1426 , 1446 via a band configuration with at least one non-circular pulley. Rotation of the upper right arm causes the right wrist joint, ie, the joint coupling the right end effector to the right forearm, to extend and contract along a straight line parallel to the desired straight path of the right end effector 1412 . , the band configuration can be designed.

Right end actuation 1412 may be limited by other band configurations with at least one non-circular pulley, which compensates for the effect of unequal lengths of the right upper arm and right forearm so that the left end effector can be the desired You can move along a straight line while maintaining your orientation.

Alternatively, if 11R=12R, conventional pulleys may be used as shown in FIG. 68B . In this embodiment, the band configuration coupling the right forearm to the shaft T2R is designed such that the diameter of the pulley coupled to the shaft T2R is twice the diameter of the pulley coupled to the right forearm. The band configuration restricting the right end effector is designed such that the diameter of the pulley attached to the upper right arm is half the diameter of the pulley attached to the right end effector.

In order for the entire robot arm to rotate, all drive shafts, i.e. (T0, T1L, T2L, T1R, T2R), need to move in the desired direction of arm rotation by the same amount relative to the fixed reference frame (or other drive shafts are The drive shaft T0 needs to move while it can be seen stationary relative to the base). This is schematically illustrated in Figures 69a and 69c. In this particular example, the entire robot arm rotates 180 degrees in a counterclockwise direction.

In order for the left end effector to extend and contract along a straight path, the drive shaft T1L needs to move at an angle determined based on the reciprocal kinematic equations of the left linkage mechanism while the shafts TO and T2L are held stationary. there is A robot 1500 is schematically shown in FIG. 69D with left and right arms 1502 and 1504 with left end effectors extending from the initial position of FIG. 69A.

Likewise, for the right end effector to extend and contract along a straight path, the drive shaft T1R needs to move at an angle determined based on the reciprocal kinematic equation of the right linkage mechanism while the shafts T0 and T2R are held stationary. there is A robot with a right end effector extended from its initial position in FIG. 69A is schematically shown in FIG. 69E .

Both left and right end effectors of the robot can be simultaneously extended and contracted along a straight path by rotating the drive shafts T1L, T1R in opposite directions, if the left and right linkages feature the same dimensions, It stretches and contracts in equal amounts. A robot with both left and right end effectors extending from the initial position of FIG. 69A is schematically shown in FIG. 69F .

The movement described above with respect to FIGS. 69D-69F allows the robot to extend/retract independently or simultaneously to or from the same station. Thus, the robot can pick up/unload a material, such as a semiconductor wafer, to/from the same station independently or simultaneously with both end effectors along a straight path 1510 .

The left and right linkages 1502 and 1504 can be rotated individually. In order to rotate the left link device, the drive shafts T1L and T2L need to move in the desired rotational direction by the same amount. Likewise, in order for the right linkage to rotate, the drive shafts T1R and T2R need to move in the desired rotational direction with the same magnitude.

When the left and right link devices are individually rotated by 180 degrees, the left end effector and the right end effector are laterally offset, as shown in the exemplary schematic diagrams shown in FIGS. 70A to 70C . In this particular example, the left linkage device 1502 rotates clockwise and the right linkage device 1504 rotates counterclockwise at the same time (prevents the risk of collision of the left and right wrist joints). However, the left and right link devices may sequentially rotate independently in the same direction or in any other suitable manner.

As a result of the respective rotation of the left and right linkages described above, the arms are such that the centers of the left and right end effectors are laterally offset by a distance D, provided the dimensions of the robot satisfy the conditions of equations (1) and (2). This is reconstructed.

If the end effector offset reconstruction by separate rotation of the left and right linkages precedes or follows the rotation of the entire arm, the movements can be conveniently blended to minimize overall delay.

Once in the position of the schematic of FIG. 70C , the left end effector can again be extended and retracted along the straight path 1512 by moving the drive shaft T1L while holding the shafts T0 and T2L stationary. Likewise, by moving the drive shaft T1R while holding the shafts T0 and T2R stationary, the right end effector can be extended and retracted along a straight path. Finally, both left and right end effectors of the robot can be simultaneously extended and contracted along a straight path by rotating the drive shafts T1L, T1R in opposite directions, if the left and right linkages have the same dimensions If characterized, it is made in the same amount.

A robot with a left end effector extended from its initial position in FIG. 70C is schematically shown in FIG. 70D ; A robot with a right end effector extended from its initial position in FIG. 70C is schematically shown in FIG. 70E ; A robot with left and right end effectors extended from the initial position of FIG. 70C is schematically shown in FIG. 70F .

The movement described above with respect to FIGS. 70E-70F allows the robot to extend/retract the end effectors from/to two side-by-side offset stations. Thus, the robot can pick up/unload material, such as semiconductor wafers, from/to two side-by-side offset stations independently or simultaneously.

In cases where the access paths to side-by-side offset stations are not parallel, such as path 1514 or 1516 in FIG. Align the direction with the access path to the station. An example of such a scenario is schematically illustrated in the schematic diagrams of FIGS. 71A-71C . Assuming the initial position of schematic 71a, the left and right linkages can be rotated to reconfigure the arm so that the end effectors are laterally and angularly offset as shown in FIG. 71B . In this particular example, the angular offset between the left end effector and the right end effector is 30 degrees. From the retracted position in Fig. 71B, the left link devices can be extended independently or simultaneously as shown in Fig. 71C.

The robot may approach the stations independently or simultaneously 180 degrees apart as shown in the example of FIGS. 71D and 71E . In this particular example, assuming the starting position of FIG. 71A, the left and right linkages first rotate into the configuration of FIG. 71D, and then the left end effector and/or right end effector as shown in FIG. 71E. can be stretched independently or simultaneously.

Although both left and right link arrangements are schematically shown elongated in FIG. 71E , in an alternative aspect only one of the two link arrangements may be elongated. Here, the arrival of the link devices (measured from the center of the robot, indicated by the axis T0 of the drive shaft) is far from the configuration shown in FIG. can be used for

The robot can be driven using a configuration of 3-axis to 5-axis drive depending on the number of degrees of freedom required for the particular application.

The configuration of the three-axis drive may include three independently controlled motors M0, M1, M2, as shown in the two examples 1600 and 1700 of FIGS. 72A, 72B, 72C and 72D. have.

72A-D, FIGS. 72A and 72B show top and side views, respectively, of an exemplary configuration 1600 of a robot drive unit and arm base 1618, where motor M0 is a shaft T0 1602 is coupled directly to actuate base 1618, motor M1 1604 is attached directly to shaft T1L 1610, driving the upper left arm, and motor M2 1606 is attached directly to shaft T2R 1616 , so that it is coupled to the right forearm. Moreover, two belt configurations 1620 and 1622 are used, respectively, so that the shafts T1L 1610 and T1R 1614 rotate in different directions than the shafts T2L 1612 and T2R 1616 . This is achieved via a crossover band arrangement 1620 between shafts T1L and T1R and likewise by another crossover band arrangement 1622 between shafts T2L and T2R.

Alternatively, the drive unit 1700 may have motors M0 1702 , M1 1704 , M2 1706 disposed in the drive unit, and the movement of the band drives 1720 , 1722 as illustrated in the example of FIGS. 71C and 72D . may be transmitted from the motors M1 and M2 to the shafts T1L 1710 and T1R 1714 and T2L 1712 and T2R 1716, respectively.

Alternatively, any suitable combination of band configuration and direct coupling between the motors and drive shafts may be employed. In general, any suitable means of transmitting motion between the motors and the drive shafts may be used that provides the desired motion relationship.

When the configuration of three-axis drive according to the example of FIGS. 72A to 72D is used, the robot is shown in FIGS. 69 through All operations shown in FIG. 71 can be performed.

The configuration of the four-axis drive may include four independently controlled motors as shown in the examples 1800 and 1900 of FIGS. 73A and 73B . 73A and 73B show top and side views of the robot drive unit and arm base 1802 . Motors M0 1804 , M1L 1808 , and M1R 1810 may be used to operate shafts T0 1804 , T1L 1808 , and T1R 1810 in an independent manner, respectively. Motors M2 and 1806 may be used to actuate shafts T2L 1812 and T2R 1814 such that the two shafts rotate in opposite directions. 73A and 73B, this is a straight band arrangement 1820 between a pulley coupled to shaft T2L and motor M2 and to shaft T2R and motor M2. This is achieved through a crossover band arrangement 1822 between the different pulleys coupled.

Alternatively, any combination of direct coupling and band configuration, or movement between the motor and drive shafts, facilitates the independent operation of the shafts T0, T1L, T1R and the combined operation of the shafts T2L, T2R. Any other suitable means of conveying the

When the above four-axis drive configuration is used, the robot can perform all the operations according to FIGS. 69 to 71, including independent extension and retraction of the left and right link devices.

A configuration 1900 of five-axis drive, as shown in the example of the schematic diagram of FIGS. Motors M0 1904 , M1L 1906 , M2L 1908 , M1R 1910 , M2R 1912 , where FIG. 73c shows a top view and FIG. 73d shows a side view of drive unit 1900 and base 192 , which are Extending the example of the schematic shown in FIGS. 72C and 72D through a band drive, using a combination of direct coupling and band configuration, or any other that can facilitate transfer of motion from the motors to the drive shafts. It can be done in any suitable way.

When the configuration of 5-axis drive is used, the robot can perform all operations according to FIGS. 69 to 71 . In addition, the left and right linkages can be operated in a completely independent manner including independent rotations, which cannot be supported with a configuration of 3 axis and 4 axis drive.

Another exemplary inner configuration of the base and linkage of the robot 2010 of FIG. 66 is schematically shown in FIG. 74A . Again, the base 2012 may be driven by the drive shaft T0.

The left upper arm 2014 may be actuated by a drive shaft T1L. The left forearm can be driven by another drive shaft T2L through a band configuration with conventional pulleys. The left end effector may be constrained by a different band configuration with at least one non-circular pulley, which compensates for the effect of unequal lengths of the left upper arm and left forearm, so that the left end effector can be You can move along a straight line while maintaining your orientation. Alternatively, if 11L=12L, conventional pulleys may be used as shown in FIG. 74B with an arm 2030 having a base 2032 , a left arm 2034 and a right arm 2036 .

Likewise, the right upper arm 2016 can be actuated by the drive shaft T1R. The upper right arm can be driven by another drive shaft T2R through a conventional pulley with band configuration. The right end effector may be constrained by another band configuration having at least one non-circular pulley, which compensates for the effect of unequal lengths of the right upper arm and right forearm so that the right end effector is in the desired orientation. can move along a straight line while maintaining Alternatively, if 11R=12R, conventional pulleys may be used as shown in FIG. 74b .

In order for the entire robot arm to rotate, all drive shafts T0, T1L, T2L, T1R, T2R need to move in the desired direction of rotation of the arm with the same magnitude relative to the fixed reference frame (or other drive shafts are The drive shaft T0 needs to move while at rest relative to the base).

In order for the left end effector to extend and contract along a straight path, the drive shafts T1L, T2L need to move in a coordinated manner according to the reciprocal kinematic equation of the left linkage device. Likewise, in order for the right end effector to extend and retract along a straight path, it is necessary for the drive shafts T1R, T2R to move in a coordinated manner according to the kinematic inverse equations of the right linkage device. Exemplary kinematic equations can be found above.

Both end effectors of the robot can be extended and contracted along a straight path by rotating the drive shafts T1L, T2L and d T1R, T2R simultaneously in the manner described above for independent stretching of the left and right end effectors. .

The left and right linkages may be rotated individually. In order for the left linkage to rotate, the drive shafts T1L and T2L need to move the same amount in the desired direction of rotation. Likewise, in order for the right linkage to rotate, the drive shafts T1R and T2R need to move the same amount in the desired direction of rotation. 68A and 68B, when the left and right linkages individually rotate 180 degrees, the left end effector and the right end effector are laterally offset, as shown in FIGS. 70A-70C.

Considering the performance of the above movement, the robot with the inner configuration according to FIGS. 74A to 74B can perform the same operations as schematically described in FIGS. 69 to 71 .

The base and link devices with the inner configurations of FIGS. 74A and 74B can be driven by the three-axis and 5-axis drive configurations of FIGS. 72 and 73C, 73D, respectively.

Another exemplary embodiment of a robot 2100 is shown in the schematic diagrams of FIGS. 75A and 75B . Fig. 75A shows a top view of the robot with both linkages retracted, and Fig. 75B shows the robot with both end effectors extended.

An exemplary inner configuration of the robot is shown schematically at 2330 in FIG. 76A . In the figure, there is shown a base 23332 having upper arms and forearms of equal length and a linkage 2334, 2336 with circular pulleys. However, unequal lengths and non-circular pulleys may be used.

The robot can be operated by the drive configurations previously described with reference to FIGS. 72 and 73 .

An alternative inner configuration of the robot of FIGS. 75A and 75B is schematically shown at 2360 in FIG. 76B . In the figure, a linkage 2364, 2366 and a base 2362 with a circular pulley and with upper arms and forearms of equal length are shown; However, unequal lengths and non-circular pulleys may be used.

The robot can be operated by the configuration of the driving unit according to FIGS. 72, 73c and 73d.

Another exemplary embodiment of a robot 2200 is shown in the schematic diagrams of FIGS. 75C and 75D . Fig. 75c shows a top view of the robot with both linkages retracted, and Fig. 75d shows the robot with both end effectors extended. 75c and 75d show the link device of the robot in a left handed configuration. Alternatively, the link arrangement may be configured in a right-handed arrangement, as shown in FIGS. 75E and 75F with a robot 2300 .

An exemplary inner configuration of the embodiments according to FIGS. 75C and 75D is schematically illustrated at 2390 in FIG. 76C . Likewise, an exemplary inner configuration of the embodiment according to FIGS. 75E and 75F is schematically illustrated at 2430 in FIG. 76D . 76c and 76d , linkages 2394 , 2396 , 2434 , 2436 with a circular pulley with upper arms and forearms of equal length are shown; However, unequal lengths and non-circular pulleys may be used.

The robot can be operated by the configuration of the driving unit according to FIGS. 77A to 77D, 78A to 78B, and FIGS. 73C and 73D. 77A and 77B , the drive unit 2500 has a base 2504 driven by a motor M0 2502 . M1 2506 drives T11 2510 while M2 2508 drives T2l 2512 and T2r 2516 limited by band, and T2r2516 with T11 2510 and T1R 2514 limited by band. 77C and 77D , the drive unit 2560 has a base 2562 driven by a motor M0 2564 . M1 2566 drives T11 2570 while M2 2568 drives T2l 2572 and T2r 2576 bounded by band, and T2r 2576 with tl 2570 and t1r 2574 bounded by band. 78A and 78B , the drive unit 2700 has a base 2702 driven by a motor M0 2704 . M11 2706 drives T11 while Mlr 2708 drives T1r and M2 2710 drives T2r 2714 and T21 2712 by band.

For example, when the configuration of the three-axis drive unit is used according to the example of FIG. 77, the robot can perform all operations limited to FIGS. 69 and 70 except for the independent extension and contraction of the left and right link devices ( 69 and 70 D and E). It cannot perform simultaneous stretching and retraction along the non-parallel and opposing paths of FIG. 71 .

When a four-axis drive configuration as in the example of FIG. 78 is used, the robot can perform all operations according to FIGS. 69 and 70 , including independent extension and retraction of the left and right linkages. It cannot perform simultaneous stretching and retraction along the non-parallel and opposing paths of FIG. 71 .

When the configuration of the 5-axis drive unit is used, the robot can perform all operations according to FIGS. 69 to 71 . Moreover, the left and right linkages can be operated in a completely independent manner, including independent rotation, which cannot be supported in the configuration of 3-axis and 4-axis drive.

The disclosed example shows a desirable reach-to-containment ratio. Combined with the configuration of the three-axis drive of FIGS. 77A and 77B, it provides a low profile and small complexity. Moreover, in combination with the configuration of the four-axis drive, the disclosed example supports independent elongation of the left and right links.

An alternative inner configuration to the exemplary embodiments of the schematic diagram of FIGS. 75A-D is schematically shown in FIGS. 79A and 79B at 2800 and 2830 , respectively. In the figure, there is shown a base 2802, 2832 with a linkage 2804, 2806, 2834, 2836 with circular pulleys and an upper arm and forearm of equal length; However, unequal lengths and non-circular pulleys may be used.

The robot can be operated by the configuration of the driving unit according to FIGS. 77, 73c and 73d.

Although the left and right linkages are shown with the same dimensions in the drawings, the left linkage may have different dimensions from the right linkage, and the drive unit may be configured to reflect the difference in dimensions.

a robot arm such that some of the links, such as upper arms and/or forearms, are below one or both of the end effectors, and other links are above one or both of the end effectors; This can be designed

When the terms band arrangements and band driver are used, they generally refer to means for transmitting motion, force and/or torque, such as a band, belt, cable, gear or any other suitable arrangement. also includes

Although the robot's motors have been shown attached directly to shafts, pulleys and other driven elements in the figure throughout the specification, the motors may contain additional bands, belts, cables, gears or movement, force and It may be coupled to the driven components via any other suitable configuration capable of transmitting torque.

Although the motors of the robot are depicted throughout the specification as being in the drive unit or base in the drawings, the motors may be located inside the robot arm, for example as part of the upper arm(s) or forearm(s). It can be positioned or integrated into a rotary joint of the robot.

The drive unit of the robot may further include a vertical elevation mechanism to adjust the height of the entire robot arm. Alternatively, the drive unit may comprise two vertical lift mechanisms, one for the left linkage and the other for the right linkage so as to independently adjust the height of the left and right linkages. Here, the end effectors may be loaded or set at the same level or otherwise positioned independently in the z axis.

In an alternative embodiment, any number and type of suitable mechanisms may be used within the robot drive and/or robot arm to control the height of the left and right end effectors of the robot.

The robot may further have a traverser mechanism, which may enable the robot to move, for example, along a tunnel in which the robot is installed.

In other embodiments, the robot may be designed in an upside-down configuration, eg the support is provided from the top rather than from the bottom.

The robot can be combined with other robots of the same or similar type, for example in an inverted configuration, providing the system with a four end effector, which can support rapid material exchange.

The robot may be designed for operation in a special environment, for example in a vacuum, which may involve the use of static and/or dynamic seals and some of the robot's components. Other means of isolation from the operating environment may be included.

80A shows a system 2900 with a robot. Robot drive unit 2904 may be configured to be movable relative to stationary portion 2902 of the system indicated by arrows 2906 and 2908 . As an example, the robot drive unit may be on a rail, a linear bearing magnetic bearing, or may be coupled to a stationary portion of the system in any suitable manner to enable the robot drive unit to move relative to the stationary portion of the system. can As an example, the robot drive unit may be driven by an electric linear motor having windings in the drive unit, by an electric linear motor having windings in a stationary part of the system, via a magnetic coupling, via a pneumatic or hydraulic actuator, a ball It may be actuated via a screw, via a cable or belt, or by using any other suitable configuration capable of actuating the robot drive unit against a stationary portion of the system. As described in the original write-up, the robot drive unit may have a pivot base and a robot arm. In schematic (a), the pivot base is actuated relative to the robot drive unit as indicated by the arrow.

80B shows a system 3000 with a configuration in which the pivot base 3004 is actuated directly relative to a stationary portion 3002 of the system as indicated by arrows 3006 and 3008 on the sides of the pivot base. When both sides of the pivot base are synchronously actuated in the same direction and by the same amount, the entire robot is translated in the corresponding direction. When the sides of the pivot base are actuated synchronously to the same extent in opposite directions, the pivot base rotates while its center remains stationary. Any combination of translation and rotation can be achieved by actuating the sides of the pivot base accordingly. For example, by a linear electric motor with windings in a pivot base, by an electric linear motor with windings in a stationary part of the system, via magnetic coupling, via a ball screw, via a cable or belt, or The base may be actuated by using any other suitable configuration capable of actuating the pivot base relative to a stationary portion of the system.

According to an aspect of an exemplary embodiment, an apparatus includes at least one drive unit; a first robotic arm comprising a first upper arm, a first forearm and a first end effector, the first upper arm coupled to the at least one drive in a first axis of rotation; and a second robotic arm comprising a second upper arm, a second forearm and a second end effector, wherein the second upper arm is coupled to the at least one drive at a second axis of rotation spaced apart from the first axis of rotation. and a second second robot arm, wherein the first and second robot arms position the end effectors in first retracted positions to at least partially load substrates positioned on the end effectors one over the other. wherein the first and second robotic arms are configured to extend the end effectors from the first retracted positions in a first direction along first parallel paths at least partially one positioned directly over the other. wherein the first and second robotic arms are configured to extend the end effectors in at least one second direction along second mutually spaced paths that are not positioned above each other, the first upper arm and the first forearm The arms have different effective lengths and the second upper arm and the second forearm have different effective lengths.

According to another aspect, an apparatus includes at least one non-circular pulley and a first band coupling at least one drive to the first forearm at a first joint between the first upper arm and the first forearm.

According to another aspect, an apparatus includes a second band coupling the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm.

According to another aspect, an apparatus includes the first and second end effectors each having an overall L shape.

According to another aspect, an apparatus includes a first circular pulley and a first band coupling at least one drive to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second circular pulleys The 2 pulleys have different diameters.

According to another aspect, the apparatus includes the first paths following a straight line from the first retracted positions.

According to another aspect, an apparatus comprises that the first and second robotic arms are configured to provide second retracted positions for positioning the end effectors such that substrates positioned on the end effectors are not stacked one over the other. include

According to another aspect, an apparatus comprises a controller, said controller to move the first and second robot arms substantially simultaneously from first retracted positions along first paths and separately or simultaneously along second paths and control the at least one drive to move the first and second robot arms.

According to another aspect, a method comprises providing a first robot having a first upper arm, a first forearm and a first end effector, the first upper arm and the first forearm having different effective lengths; step; providing a second robotic arm comprising a second upper arm, a second forearm and a second end effector, wherein the second upper arm and the second forearm have different effective lengths; connecting the first upper arm to the at least one drive at a first rotational axis; and coupling a second upper arm to at least one drive at a second axis of rotation spaced apart from the first axis of rotation, wherein at least partially loading substrates positioned on the end effectors one over the other. the first and second robotic arms are configured to position the end effectors in first retracted positions to position the end effectors in first retracted positions to and wherein the first and second robotic arms are configured to extend the end effectors from first retracted positions in a first direction along first parallel paths, one positioned directly over the other, and wherein the first and second robotic arms are positioned one over the other. and extend the end effectors in at least one second direction along second paths spaced apart from each other that are not positioned.

According to another aspect, a method includes a first band connecting at least one drive to the first forearm at a first joint between a first upper arm and a first forearm and at least one non-circular pulley in a first axis of rotation. include

According to another aspect, a method includes, at a wrist joint of the first end effector relative to the first forearm, a second band connecting the first end effector to the first joint.

According to another aspect, a method includes a first circular pulley and a first band coupling at least one drive to a second circular pulley at a first joint between a first upper arm and a first forearm, the first and first circular pulleys The 2 pulleys have different diameters.

According to another aspect, a method includes the first and second robotic arms being configured to provide first paths along a straight line from the first retracted positions.

According to another aspect, a method includes the first and second arms being configured to provide second retracted positions for positioning the end effectors such that substrates positioned on the end effectors are not stacked one over the other. .

According to another aspect, a method is provided such that the first and second robotic arms move substantially simultaneously along first paths from first retracted positions and move the first and second arms along second paths individually or simultaneously. , coupling the at least one drive to a controller configured to control the at least one drive.

According to another aspect, a method includes first and second end effectors of first and second individual robot arms to at least partially load substrates positioned on the end effectors one on top of the other. positioning in retracted positions, wherein a first robot arm has a first upper arm, a first forearm and a first end effector, the first upper arm coupled to the at least one drive in a first axis of rotation; wherein the second robot arm includes a second upper arm, a second forearm and a second end effector, the second upper arm coupled to the at least one drive at a second axis of rotation spaced apart from the first axis of rotation; moving the first and second robot arms to move the end effectors from first retracted positions in a first direction, at least partially in parallel first paths positioned directly over the other, in a first direction; and moving the first and second robot arms to move the end effectors to extend the end effectors in at least one second direction along second paths that are not located on top of each other and are spaced apart from each other. do.

According to another aspect, the step of moving the first and second robotic arms in the method comprises a first band connecting at least one drive to the first forearm at a first joint between the first upper arm and the first forearm and at least and having a single non-circular pulley.

According to another aspect, the moving of the first and second robotic arms in the method comprises a second band connecting the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm. do.

According to another aspect, moving the first and second robotic arms in the method comprises: a first band connecting at least one drive to a second circular pulley at a first joint between the first upper arm and the first forearm; one circular pulley, wherein the first and second pulleys have different diameters.

According to another aspect, a method is provided to move the first and second robotic arms substantially simultaneously from first retracted positions along first paths, and separately or simultaneously to move the first and second robotic arms along the first paths. and a controller for controlling the at least one driving unit to move.

According to another aspect, an apparatus comprises: a first robotic arm having a first upper arm, a first forearm and a first end effector; a second robot arm having a second upper arm, a second forearm and a second end effector; and a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at a first axis of rotation, and the second upper arm is connected to the driving unit at a second axis of rotation spaced apart from the first axis of rotation. wherein the drive comprises only three motors to rotate the first and second upper arms, the first and second robot arms to at least partially load substrates positioned on the end effectors one above the other. configured to position the end effector from first retracted positions, wherein the first and second robotic arms are first retracted in a first direction along first parallel paths, one positioned at least partially directly over the other. configured to extend the end effectors from positions, wherein the first and second robotic arms are configured to extend the end effectors in at least one second direction along second paths spaced from each other that are not positioned above each other. is composed

According to another aspect, in the device the first upper arm and the first forearm have different effective diameters, and the second upper arm and the second forearm have different effective diameters.

According to another aspect, an apparatus includes at least one non-circular pulley and a first band connecting a drive to the first forearm at a first joint between the first upper arm and the first forearm.

According to another aspect, an apparatus includes a second band connecting the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm.

According to another aspect, the first and second end effectors in the device each have an overall L shape.

According to another aspect, an apparatus includes a first band and a first circular pulley coupling a drive to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second pulleys comprising: have different diameters.

According to another aspect, the first paths in the device follow a straight line from the first retracted positions.

In another aspect, the first and second robotic arms are configured to provide second retracted positions for positioning the end effectors such that substrates positioned on the end effectors in the apparatus are not stacked one over the other.

According to another aspect, an apparatus moves the first and second robotic arms substantially simultaneously from first retracted positions along first paths and individually or simultaneously along second paths to move the first and second robotic arms. and a controller configured to control the driving unit so as to do so.

According to another aspect, an apparatus comprises three motors aligned on a common axis.

According to another aspect, the device has three motors positioned on three individually spaced axes.

According to another aspect, an apparatus includes a drive and a z-axis motor coupled to the drive to vertically move the first and second robot arms.

According to another aspect, a method comprises: a first end effector of first and second individual robot arms in a first retracted position such that at least partially loading substrates positioned on the end effectors one over the other; positioning a second end effector, wherein the first robot arm comprises a first upper arm, a first forearm and a first end effector, the first upper arm coupled to the drive at a first axis of rotation; wherein the second robot arm includes a second upper arm, a second forearm and a second end effector, the second upper arm coupled to the drive at a second axis of rotation spaced apart from the first axis of rotation; moving the first and second robot arms to move the end effectors from first retracted positions in a first direction along parallel first paths, one at least partially directly positioned over the other; moving the first and second robot arms to move the end effectors to extend the end effectors in at least one second direction along second paths spaced apart from each other, one not positioned over the other; rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation; moving from the first retracted positions in a first direction; The moving and rotating steps to extend the end effectors in two directions are accomplished using only the three motors of the drive unit.

According to another aspect, the step of moving the first and second robotic arms in the method comprises at least one circle and a first band connecting the drive to the first forearm at a first joint between the first upper arm and the first forearm. This includes pulleys that are not.

According to another aspect, the step of moving the first and second robotic arms in the method comprises, at a wrist joint of the first end effector relative to the first forearm, a second band connecting the first end effector to the first joint. include

According to another aspect, the step of moving the first and second robotic arms in the method comprises a first circular pulley and a first band connecting the drive to the second circular pulley at a first joint between the first upper arm and the first forearm. wherein the first and second pulleys have different diameters.

According to another aspect, a method includes moving the first and second robotic arms substantially simultaneously from first retracted positions along first paths and moving the first and second robotic arms along second paths individually or simultaneously. It further includes a controller for controlling the motors of the driving unit.

According to another aspect, a method includes providing a first robotic arm having a first upper arm, a first forearm and a first end effector; providing a second robotic arm having a second upper arm, a second forearm and a second end effector; connecting the first upper arm to the driving unit at the first rotational shaft; and connecting the second upper arm to the drive at a second axis of rotation spaced apart from the first axis of rotation; First and second robotic arms are configured to position the end effectors in retracted positions, at first retracted positions in a first direction along first parallel paths, at least in part positioned directly over the other. wherein the first and second robot arms are configured to rotate to extend the end effectors from The first and second robot arms are configured to rotate, the drive having only three motors, the motors rotating the first and second robot arms to extend the end effectors and the first and second axis of rotation for rotating the first and second robot arms about a third axis of rotation spaced apart from the .

According to another aspect, in a method the first robotic arm is provided with a first upper arm and the first forearm has different effective lengths, the second robotic arm is provided with a second upper arm and the second forearm has different effective lengths. have them

According to another aspect, a method includes a first band connecting a drive to the first forearm at a first joint between the first upper arm and the first forearm and at least one non-circular pulley in the first axis of rotation.

According to another aspect, a method includes a second band connecting the first end effector to the first joint at a wrist joint of the first end effector relative to the first forearm.

According to another aspect, a method includes a first circular pulley and a first band coupling a drive to a second circular pulley at a first joint between a first upper arm and a first forearm, the first and second pulleys comprising: have different diameters.

According to another aspect, in the method the first and second robotic arms are configured to provide first paths along a straight line from the first retracted positions.

According to another aspect, the first and second arms are configured to provide second retracted positions for positioning the end effectors in a method such that substrates positioned on the end effectors are not stacked one over the other.

According to another aspect, a method is configured to move the first and second robotic arms substantially simultaneously from first retracted positions along first paths and to move the first and second arms separately or simultaneously along second paths. and connecting a controller configured to drive the drive to the drive.

According to another aspect, an apparatus comprises: a first robotic arm having a first upper arm, a first forearm and a first end effector; a second robot arm having a second upper arm, a second forearm and a second end effector; and a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at a first rotation axis, and the second upper arm is connected to the driving unit at a second rotation axis spaced from the first rotation axis, and , the driving unit includes five motors for rotating the first and second upper arms, the first of the motors being connected to the first and second robot arms to drive the first and second arms to the first and second rotating about a third axis of rotation spaced apart from the second axis of rotation, wherein second and third of the motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively, and a fourth one of the motors and fifth motors connected to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently from the first robot arm, the first and second robot arms being positioned on the end effectors of the substrate configured to position the end effectors in first retracted positions such that at least partially one over the other, the first and second robotic arms being at least partially parallel to one another positioned directly over the other. configured to extend the end effectors from first retracted positions in a first direction along first paths, the first and second robot arms being at least one along second paths spaced apart from each other not positioned above each other configured to elongate the end effectors in a second direction of

According to another aspect, in the device the first upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths.

According to another aspect, an apparatus includes at least one non-circular pulley and a first band connecting the drive to the first forearm at a first joint between the first upper arm and the first forearm.

According to another aspect, an apparatus includes, at a wrist joint of the first end effector relative to the first forearm, a second band connecting the first end effector to the first joint.

According to another aspect, the first and second end effectors in the device each have an overall L shape.

According to another aspect, an apparatus includes a first band and a first circular pulley connecting a drive to a second circular pulley at a first joint between the first upper arm and the first forearm, the first and second pulleys comprising: have different diameters.

According to another aspect, the first paths in the device follow a straight line from the first retracted positions.

According to another aspect, the first and second robotic arms are configured to provide second retracted positions for positioning the end effectors in an apparatus such that substrates positioned on the end effectors are not stacked one over the other.

According to another aspect, an apparatus is configured to move the first and second robotic arms substantially simultaneously from first retracted positions along first paths and separately or simultaneously along second paths to move the first and second robotic arms. and a controller configured to control the drive to move.

According to another aspect, a device has a z-axis motor coupled to the drive to vertically move the drive and the first and second robot arms.

According to another aspect, a method includes first and second individual robot arms of first and second from first retracted positions to at least partially load substrates positioned on end effectors one over the other. positioning a second end effector, wherein a first robot arm comprises a first upper arm, a first forearm and a first end effector, the first upper arm coupled to the drive at a first axis of rotation, and a second the robot arm comprising a second upper arm, a second forearm and a second end effector, the second upper arm being coupled to the drive at a second axis of rotation spaced apart from the first axis of rotation; moving the first and second robot arms to move the end effector from first retracted positions in a first direction according to at least partially parallel first paths one positioned over the other; moving the first and second robot arms to move the end effectors to extend the end effectors in at least one second direction along second paths spaced from each other that are not positioned above each other; rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation; moving from the first retracted positions in a first direction; Moving and rotating to elongate the end effectors in the direction are accomplished using five motors of the drive, a first of the motors being connected to the first and second robot arms about a third axis of rotation. rotates the first and second arms, the second and third of the motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively, and the fourth and third of the robot arms 5 is connected to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently from the first robot arm.

According to another aspect, a method or apparatus includes a first motor aligned in a third axis, second and third motors aligned with each other in a first axis, and fourth and fifth motors aligned with each other in a second axis .

According to another aspect, a method includes providing a first robotic arm having a first upper arm, a first forearm and a first end effector; providing a second robotic arm having a second upper arm, a second forearm and a second end effector; connecting the first upper arm to the drive unit at the first rotational shaft; and coupling a second upper arm to the drive at a second axis of rotation spaced apart from the first axis of rotation; The first and second robotic arms are configured to position the end effectors in the retracted positions, the first retracted positions in a first direction along parallel first paths at least in part positioned directly over the other. to extend the end effectors in at least one second direction along second mutually spaced paths, the first and second robot arms being configured to rotate to extend the end effectors from The first and second robot arms are configured to rotate, the drive having five motors, the motors rotating the first and second robot arms to extend the end effectors and spaced apart from the first and second axes of rotation for rotating the first and second robot arms about a third axis of rotation, a first of the motors being connected to the first and second robot arms to rotate the first and second arms about a third axis of rotation and second and third of the motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively, and the fourth and fifth of the robot arms are connected to the second robot arm to rotate the second upper arm and the second forearm independently of the first robot arm, respectively.

According to another aspect, an apparatus includes a first robotic arm comprising a first upper arm, a first forearm and a first end effector; a second robotic arm comprising a second upper arm, a second forearm and a second end effector; and a driving unit connected to the first and second robot arms, wherein the first upper arm is connected to the driving unit at a first axis of rotation, and the second upper arm is connected to the driving unit at a second axis of rotation spaced apart from the first axis of rotation. and the driving unit has four motors for rotating the first and second upper arms, a first one of the motors connected to the first upper arm, and a second one of the motors connected to the second upper arm. wherein a third of the motors is connected to the first forearm, a fourth of the motors is connected to the second forearm, and the third and fourth motors have a common shaft spaced apart from the first and second axes. wherein the first motor is aligned to the first axis, the second motor is aligned to the second axis, and the second motor is aligned to at least partially load substrates positioned on the end effectors one over the other. The first and third robotic arms are configured to position the end effectors in first retracted positions, wherein the first retracted position is at least partially in a first retracted position in a first direction along parallel first paths one positioned directly over the other. The first and second robot arms are configured to extend the end effectors from each other and first to extend the end effectors in at least one second direction along second mutually spaced paths that are not positioned above each other. and second robot arms are configured.

In one exemplary embodiment there is provided an apparatus comprising at least one processor and at least one non-transitory memory comprising computer program code, the at least one memory and computer program code comprising: a processor to cause the apparatus to: a first end effector of first and second individual robot arms in first retracted positions such that at least partially one over the other, loading substrates positioned on the end effectors; position a second end effector, wherein the first robot arm includes a first upper arm, a first forearm and a first end effector, the first upper arm connected to the drive at a first axis of rotation, and a second The robot arm includes a second upper arm, a second forearm and a second end effector, the second upper arm coupled to the drive at a second axis of rotation spaced from the first axis of rotation and positioned at least partially directly above each other move the first and second robot arms to move the end effectors from first retracted positions in a first direction along first parallel first paths and follow second paths spaced apart from each other not positioned above each other move the first and second robot arms to move the end effectors to extend the end effectors in at least one second direction, and move the first and second robot arms about a third axis of rotation spaced apart from the first and second axes of rotation. Rotating the second robot arms together, movement from the first retracted positions in a first direction, extending the end effectors in at least one second direction, and rotation is effected using only the three motors of the drive unit.

According to an exemplary embodiment, there is provided an apparatus comprising a non-transitory program storage device readable by a machine tangibly embodied in a program of instructions executable by the machine to perform operations, the operations comprising: : actuating a first end effector and a second end of the first and second individual robot arms in first retracted positions to at least partially load substrates positioned on the end effectors one over the other. positioning the sieve, wherein a first robotic arm comprises a first upper arm, a first forearm and a first end effector, the first upper arm coupled to the drive at a first axis of rotation, the second robotic arm comprising: a second upper arm, a second forearm and a second end effector, wherein the second upper arm is connected to the drive at a second axis of rotation spaced apart from the first axis of rotation; moving the first and second robot arms to move the end effectors from first retracted positions in a first direction along first parallel paths at least partially one positioned directly over the other; moving the first and second robot arms to move the end effectors to extend the end effectors in at least one second direction along second paths spaced from each other that are not positioned above each other; rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation; moving from the first retracted positions in a first direction; The moving and rotating steps to elongate the end effectors in the direction are achieved using only the three motors of the drive unit.

In an exemplary embodiment, at least one processor; and at least one non-transitory memory containing computer program code, wherein the at least one memory and computer program code cause, as at least one process, the device to be located on the end effectors. positioning the first end effector and the second end effector of the first and second individual robot arms in first retracted positions such that the substrates are at least partially loaded one over the other, the first robot arm comprising: a first upper arm, a first forearm and a first end effector, wherein the first upper arm is connected to the drive at a first axis of rotation, and the second robot arm includes a second upper arm, a second forearm and a second an end effector, wherein the second upper arm is connected to the drive at a second axis of rotation spaced apart from the first axis of rotation; move the first and second robotic arms to move the end effector from first retracted positions in a first path along first parallel paths at least partially one positioned directly over the other; moving the first and second robotic arms to move the end effectors to extend the end effectors in at least one second direction along second mutually spaced paths, one not positioned over the other; rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation; Movement from the first retracted positions in a first direction, movement to extend the end effectors in at least one second direction, and rotation are effected using five motors of the drive, a first of the motors is connected to the first and second robot arms to rotate the first and second arms about a third axis of rotation, the second and third of the motors being connected to the first robot arms to be connected to the first upper arm and Each rotates the first forearm, and fourth and fifth motors of the robot arms are connected to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently of the first robot arm.

According to one exemplary embodiment, there is provided an apparatus comprising a non-transitory program storage device readable by a machine and tangibly embodying a program of instructions executable by a machine to perform an operation. , the operations include: first and second end effectors of first and second individual robot arms in first retracted positions to at least partially load one over the other substrates positioned on the end effectors. wherein the first robot arm comprises a first upper arm, a first forearm and a first end effector, the first upper arm coupled to the drive at a first axis of rotation, and the second robot arm comprising a second comprising two upper arms, a second forearm and a second end effector, wherein the second upper arm is connected to the drive at a second axis of rotation spaced apart from the first axis of rotation; moving the first and second robot arms to move the end effectors from first retracted positions in a first direction along first parallel paths at least partially one positioned over the other; moving the first and second robot arms to move the end effectors to extend the end effectors in at least one second direction along second paths spaced from each other that are not located above each other; rotating the first and second robot arms together about a third axis of rotation spaced apart from the first and second axes of rotation; moving from the first retracted positions in a first direction; The moving and rotating steps to extend the end effectors in the direction are by use of five motors of the drive, a first of the motors being connected to the first and second robot arms to connect the first and second motors. rotate the arms about a third axis of rotation, wherein second and third of the motors are connected to the first robot arm to rotate the first upper arm and the first forearm, respectively, and the fourth and fifth ones of the robot arms A motor is coupled to the second robot arm to rotate the second upper arm and the second forearm, respectively, independently from the first robot arm.

Any combination of one or more computer-readable medium(s) may be used as memory. The computer-readable medium may be a computer-readable signal medium or a non-transitory computer-readable storage medium. Non-transitory computer-readable storage media do not include signal propagation and may be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared or semiconductor system, apparatus, or device or any suitable combination of the above. . More specific examples (non-exhaustive list) of computer-readable storage media include: an electrical connection with one or more wires, a portable computer diskette, a hard disk, random access memory (RAM), read only memory (ROM), Erasable programmable read-only memory (EPROM or flash memory), optical fiber, portable compact disk read-only memory (CD-ROM), optical storage device, magnetic storage device, or any suitable combination of the above.

It should be understood that the above description is merely exemplary. Various alternatives and modifications can be devised by those skilled in the art. Accordingly, this embodiment is intended to cover all such alternatives, modifications and variations. For example, the features recited in the various dependent claims may be combined with each other in any suitable combination(s). Moreover, features from different embodiments described above can also be selectively combined into a new embodiment. Accordingly, this description is intended to cover all such alternatives, modifications and variations as fall within the scope of the appended claims.

10. Robot 12. Drive
14. Arm 16. First Link
20. Second Link 24. Third Link

Claims (23)

a robot comprising at least one rotating robot driving unit and at least two robot arms connected to the at least one rotating robot driving unit; and,
A device comprising: a linear robot transport configured to move the robot along linear paths;
a first one of the at least two robot arms comprising a first upper arm, a first forearm and a first end effector, the first upper arm being connected to at least one rotating robot drive in a first axis of rotation;
a second one of the at least two robot arms comprises a second upper arm, a second forearm and a second end effector, the second upper arm comprising at least one rotating robot at a second axis of rotation spaced from the first axis of rotation connected to the drive,
the first and second robotic arms are configured to position the end effectors in the first retracted position to stack the substrate such that one is positioned one over the other at least partially on the end effector;
The first and second robotic arms are configured to extend the end effector in a first direction from the first retracted position along first parallel paths, at least in part, one positioned immediately above the other, wherein the two robotic arms are configured to extend the end effectors in at least one second direction along a second path spaced apart from each other so as not to be overlying each other. The method of claim 1,
wherein the first upper arm and the first forearm have different effective lengths, and the second upper arm and the second forearm have different effective lengths. The method of claim 1,
wherein the linear robot transport comprises a stationary part and a movable part having a rotor fixed to the movable part. 4. The method of claim 3,
wherein the linear robot transport comprises at least one of a rail, a linear bearing, or a magnetic bearing. 4. The method of claim 3,
The linear robot transport is:
Electric linear motors with windings on the moving part,
Electric linear motors with windings in a stationary part,
magnetic coupling,
pneumatic actuator,
hydraulic actuator,
ball-screw or
A device comprising at least one of: a cable or a belt. The method of claim 1,
wherein the robot is on a pivot base, the pivot base is on a robot drive unit of the linear robot tronsport, and the pivot base is configured to rotate the robot on the robot drive unit. 4. The method of claim 3,
The movable part comprises a pivoting base on which the robot is mounted to the pivoting base, the pivoting base being mounted to the stationary part for both rotatable movement on the stationary part and linear motion on the stationary part. , Device. The method of claim 1,
a mechanical drive transmission coupling the at least one drive to the first forearm at a first joint between the first upper arm and the first forearm for the at least one drive to rotate the first forearm; wherein the mechanical drive transmission includes at least one non-circular pulley and a first band. 9. The method of claim 8,
at a wrist joint of the first end effector to the first forearm, further comprising a second band connecting the first end effector to the first joint. The method of claim 1,
further comprising a first circular pulley and a first band connecting the at least one drive to the second circular pulley at a first joint between the first upper arm and the first forearm;
wherein the first pulley and the second pulley have different diameters. The method of claim 1,
The apparatus of claim 1, wherein the first and second robotic arms are configured to provide a second retracted position for positioning the end effector such that substrates positioned on the end effector are not stacked on top of each other. The method of claim 1,
control the at least one drive to move the first and second robot arms substantially simultaneously from the first retracted positions along the first paths and to move the first and second robot arms along the second paths individually or simultaneously The apparatus further comprising a controller configured to: The method of claim 1,
and the second axis of rotation is laterally offset from and parallel to the first axis of rotation. The method of claim 1,
The second paths are at least partially offset laterally from and parallel to each other. The method of claim 1,
The second paths are at least partially offset laterally from and angled to each other. a robot comprising at least one rotating robot driving unit and at least two robot arms connected to the at least one rotating robot driving unit; and,
A device comprising: a linear robot transport configured to move the robot along a linear path;
a first one of the at least two robot arms comprises a first upper arm, a first forearm and a first end effector;
a second one of the at least two robotic arms comprises a second upper arm, a second forearm and a second end effector;
At least one rotating robot drive is connected to the first and second robot arms, the first upper arm is connected to the drive at a first axis of rotation, and the second upper arm is at a second axis of rotation spaced apart from the first axis of rotation. connected to the drive,
The first and second robotic arms position end effectors in first retracted positions relative to stacking substrates positioned on end effectors at least partially one over the other. is composed of
the first and second robotic arms are configured to extend the end effector in a first direction from the first retracted position along a first parallel path located at least partially directly above the other;
wherein the first and second robotic arms are configured to extend the end effector in at least one second direction along a second mutually spaced path that is not located above each other. a robot comprising at least one rotary robot drive and at least two robot arms connected to the at least one rotary robot drive; and,
A device comprising: a linear robot transport configured to move the robot along a linear path;
a first one of the at least two robotic arms comprises a first upper arm, a first forearm and a first end effector;
a second one of the at least two robot arms comprises a second upper arm, a second forearm and a second end effector;
At least one rotating robot drive is connected to the first and second robot arms,
the first upper arm is connected to the drive at the first axis of rotation,
the second upper arm is connected to the drive at a second axis of rotation spaced apart from the first axis of rotation;
At least one rotating robot drive comprises motors for rotating the first and second upper arms,
a first one of the motors is connected to the first and second robot arms to rotate the first and second arms about a third axis of rotation spaced apart from the first and second axes of rotation;
a second motor of at least one of the motors is connected to the first robot arm to rotate the first upper arm and the first forearm, respectively, and a third motor of at least one of the motors is connected to the second robot arm, 1 independently of the robot arm, rotate the second upper arm and the second forearm, respectively;
The first and second robotic arms are configured to position the end effectors in a first retracted position, the first and second robotic arms extending the end effectors from the first retracted position in a first direction along first parallel paths. and wherein the first and second robotic arms are configured to extend the end effector in at least one second direction along a second mutually spaced path that is not positioned above each other. 18. The method of claim 17,
The apparatus of claim 1, wherein the first and second robotic arms are configured to position the end effectors in first retracted positions to stack substrates positioned on the end effectors one at least partially one on top of the other. 18. The method of claim 17,
The apparatus of claim 1, wherein the first and second robotic arms arms are configured to extend the end effectors from the first retracted position in a first direction along first parallel paths, at least partially one positioned directly above the other. 18. The method of claim 17,
wherein the first upper arm and the first forearm have different effective lengths with respect to each other, and the second upper arm and the second forearm have different effective lengths with respect to each other. 18. The method of claim 17,
wherein the motor comprises only three motors for rotating the first and second upper arms. 18. The method of claim 17,
wherein the motors include only four motors for rotating the first and second upper arms. 18. The method of claim 17,
wherein the motor comprises only five motors for rotating the first and second upper arms.

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