CN114474026A - Double-arm manipulator - Google Patents
Double-arm manipulator Download PDFInfo
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- CN114474026A CN114474026A CN202210138337.3A CN202210138337A CN114474026A CN 114474026 A CN114474026 A CN 114474026A CN 202210138337 A CN202210138337 A CN 202210138337A CN 114474026 A CN114474026 A CN 114474026A
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- 239000012636 effector Substances 0.000 claims abstract description 66
- 230000005540 biological transmission Effects 0.000 claims description 50
- 230000009977 dual effect Effects 0.000 claims 8
- 239000000126 substance Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 description 5
- 210000000245 forearm Anatomy 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 206010070670 Limb asymmetry Diseases 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 210000000707 wrist Anatomy 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
- B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
- B25J18/02—Arms extensible
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
Abstract
The invention provides a double-arm manipulator, which comprises a body, a first telescopic driving shaft, a second telescopic driving shaft and a first manipulator, wherein the body comprises a rotating driving shaft and a first telescopic driving shaft/a second telescopic driving shaft which are coaxially arranged around a rotating shaft; one end of the first arm component is rotationally coupled with the rotating driving shaft and the first telescopic driving shaft, and the other end of the first arm component is rotationally coupled with the first end effector; one end of the second arm component is rotationally coupled with the rotating driving shaft and the second telescopic driving shaft, and the other end of the second arm component is rotationally coupled with the second end effector; the rotary driving shaft drives the first arm component to drive the first end effector and drives the second arm component to drive the second end effector to rotate around the rotating shaft; the first/second telescopic driving shaft respectively and correspondingly drives the first/second arm component so as to correspondingly drive the first/second end effector to reciprocate along the radial direction of the rotating shaft. The double-arm manipulator only needs 3 driving shafts, so that the cost is reduced.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a double-arm manipulator.
Background
With the continuous improvement of the semiconductor process level, the former and latter process equipment factories put higher and more complex requirements on the semiconductor automatic transmission technology. At present, a SCARA (selective Compliance Assembly Robot arm) manipulator used for wafer transmission in the industry has a structural characteristic of equal arm length, and the SCARA manipulator with the equal arm length is widely applied to semiconductor automatic transmission equipment, such as an atmospheric manipulator which is integrated in efem (electronic Front module) equipment in a matching manner and a vacuum manipulator which is integrated in tm (transfer module) vacuum transmission equipment.
Currently, two single arm SCARA robots are arranged symmetrically, the centre of the pivot axis of the first robot is at a distance from the centre of the pivot axis of the second robot, and the end effectors of the first/second robot wrist remain coincident and move parallel to the radially extending axis of the arm and along this axis. When the wafer transmission range is required to be increased, the wafer transmission range is usually realized by increasing the length of the arm, so that the minimum rotation diameter of the manipulator is also increased by times correspondingly. The environment of the vacuum chamber of the TM vacuum transmission equipment is very harsh and the space is very limited, wherein the transmission distance of the matched pm (process module) and ll (load) stations is long, the traditional equal-arm long SCARA double-arm manipulator structure cannot be sleeved on the vacuum manipulator used in the TM chamber,
at present, the centers of rotating shafts of a first mechanical arm and a second mechanical arm are coincided, a main driving shaft in a mechanical arm body 1 adopts the design of a driving arm of a shaft sleeve shaft to enable a mechanical arm part to be more compact, and because the lengths of a large arm and a small arm of the mechanical arm are equal, in order to meet the normal telescopic motion of the first mechanical arm and the second mechanical arm, the small arm of the first mechanical arm and the small arm of the second mechanical arm need to be staggered in the vertical direction in the space, although the size of the mechanical arm part in the radial direction is reduced, the size of the mechanical arm part in the thickness direction can be increased undoubtedly, and therefore, the transmission space of a TM vacuum chamber in the thickness direction can be increased even to increase the peripheral size of the whole chamber.
Moreover, the upper arm, the lower arm and the end effector of the SCARA manipulator with unequal arm lengths are independently driven by different driving units, different motion tracks are realized through the cooperative work of the driving units, the single-arm manipulator needs at least 3 driving units, when the two SCARA manipulators with unequal arm lengths are needed, more driving units are undoubtedly needed, the cost of the manipulator is increased, and the control is difficult.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a double-arm manipulator.
To achieve the above object, the present invention provides a double-arm robot comprising: a body including a rotation driving shaft and first/second telescopic driving shafts coaxially disposed around a rotation shaft; a first arm assembly and a first end effector, one end of the first arm assembly being rotationally coupled to the rotary drive shaft and the first telescopic drive shaft, the other end being rotationally coupled to the first end effector; a second arm assembly and a second end effector, one end of the second arm assembly being rotationally coupled to the rotary drive shaft and the second telescopic drive shaft, the other end being rotationally coupled to the second end effector; the rotating driving shaft drives the first arm component to drive the first end effector and drives the second arm component to drive the second end effector to rotate around the rotating shaft; the first/second telescopic driving shaft respectively and correspondingly drives the first/second arm component so as to correspondingly drive the first/second end effector to reciprocate along the radial direction of the rotating shaft.
Preferably, the first arm assembly includes a first big arm/first small arm housing, a first big arm/first small arm shaft, and a first big arm/first small arm driven wheel, and the second arm assembly includes a second big arm/second small arm housing, a second big arm/second small arm shaft, and a second big arm/second small arm driven wheel: one end of the first big arm shell is rotationally and fixedly connected with the first telescopic driving shaft, the other end of the first big arm shell is fixedly provided with the first big arm shaft, and the first big arm driven wheel is rotationally and fixedly connected with the first big arm shaft; one end of the first small arm shell is rotationally and fixedly connected with the first large arm driven wheel, the other end of the first small arm shell is fixedly provided with the first small arm shaft, and the first small arm driven wheel is rotationally and fixedly connected with the first small arm shaft; one end of the second big arm shell is rotationally and fixedly connected with the second telescopic driving shaft, the other end of the second big arm shell is fixedly provided with the second big arm shaft, and the second big arm driven wheel is rotationally and fixedly connected with the second big arm shaft; one end of the second small arm shell is fixedly connected with the second large arm driven wheel in a rotating mode, the other end of the second small arm shell is fixedly provided with the second small arm shaft, and the second small arm driven wheel is fixedly connected with the second small arm shaft in a rotating mode; the first end effector is rotationally and fixedly connected with the first small arm driven wheel, and the second end effector is rotationally and fixedly connected with the second small arm driven wheel.
Preferably, the first telescopic driving shaft drives the first big arm shell to rotate clockwise or anticlockwise for a first angle around the rotating shaft, and drives the first small arm shell to rotate anticlockwise or clockwise for a second angle around the first big arm shaft, and drives the first end effector to reciprocate along the radial direction of the rotating shaft; the second telescopic driving shaft drives the second big arm shell to rotate anticlockwise or clockwise for a first angle around the rotating shaft, drives the second small arm shell to rotate clockwise or anticlockwise for a second angle around the second big arm shaft, and drives the second end effector to move back and forth along the radial direction of the rotating shaft.
Preferably, the first angle is less than or equal to the second angle.
Preferably, the first arm assembly further comprises a first big arm/first small arm driving wheel and a first big arm/first small arm driving belt, and the second arm assembly further comprises a second big arm/second small arm driving wheel and a second big arm/second small arm driving belt; the first large arm driving wheel is fixedly connected with the rotating driving shaft, and the first large arm driven wheel is in transmission connection with the first large arm driving wheel through the first large arm transmission belt; the first small arm driving wheel is fixedly connected with the first large arm shaft, and the first small arm driven wheel is in transmission connection with the first small arm driving wheel through the first small arm transmission belt; the second large arm driving wheel is fixedly connected with the rotating driving shaft, and the second large arm driven wheel is in transmission connection with the second large arm driving wheel through the second large arm transmission belt; the second small arm driving wheel is fixedly connected with the second large arm shaft, and the second small arm driven wheel is in transmission connection with the second small arm driving wheel through the second small arm transmission belt.
Preferably, a first distance is formed between the first big arm shaft and the rotation driving shaft, and a first distance is formed between the second big arm shaft and the rotation driving shaft; a second distance is formed between the first big arm shaft and the first small arm shaft, and between the second big arm shaft and the second small arm shaft; the first distance is greater than or equal to the second distance.
Preferably, the first large arm driven wheel and the second large arm driven wheel each include a first circular pulley, and the first small arm driven wheel and the second small arm driven wheel each include a second circular pulley.
Preferably, the first big arm driving belt and the second big arm driving belt each comprise at least one first open-loop driving belt, and the first small arm driving belt and the second small arm driving belt each comprise at least one second open-loop driving belt.
Preferably, the first large arm driving wheel and the second large arm driving wheel each include a stacked large arm upper special-shaped wheel and a stacked large arm lower special-shaped wheel, and the first small arm driving wheel and the second small arm driving wheel each include a stacked small arm upper special-shaped wheel and a stacked small arm lower special-shaped wheel.
Preferably, one end of a first open-loop driving belt is fixedly connected with the special-shaped wheel on the large arm, the other end of the first open-loop driving belt is fixedly connected with the first circular belt wheel, one end of the other first open-loop driving belt is fixedly connected with the special-shaped wheel under the large arm, and the other end of the other first open-loop driving belt is fixedly connected with the first circular belt wheel; one end of a second open-loop driving belt is fixedly connected with the special-shaped wheel on the small arm, the other end of the second open-loop driving belt is fixedly connected with the second round belt wheel, one end of the other second open-loop driving belt is fixedly connected with the special-shaped wheel under the small arm, and the other end of the second open-loop driving belt is fixedly connected with the second round belt wheel.
The double-arm manipulator provided by the invention is provided with the first arm component, the first end effector, the second arm component and the second end effector which have two revolving shaft centers which are coincided, bilaterally symmetrical and can independently perform telescopic motion, the problem that two arms which need to perform independent telescopic motion are solved, the double-arm manipulator is suitable for application scenes with compact space requirements and large telescopic range, and the rotary driving shaft and the first/second telescopic driving shaft only correspond to 3 driving units, so that the cost is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a robot arm according to an embodiment of the present invention;
FIG. 2 is a schematic view of an internal connection structure of a robot arm according to an embodiment of the present invention;
FIG. 3 is a schematic view of the internal structure of a first large arm of a manipulator according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of an internal structure of a first small arm of a manipulator according to an embodiment of the present invention;
FIG. 5 is a schematic structural view of a first end effector of a manipulator according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of the internal structure of a second large arm of a robot according to an embodiment of the present invention;
FIG. 7 is a schematic view of the internal structure of a second small arm of a manipulator according to an embodiment of the present invention;
FIG. 8 is a schematic structural view of a second end effector of a robot according to an embodiment of the present invention;
FIG. 9 is a schematic view of a connection structure of a transmission pair inside a first large arm of a manipulator according to an embodiment of the present invention;
FIG. 10 is a schematic view of a connection structure of a transmission pair inside a first small arm of a manipulator according to an embodiment of the present invention;
FIG. 11 is a schematic view of a first arm assembly and a second arm assembly of a robot in an initial state in accordance with an embodiment of the present invention;
FIG. 12 is a schematic view of a robot arm assembly according to an embodiment of the present invention with the first arm assembly and the second arm assembly both in an extended position;
FIG. 13 is a schematic view of a first arm assembly of a robotic arm in an extended position in accordance with an embodiment of the present invention;
figure 14 is a schematic view of a robot second arm assembly in an extended position in accordance with an embodiment of the present invention.
In the figure: 1, a body; 2 a first arm assembly; 3 a second arm assembly; 4 a first arm telescopic drive shaft; 5 a second arm telescopic driving shaft; 6 rotating the drive shaft; 7 a first large arm shell; 8 a first large arm drive wheel; 9 a first large arm driven wheel; 10 a first boom shaft; 11 a first large arm belt; 12 a first forearm housing; 13 a first small arm drive wheel; 14 a first small arm driven wheel; 15 a first forearm shaft; 16 a first small arm belt; 17 a first end effector; 18 a second large arm casing; 19 a second large arm drive wheel; 20 second large arm driven wheel; 21 a second boom shaft; 22 a second large arm belt; 23 a second forearm shell; 24 a second small arm drive wheel; 25 second small arm driven wheel; 26 a second forearm axis; 27 a second small arm belt; 28 second end effector.
Detailed Description
In order to make the contents of the present invention more comprehensible, the present invention is further described below with reference to the accompanying drawings. The invention is of course not limited to this particular embodiment, and general alternatives known to those skilled in the art are also covered by the scope of the invention.
In the following detailed description of the embodiments of the present invention, in order to clearly illustrate the structure of the present invention and to facilitate explanation, the structure shown in the drawings is not drawn to a general scale and is partially enlarged, deformed and simplified, so that the present invention should not be construed as limited thereto.
As shown in fig. 1, a double-arm manipulator according to the present invention includes a body 1, a first arm assembly 2, and a second arm assembly 3.
The body 1 comprises a first telescopic driving shaft 4, a second telescopic driving shaft 5 and a rotary driving shaft 6 which are coaxially arranged around a rotating shaft, wherein in the embodiment, the second telescopic driving shaft 5, the rotary driving shaft 6 and the first telescopic driving shaft 4 are sequentially arranged from inside to outside.
One end of the first arm assembly 2 is rotationally coupled to the rotary drive shaft 6 and the first telescopic drive shaft 4, and the other end is rotationally coupled to the first end effector 17; the second arm assembly 3 has one end rotatably coupled to the rotary drive shaft 6 and the second telescopic drive shaft 5 and the other end rotatably coupled to the second end effector 28.
The first arm assembly 2 and the second arm assembly 3 both have an extended state and an initial state, please refer to fig. 11 to 14, the first arm assembly 2 and the second arm assembly 3 both are in the initial state, the first end effector 17 and the second end effector 28 are stacked, in this embodiment, the second end effector 28 is stacked on the first end effector 17.
The rotary drive shaft 6 drives the first arm assembly to rotate the first end effector 17 about the axis of rotation, and simultaneously drives the second arm assembly 3 to rotate the second end effector 28 about the axis of rotation. That is, the rotary drive shaft 6 realizes simultaneous and same-direction rotation of the first arm assembly and the first end effector 17, and the second arm assembly 3 and the second end effector 28.
The first telescopic drive shaft 4 drives the first arm assembly to drive the first end effector 17 to and fro in the radial direction of the axis of rotation.
When the first arm assembly 2 is in the extension state, the first end effector 17 moves linearly along the radial direction of the rotating shaft from the first initial position to the first extension position, and when the first arm assembly 2 is in the initial state, the first end effector 17 returns to the first initial position along the radial line of the rotating shaft from the first extension position.
The first arm assembly comprises a first big arm shell 7, a first small arm shell 12, a first big arm shaft 10, a first small arm shaft 15, a first big arm driven wheel 9 and a first small arm driven wheel 14.
The first telescopic driving shaft 4 drives the first big arm shell 7 to rotate around the rotating shaft clockwise or counterclockwise by a first angle, and drives the first small arm shell 12 to rotate around the first big arm shaft 10 counterclockwise or clockwise by a second angle, one end of the first small arm shell 12 rotates around the first big arm shaft 10 counterclockwise or clockwise by a second angle, and the other end extends or retracts the first end effector 17. The first angle is less than or equal to the second angle.
In this embodiment, the length of the first large arm casing 7 is greater than the length of the first small arm casing 12, and the first angle is smaller than the second angle.
One end of the first big arm shell 7 is rotationally and fixedly connected with the first telescopic driving shaft 4, the other end of the first big arm shell is fixedly provided with the first big arm shaft 10, and the first big arm driven wheel 9 is rotationally and fixedly connected with the first big arm shaft 10; one end of the first small arm shell 12 is rotationally and fixedly connected with the first large arm driven wheel 9, the other end of the first small arm shell is fixedly provided with the first small arm shaft 15, and the first small arm driven wheel 14 is rotationally and fixedly connected with the first small arm shaft 15. A first end effector 17 is rotationally fixedly connected to the first small arm driven wheel 14.
The first arm assembly further includes a first large arm drive wheel 8, a first small arm drive wheel 13, a first large arm drive belt 11, and a first small arm drive belt 16.
The first large arm driving wheel 8 is fixedly connected with the rotary driving shaft 6, and the first large arm driven wheel 9 is in transmission connection with the first large arm driving wheel 8 through a first large arm transmission belt 11; the first small arm driving wheel 13 is fixedly connected with the first big arm shaft 10, and the first small arm driven wheel 14 is in transmission connection with the first small arm driving wheel 13 through the first small arm transmission belt 16;
the second telescopic drive shaft 5 drives the second arm assembly 3 to drive the second end effector 28 to and fro in the radial direction of the axis of rotation.
When the second arm assembly 3 is in the extension state, the second end effector 28 linearly moves from the second initial position to the second extension position along the radial direction of the rotation shaft, and when the second arm assembly 3 is in the initial state, the second end effector 28 linearly returns to the second initial position from the second extension position along the radial direction of the rotation shaft.
The second arm assembly 3 comprises a second big arm shell 18, a second small arm shell 23, a second big arm shaft 21, a second small arm shaft 26, a second big arm driven wheel 20 and a second small arm driven wheel 25.
The second telescopic driving shaft 5 drives the second big arm housing 18 to rotate counterclockwise or clockwise by a first angle around the rotating shaft, and drives the second small arm housing 23 to rotate counterclockwise or clockwise by a second angle around the second big arm shaft 21, one end of the second small arm housing 23 rotates clockwise or counterclockwise by a second angle around the second big arm shaft 21, and the other end extends or retracts the second end effector 28.
In this embodiment, a distance between the first initial position and the first extending position is equal to a distance between the second initial position and the second extending position, and the first angle is smaller than the second angle. It should be understood by those skilled in the art that the distance between the first initial position and the first extended position, and the distance between the second initial position and the second extended position may be determined according to practical requirements, and are not limited herein.
In this embodiment, the first angle is smaller than the second angle, the first end effector 17 includes a first supporting portion and a first connecting portion that are fixedly connected, one end of the first connecting portion is rotationally and fixedly connected to the first small arm driven wheel 14, and the other end of the first connecting portion is fixedly connected to the first supporting portion.
The second end effector 28 includes a second supporting portion and a second connecting portion, one end of the second connecting portion is rotationally and fixedly connected to the second small arm driven wheel 20, and the other end of the second connecting portion is fixedly connected to the second supporting portion.
The first supporting part and the second supporting part are used for supporting the substrate. The initial third angle is an obtuse angle.
When the first arm component 2 is in an initial state, the first connecting part and the first small arm shell 12 are intersected at an initial third angle, and when the first arm component 2 is in an extending state, the first connecting part and the first small arm shell 12 are intersected at an extending third angle; when the second arm assembly 3 is in the initial state, the second connecting part and the second small arm shell 23 are intersected in an initial third angle, and when the second arm assembly 3 is in the stretching state, the second connecting part and the second small arm shell 23 are intersected in a stretching third angle. The initial third angle includes an obtuse angle and a right angle.
The sum of the extended third angle, the initial third angle, and the second angle is 360 °.
One end of the second big arm shell 18 is rotationally and fixedly connected with the second telescopic driving shaft 5, the other end of the second big arm shell is fixedly provided with the second big arm shaft 21, and the second big arm driven wheel 20 is rotationally and fixedly connected with the second big arm shaft 21; one end of the second small arm shell 23 is fixedly connected with the second large arm driven wheel 20 in a rotating manner, the other end of the second small arm shell is fixedly provided with the second small arm shaft 26, and the second small arm driven wheel 25 is fixedly connected with the second small arm shaft 26 in a rotating manner. A second end effector 28 is rotatably fixedly connected to the second small arm driven wheel 25.
The second arm assembly 3 further includes a second large arm drive wheel 19, a second small arm drive wheel 24, a second large arm drive belt 22, and a second small arm drive belt 27.
The second large arm driving wheel 19 is fixedly connected with the rotary driving shaft 6, and the second large arm driven wheel 20 is in transmission connection with the second large arm driving wheel 19 through a second large arm transmission belt 22; the second small arm driving wheel 24 is fixedly connected with the second big arm shaft 21, and the second small arm driven wheel 25 is in transmission connection with the second small arm driving wheel 24 through a second small arm transmission belt 27.
A first distance is formed between the first boom shaft 10 and the rotation driving shaft 6, and between the second boom shaft 21 and the rotation driving shaft 6; a second distance is formed between the first big arm shaft 10 and the first small arm shaft 15, and between the second big arm shaft 21 and the second small arm shaft 26; the first distance is greater than or equal to the second distance.
The first large arm driven wheel 9 and the second large arm driven wheel 20 both comprise first circular belt pulleys, and the first small arm driven wheel 14 and the second small arm driven wheel 25 both comprise second circular belt pulleys, so that the universalization of parts is realized, and the manufacturing cost is reduced.
When the first arm assembly 2 and the second arm assembly 3 are in the initial state, the first large arm shell 7, the second large arm shell 18, the second small arm shell 23 and the first small arm shell 12 are sequentially arranged from bottom to top, and the first/second supporting parts are stacked from bottom to top, so that the floor area is effectively saved.
The first large arm transmission belt 11 and the second large arm transmission belt 22 both include at least one first open-loop transmission belt, and the first small arm transmission belt 16 and the second small arm transmission belt 27 both include at least one second open-loop transmission belt.
In this embodiment, the first large arm driving wheel 8 and the second large arm driving wheel 19 are both fixedly connected to the rotating driving shaft 6, and both include a stacked large arm upper special-shaped wheel and a stacked large arm lower special-shaped wheel, and the first small arm driving wheel 13 and the second small arm driving wheel 24 both include a stacked small arm upper special-shaped wheel and a stacked small arm lower special-shaped wheel.
When the first arm assembly 2 and the second arm assembly 3 are both in the initial state, the first large arm driving wheel 8 and the second large arm driving wheel 19 are symmetrically arranged, and the first small arm driving wheel 13 and the second small arm driving wheel 24 are symmetrically arranged.
The first large arm belt 11 and the second large arm belt 22 both include two first open-loop belts, and the first small arm belt 16 and the second small arm belt 27 both include two second open-loop belts. One end of one first open-loop transmission belt is fixedly connected with the special-shaped wheel on the large arm, the other end of the first open-loop transmission belt is fixedly connected with the first round belt wheel, one end of the other first open-loop transmission belt is fixedly connected with the special-shaped wheel under the large arm, and the other end of the other first open-loop transmission belt is fixedly connected with the first round belt wheel; one end of a second open-loop driving belt is fixedly connected with the special-shaped wheel on the small arm, the other end of the second open-loop driving belt is fixedly connected with the second round belt wheel, one end of the other second open-loop driving belt is fixedly connected with the special-shaped wheel under the small arm, and the other end of the second open-loop driving belt is fixedly connected with the second round belt wheel.
Both the first open loop belt and the second open loop belt must be kept in tension at all times. In order to ensure that the first end effector and the second end effector reciprocate along the radial direction of the rotating shaft, when the first distance is greater than the second distance, a large arm upper special-shaped wheel and a large arm lower special-shaped wheel with constantly changing transmission ratios, and a small arm upper special-shaped wheel and a small arm lower special-shaped wheel are arranged.
In the present invention, when the second arm telescopic drive shaft 5 and the rotary drive shaft 6 are fixed and do not rotate, and the first arm telescopic drive shaft 4 rotates, the first arm assembly 2 makes telescopic motion to reciprocate the first end effector 17 in the radial direction of the rotating shaft, and the second arm assembly 3 is stationary.
In the present invention, when the first arm telescopic drive shaft 4 and the rotary drive shaft 6 are fixed and do not rotate and the second arm telescopic drive shaft 5 rotates, the second arm assembly 3 makes telescopic motion to reciprocate the second end effector 28 in the radial direction of the rotation shaft, while the first arm assembly 2 is stationary.
In the present invention, the rotary drive shaft 6 is fixed and does not rotate, and when the first arm telescopic drive shaft 4 and the second arm telescopic drive shaft 5 rotate, the first arm assembly 2 and the second arm assembly 3 do telescopic motion to make the first end effector 17 and the second end effector 28 reciprocate along the radial direction of the rotary shaft.
According to the invention, the second arm telescopic driving shaft 5, the first arm telescopic driving shaft 4 and the rotating driving shaft 6 rotate in the same direction at the same speed to drive the double-arm manipulator to rotate.
The double-arm manipulator provided by the invention is provided with the first arm component, the first end effector, the second arm component and the second end effector which have two revolving shaft centers which are coincided, bilaterally symmetrical and can independently perform telescopic motion, the problem that two arms which need to perform independent telescopic motion are solved, the double-arm manipulator is suitable for application scenes with compact space requirements and large telescopic range, and the rotary driving shaft and the first/second telescopic driving shafts only correspond to 3 driving shafts, so that the cost is reduced.
The double-arm manipulator of the present invention is not limited to the atmospheric and vacuum robots, and the first/second end effectors are not limited to the vacuum suction and gripping.
The driving wheel and the driven wheel in the double-arm manipulator are not limited to steel belt round wheels, synchronous belt wheels, chain wheels and other common driving wheels, and the synchronous belt in the arm is not limited to steel belts, chains and other common driving belts.
The present invention may be a transfer robot for transferring other transfer objects such as semiconductor wafers, or may be an industrial robot other than a transfer robot such as an assembly robot.
The above description is only for the preferred embodiment of the present invention, and the embodiment is not intended to limit the scope of the present invention, so that all the equivalent structural changes made by using the contents of the description and the drawings of the present invention should be included in the scope of the present invention.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A dual arm robot, comprising:
a body including a rotation driving shaft and first/second telescopic driving shafts coaxially disposed around a rotation shaft;
a first arm assembly and a first end effector, one end of the first arm assembly being rotationally coupled to the rotary drive shaft and the first telescopic drive shaft, the other end being rotationally coupled to the first end effector;
a second arm assembly and a second end effector, one end of the second arm assembly being rotationally coupled to the rotary drive shaft and the second telescopic drive shaft, the other end being rotationally coupled to the second end effector; wherein the content of the first and second substances,
the rotary driving shaft drives the first arm component to drive the first end effector and drives the second arm component to drive the second end effector to rotate around the rotating shaft; the first/second telescopic driving shaft respectively and correspondingly drives the first/second arm component so as to correspondingly drive the first/second end effector to reciprocate along the radial direction of the rotating shaft.
2. The dual arm robot of claim 1, wherein the first arm assembly comprises a first big arm/first small arm housing, a first big arm/first small arm shaft, and a first big arm/first small arm follower, and the second arm assembly comprises a second big arm/second small arm housing, a second big arm/second small arm shaft, and a second big arm/second small arm follower: wherein, the first and the second end of the pipe are connected with each other,
one end of the first big arm shell is rotationally and fixedly connected with the first telescopic driving shaft, the other end of the first big arm shell is fixedly provided with the first big arm shaft, and the first big arm driven wheel is rotationally and fixedly connected with the first big arm shaft; one end of the first small arm shell is rotationally and fixedly connected with the first large arm driven wheel, the other end of the first small arm shell is fixedly provided with the first small arm shaft, and the first small arm driven wheel is rotationally and fixedly connected with the first small arm shaft;
one end of the second big arm shell is rotationally and fixedly connected with the second telescopic driving shaft, the other end of the second big arm shell is fixedly provided with the second big arm shaft, and the second big arm driven wheel is rotationally and fixedly connected with the second big arm shaft; one end of the second small arm shell is fixedly connected with the second large arm driven wheel in a rotating mode, the other end of the second small arm shell is fixedly provided with the second small arm shaft, and the second small arm driven wheel is fixedly connected with the second small arm shaft in a rotating mode;
the first end effector is rotationally and fixedly connected with the first small arm driven wheel, and the second end effector is rotationally and fixedly connected with the second small arm driven wheel.
3. The dual arm robot of claim 2, wherein the first telescopic driving shaft drives the first large arm housing to rotate clockwise or counterclockwise by a first angle about the rotation axis and drives the first small arm housing to rotate counterclockwise or clockwise by a second angle about the first large arm axis and drives the first end effector to reciprocate in a radial direction of the rotation axis; the second telescopic driving shaft drives the second big arm shell to rotate anticlockwise or clockwise for a first angle around the rotating shaft, drives the second small arm shell to rotate clockwise or anticlockwise for a second angle around the second big arm shaft, and drives the second end effector to move back and forth along the radial direction of the rotating shaft.
4. The dual arm robot of claim 3, wherein the first angle is less than or equal to the second angle.
5. The dual arm robot of claim 2, wherein said first arm assembly further comprises a first big arm/first small arm drive wheel and a first big arm/first small arm drive belt, and said second arm assembly further comprises a second big arm/second small arm drive wheel and a second big arm/second small arm drive belt; wherein the content of the first and second substances,
the first large arm driving wheel is fixedly connected with the rotating driving shaft, and the first large arm driven wheel is in transmission connection with the first large arm driving wheel through the first large arm transmission belt; the first small arm driving wheel is fixedly connected with the first large arm shaft, and the first small arm driven wheel is in transmission connection with the first small arm driving wheel through the first small arm transmission belt;
the second large arm driving wheel is fixedly connected with the rotating driving shaft, and the second large arm driven wheel is in transmission connection with the second large arm driving wheel through the second large arm transmission belt; the second small arm driving wheel is fixedly connected with the second large arm shaft, and the second small arm driven wheel is in transmission connection with the second small arm driving wheel through the second small arm transmission belt.
6. The dual arm robot of claim 5, wherein the first large arm shaft and the rotary drive shaft, and the second large arm shaft and the rotary drive shaft are spaced apart by a first distance; a second distance is formed between the first big arm shaft and the first small arm shaft, and between the second big arm shaft and the second small arm shaft; the first distance is greater than or equal to the second distance.
7. The dual-arm manipulator of claim 6, wherein the first large-arm driven wheel and the second large-arm driven wheel each comprise a first circular pulley, and the first small-arm driven wheel and the second small-arm driven wheel each comprise a second circular pulley.
8. The dual arm robot of claim 7, wherein the first large arm belt and the second large arm belt each comprise at least one first open loop belt and the first small arm belt and the second small arm belt each comprise at least one second open loop belt.
9. The dual arm robot of claim 8, wherein the first large arm driving wheel and the second large arm driving wheel each comprise a stacked upper large arm contour wheel and a stacked lower large arm contour wheel, and the first small arm driving wheel and the second small arm driving wheel each comprise a stacked upper small arm contour wheel and a stacked lower small arm contour wheel.
10. The dual-arm manipulator of claim 9, wherein one end of a first open-loop transmission belt is fixedly connected with the upper special-shaped wheel of the large arm, the other end of the first open-loop transmission belt is fixedly connected with the first circular belt wheel, one end of the other first open-loop transmission belt is fixedly connected with the lower special-shaped wheel of the large arm, and the other end of the other first open-loop transmission belt is fixedly connected with the first circular belt wheel; one end of a second open-loop driving belt is fixedly connected with the special-shaped wheel on the small arm, the other end of the second open-loop driving belt is fixedly connected with the second round belt wheel, one end of the other second open-loop driving belt is fixedly connected with the special-shaped wheel under the small arm, and the other end of the second open-loop driving belt is fixedly connected with the second round belt wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210138337.3A CN114474026A (en) | 2022-02-15 | 2022-02-15 | Double-arm manipulator |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210138337.3A CN114474026A (en) | 2022-02-15 | 2022-02-15 | Double-arm manipulator |
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| CN114474026A true CN114474026A (en) | 2022-05-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202210138337.3A Withdrawn CN114474026A (en) | 2022-02-15 | 2022-02-15 | Double-arm manipulator |
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| JP2009018244A (en) * | 2007-07-11 | 2009-01-29 | Panasonic Corp | Dedusting device |
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| WO2016127160A1 (en) * | 2015-02-06 | 2016-08-11 | Persimmon Technologies, Corp. | Robot having arm with unequal link lengths |
| KR102074366B1 (en) * | 2019-06-05 | 2020-02-06 | 엠넥스텍 주식회사 | Ventilation type air purification system |
| TW202112510A (en) * | 2019-06-07 | 2021-04-01 | 美商應用材料股份有限公司 | Dual robot including splayed end effectors and systems and methods including same |
| CN218747730U (en) * | 2022-02-15 | 2023-03-28 | 上海广川科技有限公司 | Double-arm manipulator |
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Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009018244A (en) * | 2007-07-11 | 2009-01-29 | Panasonic Corp | Dedusting device |
| CN103208447A (en) * | 2012-01-13 | 2013-07-17 | 诺发系统公司 | Dual Arm Vacuum Robot |
| CN103802099A (en) * | 2012-11-08 | 2014-05-21 | 沈阳新松机器人自动化股份有限公司 | Manipulator mechanism |
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| WO2016127160A1 (en) * | 2015-02-06 | 2016-08-11 | Persimmon Technologies, Corp. | Robot having arm with unequal link lengths |
| KR102074366B1 (en) * | 2019-06-05 | 2020-02-06 | 엠넥스텍 주식회사 | Ventilation type air purification system |
| TW202112510A (en) * | 2019-06-07 | 2021-04-01 | 美商應用材料股份有限公司 | Dual robot including splayed end effectors and systems and methods including same |
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